JPH06162978A - Field emission type electron microscope - Google Patents
Field emission type electron microscopeInfo
- Publication number
- JPH06162978A JPH06162978A JP4316780A JP31678092A JPH06162978A JP H06162978 A JPH06162978 A JP H06162978A JP 4316780 A JP4316780 A JP 4316780A JP 31678092 A JP31678092 A JP 31678092A JP H06162978 A JPH06162978 A JP H06162978A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- electron microscope
- extraction
- field emission
- constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims abstract description 18
- 238000000605 extraction Methods 0.000 claims description 36
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 238000011010 flushing procedure Methods 0.000 abstract description 6
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電界放出形電子顕微鏡
における引出電流を一定に保ちかつ電子銃の軸を一定に
保つものに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a field emission type electron microscope for keeping a constant extraction current and a constant axis of an electron gun.
【０００２】[0002]
【従来の技術】従来の装置は、特開昭60−117534号に記
載のように、引出電極に印加する引出電圧の変化に連動
して初段加速電極に印加する電圧を変化させるようにな
っていった。2. Description of the Related Art As described in JP-A-60-117534, a conventional apparatus is designed to change the voltage applied to the first-stage accelerating electrode in association with the change in the extraction voltage applied to the extraction electrode. It was.
【０００３】電界放出形電子顕微鏡の引出電流を一定に
保つため引出電圧を昇圧することは、通常電界放出形電
子顕微鏡で実施されている。但し、観察時は、引出電圧
を一定にして使用しているため引出電流の時間経過によ
る低下がおこっていた。Boosting the extraction voltage in order to keep the extraction current of the field emission electron microscope constant is usually carried out by the field emission electron microscope. However, at the time of observation, since the extraction voltage was kept constant and used, the extraction current decreased with time.
【０００４】従来、一定の引出電圧に対しある比で、初
段の加速電極に印加する電圧を設定した後一定にして使
用していた。Conventionally, the voltage applied to the accelerating electrode in the first stage was set at a certain ratio with respect to a constant extraction voltage, and then the voltage was made constant and used.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、引出電流を
一定にして電子顕微鏡を使用することを目的としてお
り、引出電流を一定にした状態で、電子銃部の光軸を一
定に保つ電界放出形電子顕微鏡を提供することを目的と
する。SUMMARY OF THE INVENTION An object of the present invention is to use an electron microscope with a constant extraction current, and an electric field that keeps the optical axis of the electron gun part constant with the extraction current kept constant. An object is to provide an emission electron microscope.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するた
め、引出電流を一定にするよう引出電圧を可変するのと
同時に引出電圧の変化に連動し初段加速電極に印加する
電圧を変化させ、静電レンズ作用を一定にし電子銃部の
光軸のずれをなくすよう構成したものである。In order to achieve the above object, the extraction voltage is varied so as to keep the extraction current constant, and at the same time, the voltage applied to the first-stage accelerating electrode is changed in conjunction with the change in the extraction voltage, It is configured so that the action of the electro-lens is constant and the deviation of the optical axis of the electron gun is eliminated.
【０００７】[0007]
【作用】引出電流を検出し、引出電流を一定とするよう
引出電圧を昇圧する。引出電圧を昇圧時、初段の加速電
極へ印加する電圧を引出電圧に連動し同時に昇圧するよ
うになるので、多段形電子銃の場合、陰極に印加される
加速電圧は一定のままで行える。Function: The extraction current is detected, and the extraction voltage is boosted so that the extraction current is kept constant. When the extraction voltage is boosted, the voltage applied to the first-stage accelerating electrode is simultaneously increased in conjunction with the extraction voltage. Therefore, in the case of a multi-stage electron gun, the acceleration voltage applied to the cathode can be kept constant.
【０００８】[0008]
【実施例】以下、本発明の一実施例を図１により説明す
る。図１は３段加速方式の電界放出形電子顕微鏡の電子
銃及び電源を記述している。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. FIG. 1 describes an electron gun and a power supply of a three-stage acceleration type field emission electron microscope.
【０００９】加速電圧発生電源９で発生した電圧Ｖ
0 を、電界放出形電子銃の陰極１に印加し、引出電圧発
生電源６で発生した電圧Ｖ1 を陽極２に印加する。The voltage V generated by the acceleration voltage generating power supply 9
0 is applied to the cathode 1 of the field emission electron gun, and the voltage V 1 generated by the extraction voltage generating power supply 6 is applied to the anode 2.
【００１０】初段加速電極３には、初段加速電圧発生電
源７により電圧Ｖ2 が印加される。陰極１の先端は、鋭
くとがっており引出電極２に印加されたＶ1 電圧によ
り、電子が陰極１の先端から引出される。初段加速電極
３に印加されたＶ2 電圧により引出された電子は、静電
レンズ作用を受ける。加速電圧Ｖ0 は、初段加速電極３
に印加されたＶ2 電圧と他の加速電極４に等しく分割抵
抗１０で分割された電圧Ｖ3 の総和となっている。電圧
Ｖ3 は(Ｖ0−Ｖ2)／２となる。A voltage V 2 is applied to the first-stage acceleration electrode 3 by a first-stage acceleration voltage generating power supply 7. The tip of the cathode 1 is sharply pointed and electrons are extracted from the tip of the cathode 1 by the V 1 voltage applied to the extraction electrode 2. The electrons extracted by the V 2 voltage applied to the first-stage acceleration electrode 3 are subjected to the electrostatic lens action. The acceleration voltage V 0 is the same as that of the first-stage acceleration electrode 3
The sum of the V 2 voltage applied to the other acceleration electrode 4 and the voltage V 3 equally divided by the division resistor 10 to the other acceleration electrodes 4. Voltage V 3 becomes (V 0 -V 2) / 2 .
【００１１】また陰極１をフラッシングするためフラッ
シング電源８が結線されている。A flushing power source 8 is connected to flush the cathode 1.
【００１２】陰極１，陽極２，初段加速電極３および加
速電極４は、真空容器５により高真空に保たれている。
フラッシングにより、陰極１先端部を静浄した後加速電
圧Ｖ0 が印加され、引出電圧Ｖ1 が印加される。The cathode 1, the anode 2, the first stage accelerating electrode 3 and the accelerating electrode 4 are kept in a high vacuum by a vacuum container 5.
After flushing the tip of the cathode 1 by flushing, the acceleration voltage V 0 is applied and the extraction voltage V 1 is applied.
【００１３】陰極１から引出された電子線はＶ0 電圧に
より加速され放出される。放出された電子線は陽極２の
小孔を通過し、Ｖ2 電圧により静電レンズ作用を受け平
行ビームとなる。また陽極２へ流れ込むエミッション電
流ｉ1 は、引出電圧発生電源６内に持つ検出回路により
検出される。The electron beam extracted from the cathode 1 is accelerated and emitted by the V 0 voltage. The emitted electron beam passes through the small hole of the anode 2 and is subjected to an electrostatic lens action by the V 2 voltage to become a parallel beam. Further, the emission current i 1 flowing into the anode 2 is detected by the detection circuit provided in the extraction voltage generating power supply 6.
【００１４】通常、電界放出形電子線では、設定された
引出電流値になるよう引出電圧Ｖ1を昇圧し、数分間引
出電流を一定にするよう定電流制御をする。その間Ｖ1
は少しずつ昇圧される。その後、Ｖ1 電圧を固定し定電
圧制御とし、静電レンズ作用をＶ2 電圧で与えほぼ平行
ビームとなるよう一定の比（Ｖ2／Ｖ1＝一定）に設定す
る。Normally, in the field emission electron beam, the extraction voltage V 1 is boosted so that the extraction current value is set, and the extraction current is controlled to be constant for several minutes. Meanwhile V 1
Is boosted little by little. Then, a fixed constant voltage control V 1 voltage is set to a substantially collimated beam become as fixed ratio given electrostatic lens action by V 2 voltage (V 2 / V 1 = constant).
【００１５】Ｖ2 電圧が一定の値に設定された後、電子
顕微鏡の観察を行う。この場合引出電圧Ｖ1 が一定のた
め、陰極１から引出される電子線量は、陰極１表面への
ガス等の付着により低下する。陰極１から引出される電
子線量は、陽極２へ流れるエミッション電流ｉ1 と陽極
２の小孔を通過する電流ｉ2 の和となる。陰極１から引
出される電子線量にエミッション電流ｉ1 は比例するた
めｉ1 電流検出をしている。陰極１から引出される電子
線量を常に一定にするため、第２図に示すように引出電
圧発生電源６で定電流制御を常時行う。この場合Ｖ1 電
圧は少しずつ上昇するが、Ｖ1 電圧の上昇分を高電圧制
御手段１１で検出し、静電レンズ作用が一定となるよう
初段加速電圧発生電源７のＶ2 電圧をＶ1 電圧上昇によ
る変化分に対応し同時に上昇するよう高電圧制御手段１
１で制御する。After the V 2 voltage is set to a constant value, the electron microscope is observed. In this case, since the extraction voltage V 1 is constant, the electron dose extracted from the cathode 1 decreases due to the deposition of gas or the like on the surface of the cathode 1. The electron dose extracted from the cathode 1 is the sum of the emission current i 1 flowing to the anode 2 and the current i 2 passing through the small hole of the anode 2. Since the emission current i 1 is proportional to the electron dose extracted from the cathode 1, the i 1 current is detected. In order to keep the electron dose extracted from the cathode 1 constant, the extraction voltage generating power source 6 always performs constant current control as shown in FIG. In this case, the V 1 voltage rises little by little, but the rising amount of the V 1 voltage is detected by the high voltage control means 11, and the V 2 voltage of the first stage accelerating voltage generating power supply 7 is set to V 1 so that the electrostatic lens action becomes constant. High voltage control means 1 so as to correspond to the change due to the voltage rise and rise simultaneously
Controlled by 1.
【００１６】[0016]
【発明の効果】本発明によれば、電界放出形電子銃（冷
陰極形）のもつ放出電流の経時変化（低下）をなくし、
放出電流を一定に保つことが出来るので、電界放出形電
子顕微鏡を使った像観察やＸ線の元素分析に効果大であ
る。According to the present invention, the change (decrease) in emission current of a field emission type electron gun (cold cathode type) is eliminated,
Since the emission current can be kept constant, it is effective for image observation using a field emission electron microscope and elemental analysis of X-rays.
【００１７】また、フラッシングによる陰極の清浄のた
めにＶ0，Ｖ1，Ｖ2 電圧を一度落して再度印加する頻度
を減らすことが出来る。Further, for cleaning the cathode by flushing, the V 0 , V 1 , and V 2 voltages can be once dropped to reduce the frequency of re-application.
【図１】本発明の一実施例の説明図である。FIG. 1 is an explanatory diagram of an embodiment of the present invention.
【図２】放出電流を常に一定にするための説明図であ
る。FIG. 2 is an explanatory diagram for keeping an emission current constant.
１…陰極、２…陽極、３…初段加速電極、４…加速電
極、５…真空容器、６…引出電圧発生電源、７…初段加
速電圧発生電源、８…フラッシング電流、９…加速電圧
発生電源、１０…分割抵抗、１１…高電圧制御手段。DESCRIPTION OF SYMBOLS 1 ... Cathode, 2 ... Anode, 3 ... First stage accelerating electrode, 4 ... Accelerating electrode, 5 ... Vacuum container, 6 ... Extraction voltage generating power supply, 7 ... First stage accelerating voltage generating power supply, 8 ... Flushing current, 9 ... Acceleration voltage generating power supply 10 ... Dividing resistor, 11 ... High voltage control means.
Claims (1)
出させる引出電極と引出電極に設けられた小孔から出た
電子線を加速する２段以上の加速電極と引出電圧を制御
する引出電圧発生電源と引出電流を検出する手段と初段
の加速電圧に印加する電圧を制御する初段加速電圧発生
電源を有する電界放出形電子顕微鏡において、引出電流
を一定にするよう引出電圧を可変すると同時に引出電圧
に連動し初段の加速電圧を可変するよう高電圧制御手段
を設けたことを特徴とする電界放出形電子顕微鏡。1. A field emission cathode, an extraction electrode for field emission of electrons from this cathode, two or more stages of acceleration electrodes for accelerating an electron beam emitted from a small hole provided in the extraction electrode, and an extraction voltage for controlling the extraction voltage. In a field emission electron microscope that has a power source, a means for detecting the extraction current, and a first-stage accelerating voltage generation power source that controls the voltage applied to the first-stage accelerating voltage, the extraction voltage can be varied at the same time as the extraction voltage can be varied to keep the extraction current constant. A field emission electron microscope characterized in that a high voltage control means is provided so as to change the accelerating voltage of the first stage in conjunction with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4316780A JPH06162978A (en) | 1992-11-26 | 1992-11-26 | Field emission type electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4316780A JPH06162978A (en) | 1992-11-26 | 1992-11-26 | Field emission type electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06162978A true JPH06162978A (en) | 1994-06-10 |
Family
ID=18080832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4316780A Pending JPH06162978A (en) | 1992-11-26 | 1992-11-26 | Field emission type electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06162978A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7151268B2 (en) | 2004-03-26 | 2006-12-19 | Hitachi High-Technologies Corporation | Field emission gun and electron beam instruments |
-
1992
- 1992-11-26 JP JP4316780A patent/JPH06162978A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7151268B2 (en) | 2004-03-26 | 2006-12-19 | Hitachi High-Technologies Corporation | Field emission gun and electron beam instruments |
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