JPH06160152A - Micro-volume measuring device - Google Patents

Micro-volume measuring device

Info

Publication number
JPH06160152A
JPH06160152A JP31477892A JP31477892A JPH06160152A JP H06160152 A JPH06160152 A JP H06160152A JP 31477892 A JP31477892 A JP 31477892A JP 31477892 A JP31477892 A JP 31477892A JP H06160152 A JPH06160152 A JP H06160152A
Authority
JP
Japan
Prior art keywords
valve
pressure
pipe
internal volume
closed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31477892A
Other languages
Japanese (ja)
Inventor
Hironobu Iwasaki
博信 岩崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Avio Infrared Technologies Co Ltd
Original Assignee
NEC Avio Infrared Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Avio Infrared Technologies Co Ltd filed Critical NEC Avio Infrared Technologies Co Ltd
Priority to JP31477892A priority Critical patent/JPH06160152A/en
Publication of JPH06160152A publication Critical patent/JPH06160152A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To accurately measure a micro-internal volume of a capillary or the like. CONSTITUTION:A micro-volume measuring device is provided with a pipe C having a known internal volume, a pressure control device 2 feeding the preset pressure to the pipe C, a pressure sensor 6 detecting the pressure of the pipe C, the first valve 3 applying the preset pressure fed from the pressure control device 2 to the pipe C, the second valve 4 releasing the preset pressure of the pipe C to a measured object at the preset time after the first valve 3 is closed, and a controller 8 calculating the internal volume of the measured object based on the preset pressure of the pipe C detected when the first valve 3 is opened and the second valve 4 is closed, the pressure detected when the first valve 3 is closed and the second valve 4 is opened, and the known internal volume of the pipe C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、パイプやバルブで構成
された装置内の容積、特にキャピラリーを使用した装置
等の微少容積を測定する微少容積測定装置に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microvolume measuring device for measuring the volume inside a device composed of pipes and valves, especially the microvolume of a device using a capillary.

【0002】[0002]

【従来の技術】従来、被測定物の容積を求める方法とし
て、比重が判明している液体を被測定物に注入し、その
重量変化によりその内容積を求めるようにしていた。
2. Description of the Related Art Conventionally, as a method for determining the volume of an object to be measured, a liquid whose specific gravity is known has been injected into the object to be measured, and its internal volume is determined by the change in its weight.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上記従
来の測定方法においては、液体を注入するため、キャピ
ラリー(毛管)を使用した装置等では、細部に液体が完
全に到達しなかったり、表面張力によりキャピラリーの
開口部に完全に満たすことが困難で、測定値に誤差を生
じ、精密な微少容積の測定が出来ない不都合があった。
However, in the above-mentioned conventional measuring method, since the liquid is injected, in a device using a capillary (capillary) or the like, the liquid may not completely reach the details or the surface tension may cause a problem. Since it was difficult to completely fill the opening of the capillary, an error occurred in the measured value, and there was the inconvenience that a precise minute volume could not be measured.

【0004】また、装置によっては液体を注入すること
が出来ない物があり、このような場合は、容積の測定が
出来ない不都合があった。
Also, some devices cannot inject a liquid, and in such a case, there is an inconvenience that the volume cannot be measured.

【0005】本発明は、斯かる不都合点に鑑み、微少な
被測定物の容積を正確に測定できる微少容積測定装置を
提供することを目的とする。
In view of such inconveniences, an object of the present invention is to provide a minute volume measuring device capable of accurately measuring the volume of a minute object to be measured.

【0006】[0006]

【課題を解決するための手段】本発明の微少容積測定装
置は、例えば図1に示す如く、予め既知の内容積を有す
る配管手段cと、この配管手段cに所定の圧力を供給す
る圧力制御手段2と、この配管手段cの圧力を検出する
圧力検出手段と6、圧力制御手段2より供給される所定
の圧力を配管手段cに加える第1のバルブ3と、第1の
バルブ3の閉塞後、所定時間おいて被測定物10に配管
手段cの所定の圧力を開放する第2のバルブ4と、第1
のバルブ3の開放時及び第2のバルブの閉塞時に検出さ
れる配管手段cの所定の圧力と、第1のバルブ3の閉塞
時及び第2のバルブ4の開放時に検出される圧力及び配
管手段cの既知の内容積に基づいて被測定物10の内容
積を算定する制御手段8とを具えるものである。
The microvolume measuring device of the present invention is, for example, as shown in FIG. 1, a pipe means c having a known internal volume and a pressure control for supplying a predetermined pressure to the pipe means c. Means 2, pressure detecting means 6 for detecting the pressure of the piping means c, first valve 3 for applying a predetermined pressure supplied from the pressure control means 2 to the piping means c, and closure of the first valve 3. After that, after a predetermined time, the second valve 4 for releasing the predetermined pressure of the piping means c to the DUT 10, and the first valve
The predetermined pressure of the piping means c detected when the valve 3 is opened and the second valve closed, and the pressure and the piping means detected when the first valve 3 is closed and the second valve 4 is opened. The control means 8 calculates the internal volume of the DUT 10 based on the known internal volume of c.

【0007】[0007]

【作用】第1のバルブを開放させ、第2のバルブの閉塞
時に一定の圧力を既知の内容積を有する配管に供給し、
この時の圧力を検出する。検出後、第1のバルブを閉塞
し、第2のバルブを開放させ、被測定物に配管の圧力を
供給してこの時の圧力を検出し、この圧力値と、配管の
既知の内容積及び第1のバルブを開放して第2のバルブ
を閉塞した時に検出された圧力とに基づいて、被測定物
の内容積を算定できるようにした。従って、液体等を使
用する測定法に比較して、表面張力等による測定誤差が
なくなるので正確な微少容積の測定が可能となる。
The first valve is opened, and when the second valve is closed, a constant pressure is supplied to the pipe having a known internal volume.
The pressure at this time is detected. After the detection, the first valve is closed, the second valve is opened, the pressure of the pipe is supplied to the object to be measured, and the pressure at this time is detected. This pressure value and the known internal volume of the pipe and The internal volume of the object to be measured can be calculated based on the pressure detected when the first valve is opened and the second valve is closed. Therefore, as compared with the measurement method using a liquid or the like, the measurement error due to the surface tension or the like is eliminated, and thus the accurate measurement of a minute volume becomes possible.

【0008】[0008]

【実施例】以下図1を参照して本発明の微少容積測定装
置の実施例について説明する。図1において、1はポン
プで配管aを介して、圧力制御装置2に例えば空気圧を
供給し、圧力制御装置2は、圧力を予め定めた一定の圧
力になるように制御する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the microvolume measuring device of the present invention will be described below with reference to FIG. In FIG. 1, reference numeral 1 denotes a pump which supplies, for example, air pressure to the pressure control device 2 through a pipe a, and the pressure control device 2 controls the pressure to a predetermined constant pressure.

【0009】3は、圧力制御装置2により加えられる圧
力を配管bを介して開放及び閉塞させる第1のバルブ
で、配管cの一方の端部に接続されている。この配管c
は予め測定された既知の内容積V1 を有するものとす
る。また、この配管cの他方の端部には第2のバルブ4
が接続されている。第2のバルブ4には内容積が測定さ
れる被測定物10が配管dを介して接続される。
Reference numeral 3 is a first valve for opening and closing the pressure applied by the pressure control device 2 through the pipe b, and is connected to one end of the pipe c. This pipe c
Has a known internal volume V 1 measured in advance. The second valve 4 is provided at the other end of the pipe c.
Are connected. An object to be measured 10 whose internal volume is measured is connected to the second valve 4 via a pipe d.

【0010】5はバルブ制御部で、後述する制御部8の
制御信号によりバルブ3及び4の夫々の駆動モータM1
及びM2 を駆動して、配管c内における圧力を供給及び
開放する。
Reference numeral 5 denotes a valve control unit, which controls the drive motors M 1 of the valves 3 and 4 in response to a control signal from a control unit 8 described later.
And M 2 are supplied to supply and release the pressure in the pipe c.

【0011】6は圧力センサで、バルブ3及び4の開閉
により変化する配管c内の圧力を検出してA/D変換器
7に出力する。このA/D変換器7は、圧力制御装置2
の圧力信号も入力され、配管cの圧力信号と共にデジタ
ル信号に変換して、次に説明する制御部8に出力する。
Reference numeral 6 denotes a pressure sensor, which detects the pressure in the pipe c which changes depending on the opening and closing of the valves 3 and 4, and outputs it to the A / D converter 7. This A / D converter 7 includes a pressure control device 2
Is also input, converted into a digital signal together with the pressure signal of the pipe c, and output to the control unit 8 described below.

【0012】8はCPU、RAM及びROM等から成る
制御部で、ROMには配管cの既知の内容積V1 のデー
タと共にバルブ3の開放時間及びバルブ4の閉塞時間、
並びにバルブ3の閉塞時間及びバルブ4の閉塞時間が予
め記憶保持されている。また、制御部6は、配管cの既
知の内容積V1 、RAMに記憶されるバルブ3の開放時
及びバルブ4の閉塞時に検出される配管cの圧力P1
びバルブ3の閉塞時及びバルブ4の開放時に検出される
被測定物10(後述)の圧力P2 とに基づき、被測定物
10の内容積Vx を算定する。
Reference numeral 8 denotes a control unit composed of a CPU, a RAM, a ROM and the like. The ROM has data of the known internal volume V 1 of the pipe c together with the opening time of the valve 3 and the closing time of the valve 4.
In addition, the closing time of the valve 3 and the closing time of the valve 4 are stored and held in advance. Further, the control unit 6 controls the known internal volume V 1 of the pipe c, the pressure P 1 of the pipe c detected when the valve 3 stored in the RAM is opened and when the valve 4 is closed, and when the valve 3 is closed and when the valve 3 is closed. The internal volume Vx of the object to be measured 10 is calculated based on the pressure P 2 of the object to be measured 10 (described later) detected when the valve 4 is opened.

【0013】9はD/A変換器で、制御部8からバルブ
3及び4の開放及び閉塞を制御する制御信号をアナログ
信号に変換してバルブ制御部5に出力する。
A D / A converter 9 converts a control signal for controlling opening and closing of the valves 3 and 4 from the control unit 8 into an analog signal and outputs the analog signal to the valve control unit 5.

【0014】上述の構成において、電源を投入しポンプ
1を駆動して、圧力制御装置2に例えば空気圧を加え、
圧力制御装置2は予め決められた所定の圧力に維持す
る。この所定の圧力に応じた信号がA/D変換器7を介
して制御部8に出力され圧力が監視される。
In the above structure, the power is turned on to drive the pump 1 to apply, for example, air pressure to the pressure control device 2,
The pressure control device 2 maintains the predetermined pressure. A signal corresponding to this predetermined pressure is output to the control unit 8 via the A / D converter 7 and the pressure is monitored.

【0015】制御部8は、D/A変換器9を介してバル
ブ制御部5にバルブ3を開放させる制御信号を出力する
と共にバルブ4の閉塞を維持する制御信号を出力し、バ
ルブ制御部5はこの制御信号に応じた駆動信号をモータ
1 及びモータM2 に出力る。従って、バルブ3は開放
され、バルブ4は閉塞状態を維持する。
The control unit 8 outputs a control signal for opening the valve 3 to the valve control unit 5 via the D / A converter 9 and a control signal for maintaining the valve 4 closed, and the valve control unit 5 Outputs a drive signal corresponding to the control signal to the motor M 1 and the motor M 2 . Therefore, the valve 3 is opened and the valve 4 remains closed.

【0016】バルブ3の開放により、圧力制御装置2か
ら所定圧力の空気が配管bを介して配管cに加えられ、
所定時間後バルブ3が閉じられる。この時の圧力P1
圧力センサ6で検出され、A/D変換器7を介して制御
部8のRAMに記憶される。
By opening the valve 3, air of a predetermined pressure is added from the pressure control device 2 to the pipe c through the pipe b,
After a predetermined time, the valve 3 is closed. The pressure P 1 at this time is detected by the pressure sensor 6 and is stored in the RAM of the control unit 8 via the A / D converter 7.

【0017】次にバルブ3が閉塞されてから所定時間
後、制御部8よりバルブ4を開放させる制御信号が出力
され、D/A変換器9及びバルブ制御部5を介してバル
ブ4の駆動用モータM2 が駆動され、バルブ4が開放さ
れる。バルブ4が開放されると、配管c内の所定圧力の
空気が被測定物10に流入し、その時、配管c及び被測
定物10内の圧力P1 は降下してP2 となり圧力センサ
6により検出され、A/D変換器7を介して制御部8の
RAMに取り込まれる。
Then, a predetermined time after the valve 3 is closed, a control signal for opening the valve 4 is output from the control unit 8 to drive the valve 4 via the D / A converter 9 and the valve control unit 5. The motor M 2 is driven and the valve 4 is opened. When the valve 4 is opened, air of a predetermined pressure in the pipe c flows into the DUT 10, and at that time, the pressure P 1 in the pipe c and the DUT 10 drops to P 2 and the pressure sensor 6 is used. It is detected and taken into the RAM of the control unit 8 via the A / D converter 7.

【0018】ここで、P1 :バルブ3開放及びバルブ4
閉塞時の配管cの圧力、P2 :バルブ3閉塞及びバルブ
4開放時の配管c及び被測定物10の圧力、V1 :配管
cの既知の内容積、V2 :配管cの既知の内容積V1
被測定物10の未知の内容積Vx 、T1 :配管cの周囲
温度(バルブ3開放及びバルブ4閉塞時)、T2 :配管
c及び被測定物の周囲温度(バルブ3閉塞及びバルブ4
開放時)とすれば、ボイル−シャルルの法則により、次
の式が成り立つ。
Where P 1 : valve 3 open and valve 4
Pressure of pipe c when closed, P 2 : pressure of pipe c and DUT 10 when valve 3 is closed and valve 4 is opened, V 1 : known internal volume of pipe c, V 2 : known contents of pipe c Product V 1 +
Unknown internal volume Vx of the object to be measured 10, T 1 : ambient temperature of the pipe c (when the valve 3 is open and valve 4 is closed), T 2 : ambient temperature of the pipe c and the object to be measured (valve 3 is closed and the valve 4 is closed).
(At the time of opening), the following formula is established according to Boyle-Charles' law.

【0019】[0019]

【数1】P1 ・V1 /T1 =P2 ・V2 /T2 [Formula 1] P 1 · V 1 / T 1 = P 2 · V 2 / T 2

【0020】この時、微小時間内、例えば100ms(ミ
リセカンド)程度では、周囲温度T 1 =T2 がほぼ等し
いと見なせるので上記式は、
At this time, within a minute time, for example, 100 ms (Mi
Ambient temperature T 1= T2Are almost equal
Can be regarded as

【0021】[0021]

【数2】P1 ・V1 =P2 ・V2 [Equation 2] P 1 · V 1 = P 2 · V 2

【0022】となり、P1 、P2 は圧力センサ6で検出
され、また、配管cの内容積V1 は既知であるので、V
2 が算定できる。このV2 は上述したように、配管cの
既知の内容積V1 と被測定物10の未知の内容積Vx と
の和であるから、被測定物10の内容積Vx は、
Since P 1 and P 2 are detected by the pressure sensor 6, and the internal volume V 1 of the pipe c is known, V 1
2 can be calculated. Since V 2 is the sum of the known internal volume V 1 of the pipe c and the unknown internal volume Vx of the DUT 10 as described above, the internal volume Vx of the DUT 10 is

【0023】[0023]

【数3】Vx =V2 −V1 より求めることが出来る。[Number 3] can be obtained from the Vx = V 2 -V 1.

【0024】このようにして、被測定物10の未知の内
容積Vx は、制御部8にバルブ3の開放及びバルブ4の
閉塞時に検出される圧力P1 、バルブ3の閉塞及びバル
ブ4の開通時に検出される圧力P2 及び配管cの既知の
内容積V1 を入力して演算することにより求められる。
In this way, the unknown internal volume Vx of the object to be measured 10 is detected by the control unit 8 at the pressure P 1 detected when the valve 3 is opened and the valve 4 is closed, and the valve 3 is closed and the valve 4 is opened. The pressure P 2 and the known internal volume V 1 of the pipe c, which are sometimes detected, are input and calculated.

【0025】図2は本発明の他の実施例を示すものであ
る。図1の実施例と対応する部分には同一の符号を付し
て重複説明を省略する。
FIG. 2 shows another embodiment of the present invention. The parts corresponding to those in the embodiment of FIG. 1 are designated by the same reference numerals, and duplicate description will be omitted.

【0026】前述の構成においては、2つのバルブを用
いて圧力の切換えを行うようにしたが、本例では3方切
換弁を用いて圧力を切換えると共に手動バルブの調整に
より一定圧力が得られるようにした。
In the above-mentioned structure, the pressure is switched by using two valves, but in this example, the pressure is switched by using the three-way switching valve and the constant pressure is obtained by adjusting the manual valve. I chose

【0027】図2において、ポンプ1から配管eを介し
て例えば空気圧がバッファタンク11に加えられる。こ
のバッファタンク11はポンプ1より供給される圧力を
安定化させるためのものである。配管eからは途中より
配管e1 が分岐し、先端部に手動バルブ12が取り付け
られている。手動バルブ12は、ポンプ1から供給され
る圧力を外部に開放又は停止して、バッファタンク11
内の圧力を予め定められた一定の圧力値に保持するよう
に調整される。
In FIG. 2, for example, air pressure is applied to the buffer tank 11 from the pump 1 through the pipe e. The buffer tank 11 is for stabilizing the pressure supplied from the pump 1. From the pipe e, a pipe e 1 is branched from the middle, and a manual valve 12 is attached to the tip. The manual valve 12 releases or stops the pressure supplied from the pump 1 to the outside, and the buffer tank 11
The pressure within is adjusted to maintain a predetermined constant pressure value.

【0028】3方切換弁13は、その2つの開口内の内
容積V1aが予め判明したものを用いる。この内容積V1a
は、制御部8内の例えばROMに格納されている。ま
た、この3方切換弁13は、バルブ制御部5の制御によ
りモータを駆動して90度回転させることにより、バッ
ファタンク11及び圧力センサ6側から、圧力センサ6
及び被測定物10側に切換えらる。バッファタンク1
1、圧力センサ6及び被測定物10は、配管f、g及び
hにより3方切換弁に接続される。
As the three-way switching valve 13, a valve whose internal volume V 1 a in its two openings is known in advance is used. This internal volume V 1 a
Are stored in, for example, a ROM in the control unit 8. In addition, the three-way switching valve 13 drives the motor under the control of the valve control unit 5 to rotate the motor by 90 degrees, so that the pressure sensor 6 is moved from the buffer tank 11 and the pressure sensor 6 side.
And switch to the DUT 10 side. Buffer tank 1
1, the pressure sensor 6 and the DUT 10 are connected to the three-way switching valve by the pipes f, g and h.

【0029】圧力センサ6の出力は、A/D変換器7に
よりデジタル信号に変換されて制御部8に出力され、更
に表示部14により圧力値が表示され監視される。
The output of the pressure sensor 6 is converted into a digital signal by the A / D converter 7 and output to the control unit 8, and the display unit 14 displays and monitors the pressure value.

【0030】斯かる構成において、被測定物10の内容
積Vxaを求める場合、制御部8はD/A変換器9及びバ
ルブ制御部5を介してモータを駆動することにより、3
方切換弁13をバッファタンク11及び圧力センサ6側
に切換える。ポンプ1からバッファタンク11に供給さ
れる圧力は圧力センサ6により検出され、A/D変換器
7及び制御部8を介して表示部14に圧力値が表示され
るので、この圧力値を確認しながら手動バルブ12によ
り一定の圧力値P1aに調整する。
In such a configuration, when the internal volume Vxa of the object to be measured 10 is obtained, the control unit 8 drives the motor through the D / A converter 9 and the valve control unit 5 so that the 3
The one-way switching valve 13 is switched to the buffer tank 11 and the pressure sensor 6 side. The pressure supplied from the pump 1 to the buffer tank 11 is detected by the pressure sensor 6, and the pressure value is displayed on the display unit 14 via the A / D converter 7 and the control unit 8. Check this pressure value. Meanwhile, the manual valve 12 is used to adjust to a constant pressure value P 1 a.

【0031】一定の圧力値P1aが得られたら、3方切換
弁13が被測定物10及び圧力センサ6側に切換えら
れ、被測定物10内の圧力値P2aが圧力センサ6により
検出され、A/D変換器7を介して制御部8に出力され
る。
When a constant pressure value P 1 a is obtained, the three-way switching valve 13 is switched to the side of the object to be measured 10 and the pressure sensor 6, and the pressure value P 2 a in the object to be measured 10 is detected by the pressure sensor 6. It is detected and output to the control unit 8 via the A / D converter 7.

【0032】このようにして、検出されたバッファタン
ク11の圧力P1a、被測定物10の圧力P2a及び3方切
換弁13の既知の内容積V1aから、前述の実施例と同様
に制御部8の演算により、被測定物10の内容積Vxaを
求めることが出来る。
[0032] In this way, the pressure P 1 a of the buffer tank 11 detected from the known internal volume V 1 a of the pressure P 2 a and 3-way switching valve 13 of the object 10, and the above-described embodiment Similarly, the internal volume Vxa of the DUT 10 can be obtained by the calculation of the control unit 8.

【0033】また、本発明は上述の実施例に限ることな
く、本発明の要旨を逸脱することなくその他種々の構成
を取り得ることは勿論である。
Further, the present invention is not limited to the above-mentioned embodiments, and it goes without saying that various other configurations can be adopted without departing from the gist of the present invention.

【0034】[0034]

【発明の効果】以上説明したように本発明によれば、一
定の圧力を既知の内容積を有する配管に供給し、この時
検出される圧力と、配管の圧力を被測定物に供給してこ
の時検出検出される圧力及び配管の既知の内容積とに基
づいて、被測定物の内容積を検出できるようにしたの
で、液体等を使用する測定法に比較して、表面張力等に
よる測定誤差がなくなるので正確な微少容積の測定が可
能となる。また、従来のごとく液体等を使用しないの
で、被測定物の流路を汚染することがない。更に、測定
時に被測定物に配管を接続すればよいので、測定が簡単
に行える利点を有する。
As described above, according to the present invention, a constant pressure is supplied to a pipe having a known internal volume, and the pressure detected at this time and the pressure of the pipe are supplied to the object to be measured. Since the internal volume of the object to be measured can be detected based on the pressure detected at this time and the known internal volume of the pipe, it is possible to measure by surface tension, etc., as compared to the measurement method using liquid etc. Since there is no error, it is possible to accurately measure a minute volume. Further, unlike the conventional case, since liquid or the like is not used, the flow path of the object to be measured is not contaminated. Furthermore, since it is only necessary to connect a pipe to the object to be measured at the time of measurement, there is an advantage that the measurement can be easily performed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の微少容積測定装置の一実施例を示すブ
ロック図である。
FIG. 1 is a block diagram showing an embodiment of a microvolume measuring device of the present invention.

【図2】本発明の他の実施例を示すブロック図である。FIG. 2 is a block diagram showing another embodiment of the present invention.

【符号の説明】[Explanation of symbols]

2 圧力制御装置 3 第1のバルブ 4 第2のバルブ 6 圧力センサ 8 制御部 10 被測定物 c 配管 2 Pressure control device 3 First valve 4 Second valve 6 Pressure sensor 8 Control unit 10 Object to be measured c Piping

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】予め既知の内容積を有する配管手段と、 この配管手段に所定の圧力を供給する圧力制御手段と、 上記配管手段の圧力を検出する圧力検出手段と、 上記圧力制御手段より供給される上記所定の圧力を上記
配管手段に加える第1のバルブと、 上記第1のバルブの閉塞後、所定時間おいて被測定物に
上記配管手段の上記所定の圧力を開放する第2のバルブ
と、 上記第1のバルブの開放時及び上記第2のバルブの閉塞
時に検出される上記配管手段の上記所定の圧力と、上記
第1のバルブの閉塞時及び上記第2のバルブの開放時に
検出される圧力及び上記配管手段の上記既知の内容積に
基づいて上記被測定物の内容積を算定する制御手段とを
具えることを特徴とする微少容積測定装置。
1. A piping means having a known internal volume in advance, a pressure control means for supplying a predetermined pressure to the piping means, a pressure detection means for detecting the pressure of the piping means, and a supply by the pressure control means. A first valve for applying the predetermined pressure to the piping means, and a second valve for releasing the predetermined pressure of the piping means to an object to be measured at a predetermined time after closing the first valve. And the predetermined pressure of the piping means detected when the first valve is opened and when the second valve is closed, and when the first valve is closed and the second valve is opened. And a control means for calculating the inner volume of the object to be measured based on the determined pressure and the known inner volume of the piping means.
JP31477892A 1992-11-25 1992-11-25 Micro-volume measuring device Pending JPH06160152A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31477892A JPH06160152A (en) 1992-11-25 1992-11-25 Micro-volume measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31477892A JPH06160152A (en) 1992-11-25 1992-11-25 Micro-volume measuring device

Publications (1)

Publication Number Publication Date
JPH06160152A true JPH06160152A (en) 1994-06-07

Family

ID=18057482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31477892A Pending JPH06160152A (en) 1992-11-25 1992-11-25 Micro-volume measuring device

Country Status (1)

Country Link
JP (1) JPH06160152A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006337346A (en) * 2005-06-06 2006-12-14 Ckd Corp Absolute flow rate calibration system in flow rate control device
JP2011064707A (en) * 2006-03-07 2011-03-31 Ckd Corp Gas flow rate verification unit
JP2018044887A (en) * 2016-09-15 2018-03-22 東京エレクトロン株式会社 Gas supply system inspection method, flow rate controller calibration method, and secondary reference device calibration method
JP2021501319A (en) * 2017-10-30 2021-01-14 ノードソン コーポレーションNordson Corporation Methods and systems for detecting volume parameters of liquids in containers

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006337346A (en) * 2005-06-06 2006-12-14 Ckd Corp Absolute flow rate calibration system in flow rate control device
JP2011064707A (en) * 2006-03-07 2011-03-31 Ckd Corp Gas flow rate verification unit
JP4801726B2 (en) * 2006-03-07 2011-10-26 シーケーディ株式会社 Gas supply unit with gas flow verification unit
JP2018044887A (en) * 2016-09-15 2018-03-22 東京エレクトロン株式会社 Gas supply system inspection method, flow rate controller calibration method, and secondary reference device calibration method
KR20180030447A (en) * 2016-09-15 2018-03-23 도쿄엘렉트론가부시키가이샤 Method of inspecting gas supply system, method of calibrating flow controller, and method of calibrating secondary reference device
US10788356B2 (en) 2016-09-15 2020-09-29 Tokyo Electron Limited Method of inspecting gas supply system, method of calibrating flow controller, and method of calibrating secondary reference device
JP2021501319A (en) * 2017-10-30 2021-01-14 ノードソン コーポレーションNordson Corporation Methods and systems for detecting volume parameters of liquids in containers

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