JPH06160131A - Composite thin film sensor - Google Patents
Composite thin film sensorInfo
- Publication number
- JPH06160131A JPH06160131A JP4270620A JP27062092A JPH06160131A JP H06160131 A JPH06160131 A JP H06160131A JP 4270620 A JP4270620 A JP 4270620A JP 27062092 A JP27062092 A JP 27062092A JP H06160131 A JPH06160131 A JP H06160131A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- radiation
- air
- temperature correction
- correction unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、エアコン、加湿器、空
気清浄器等の環境制御装置およびクリーンルーム等の精
密環境の分布モニタリングに好適な複合薄膜センサに関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an environmental control device such as an air conditioner, a humidifier, an air purifier, etc. and a composite thin film sensor suitable for distribution monitoring of a precision environment such as a clean room.
【０００２】[0002]
【従来の技術】従来の複合薄膜センサについて図を用い
て説明する。図４は、例えば、特願平２−０６１７９３
号に開示されているような従来の環境センサ（複合薄膜
センサ）の構造図である。2. Description of the Related Art A conventional composite thin film sensor will be described with reference to the drawings. FIG. 4 shows, for example, Japanese Patent Application No. 2-061793.
FIG. 4 is a structural diagram of a conventional environment sensor (composite thin film sensor) as disclosed in No.
【０００３】図において、複合薄膜センサは、基板（シ
リコン基板）２１上に絶縁膜２２を成膜し、その絶縁膜
２２上に気温センサ２３と気流センサ２４と輻射センサ
２５と湿度センサ２６とを形成した構造となっている。
上記気温センサ２３、気流センサ２４、輻射センサ２５
は、それぞれ薄膜抵抗で形成されている。In the figure, the composite thin film sensor has an insulating film 22 formed on a substrate (silicon substrate) 21, and an air temperature sensor 23, an air flow sensor 24, a radiation sensor 25, and a humidity sensor 26 on the insulating film 22. It has a formed structure.
The temperature sensor 23, the airflow sensor 24, the radiation sensor 25.
Are formed of thin film resistors, respectively.
【０００４】気流センサ２４は、気流検知部２４ａの
他、同検知部２４ａで検知した気流の気温に対する補正
を行う気流気温補正部２４ｂを有する。気流気温補正部
２４ｂは、基板２１上に形成された絶縁膜２２上に設け
られている。輻射センサ２５は、その上部に熱吸収効率
を高めるための黒体材料２５ａを有している。また、湿
度センサ２６は、電極２６ｂ間に挿入した感湿材２６ａ
の静電容量の変化により湿度を検知する。図５（ａ）
は、図４に示すＣ−Ｃ線に沿った断面図であり、図５
（ｂ）は、図４に示すＤ−Ｄ線に沿った断面図である。The air flow sensor 24 has an air flow temperature correction unit 24b for correcting the air temperature of the air flow detected by the detection unit 24a, in addition to the air flow detection unit 24a. The air temperature correction unit 24b is provided on the insulating film 22 formed on the substrate 21. The radiation sensor 25 has a black body material 25a on its upper part for increasing heat absorption efficiency. Further, the humidity sensor 26 includes a moisture sensitive material 26a inserted between the electrodes 26b.
Humidity is detected by the change of the electrostatic capacity of. Figure 5 (a)
5 is a cross-sectional view taken along line CC shown in FIG.
FIG. 6B is a sectional view taken along the line D-D shown in FIG. 4.
【０００５】図５（ａ），（ｂ）に示すように、気流セ
ンサ２４の気流検知部２４ａおよび輻射センサ２５の下
部には、基板２１の対応部分を除去することによって、
空隙部（空所）２７が形成されている。この空隙部２７
は、気流および輻射に対するそれぞれのセンサの感度向
上およびローパワ化をはかるためのものである。As shown in FIGS. 5 (a) and 5 (b), by removing the corresponding portions of the substrate 21 below the air flow detecting portion 24a of the air flow sensor 24 and the radiation sensor 25,
A void (vacant space) 27 is formed. This void 27
Is for improving the sensitivity of the respective sensors to the air flow and the radiation and for lowering the power.
【０００６】[0006]
【発明が解決しようとする課題】上記従来の環境センサ
（複合薄膜センサ）には下記の問題点があった。The above-mentioned conventional environment sensor (composite thin film sensor) has the following problems.
【０００７】まず、気流センサ２４は、気流気温補正部
２４ａを有しているものの、気流センサ２４の気流検知
部２４ａは測定原理上発熱した状態になっており、気流
気温補正部２４ｂの温度に対する抵抗値の変化量、即ち
抵抗温度係数が異なるため、検知した抵抗値の変化量に
ついて、気温に対する補正を完全に行うことができず、
複合薄膜センサ外部に更に補正回路を設ける必要があっ
た。また、上記環境センサ（複合薄膜センサ）の調整は
一品一品の調整となるため労力がかかった。First, although the airflow sensor 24 has an airflow temperature correction unit 24a, the airflow detection unit 24a of the airflow sensor 24 is in a state of heat generation due to the measurement principle, and the airflow temperature correction unit 24b with respect to the temperature. Since the amount of change in the resistance value, that is, the temperature coefficient of resistance is different, the detected amount of change in the resistance value cannot be completely corrected for the air temperature,
It was necessary to further provide a correction circuit outside the composite thin film sensor. In addition, the adjustment of the environment sensor (composite thin film sensor) requires adjustment because each item is adjusted individually.
【０００８】また、従来の環境センサ（複合薄膜セン
サ）は、輻射センサ２５の気温に対する補正を行なうた
めの輻射気温補正部を有していないので、複合薄膜セン
サ外部に輻射気温補正回路を設ける必要があった。Further, since the conventional environment sensor (composite thin film sensor) does not have a radiation air temperature correction unit for correcting the air temperature of the radiation sensor 25, it is necessary to provide a radiation air temperature correction circuit outside the composite thin film sensor. was there.
【０００９】本発明は上記事情に鑑みて成されたもので
あり、その目的は、基板上で気流センサおよび輻射セン
サの気温に対する補正を行ない、気温、湿度、気流、輻
射をローパワで検出でき、調整の必要がない小形の複合
薄膜センサを提供することにある。The present invention has been made in view of the above circumstances, and an object thereof is to correct the air temperature of an air flow sensor and a radiation sensor on a substrate and to detect the air temperature, humidity, air flow, and radiation with low power. An object is to provide a small-sized composite thin film sensor that does not require adjustment.
【００１０】[0010]
【課題を解決するための手段】本発明は、上記問題点を
解決するために、気温センサと、輻射センサと、静電容
量型湿度センサと、気流気温補正部を備えた気流センサ
とを基板上に絶縁膜を介して一体形成した複合薄膜セン
サにおいて、輻射の気温による変化を補正するための輻
射気温補正部を、輻射検知部と対を成して輻射センサに
設け、In order to solve the above problems, the present invention provides an air temperature sensor, a radiation sensor, a capacitance type humidity sensor, and an airflow sensor having an airflow temperature correction unit on a substrate. In the composite thin film sensor integrally formed via the insulating film on the top, the radiation temperature correction unit for correcting the change of the radiation due to the temperature is provided in the radiation sensor in pair with the radiation detection unit,
【００１１】輻射検知部と輻射気温補正部と気流検知部
と気流気温補正部に対応する基板の各該当部分をそれぞ
れ除去して、空隙部を形成し、更に気流気温補正部に風
防部材を被せたことを特徴とする。また、本発明は、上
記風防部材を上記気流気温補正部の他に、輻射検知部お
よび輻射気温補正部にも被せたことをも特徴とする。The corresponding portions of the substrate corresponding to the radiation detecting portion, the radiation temperature correcting portion, the airflow detecting portion, and the airflow temperature correcting portion are respectively removed to form voids, and the windshield member is covered on the airflow temperature correcting portion. It is characterized by that. Further, the present invention is characterized in that the windshield member is covered not only on the air temperature correction unit but also on the radiation detection unit and the radiation temperature correction unit.
【００１２】[0012]
【作用】本発明によれば、気温センサは気温変化を薄膜
抵抗変化で捉える方式とし、湿度センサは湿度変化を感
湿材の静電容量変化で捉える方式とし、気流センサは気
流による大気の熱伝導率の変化による温度変化を薄膜抵
抗変化で捉える方式とし、輻射センサは輻射熱の入熱に
よる温度変化を薄膜抵抗変化で捉える方式としているた
めに、同一基板上で気温、湿度、気流、輻射を同時に個
別に検出できる。According to the present invention, the air temperature sensor uses a method of detecting a temperature change by a thin film resistance change, the humidity sensor uses a method of detecting a humidity change by a capacitance change of a moisture sensitive material, and the air flow sensor uses an air heat caused by an air flow. Since the temperature change due to the change in conductivity is captured by the thin film resistance change, and the radiation sensor is the system that captures the temperature change due to the input of radiant heat by the thin film resistance change, temperature, humidity, air flow, and radiation can be detected on the same substrate. Can be detected individually at the same time.
【００１３】また、気流センサの気流検知部と気流気温
補正部、輻射センサの輻射検知部と輻射気温補正部の各
々の下部の基板部材を微細加工により全て取り除くこと
により、空隙部（空所）を形成しているので、熱絶縁性
の高い薄膜（絶縁膜）上に両センサが形成される構造と
なり、両センサの熱抵抗が増大する。この様な構造とす
ることにより、基板上の気流センサ部を形成する薄膜抵
抗は、わずかな消費電力で温度が上り、気流センサとし
て正しく機能し、また、輻射センサ部を形成する薄膜抵
抗も、わずかな輻射エネルギで温度が上昇するため、高
感度な輻射センサとして機能する。Further, by removing finely all the substrate members under the air flow detection part and air flow temperature correction part of the air flow sensor and the radiation detection part and radiation air temperature correction part of the radiation sensor, a void (vacant space) is formed. Therefore, both sensors are formed on a thin film (insulating film) having high thermal insulation, and the thermal resistance of both sensors increases. With such a structure, the thin film resistor forming the air flow sensor section on the substrate rises in temperature with a small amount of power consumption and functions properly as an air flow sensor, and the thin film resistance forming the radiation sensor section also has Since the temperature rises with a little radiation energy, it functions as a highly sensitive radiation sensor.
【００１４】また、気流センサの気流検知部と気流気温
補正部を同一形状とし、上記したように各々の下部に空
隙部が形成された構造とすることにより、気流センサは
精度良く気温補正ができる。輻射センサの輻射検知部と
輻射気温補正部についても同一形状とし、上記したよう
に各々の下部に空隙部が形成された構造とすることによ
り、輻射センサは精度良く気温補正ができる。Further, the airflow sensor and the airflow temperature compensator of the airflow sensor have the same shape, and the air gap is formed in the lower portion as described above, so that the airflow sensor can accurately correct the air temperature. . The radiation detection section and the radiation temperature correction section of the radiation sensor have the same shape, and the air gap can be formed in the lower portion of each as described above, so that the radiation sensor can accurately correct the temperature.
【００１５】気流センサの気流気温補正部には風防部材
が被せられており、これにより気流が気流気温補正部に
直接当たるのが防止される。この結果、気流気温補正部
は、気流の影響を受けないため、気流検知部での気流検
知に対する比較部として正しく使用することが可能とな
る。The airflow temperature correction unit of the airflow sensor is covered with a windshield member, which prevents the airflow from directly hitting the airflow temperature correction unit. As a result, since the airflow temperature correction unit is not affected by the airflow, it can be correctly used as a comparison unit for airflow detection by the airflow detection unit.
【００１６】また、輻射センサにも被せられた風防部材
は、輻射センサに気流が直接当たるのを防止している。
このため、輻射検知時に気流によるノイズ成分を小さく
することができる。The windshield member also covers the radiation sensor to prevent the airflow from directly hitting the radiation sensor.
Therefore, it is possible to reduce the noise component due to the air flow when detecting the radiation.
【００１７】[0017]
【実施例】以下、図面を参照して本発明の第１実施例を
説明する。図１は、同実施例における複合薄膜センサの
構造図である。図において、基板１はシリコンで形成さ
れており、同基板上１には絶縁膜２が成膜されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a structural diagram of the composite thin film sensor in the example. In the figure, a substrate 1 is made of silicon, and an insulating film 2 is formed on the substrate 1.
【００１８】絶縁膜２上には、気温センサ３、気流セン
サ４、輻射センサ５および湿度センサ６が形成されてい
る。また、絶縁膜２は、各センサに用いられている薄膜
抵抗間の電気的絶縁と気流センサ４および輻射センサ５
に対して熱的絶縁の機能を有する。気温センサ３は、薄
膜抵抗で形成されており、気温変化を抵抗変化で検出す
るものである。An air temperature sensor 3, an air flow sensor 4, a radiation sensor 5 and a humidity sensor 6 are formed on the insulating film 2. In addition, the insulating film 2 is an electrical insulation between the thin film resistors used for each sensor and the air flow sensor 4 and the radiation sensor 5.
It has the function of thermal insulation. The air temperature sensor 3 is formed of a thin film resistor and detects a temperature change by a resistance change.
【００１９】気流センサ４は、気流を検知するための気
流検知部４ａと気流の気温に対する補正をするための気
流気温補正部４ｂとで構成されている。気流検知部４ａ
と気流気温補正部４ｂは共に薄膜抵抗で同形状に形成さ
れている。気流センサ４は、気流による大気の熱伝導率
の変化を温度変化で捉えるもので、最終的に薄膜抵抗の
変化で検出する。また、気流気温補正部４ｂは、風防７
により覆われている。The air flow sensor 4 comprises an air flow detection unit 4a for detecting the air flow and an air flow temperature correction unit 4b for correcting the air temperature of the air flow. Airflow detector 4a
Both the air temperature correction unit 4b and the air temperature correction unit 4b are formed in the same shape by thin film resistors. The air flow sensor 4 captures a change in the thermal conductivity of the atmosphere due to the air flow as a change in temperature, and finally detects it as a change in thin film resistance. Further, the air temperature correction unit 4b is provided with a windshield 7
Are covered by.
【００２０】輻射センサ５は、輻射を検知するための輻
射検知部５ａと輻射の気温に対する補正をするための輻
射気温補正部５ｂとで構成されている。輻射検知部５ａ
と輻射気温補正部５ｂは、共に薄膜抵抗で同形状に形成
されている。また、輻射検知部５ａは、輻射熱検出のた
めの薄膜抵抗と輻射熱の吸収効率を高めるための黒体材
料５ａ-1とで構成されている。The radiation sensor 5 is composed of a radiation detection section 5a for detecting radiation and a radiation temperature correction section 5b for correcting the temperature of the radiation. Radiation detector 5a
Both the radiant air temperature correction unit 5b and the radiant air temperature correction unit 5b are formed in the same shape by thin film resistors. The radiation detecting section 5a is composed of a thin film resistor for detecting the radiant heat and a black body material 5a-1 for increasing the efficiency of absorbing the radiant heat.
【００２１】湿度センサ６は、感湿材６ａの静電容量変
化により湿度を検出する。この湿度センサ６の詳細な構
造を図６に示す。なお、同図（ａ）は同センサ６の平面
図、同図（ｂ）は同図（ａ）に示すＥ−Ｅ線に沿った断
面図であり、同図で示される湿度センサ６は、先に本出
願人により出願された実願平０３−０６７１５７号に記
載されているものである。The humidity sensor 6 detects the humidity by the change in the electrostatic capacity of the moisture sensitive material 6a. The detailed structure of the humidity sensor 6 is shown in FIG. Note that FIG. 7A is a plan view of the sensor 6, FIG. 8B is a cross-sectional view taken along line EE shown in FIG. 7A, and the humidity sensor 6 shown in FIG. It is described in Japanese Patent Application No. 03-067157 previously filed by the present applicant.
【００２２】図６に示す湿度センサは、静電容量型湿度
センサであり、一端に端子部３５ａを有する上部電極板
３５と下部電極板３３の間に感湿材３４を配置した構造
となっている。また、上部電極板３５は、下部電極板３
３より小さく形成されている。図２（ａ）は、図１に示
すＡ−Ａ線に沿った断面図であり、図２（ｂ）は図１に
示すＢ−Ｂ線に沿った断面図である。The humidity sensor shown in FIG. 6 is a capacitance type humidity sensor, and has a structure in which a moisture sensitive material 34 is arranged between an upper electrode plate 35 having a terminal portion 35a at one end and a lower electrode plate 33. There is. In addition, the upper electrode plate 35 is the lower electrode plate 3
It is formed smaller than 3. 2A is a sectional view taken along the line AA shown in FIG. 1, and FIG. 2B is a sectional view taken along the line BB shown in FIG.
【００２３】図２（ａ）、（ｂ）に示すように、表面に
絶縁膜２が形成された基板１の一部は、微細加工技術に
よりエッチングを用いて、絶縁膜に達するまで除去さ
れ、空隙部８ａ〜８ｄが形成されている。As shown in FIGS. 2A and 2B, a part of the substrate 1 having an insulating film 2 formed on its surface is removed by etching using a fine processing technique until the insulating film is reached. Voids 8a to 8d are formed.
【００２４】図２（ａ）に示すように、空隙部８ａに対
応する絶縁膜２上には輻射検知部５ａが形成され、同じ
く空隙部８ｂに対応する絶縁膜２上には輻射気温補正部
５ｂが形成されている。また、図２（ｂ）に示すよう
に、空隙部８ｃに対応する絶縁膜２上には気流気温補正
部４ｂが形成され、空隙部８ｄに対応する絶縁膜２上に
は気流検知部４ａが形成されている。As shown in FIG. 2A, the radiation detecting portion 5a is formed on the insulating film 2 corresponding to the void portion 8a, and the radiation temperature correction portion is also formed on the insulating film 2 corresponding to the void portion 8b. 5b is formed. Further, as shown in FIG. 2B, an airflow temperature correction unit 4b is formed on the insulating film 2 corresponding to the void 8c, and an airflow detection unit 4a is formed on the insulating film 2 corresponding to the void 8d. Has been formed.
【００２５】即ち、本実施例において、輻射センサ５の
輻射検知部５ａ、輻射気温補正部５ｂと絶縁膜２を挾ん
で対向する基板１の各該当部は全て除去されて空隙部８
ａ、８ｂが形成され、気流センサ４の気流検知部４ａ、
気流気温補正部４ｂと絶縁膜２を挾んで対向する基板１
の各該当部は全て除去されて空隙部８ｃ、８ｄが形成さ
れている。That is, in this embodiment, all the corresponding portions of the substrate 1 which face the radiation detection portion 5a and the radiation temperature correction portion 5b of the radiation sensor 5 across the insulating film 2 are removed and the void portion 8 is formed.
a and 8b are formed, and the air flow detection part 4a of the air flow sensor 4 is formed.
Substrate 1 facing air temperature correction unit 4b with insulating film 2 in between
All the corresponding portions are removed to form voids 8c and 8d.
【００２６】この様に、基板１の気流センサ４と輻射セ
ンサ５に対応する部分のシリコンを微細加工技術により
エッチングし、全て除去することにより、気流センサ４
および輻射センサ５は共に熱絶縁性の高い絶縁膜２上に
形成された構造となるので、両センサの熱抵抗は増大す
る。このため、（両センサの熱抵抗が増大したことによ
り）、輻射センサ５はわずかな輻射エネルギで温度が上
昇するので熱感度が向上し、気流センサ４はわずかな消
費電力で温度が上昇するので電池駆動にも対応可能な程
度にローパワ化される。In this way, the silicon of the portion corresponding to the air flow sensor 4 and the radiation sensor 5 of the substrate 1 is etched by the microfabrication technique and all the silicon is removed, whereby the air flow sensor 4 is removed.
Since the radiation sensor 5 and the radiation sensor 5 are both formed on the insulating film 2 having a high thermal insulation property, the thermal resistance of both sensors increases. Therefore (because of the increased thermal resistance of both sensors), the temperature of the radiation sensor 5 rises with a small amount of radiant energy, so the thermal sensitivity is improved, and the temperature of the airflow sensor 4 rises with a small amount of power consumption. Low power to the extent that it can be driven by batteries.
【００２７】また、既に述べた通り、気流センサ４の気
流気温補正部４ｂは気流検知部４ａと同形状・同構造に
形成されており、輻射センサ５の輻射気温補正部５ｂは
輻射検知部５ａと同形状・同構造に形成されている。こ
のため、気温センサ４および輻射センサ５は、同一シリ
コン半導体チップ上で共に精度良く気温補正ができる。As described above, the airflow temperature correction unit 4b of the airflow sensor 4 is formed in the same shape and structure as the airflow detection unit 4a, and the radiation air temperature correction unit 5b of the radiation sensor 5 is the radiation detection unit 5a. It is formed in the same shape and structure. Therefore, the temperature sensor 4 and the radiation sensor 5 can both accurately correct the temperature on the same silicon semiconductor chip.
【００２８】上記構成の気流センサ４において、その気
流検出原理は、気流検知部４ａと気流気温補正部４ｂを
発熱させ、気流検知部４ａと気流気温補正部４ｂをそれ
ぞれ形成する薄膜抵抗の気流による抵抗値変化量を検出
するものである。ここで、気流気温補正部４ｂは、気流
検知部４ａでの気流検知に対して、比較部として使用さ
れる。そこで、図１に示すように気流気温補正部４ｂを
覆う風防７を設け、同補正部４ｂに気流が直接当たらな
いようにしている。また、輻射センサ５についても、そ
の検出原理は上記気流センサ４と同様である。つぎに本
発明の第２実施例について説明する。図３は、同実施例
における複合薄膜センサの構造を示すものである。な
お、図１と同一部分には、同一符号を付して詳細な説明
を省略する。In the airflow sensor 4 having the above-described structure, the airflow detection principle is based on the airflow of the thin film resistor that causes the airflow detection unit 4a and the airflow temperature correction unit 4b to generate heat, and forms the airflow detection unit 4a and the airflow temperature correction unit 4b, respectively. The amount of change in resistance is detected. Here, the airflow temperature correction unit 4b is used as a comparison unit for airflow detection by the airflow detection unit 4a. Therefore, as shown in FIG. 1, a windshield 7 is provided to cover the airflow temperature correction unit 4b so that the airflow does not directly hit the correction unit 4b. The radiation sensor 5 has the same detection principle as that of the airflow sensor 4. Next, a second embodiment of the present invention will be described. FIG. 3 shows the structure of the composite thin film sensor in the example. The same parts as those in FIG. 1 are designated by the same reference numerals and detailed description thereof will be omitted.
【００２９】図３に示す複合薄膜センサが図１に示す複
合薄膜センサと異なる点は、気流気温補正部４ｂだけで
なく輻射センサ５、即ち輻射検知部５ａおよび輻射気温
補正部５ｂをも覆う風防１７が設けられた構造となって
いることである。The composite thin-film sensor shown in FIG. 3 differs from the composite thin-film sensor shown in FIG. 1 in that the windshield covers not only the airflow temperature correction unit 4b but also the radiation sensor 5, that is, the radiation detection unit 5a and the radiation temperature correction unit 5b. That is, the structure is provided with 17.
【００３０】上記構成において、輻射センサ５の輻射検
知部５ａと輻射気温補正部５ｂは、第１実施例同様に同
形状を成している。このため、輻射センサ５は風防無し
でも輻射の検出はできる。しかし、図３に示すように気
流気温補正部４ｂだけでなく輻射センサ５、即ち輻射検
知部５ａと輻射気温補正部５ｂにも風防１７を被せるこ
とにより、輻射検知時における気流によるノイズ成分が
小さくできる。このため、輻射センサ５は、精度良く輻
射検知ができる。また、風防１７の材料としては、輻射
エネルギを通過させる必要があるため、ポリエチレン等
の赤外線透過材料が用いられる。In the above structure, the radiation detecting portion 5a and the radiation temperature correcting portion 5b of the radiation sensor 5 have the same shape as in the first embodiment. Therefore, the radiation sensor 5 can detect radiation without the windshield. However, as shown in FIG. 3, by covering the radiation sensor 5, that is, the radiation detection unit 5a and the radiation temperature correction unit 5b as well as the airflow temperature correction unit 4b with the windshield 17, the noise component due to the airflow during radiation detection is reduced. it can. Therefore, the radiation sensor 5 can accurately detect radiation. Further, as the material of the windshield 17, since it is necessary to pass radiant energy, an infrared transmitting material such as polyethylene is used.
【００３１】[0031]
【発明の効果】以上詳述したように、本発明によれば、
複合薄膜センサにおいて、輻射センサに輻射気温補正部
を設けたことにより、輻射センサは、基板上で輻射検知
の気温に対する補正が行うことができる。As described in detail above, according to the present invention,
In the composite thin film sensor, since the radiation sensor is provided with the radiation temperature correction unit, the radiation sensor can perform correction on the temperature of radiation detection on the substrate.
【００３２】本発明によれば、気流センサの気流気温補
正部の下部と輻射センサの輻射検知部および輻射気温補
正部の各々の下部に空隙部を形成したことにより、熱絶
縁性の高い絶縁膜上に輻射センサと気流センサが形成さ
れた構造となり、輻射センサおよび気流センサの熱抵抗
が増大する。このため、輻射センサはわずかな輻射エネ
ルギで温度が上昇するので熱感度が向上し、気流センサ
はわずかな消費電力で温度が上昇するので電池駆動に対
応できる程度にローパワ化される。According to the present invention, the insulating film having a high thermal insulation property is formed by forming the voids below the air temperature correction unit of the air flow sensor and below the radiation detection unit and the radiation air temperature correction unit of the radiation sensor. Since the radiation sensor and the airflow sensor are formed on the structure, the thermal resistance of the radiation sensor and the airflow sensor increases. Therefore, the temperature of the radiation sensor rises with a small amount of radiant energy, so that the thermal sensitivity is improved, and the temperature of the airflow sensor rises with a small amount of power consumption, so that the power consumption is low enough to support battery driving.
【００３３】また、本発明によれば、気流センサの気流
気温補正部に風防を設けたことにより、気流は直接気流
気温補正部に当たることはなくなるので、基板上で気温
に対する補正を正確に行うことができる。このため、複
合薄膜センサの外部に新たに補正回路を設ける必要がな
くなる。Further, according to the present invention, since the airflow temperature correction unit of the airflow sensor is provided with the windshield, the airflow does not directly hit the airflow temperature correction unit, so that the air temperature can be corrected accurately on the substrate. You can Therefore, it is not necessary to newly provide a correction circuit outside the composite thin film sensor.
【００３４】また、本発明によれば、気温、湿度、気
流、輻射の４種の物理量を同一点で個別に同時に検出可
能な複合薄膜センサが得られる。この複合薄膜センサは
空調機等に搭載できるため、快適環境制御の高度化が図
れる。Further, according to the present invention, it is possible to obtain a composite thin film sensor capable of individually and simultaneously detecting four kinds of physical quantities of temperature, humidity, air flow and radiation at the same point. Since this composite thin film sensor can be installed in an air conditioner or the like, the comfort environment control can be enhanced.
【００３５】また、本発明によれば、気流センサおよび
輻射センサの気温補正をチップ（基板）上で行っている
ため、両センサからの信号を処理する信号処理回路の調
整が不要となり低コスト化が図れる。また、本発明によ
れば、複合薄膜センサは小形であるため、クリーンルー
ム等、精密環境の分布モニタリングが可能となる。Further, according to the present invention, since the air temperature of the air flow sensor and the temperature of the radiation sensor are corrected on the chip (board), the adjustment of the signal processing circuit for processing the signals from both sensors becomes unnecessary, and the cost is reduced. Can be achieved. Further, according to the present invention, since the composite thin film sensor is small, it is possible to perform distribution monitoring of a precision environment such as a clean room.
【図１】本発明の第１実施例に係る複合薄膜センサの構
造図。FIG. 1 is a structural diagram of a composite thin film sensor according to a first embodiment of the present invention.
【図２】図１の気流センサ４および輻射センサ５の断面
図。FIG. 2 is a cross-sectional view of the airflow sensor 4 and the radiation sensor 5 of FIG.
【図３】本発明の第２実施例に係る複合薄膜センサの構
造図。FIG. 3 is a structural diagram of a composite thin film sensor according to a second embodiment of the present invention.
【図４】従来の環境センサ（複合薄膜センサ）の構造
図。FIG. 4 is a structural diagram of a conventional environment sensor (composite thin film sensor).
【図５】図４の気流センサ２４および輻射センサ２５の
断面図。5 is a cross-sectional view of the airflow sensor 24 and the radiation sensor 25 of FIG.
【図６】上記第１および第２実施例で適用されている湿
度センサの構造図。FIG. 6 is a structural diagram of a humidity sensor applied in the first and second embodiments.
１…基板、 ２…絶縁膜、 ３…
気温センサ、４…気流センサ、 ４ａ…気流検知
部、 ４ｂ…気流気温補正部、５…輻射センサ、
５ａ…輻射検知部、 ５ａ-1…黒体材料、５ｂ…
輻射気温補正部、 ６…湿度センサ、 ６ａ…感湿
材、６ｂ…電極、 ７，１７…風防1 ... Substrate, 2 ... Insulating film, 3 ...
Air temperature sensor, 4 ... Air flow sensor, 4a ... Air flow detection unit, 4b ... Air flow temperature correction unit, 5 ... Radiation sensor,
5a ... Radiation detection part, 5a-1 ... Black body material, 5b ...
Radiation temperature correction unit, 6 ... Humidity sensor, 6a ... Moisture sensitive material, 6b ... Electrode, 7, 17 ... Windshield
───────────────────────────────────────────────────── フロントページの続き (72)発明者 中井 正義 兵庫県高砂市荒井町新浜二丁目１番１号 三菱重工業株式会社高砂研究所内 (72)発明者 江頭 良夫 兵庫県高砂市荒井町新浜二丁目１番１号 三菱重工業株式会社高砂研究所内 (72)発明者 石山 一郎 富山県上新川郡大沢野町下大久保3158番地 北陸電気工業株式会社中央研究所内 (72)発明者 嘉藤 雅記 富山県上新川郡大沢野町下大久保3158番地 北陸電気工業株式会社中央研究所内 (72)発明者 西田 達也 富山県上新川郡大沢野町下大久保3158番地 北陸電気工業株式会社中央研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Masayoshi Nakai 2-1-1, Niihama, Arai-cho, Takasago-shi, Hyogo Prefecture Takasago Laboratory, Mitsubishi Heavy Industries, Ltd. (72) Yoshio Egashira 2-chome, Niihama, Arai-cho, Takasago-shi, Hyogo Prefecture No. 1 Mitsubishi Heavy Industries, Ltd. Takasago Research Institute (72) Inventor Ichiro Ishiyama 3158 Shimookubo, Osawano-cho, Kamishinagawa-gun, Toyama Prefecture Hokuriku Electric Industry Co., Ltd. Central Research Laboratory (72) Inventor Masaki Kato Shimo-Okubo, Osawano-cho, Kamishinagawa-gun, Toyama Prefecture 3158 Hokuriku Electric Industry Co., Ltd. Central Research Laboratory (72) Inventor Tatsuya Nishida Shimookubo, Osawano-cho, Kamishinagawa-gun, Toyama Prefecture 3158 Address Hokuriku Electric Industry Co., Ltd. Central Research Laboratory
Claims (2)
射検知部を持つ輻射センサと、電極板間に感湿材を配置
して形成した静電容量型湿度センサと、気流を検知する
ための気流検知部と気流の気温による変化を補正するた
めの、気流気温補正部を持つ気流センサとを、絶縁膜が
成膜された基板上に薄膜形成によって一体形成した複合
薄膜センサにおいて、 前記輻射センサの一部を成し、輻射の気温による変化を
補正するための前記基板上に前記絶縁膜を介して形成さ
れた輻射気温補正部と、 前記輻射検知部、前記輻射気温補正部、前記気流検知部
および前記気流気温補正部に対応する前記基板の各該当
部分をそれぞれ除去することにより形成された空隙部
と、 前記気流気温補正部を覆う風防部材と、 を具備することを特徴とする複合薄膜センサ。1. A temperature sensor, a radiation sensor having a radiation detector for detecting radiation, a capacitance type humidity sensor formed by arranging a humidity sensitive material between electrode plates, and for detecting an air flow. In the composite thin-film sensor, the air-flow detection unit and the air-flow sensor having an air-flow temperature correction unit for correcting the change of the air flow due to the air temperature are integrally formed by thin-film formation on a substrate on which an insulating film is formed. A radiation air temperature correction unit that forms a part of a sensor and is formed on the substrate via the insulating film to correct a change in radiation due to air temperature, the radiation detection unit, the radiation air temperature correction unit, and the air flow. A composite comprising: a void portion formed by removing respective corresponding portions of the substrate corresponding to the detection unit and the airflow temperature correction unit; and a windshield member that covers the airflow temperature correction unit. Thin film Capacitors.
他、前記輻射検知部および前記輻射気温補正部をも覆う
ことを特徴とする請求項１記載の複合薄膜センサ。2. The composite thin film sensor according to claim 1, wherein the windshield member covers not only the airflow temperature correction unit but also the radiation detection unit and the radiation temperature correction unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4270620A JPH07119632B2 (en) | 1992-10-08 | 1992-10-08 | Composite thin film sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4270620A JPH07119632B2 (en) | 1992-10-08 | 1992-10-08 | Composite thin film sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06160131A true JPH06160131A (en) | 1994-06-07 |
| JPH07119632B2 JPH07119632B2 (en) | 1995-12-20 |
Family
ID=17488628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4270620A Expired - Lifetime JPH07119632B2 (en) | 1992-10-08 | 1992-10-08 | Composite thin film sensor |
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| Country | Link |
|---|---|
| JP (1) | JPH07119632B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012042288A (en) * | 2010-08-17 | 2012-03-01 | Sinfonia Technology Co Ltd | Composite sensor and sensor unit |
| KR101237962B1 (en) * | 2010-08-11 | 2013-02-27 | 주식회사 에스앤에스레볼루션 | Multi-function sensor and manufacturing method thereof |
-
1992
- 1992-10-08 JP JP4270620A patent/JPH07119632B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101237962B1 (en) * | 2010-08-11 | 2013-02-27 | 주식회사 에스앤에스레볼루션 | Multi-function sensor and manufacturing method thereof |
| JP2012042288A (en) * | 2010-08-17 | 2012-03-01 | Sinfonia Technology Co Ltd | Composite sensor and sensor unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07119632B2 (en) | 1995-12-20 |
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