JPH06153546A - Ultrasonic oscillator and ultrasonic actuator - Google Patents

Abstract

PURPOSE:To obtain an ultrasonic oscillator and an ultrasonic actuator in which the longitudinal oscillation of the ultrasonic oscillator is synthesized and a large reversible elliptical oscillation is excited and a driving can be efficiently performed. CONSTITUTION:An ultrasonic oscillator 1 comprises a first oscillator 2 and a second oscillator 3, and a first piezoelectric element 4 is placed in a node position of a longitudinal resonance of the first oscillator 2. The first piezoelectric element 4 is fixed on a resonator together with a resonator 8. Piezoelectric elements 12 and 13 and a resonator 17 are fixed on a protrusion 19 of the resonator.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic vibrator for generating ultrasonic vibration by an electro-mechanical energy conversion element such as a piezoelectric element or an electrostrictive element.

[0002]

2. Description of the Related Art Conventionally, ultrasonic vibrators having various shapes have been proposed, for example, Japanese Patent Publication No. 59-37673.
There is an ultrasonic transducer having a shape as described in the publication. In the above invention, as shown in FIG. 17, the Langevin vibrators 92 having the same shape are fixed to the left and right side surfaces and the lower surface of the vibrating body 91, and the vibrating piece 93 having an inclination is provided on the upper surface of the vibrating body 91. It is provided.

[0003]

However, in the ultrasonic transducer disclosed in Japanese Patent Publication No. 59-37673, three Langevin transducers 92 having the same shape are fixed to three surfaces, and each Langevin is provided. Oscillator 9
The longitudinal resonance of 2 is used to excite elliptical vibration. However, when the Langevin vibrator 92 is fixed to the vibrating body 91, the resonance frequency of the longitudinal vibration is determined by the length of the fixed Langevin vibrator 92. However, the resonance frequency is deviated, and the elliptical vibration cannot actually be excited at the root of the vibrating piece 93. For this reason, by tilting the vibrating piece 93, an ultrasonic oscillator is provided which causes a picking motion and vibrates in only one direction.

Therefore, the present invention was developed in view of the above-mentioned drawbacks in the prior art, and an object thereof is to provide an ultrasonic transducer and an ultrasonic actuator which are small in size, have a large output, and can excite reversible elliptical vibration. And

[0005]

An ultrasonic transducer according to the present invention is an ultrasonic transducer for generating elliptical vibration by coupling a plurality of Langevin transducers at right angles at antinode positions of longitudinal vibration. The ratio of the lengths of the Langevin oscillators of is an integer.

Further, a first vibrator comprising a plurality of piezoelectric elements arranged at node positions of longitudinal vibration and resonators arranged on both sides thereof, and a first vibration at an antinode position of the first vibrator. It is right-angled and bilaterally symmetrical with the child, and has a length twice that of the first oscillator,
A plurality of piezoelectric elements are provided at a plurality of longitudinal vibration node positions, respectively, and a second oscillator is formed by a resonator sandwiched between the piezoelectric elements and resonators arranged on both sides of the piezoelectric element. The phase of the high frequency voltage applied to the piezoelectric elements arranged in the adjacent nodes of the second vibrator is shifted by 180 degrees, and the phase of the high frequency voltage applied to the piezoelectric elements arranged in the first vibrator is shifted. Is the phase shifted by 90 degrees with respect to the high frequency voltage applied to the piezoelectric element arranged on the second oscillator.

Further, a first vibrator composed of a plurality of piezoelectric elements arranged at node positions of the primary longitudinal vibration and resonators arranged on both sides thereof, and a first vibrator at both end antinode positions of the first vibrator. It is right-angled and bilaterally symmetric with one oscillator, has a length twice that of the first oscillator, has a plurality of piezoelectric elements at a plurality of node positions of longitudinal vibration, and is sandwiched between the piezoelectric elements. And a pair of second vibrators each including a resonator arranged on both sides of the piezoelectric element, and applied to the piezoelectric elements arranged in adjacent nodes of the second vibrator. 180 degrees of high frequency voltage phase
The phase of the high frequency voltage applied to the piezoelectric element arranged on the first vibrator is shifted by 90 degrees with respect to the high frequency voltage applied to the piezoelectric element arranged on the second vibrator. is there.

Further, a first vibrator comprising a plurality of piezoelectric elements arranged at node positions of the primary longitudinal vibration and resonators arranged on both sides thereof, and a radial pattern at both end antinode positions of the first vibrator. At a right angle and a left-right symmetry with the first vibrator, having a length twice that of the first vibrator, and having a plurality of piezoelectric elements at a plurality of node positions of longitudinal vibration. A plurality of second vibrators composed of a sandwiched resonator and resonators arranged on both sides of the piezoelectric element, the piezoelectric element being arranged in a node adjacent to the second vibrator; The phase of the applied high-frequency voltage is shifted by 180 degrees, and the phase of the high-frequency voltage applied to the piezoelectric element arranged on the first vibrator is compared with the high-frequency voltage applied to the piezoelectric element arranged on the second vibrator. Phase 9
It is shifted by 0 degrees.

Further, a first oscillator including a resonator having a plurality of piezoelectric elements sandwiched between a plurality of nodes, and a second oscillator having the same shape as the first oscillator at the center antinode position of the first oscillator. The children are symmetrically arranged at right angles to the first oscillator.

Further, the amplitude enlarging mechanism is arranged integrally with the resonator on the elliptical vibration generating surface.

Further, the ultrasonic transducer is fixed near the node position of the first transducer by the fastening member having one end fixed to the fixed end, and the fastening member is not brought into contact with the resonator except at the fastening portion. A concave portion for forming is formed.

Further, a vibration insulating mechanism is provided at a fastening portion of the fastening member with the fixed end.

An ultrasonic actuator according to the present invention is an ultrasonic vibrator in which a sliding member is fixed to an elliptical vibration generating portion of the ultrasonic vibrator, and a driven member driven by elliptic vibration via the sliding member. And a pressing mechanism and a guide portion.

[0014]

In the present invention, the resonance frequency of the longitudinal vibrations in the two directions can be made to coincide by setting the length ratio of the Langevin vibrators arranged in the vertical and horizontal directions to an integral multiple, and the piezoelectric elements can be arranged at the node positions. The efficiency can be improved by arranging in. Further, the length of the second vibrator is twice the length of the first vibrator, and the second vibrator is arranged symmetrically with respect to the first vibrator, so that the vibration amplitude of the second vibrator is increased.

Further, by providing two second oscillators symmetrically at the amplitude antinode positions at both ends of the first oscillator, the second oscillator acts as the load mass of the first oscillator and the second oscillator is provided. Because there are two, stronger vibration can be obtained. Further, by arranging the second oscillator radially with respect to the first oscillator, elliptical vibration can be excited in any direction. Also, by arranging the first vibrator and the second vibrator in the same shape and at right angles, it is easy to match the resonance frequencies of the two vibrators,
Strong elliptical vibration can be excited stably.

Further, the vibration is insulated by fixing the vibrator only near the antinode position of the first vibrator. Further, by disposing the displacement magnifying mechanism integrally with the resonator on the ellipse generating surface of the vibrator, stronger elliptical vibration is obtained.
Further, by providing the vibration insulating member between the fastening member and the fixed end, the vibration is more reliably insulated.

Further, the driven member is pressed by the pressing mechanism to the elliptical vibration generation position due to the longitudinal vibration of the first vibrator and the second vibrator, whereby the ultrasonic actuator is obtained.

[0018]

Embodiment 1 FIGS. 1 and 2 show this embodiment, FIG. 1 is a longitudinal sectional view, and FIG. 2 is a graph showing the phase of a high frequency voltage. Reference numeral 1 denotes an ultrasonic oscillator, and this ultrasonic oscillator 1 is composed of a first oscillator 2 and a second oscillator 3. The first piezoelectric element 4 is arranged at the node position of the longitudinal resonance of the first vibrator 2. First piezoelectric element 4 formed by stacking a plurality of piezoelectric elements
Are the electrode plates (B) for the drive voltage when the contact surfaces of the GND electrode plate 5 and the electrode plate (G) 5 of the piezoelectric element are opposite to each other.
6 are laminated so as to be sandwiched between them, and both ends thereof are sandwiched by the resonators 7 and 8, and are integrally fixed by a fastening member 9.

Further, the resonator 7 is symmetrical to the longitudinal vibration of the second vibrator 3 at the tip antinode position of the first vibrator 2.
The resonator of the second oscillator 3 is formed by the protrusion 19 having the wavelength length and substantially equal to the total length L of the first oscillator 2. The second oscillator 3 has the first oscillator 2 at both ends of the resonator 7.
In the same arrangement as the piezoelectric element 4, the electrode plates 5 and 6, the piezoelectric elements 12 and 13, the GND electrode plate 14 and the drive voltage electrode (A).
15, (A ') 16 are resonators 17 arranged at both ends thereof.
Is integrally fixed to the resonator 7 by a fastening member 18. The total length of the second vibrator 3 is twice that of the first vibrator 2 (2L).

The length of the resonator 17 is determined to be an appropriate length such that the longitudinal resonance vibration of the second oscillator 3 is the secondary longitudinal vibration and the piezoelectric elements 12 and 13 are located at the node position of the vibration. There is. The material of the resonators 7, 8, 17 is aluminum with good vibration characteristics,
It is made of metal such as duralumin, stainless steel and brass.

The ultrasonic transducer 1 having the above-mentioned structure is applied with a high frequency voltage applied to the electrode (A) 15 of the piezoelectric element arranged in the adjacent node of the second transducer 3 by a high frequency power source (not shown). The phase is shifted by 180 degrees with respect to the high frequency voltage applied to the electrode (A ′) 16 and applied. By driving the second oscillator 3 at the secondary longitudinal resonance frequency of the second oscillator 3, a plurality of piezoelectric elements arranged in adjacent nodes of the second oscillator 3 cause the nodes to be separated from each other. The antinode position between them vibrates greatly in the longitudinal vibration direction of the second vibrator 3.

At this time, by shifting the high frequency voltage (B) applied to the piezoelectric element 4 of the first vibrator 2 by 90 degrees with respect to the above (A), the first vibrator 2 and the second vibrator 3 Elliptical vibration is excited at the intersection 21 of the. Then, the elliptical vibration direction is reversed by changing the phase of the high frequency voltage applied to (B) by 180 degrees.

According to the present embodiment, the Langevin oscillator which forms the resonance frequencies of the two longitudinal resonance vibrations at the same frequency is formed, and thereby the ultrasonic oscillator which synthesizes strong and efficient elliptical vibration is obtained.

In this embodiment, the phase of the high frequency voltage applied to the second vibrator is inverted by 180 degrees, but it is of course possible to invert the polarization direction of the piezoelectric element and drive them in the same phase. . In addition, when the vibrator has a plurality of nodes (such as the second vibrator in this embodiment), it is obvious that elliptic vibration is synthesized if there is at least one node sandwiching the piezoelectric element.

[0025]

[Embodiment 2] FIGS. 3 to 8 show the present embodiment, FIG. 3 is a partially sectional side view, FIG. 4 is a fragmentary sectional view showing a modified example, and FIGS. 5 and 6 show a driving state. Side view, FIG. 7 and FIG.
3 is a graph showing the phase of a high frequency voltage during driving. In this embodiment, the same components as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

The ultrasonic vibrator 23 of this embodiment is the resonator 8 of the first vibrator 2 of the ultrasonic vibrator 1 of the first embodiment.
On both sides of the third oscillator 22 having the same shape as the second oscillator 3.
Was arranged at the antinode position of the first oscillator 2 in parallel with the second oscillator 3. The fastening member 2 is attached to the resonator 26 of the third oscillator 22.
Holes 28 are provided with a gap so that the flange portion 25 of No. 4 does not come into contact with the resonator 26. As described above, the depth of the hole 28 is determined. The fastening member 24 has a small diameter portion 29, and is fixed to the fixing portion 33 with a bolt 32 by a female screw 31 provided at the end portion 30.

In the ultrasonic transducer 23 having the above structure, the driving high-frequency voltage applied to the piezoelectric element terminal on the left side of the upper second transducer 3 in FIG. When the high frequency voltage applied to the element is A ′, that of the first oscillator 2 is B, the left side of the third oscillator 22 is C, and the right side is C ′, the driving method as shown in FIG. Second, the third oscillators 3 and 22 excite vibrations that oscillate to the left and right with the center P of the ultrasonic oscillator 23 as a substantial rotation center, and at the same time, the first oscillator 2 excites longitudinal vibration.

As a result, elliptical vibration is excited at the intersection 21 of the vibrator. The phase of the voltage applied to the first oscillator 2 is 1
When reversing by 80 degrees, the direction of elliptical vibration is reversed. At this time, since the fastening member 24 fixes the first oscillator 2 in the vicinity of the center P of the first oscillator 2, vibration is hard to be transmitted to the fastening member 24, and there is a vibration insulating action. Further, when the driving method shown in FIG. 8 is adopted, vibration as shown in FIG. 6 is performed.

According to this embodiment, the second oscillator 3 and the third oscillator 22 having the same shape are attached in parallel to the antinode position of the first oscillator 2 and symmetrically with respect to the first oscillator 2. As a result, the vibration in the left-right direction increases. Reverse rotation At this time, since the fastening member 24 fixes the first oscillator 2 in the vicinity of the center P of the first oscillator 2, vibration is hard to be transmitted to the fastening member 24, and there is an action of vibration isolation. By providing the fastening member 24 with the small diameter portion 29, its effect is enhanced.

A modification of this embodiment is shown in FIG. A thin flange portion 34 is provided at the lower end of the small diameter portion 29 of the fastening member, and a cushioning material 35 and a washer 36 are sandwiched between the bolt 32 and the fixing portion 33. The material of the cushioning material 35 may be rubber, felt, plastic, a composite thereof, or the like, as long as it is the fixing member 33, the bolt 32, and a substance having a large acoustic impedance. A flange portion 34 is provided at the lower end of the small diameter portion 29 of the fastening member, and the bolt 3
By sandwiching the cushioning material 35 between the stationary member 33 and the fixed portion 33, the vibration isolation effect is further increased and the efficiency is increased.

[0031]

[Third Embodiment] FIGS. 9 and 10 show the present embodiment.
Is a perspective view, and FIG. 10 is an explanatory diagram of the operation. In the present embodiment, the same components as those in the above-mentioned respective embodiments are designated by the same reference numerals, and the description thereof will be omitted. In this embodiment, the second oscillator 3 is further provided in the same plane as the second oscillator 3 in the second embodiment and in a direction orthogonal to each other. In other words, the four second oscillators 3 are radially provided in the same plane at the antinode position of the first oscillator 2 at equal intervals (intervals of 90 degrees). Similarly, four third oscillators 22 in the second embodiment are also provided radially at the antinode position of the first oscillator 2.

The ultrasonic transducer 38 having the above structure is
When the longitudinal vibration axis of the first oscillator 2 is 43, the second oscillator 3 is 39, 40, and the third oscillator 22 is 41, 42, the axes of the respective oscillators are in the same plane. When the first, second, and third oscillators in 3 are driven by the method as in the second embodiment, elliptical vibration is excited in the plane. In a combination of oscillators with axes contained in planes other than this plane,
Elliptical vibration is excited in the plane.

Further, by exciting the oscillators of the plurality of surfaces at the same time with an appropriate phase difference, arbitrary elliptical vibration is excited in an arbitrary plane including the axis 43 of the first oscillator 2. You can Further, when only the plurality of second oscillators 3 on the same plane are driven with an appropriate phase difference, a vibration 44 that causes the entire vibration can be excited. When the second vibrators 3 are arranged with a shift of 90 degrees as in this embodiment, the phase of the drive frequency should be shifted by 90 degrees between the vibrators 3 that are positionally shifted by 90 degrees. As a result, as shown in FIG. 10, the contact vibration is excited.

According to this embodiment. In addition to the effect of the second embodiment, the direction of elliptical vibration can be excited in any direction.

[0035]

Fourth Embodiment FIGS. 11 to 13 show the present embodiment, and FIG.
FIG. 12 is a partial side view showing a modified example, and FIG. 12 and FIG. 13 are partial side views showing a modified example. In the present embodiment, the displacement magnifying mechanism is arranged integrally with the resonator on the elliptical vibration generating surface of the ultrasonic transducer. That is, the plane of the intersection 21 of the vertical vibrations of the ultrasonic transducer 23 in the second embodiment (this plane 21
Corresponds to the antinode position of the vertical vibration of the first vibrator 2. )above,
A horn 45 for expanding the amplitude is provided integrally with the resonator 7.

In this embodiment, by providing the displacement magnifying mechanism, the longitudinal vibration of the first vibrator 2 is magnified.

According to the present embodiment, the longitudinal vibration of the first vibrator is expanded to form a powerful ultrasonic vibrator.

The shape of the horn may be any shape as long as it expands the longitudinal vibration of the first vibrator 2, and a simple stepped horn 46 as shown in FIG.
The step horn 47 may be a step horn 47 as shown in FIG. 3, or a commonly used displacement magnifying horn.

[0039]

Fifth Embodiment FIG. 14 is a side view showing a part of the present embodiment in cross section. In this embodiment, a plurality of piezoelectric elements 63 are sandwiched at four ends of a cross-shaped resonator 62 having a symmetrical outer shape, and a resonator 64 is fixed by bolts 65. Fastening member 6
The fastening member 66 integrally fixes the resonator 64, the piezoelectric element 63, and the resonator 62 so that 6 does not come into contact with the central hole 67 of the resonator 62. A female screw for fixing and a thin flange portion 69 are provided at the other end of the fastening member 66, and are fixed by a bolt 70 arranged on the fixing portion 71. The length of each resonator is determined so that the piezoelectric elements 63 at the four positions come to the node position of the secondary longitudinal resonance vibration of each vibrator.

In this embodiment, two sets of Langevin oscillators arranged in a cross shape are driven at the same resonance frequency and with a phase difference of 90 degrees.

According to this embodiment, since the two Langevin vibrators have the same size and shape, the resonance frequency is unlikely to shift, and the elliptic vibrations can be easily synthesized.

[0042]

[Sixth Embodiment] FIGS. 15 and 16 show the present embodiment, FIG. 15 is a side view with a partial cross section, and FIG. 16 is a partial cross sectional view showing a modified example. The present embodiment is an example in which the ultrasonic actuator is configured by pressing the driven body against the elliptical vibration generating surface of the ultrasonic vibrator. In this embodiment, the ultrasonic transducer 23 of the second embodiment is used,
This ultrasonic oscillator 23 includes a third oscillator 22 having the same shape as the second oscillator 3 on both sides of the resonator 8 of the first oscillator 2 of the ultrasonic oscillator 1 in the first embodiment, and a second oscillator. It is arranged at the antinode position of the first oscillator 2 in parallel with the child 3.

The fastening member 2 is attached to the resonator 26 of the first vibrator.
Holes 28 are provided with a gap so that the flange portion 25 of No. 4 does not come into contact with the resonator 26, and the fastening by the flange portion 25 is performed in the vicinity of the node position of the vibrator 2 and an appropriate pressing force is applied to the piezoelectric element 4. As described above, the depth of the hole 28 is determined. The fastening member 24 has a small diameter portion 29, and is fixed to the fixing portion 33 with a bolt 32 by a female screw 31 provided at the end portion 30. A sliding plate 48 made of mullite is fixed to the elliptical vibration generating surface 21 by bonding the longitudinal vibrations of the first vibrator 2 and the second vibrator 3 by adhesion.

A guide 50 fixed to the fixed portion holds the guide rail 51 slidably in the x direction. The guide rail 51 is fixed to an arm 53 at an end portion 52 of the guide rail 51. The arm 53 is provided at its tip end 54 with a parallel plate spring 55 so that a driven body 56 can move a little in the y direction and x. The direction is firmly fixed. A sliding plate 57 made of HIP-treated zirconia is fixed to the driven body 56 via a cushioning material 58 made of silicon rubber. On the side opposite to the contact position 59 of the driven body 56 with the ultrasonic transducer 23, a pressing roller 61 is provided via a pressing spring 60 fixed to a fixed 49 as the driven body 56 moves in the x direction. , Is held rotatably and smoothly.

The ultrasonic actuator having the above-mentioned structure is driven by the elliptical vibration of the ultrasonic vibrator 23 to drive the driven body 56.
Are driven in the x direction. At this time, due to the leaf springs 55 arranged at both ends of the driven body 56, the driven body 56 can move in the y direction even when there is a deviation in parallelism between the driven body 56 and the guide rail 51. The parallel plate spring 55 does not affect the pressing conditions of the ultrasonic transducer 23 and the driven body 56. Further, the parallel plate spring 55 also has a vibration insulating function.

According to this embodiment, an ultrasonic linear actuator can be realized with a simple structure.

Although the present embodiment is constructed by using the ultrasonic transducer of the second embodiment, the present invention is not limited to this and can be realized by using all the ultrasonic transducers of the present invention. . Also, in the ultrasonic actuator of the present embodiment,
As shown in FIG. 16, the leaf spring 72 is fixed by the fixing portion 49 (or 50), and the pressing roller 61 is rotatably fixed to the tip of the leaf spring 72, and the bolt 7 arranged in the middle of the leaf spring 72.
By controlling the pressing force of the pressing roller 61 with 3, it is possible to easily adjust appropriate pressing conditions. Furthermore, the ultrasonic actuator of this configuration is not limited to the linear type, but by pressing the rotating body against the elliptical vibration generating section,
A rotary ultrasonic actuator can be realized.

[0048]

As described above, according to the ultrasonic oscillator and the ultrasonic actuator of the present invention, the longitudinal vibration of the ultrasonic oscillator can be combined to excite a strong reversible elliptic vibration. Thus, efficient driving can be performed.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing a first embodiment.

2 is a graph showing Example 1. FIG.

FIG. 3 is a side view showing a second embodiment.

FIG. 4 is a cross-sectional view of essential parts showing a modified example of the second embodiment.

FIG. 5 is a side view showing a driving state of the second embodiment.

FIG. 6 is a side view showing a driving state of the second embodiment.

FIG. 7 is a graph showing Example 2.

FIG. 8 is a graph showing Example 2.

FIG. 9 is a perspective view showing a third embodiment.

FIG. 10 is an explanatory diagram showing a third embodiment.

FIG. 11 is a side view showing a fourth embodiment.

FIG. 12 is a partial side view showing a modified example of the fourth embodiment.

FIG. 13 is a partial side view showing a modified example of the fourth embodiment.

FIG. 14 is a side view showing a fifth embodiment.

FIG. 15 is a side view showing a sixth embodiment.

FIG. 16 is a partial cross-sectional view showing a modified example of the sixth embodiment.

FIG. 17 is a side view showing a conventional example.

[Explanation of symbols]

 1 Ultrasonic transducer 2 1st transducer 3 2nd transducer 4, 12, 13 Piezoelectric element 7, 8, 17 Resonator 9, 18 Fastening member

Claims (9)

[Claims] 1. An ultrasonic transducer for generating elliptical vibration by coupling a plurality of Langevin transducers at an antinode position of longitudinal vibration at right angles, wherein the ratio of the length of each Langevin transducer is approximately an integer. Ultrasonic transducer characterized by becoming. 2. A first vibrator comprising a plurality of piezoelectric elements arranged at node positions of longitudinal vibration and resonators arranged on both sides thereof, and a first vibration at an antinode position of the first vibrator. A resonator that is orthogonal to the child and has a length that is twice as long as that of the first vibrator, has a plurality of piezoelectric elements at a plurality of node positions of longitudinal vibration, and is sandwiched between the piezoelectric elements. And a second vibrator composed of resonators arranged on both sides of the piezoelectric element, and the phase of the high-frequency voltage applied to the piezoelectric element arranged in the adjacent node of the second vibrator. By 180 degrees, and the phase of the high frequency voltage applied to the piezoelectric element arranged on the first vibrator is shifted by 90 degrees with respect to the high frequency voltage applied to the piezoelectric element arranged on the second vibrator. An ultrasonic transducer characterized in that. 3. A first vibrator comprising a plurality of piezoelectric elements arranged at node positions of primary longitudinal vibration and resonators arranged on both sides thereof, and a first vibrator at both end antinode positions. It is right-angled and bilaterally symmetric with one oscillator, has a length twice that of the first oscillator, has a plurality of piezoelectric elements at a plurality of node positions of longitudinal vibration, and is sandwiched between the piezoelectric elements. And a pair of second vibrators each including a resonator arranged on both sides of the piezoelectric element, and applied to the piezoelectric elements arranged in adjacent nodes of the second vibrator. The phase of the high frequency voltage is shifted by 180 degrees, and the phase of the high frequency voltage applied to the piezoelectric element arranged on the first vibrator is changed with respect to the phase of the high frequency voltage applied to the piezoelectric element arranged on the second vibrator. An ultrasonic transducer characterized by being shifted by 90 degrees. 4. A first vibrator comprising a plurality of piezoelectric elements arranged at node positions of the primary longitudinal vibration and resonators arranged on both sides thereof, and a radial pattern extending to both end antinode positions of the first vibrator. At a right angle and a left-right symmetry with the first vibrator, having a length twice that of the first vibrator, and having a plurality of piezoelectric elements at a plurality of node positions of longitudinal vibration. A plurality of second vibrators composed of a sandwiched resonator and resonators arranged on both sides of the piezoelectric element, the piezoelectric element being arranged in a node adjacent to the second vibrator; The phase of the applied high frequency voltage is 18
The phase of the high frequency voltage applied to the piezoelectric element arranged on the first vibrator is shifted by 0 degree, and the phase is shifted by 90 degrees with respect to the high frequency voltage applied to the piezoelectric element arranged on the second vibrator. Ultrasonic transducer characterized by. 5. A first vibrator comprising a resonator having a plurality of piezoelectric elements sandwiched between a plurality of nodes, and a second vibration having the same shape as the first vibrator at a center antinode position of the first vibrator. An ultrasonic transducer in which the children are symmetrically arranged at right angles to the first transducer. 6. An amplitude amplification mechanism is integrally arranged with a resonator on the elliptical vibration generating surface.
Alternatively, the ultrasonic transducer described in 5 above. 7. The ultrasonic vibrator is fixed near the node position of the first vibrator by a fastening member having one end fixed to a fixed end, and the resonator is not contacted with the fastening member except at the fastening portion. The ultrasonic transducer according to claim 1, 2, 3, 4, 5 or 6, characterized in that a concave portion for forming is formed. 8. The ultrasonic vibrator according to claim 7, wherein a vibration insulating mechanism is provided at a fastening portion of the fastening member with the fixed end of the fastening member. 9. The method of claim 1, 2, 3, 4, 5, 6 or 7.
From the ultrasonic oscillator in which the sliding member is fixed to the elliptical vibration generating portion of the ultrasonic oscillator described above, the driven member driven by the elliptical vibration through the sliding member, the pressing mechanism, and the guide portion. An ultrasonic actuator characterized by being configured.