JPH0615217A - Spin coater with movable plate - Google Patents

Abstract

PURPOSE:To obtain a spin coater which does not allow a coating agent to stick to the end rear of a work unnecessarily. CONSTITUTION:A disc 14 is arranged on the surrounding of a rectangular work table 11. In addition, each one piece of symmetric movable plates 15, 16 is arranged symmetrically on both external longer sides of the work table 11. Contact sides 17, 18 are formed on the work side of each movable plate. Next, each two guide pins 19 are provided on the lower surface of each movable plate, and are introduced slidably into the corresponding guide grooves 20a to 20d of the disc. A swollen part is formed at the tip of each guide pin 19. Each guide groove 20a to 20d is formed across an area from a position 20a for closing each guide pin to a position 20b for opening each guide pin. The mildly slant part 20d of each of guide grooves 20a to 20d forms an obtruse angle alpha as viewed from a direction G where a centrifugal force works on the gravitational center A of each movable plate. The upper surface of the movable plate is allowed to come in contact with or come closer to the upper surface of a work at a closed position by arranging both the upper surfaces so that they are almost at the same level.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention applies a surface coating agent such as photoresist to the surface of a work such as LCD.
This relates to the one in which the surface coating agent is prevented from adhering to the work end surface and the back surface.

[0002]

2. Description of the Related Art Conventionally, a spin coater is known as an apparatus for uniformly coating the surface of a work with a surface coating agent. This spin coater mounts the work to be processed on a rotary table, drops the surface coating on the surface of the work, then rotates the work together with the table, and the centrifugal force acts to make the surface coating uniform on the surface of the work. It is a device for applying to.

[0003]

Certainly, according to this type of apparatus, the surface of the work can be uniformly coated with the surface coating agent. However, this type of device has the following problems. First, FIG. 7 schematically shows a work 1 rotating on a conventional spin coater,
In particular, the work 1 in front of the rotation direction of the table 11
It is the enlarged view which looked at the state of an end face from the direction perpendicular to the direction of rotation. The spin coater is of a type in which the surface coating agent is sprayed from above the work 1.

That is, as shown in FIG. 7, the surface coating agent sprayed in the form of mist becomes droplets 2 and drops onto the entire surface of the work 1. At this time, when the spin coater rotates the work 1, the end surface 9 of the work 1, which is forward with respect to the rotation direction, cuts off the air flow and advances. For this reason, since the droplet 2 collides with the end surface 9, unnecessary droplet 6 is attached. Further, since fine turbulent air currents are generated above and below this end surface 9 that cuts the air flow 3, the droplet 2 also wraps around the back surface 10 of the work 1 and unnecessary droplets 7 are formed.
Attach as. In addition, in FIG. 7, the direction in which the droplet 2 is directed to the end surface 9 is indicated by a solid arrow.

On the other hand, there is also a spin coater of a type in which the surface coating agent is collectively dropped to the central portion of the work 1 to some extent. FIG. 8 schematically shows the work 1 rotating on this type of spin coater. In particular, the state of the end face of the work 1 in front of the rotation direction of the table 11 is shown in a direction perpendicular to the rotation direction. It is the enlarged view seen. That is, when the spin coater rotates the work 1, by the action of the centrifugal force generated by the rotation, the surplus surface coating 8 out of the surface coating 8 on the upper surface of the work 1 becomes droplets 2 from the outer peripheral portion of the work 1. Scatter around it.

At the same time, the rotating work 1 rotates against the air flow 3 which is about to stop due to inertial force. At this time, the vortex airflow 4 is generated immediately after the table 11 and the end surface of the work 1 which are rearward with respect to the rotation direction. In addition, in FIG. 8, the vortex airflow is shown by a dashed arrow. The vortex air flow 4 entrains the scattered droplets 2 to form a work end surface 9
And wrap it around the back 10 a lot. In particular, the surface coating agent 8 such as a photoresist often has a high viscosity, so that the surface tension thereof is more likely to cause wraparound.

As described above, this type of device has a drawback in that unnecessary droplets 6 and 7 adhere to the work end surface 9 and the back surface 10. As described above, the surface coating agent attached to the end surface or the back surface of the work should be coated only on the upper surface of the work, and since the adhesion is also irregular, the accuracy, performance and appearance of the work are deteriorated. There was a point. In particular, since the exposure position in the subsequent exposure step is displaced by the thickness of the coating film attached to the end face, the number of defective products increases. Further, if the surface coating agent is to be removed, an extra cleaning step is required, and this cleaning step causes a problem that the manufacturing cost and time of the work increases.

The present invention has been proposed to solve the above-mentioned problems of the prior art, and an object thereof is to provide a spin coater in which unnecessary adhesion of the surface coating agent to the end surface and the back surface of the work does not occur. To do.

[0009]

To achieve the above object, the present invention provides a rotary table having a support surface for a rectangular work, a driving means for the rotary table, and a surface coating agent applied to the surface of the work. In the spin coater including means, a movable plate mounted so as to be capable of opening and closing toward the work is disposed on the rotary table on the outer side of two opposite sides or four sides of the work. The plate is provided with a contact side that is in contact with or close to the end face of the work mounted on the rotary table in the closed position, and the contact side of each movable plate is at least half the length of the side of the work having the end face. And the upper surface of the movable plate is located at substantially the same height as the upper surface of the work.

According to a second aspect of the present invention, in the spin coater having the movable plate according to the first aspect, one movable plate is arranged on each of both outer sides of the two opposite sides of the rotary table, and each movable plate is movable. In the closed position of the plate, the contact side of the movable plate is in contact with at least a portion of the end surface of the work which is in front of the rotation direction when the work rotates.

According to a third aspect of the present invention, in the spin coater having the movable plate according to the first aspect, one movable plate is provided on each of two outer sides of the rotary table that face each other, and each movable plate is movable. In the closed position of the plate, the contact side of the movable plate comes into contact with at least a portion of the end face of the work which is rearward with respect to the rotation direction when the work is rotated.

According to a fourth aspect of the present invention, in the spin coater having the movable plate according to the first aspect, one movable plate is provided outside each of four sides of the rotary table, and each movable plate is closed. In the position, the contact side of the movable plate is
It is characterized in that it contacts all or part of the end surface of the work.

According to a fifth aspect of the present invention, in the spin coater having the movable plate according to the first or fourth aspect, one set or two sets of movable plates that are adjacent to each other at a right angle are integrally formed. .

According to a sixth aspect of the present invention, in the spin coater having the movable plate according to the first, second, third or fourth aspect, each movable plate is attached to the rotary table by a hinge, and the hinge is on the work side of the movable plate. , The movable plate is provided in parallel with the contact side of the movable plate, and the opening and closing movement of each movable plate is a rotation about a hinge. It is characterized in that the movable plates are in horizontal contact with each other and in the open position of each movable plate, the movable plate hangs vertically due to the action of gravity.

The invention of claim 7 is the invention of claims 1, 2, 3, 4
Alternatively, in the spin coater having the movable plate described in 5, the opening / closing movement of each movable plate is a slide in the horizontal direction.

According to an eighth aspect of the present invention, in the spin coater having the movable plate according to the first, second, third or fourth aspect, the opening / closing movement of each movable plate is vertical up / down movement.

The invention of claim 9 is the invention of claims 1, 2, 3,
In the spin coater having the movable plate described in 4, 5, or 7, a disk that is coaxial with the rotation axis of the rotary table is provided around the rotary table, and each movable plate is arranged on this disk. A plurality of guide pins are provided on the lower surface of the disk, guide grooves corresponding to these guide pins are formed in parallel with each other on the disk, and the guide pins are slidably inserted into the guide grooves. , An enlarged portion having a diameter larger than the width of each guide groove is formed at the tip of each guide pin, and each guide groove extends from each guide pin closed position at each movable plate closed position to each movable plate open position. Each guide groove formed at the guide pin open position and at each guide pin closed position has an obtuse angle when viewed from the direction of the centrifugal force acting on the center of gravity of each movable plate.

The invention of claim 10 is the invention of claims 1, 2, 3,
In the spin coater having the movable plate described in 4, 5, 6, 7, 8 or 9, the contact side of each movable plate is characterized in that the upper end of the end face projects toward the work side more than other parts of the end face. And

[0019]

The spin coater having the movable plate of the present invention having the above structure has the following functions. That is, when coating a work using the rotary table of the present invention, first, after mounting the work on the rotary table, the movable plate is placed in the closed position, and then a surface coating agent or the like is dropped on the surface of the work. The work is rotated together with the table with or while dropping.

At this time, since the movable plate is in contact with the end face of the work, the movable plate can prevent the surface coating agent from wrapping around and prevent the adhesion of the splash to the end face or the back face of the work. Further, since the upper surface of the movable plate is located slightly lower than the upper surface of the work, the surface coating agent does not flow back onto the surface of the work from the movable plate, so that the coating is not uneven. In the present specification, "substantially the same" means a height at which the surface coating agent can smoothly flow between the work surface and the movable plate, and preferably the same or the movable plate side has a height of 0.
It is about 1 to 0.5 mm lower, but on the contrary, it also includes the case where the work side is high, and depending on various factors such as the work standard, the type or property of the surface coating agent, the rotation speed of the table, etc. Including small and large elevation differences.

According to the second aspect of the present invention, since the movable plate is in contact with the front end surface of the work in the rotation direction, it is possible to prevent the droplets from adhering to the end surface or the back surface of the work due to a collision from the front. The present invention is suitable for a spin coater of the type in which a surface coating agent is sprayed in a mist form.

In the third aspect of the present invention, since the movable plate is in contact with the work end face rearward in the rotation direction, no vortex flow is generated immediately after the work end face. Further, the surplus surface coating agent scattered from the upper surface of the work is also blocked by the movable plate and does not wrap around to the end surface or the back surface of the work. For this reason, it is possible to prevent the splash from adhering to the end surface or the back surface of the work due to being caught from the rear. The present invention is suitable for a spin coater of the type in which the surface coating agent is collectively dropped to the central portion of the work.

According to the fourth aspect of the present invention, since the movable plate comes into contact with the four sides of the work, unnecessary splash adhesion can be prevented on all four sides of the work.

According to the fifth aspect of the invention, since the movable plates that are adjacent to each other at a right angle are integrally formed in an L shape, the number of members is reduced and the opening / closing mechanism is simplified.

According to the invention of claim 6, the opening and closing movement of the movable plate is
Since it is automatically performed by the action of centrifugal force during rotation, no special operation or mechanism for opening / closing is required.

According to the seventh aspect of the invention, since the opening / closing movement of the movable plate is a slide, no extra space is required above and below, and it is not necessary to adjust the height of the movable plate in the vertical direction.

In the invention described in claim 8, the opening / closing movement of each movable plate is vertical movement. Therefore, as compared with the case where the movable plate slides horizontally, the movable plate can be installed in a small area.

In the ninth aspect of the invention, each guide groove at each guide pin closed position is formed at an obtuse angle when viewed from the direction of the centrifugal force acting on the center of gravity of each movable plate. Therefore, the centrifugal force acting on each movable plate when the rotary table rotates rotates in the direction of closing each movable plate. Therefore, this spin coater does not require any special means for maintaining each movable plate in the closed position during rotation.

According to the tenth aspect of the present invention, since the upper end of the end face of the contact side projects toward the work more than the other part of the end face,
The adhesion of the contact side to the work end face is improved, and the surface coating agent is more reliably prevented from adhering to the work end face and the back surface.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A spin coater as an embodiment of the present invention will be specifically described below with reference to the drawings. In addition,
The same members as those of the related art are designated by the same reference numerals, and the description thereof will be omitted.

(1) Structure of the first embodiment ... FIGS. 1 to 4 The spin coater of this embodiment has a rotary table for processing a workpiece. Here, FIG. 1 is a plan view of the rotary table in this embodiment as seen from above. A work table 11 is arranged at the center of the rotary table, and a plurality of vacuum suction holes for fixing the work 1 are provided on the surface of the work table 11 although not shown. This rotary table has a rotary shaft 13 so that it rotates to the left.
Is mounted on.

A disk 14 coaxial with the rotary shaft 13 of the rotary table is arranged around the work table 11. On the outer sides of the work table 11, on the disk 14, movable plates 15 and 16 are arranged symmetrically with respect to each other.

The movable plates 15 and 16 are plate-shaped, and both end corners of the outer side of the disk 14 are cut off. Movable plates 15, 1
6 One side on the side of each work table 11 is a contact side 1 for contacting the end surface of the work 1 mounted on the work table 11.
It is 7,18.

The movable plates 15 and 16 are arranged parallel to one side of the work table 11. The movable plates 15 and 16 are
The contact sides 17 and 18 are mounted so as to be slidable in parallel between a closed position where the contact sides 17 and 18 contact the end surface of the work 1 and an open position where the contact sides 17 and 18 do not contact the work 1. In FIG. 1, the movable plates 15 and 16 are
The closed position is shown by a solid line, and the open position is shown by a broken line. Then, in the closed position, the contact sides 17 and 18 of the movable plate are
The end surface of the work 1 is in contact with a portion that is rearward with respect to the rotation direction when the work 1 rotates. Further, although there is a certain head difference between the disk 14 and the work 1 upper surface, since the movable plates 15 and 16 have a thickness close to this head, the upper surfaces of the movable plates 15 and 16 are in the closed position at this time. It will be positioned slightly lower than the upper surface.

On the other hand, in the open position, the movable plates 15, 1
Since 6 moves to the outer peripheral side of the disk 14, the contact side 1
7 and 18 are not in contact with the end surface of the work 1.

Near both ends of the lower surfaces of the movable plates 15 and 16,
Two guide pins 19 are provided for each, and
Guide grooves 20 corresponding to the guide pins 19 are provided in the disk 14 in parallel with each other. The guide pins 19 are slidably inserted in these guide grooves 20, and although not shown, each guide pin 19
At the tip of the, an enlarged portion 19 with a diameter larger than the width of each guide groove
a is formed. Therefore, the movable plates 15 and 16 are
It can be opened and closed by sliding toward the work 1, and will not fall off the disk 14 even if centrifugal force due to rotation acts.

The movable plates 15 and 16 are the guide pins 1
The guide grooves 20 attached via 9 are provided at the guide pin closed positions 20 at the closed positions of the movable plates 15 and 16.
It is formed from a to the guide pin open position 20b at the open position of the movable plates 15 and 16. Each guide groove 20 is composed of a steep slope portion 20c having a steep slope with respect to the side of the work 1 and a gentle slope portion 20d having a gentle slope. The guide pin closed position 20a has a gentle slope portion. It is located at the end of the work table 11 side of 20d. The gently inclined portion 20d is formed at an obtuse angle α when viewed from the direction G of the centrifugal force acting on the center of gravity A of the movable plates 15 and 16.

The disk 14 is adjacent to the work table 11, is covered by the movable plates 15 and 16 in the closed position, and
At a position not covered by the movable plates 15 and 16 in the open position,
An opening 21 for the work transfer claw is provided.

By the way, the concrete shapes of the movable plates 15 and 16 are as shown in FIGS. First, FIG. 3 shows the relationship between the movable plate and the work 1. The gap G between the edge of the work 1 and the tip of the movable plate is preferably 0 mm, but may be up to about 0.5 mm. Further, it is preferable that the height H of the surface of the work 1 is equal to the height H of the surface of the movable plate, but the movable plate side may be lowered by about 2.0 mm. In addition, the type of the coating material, the rotation speed of the spin coater, etc. may be higher on the movable plate side depending on the case. On the other hand, as shown in FIGS. 4A and 4B, the movable plate preferably has a tapered tip, and the thickness T of the movable plate is 1 depending on the thickness of the work. ~ 5
mm, the width W is 30 to 100 mm, and the height (t) of the cut portion is 0.5 to 0.
7 mm is desirable. Further, the taper angle is 45 to 3
It is desirable to use the one of about 0 degree.

(2) Operation and effect of the first embodiment The spin coater of this embodiment having the above-mentioned structure has the following operation. That is, when the work 1 is coated with the surface coating agent using the rotary table of the present embodiment, it is necessary to set the movable plates 15 and 16 to the open position and mount the work 1 on the work table 11. At this time, the opening 21 for the work transfer claw provided on the disk 14 is
Not covered by 16. For this reason, even when using a work transfer device that supports the lower part of the outer periphery of the work with a claw, the claw portion protruding to the lower part of the work can also enter the inside of the work transfer claw opening 21 and is not blocked by the disk 14. Therefore, the transfer of the work 1 onto the work table 11 by such a work transfer device is not hindered.

Next, after the movable plates 15 and 16 are slid along the guide groove 20 to the closed position, the surface coating agent is dropped and the table is rotated. Here, the movable plates 15 and 16 positioned slightly lower than and in contact with the end surface of the work 1 in front of the rotation direction prevent contact of the droplets on the end surface and the back surface of the work 1.

Further, each work transfer claw opening 21 is provided with the movable plates 15 and 16 in the closed position during the rotation of the rotary table.
Is covered with. Therefore, the airflow does not blow up from below through the work transfer claw opening 21 during rotation. Therefore, in the rotary table of the present embodiment, the scattered droplets 2 fall again on the work 12 surface by the air flow,
It has the advantage of not making the coating non-uniform.

Further, the gently inclined portion 20d of the guide groove 20
Is formed at an obtuse angle α when viewed from the direction G of the centrifugal force acting on the center of gravity A of the movable plates 15 and 16. Therefore, the centrifugal force acting on the movable plates 15 and 16 when the table rotates is
The movable plates 15 and 16 work in the closing direction. Therefore, the rotary table of the present embodiment has the advantage that no special means for maintaining the movable plates 15, 16 in the closed position during rotation is required.

In addition, each guide groove 20 has a steep slope 20.
It is composed of two stages, that is, c and the gently sloping portion 20d. For this reason, the moving distance in the contact side direction of the movable plates 15 and 16 between the open position and the closed position is smaller than in the case where the entire length of the guide groove 20 is the gentle inclined portion 20d having an obtuse angle with the centrifugal force direction G. Therefore, the rotary table in the spin coater of the present embodiment has an advantage that it can be formed on a disk having a small diameter together with the corner cutting of the movable plates 15 and 16.

(3) Second Embodiment FIG. 5 shows a second embodiment of the present invention, in which the movable plate is opened and closed by utilizing the centrifugal force of a spin coater. That is, the contact side of the movable plate is fixed to the rotary table with a hinge, and the movable plate hangs down due to gravity is defined as the open position, and the centrifugal force acts to rotate the movable plate to the horizontal position. Note that FIG. 5 is a cross-sectional view of the movable plate fixed by the hinges in contact with the work as seen from the long side direction of the work. The closed position of the movable plate is shown by a solid line and the open position is shown by a broken line.

(4) Third Embodiment FIG. 6 shows a third embodiment of the present invention, in which movable plates are provided on four sides of a work, and two adjacent movable plates are integrated into an L-shape. It was done. In this embodiment, by moving the movable plate in the diagonal direction of the work, the movable plates on the two sides of the work can be simultaneously opened and closed with respect to the work, and the four sides come into contact with the movable plate. The coating agent does not wrap around on any side.

(5) Other Embodiments The present invention is not limited to the above embodiments, and the specific shapes, mounting positions, mounting structures, etc. of the respective members can be appropriately changed. And other examples. That is, the shapes of the work and the table are not limited to the rectangle, and the present invention can be applied to a work having a square or other shapes. The rotation direction of the turntable is not limited to the left, and may be right. However, in this case, the position of the long side end surface of the work 1 that is forward with respect to the rotation direction is opposite to that in the first embodiment. Therefore, the work table 11, the disk 14, and the movable plates 15 and 16
In either case, it is necessary to have a configuration line-symmetrical to that of the first embodiment.

The means for opening and closing each movable plate may be manually operated or mechanically operated by an actuator or the like. When an actuator is used, the actuator may be provided on the rotary table or may be provided integrally with the work transfer means. Opening / closing movement of each movable plate is not limited to sliding, and may be vertical movement by an actuator or the like.

The shape of each guide groove is not limited to the two stages of the steep slope 20c and the gentle slope 20d, and may be only the gentle slope having an obtuse angle with the centrifugal force direction G. However, in this case, since the moving distance of each movable plate 15 and 16 increases in the long side direction of the workpiece 1, it is necessary to provide the disk 14 having a sufficient diameter.

Since the movable plate sandwiches the work from both sides, there is an effect of position correction, but in this case, it is necessary to take measures to prevent damage to the back surface of the work due to friction with the work table.

[0051]

As described above, according to the spin coater having the movable plate of the present invention, it is possible to effectively prevent the surface coating agent from adhering to the end surface and the back surface of the work. Therefore, according to the present invention, the accuracy, performance and appearance of the work can be improved. Further, according to the present invention, a cleaning step of using a chemical that is somewhat harmful to a human body to remove an unnecessary surface coating agent is unnecessary, so that it is possible to reduce a burden for manufacturing a work.

[Brief description of drawings]

FIG. 1 is a plan view of a rotary table in a spin coater according to an embodiment of the present invention as seen from above.

FIG. 2 is a cross-sectional view of a state where each movable plate in a closed position is in contact with an end face of a long side of a work in the same table, as viewed from the long side direction thereof.

FIG. 3 is an enlarged view showing a positional relationship between a movable plate and a work according to the present invention.

FIG. 4 is an enlarged view showing an example of a movable plate used in the present invention.

FIG. 5 shows a second embodiment of the present invention and is a cross-sectional view of a state in which a movable plate fixed by a hinge comes into contact with a work, as seen from the long side direction of the work.

FIG. 6 is a plan view showing a third embodiment of the present invention.

FIG. 7 schematically shows a work rotating on a conventional spin coater, and in particular, an enlargement of the state of the work end face in front of the rotation direction of the table when viewed from a direction perpendicular to the rotation direction. Fig.

FIG. 8 is a schematic view of a work rotating on a spin coater according to a conventional technique, and in particular, an enlargement of a state of a work end face rearward with respect to a rotation direction of a table when viewed from a direction perpendicular to the rotation direction. Fig.

[Explanation of symbols]

 1 ... Work 2,6,7 ... Splash 3 ... Air flow 4 ... Vortex air flow 8 ... Surface coating 9 ... Work end surface 10 ... Work back surface 11 ... Work table 13 ... Rotating shaft 14 ... Disc 15,15 ... Movable plate 17, 18 ... Contact side 19 ... Guide pin 20 ... Guide groove 21 ... Work transfer claw opening 22 ... Hinges

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Akinori Iso, 1000 Kasama-cho, Sakae-ku, Yokohama-shi, Kanagawa Shibaura Manufacturing Co., Ltd. Ofuna Plant

Claims (10)

[Claims] 1. A spin coater comprising a rotary table having a support surface for a rectangular work, a drive means for the rotary table, and a means for applying a surface coating agent to the surface of the work, the rotary table comprising: Two opposite sides of work or four
Movable plates mounted so as to be able to open and close toward the workpiece are disposed outside the sides, and each movable plate comes into contact with or comes close to the end surface of the workpiece mounted on the rotary table in the closed position. A contact side is provided, the contact side of each movable plate has a length of at least half or more of the side of the work having the end face, and the movable plate upper surface is positioned at substantially the same height as the work upper surface. A spin coater having a movable plate. 2. One movable plate is disposed on each of both outer sides of the two opposite sides of the rotary table, and in the closed position of each movable plate, the contact side of the movable plate is a workpiece. 2. The spin coater having a movable plate according to claim 1, wherein at least a portion of the end surface that is in front of the rotation direction when the work rotates is in contact with the spin coater. 3. One movable plate is disposed on each of both outer sides of the rotary table facing each other, and at the closed position of each movable plate, the contact side of the movable plate is a 2. The spin coater having a movable plate according to claim 1, wherein at least a portion of the end face that is rearward with respect to the rotation direction when the work rotates is in contact. 4. One movable plate is disposed outside each of the four sides of the rotary table, and in the closed position of each movable plate, the contact side of the movable plate is the entire edge surface of the workpiece. A spin coater having a movable plate according to claim 1, wherein the spin coater contacts a part of the spin coater. 5. The spin coater having a movable plate according to claim 1, wherein one set or two sets of movable plates that are adjacent to each other at a right angle are integrally formed in an L-shape. 6. Each movable plate is attached to a rotary table by a hinge, the hinge is provided on the work side of the movable plate in parallel with the contact side of the movable plate, and the opening and closing movement of each movable plate is centered on the hinge. At the closed position of each movable plate, the movable plate makes horizontal contact with the work by the action of centrifugal force due to the rotation, and at the open position of each movable plate, the movable plate becomes vertically by the action of gravity. 4. A pendant, which is hung down.
Alternatively, a spin coater having the movable plate described in 4. 7. The opening / closing movement of each movable plate is a slide in a horizontal direction, 1, 2, 3, 4 or 5.
A spin coater having the movable plate described. 8. A spin coater having a movable plate according to claim 1, 2, 3 or 4, wherein the opening and closing movement of each movable plate is vertical up and down movement. 9. A disk which is coaxial with the rotary shaft of the rotary table is provided around the rotary table, each movable plate is disposed on the disk, and a plurality of guide pins are provided on the lower surface of each movable plate. Guide grooves corresponding to these guide pins are formed in parallel with each other on the disc, the guide pins are slidably inserted into the guide grooves, and the guide pins are provided at the tip of each guide pin. An enlarged portion having a diameter larger than the width of the groove is formed, and each guide groove is formed from each guide pin closed position in the closed position of each movable plate to each guide pin open position in the open position of each movable plate, The movable guide according to claim 1, 2, 3, 4, 5 or 7, wherein each guide groove at each guide pin closed position is formed at an obtuse angle when viewed from a direction of a centrifugal force acting on the center of gravity of each movable plate. Spin coater with a plate. 10. The contact side of each of the movable plates has an end face inclined so that an upper end of the end face thereof projects toward the work side more than other portions of the end face.
A spin coater having a movable plate according to 2, 3, 4, 5, 6, 7, 8 or 9.