JPH06148011A - Piezoelectric vibration sensor - Google Patents
Piezoelectric vibration sensorInfo
- Publication number
- JPH06148011A JPH06148011A JP4293461A JP29346192A JPH06148011A JP H06148011 A JPH06148011 A JP H06148011A JP 4293461 A JP4293461 A JP 4293461A JP 29346192 A JP29346192 A JP 29346192A JP H06148011 A JPH06148011 A JP H06148011A
- Authority
- JP
- Japan
- Prior art keywords
- package
- load body
- sensor
- side electrode
- detecting section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003825 pressing Methods 0.000 claims abstract description 6
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 20
- 239000000853 adhesive Substances 0.000 abstract description 10
- 230000001070 adhesive effect Effects 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000032798 delamination Effects 0.000 abstract description 4
- 230000006866 deterioration Effects 0.000 abstract description 3
- 230000005489 elastic deformation Effects 0.000 abstract 1
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000004299 exfoliation Methods 0.000 abstract 1
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 230000007774 longterm Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000010951 brass Substances 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- FCYVWWWTHPPJII-UHFFFAOYSA-N 2-methylidenepropanedinitrile Chemical compound N#CC(=C)C#N FCYVWWWTHPPJII-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229920006163 vinyl copolymer Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、圧電型振動センサに関
し、特に高温条件下でも極めて優れた耐久性を有し、な
おかつ量産に適した圧電型振動センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibration sensor, and more particularly to a piezoelectric vibration sensor which has extremely excellent durability even under high temperature conditions and is suitable for mass production.
【０００２】[0002]
【従来の技術】従来、被測定物体の振動を測定する圧電
型振動センサとしては、片持ち梁型、ダイアフラム型、
圧縮型、せん断型等種々の形式のものが知られている
が、信頼性が高く、小型化が可能である圧縮型が多く使
用されている。この圧縮型の圧電型振動センサは、台
座、台座側電極、圧電体、荷重体側電極、及び荷重体を
順次積層した積層体からなり、その台座の下面を被測定
物体に剛に取り付けて使用されるものである。被測定物
体に振動が発生すると、その振動がセンサに伝達され
る。すると、台座側は被測定物体とともに振動するが、
荷重体側には慣性力による遅れが生ずる。したがって、
圧電体に振動加速度に比例した圧縮、あるいは引っ張り
応力が発生し、その応力に比例した電荷あるいは電圧
が、圧電体の両面に発生する。よって、圧電体両側に配
設された前記２枚の電極から取り出した電気出力を測定
することによって被測定物体の振動の大きさを検知する
ことができるのである。2. Description of the Related Art Conventionally, as a piezoelectric vibration sensor for measuring the vibration of an object to be measured, a cantilever type, a diaphragm type,
Various types such as a compression type and a shearing type are known, but a compression type that is highly reliable and can be downsized is often used. This compression type piezoelectric vibration sensor is composed of a pedestal, a pedestal side electrode, a piezoelectric body, a load body side electrode and a load body which are sequentially laminated, and the lower surface of the pedestal is rigidly attached to an object to be measured for use. It is something. When vibration occurs in the measured object, the vibration is transmitted to the sensor. Then, the pedestal side vibrates with the measured object,
A delay occurs due to inertial force on the load side. Therefore,
A compressive or tensile stress is generated in the piezoelectric body in proportion to the vibration acceleration, and an electric charge or voltage in proportion to the stress is generated on both sides of the piezoelectric body. Therefore, the magnitude of vibration of the object to be measured can be detected by measuring the electrical output taken out from the two electrodes arranged on both sides of the piezoelectric body.
【０００３】この振動センサの用途は、工場における回
転体の異常振動の検知や、自動車の姿勢制御等であり、
センサは常時設置された状態にあり、高温などの過酷な
条件下で使用されることが多い。しかも、そのような過
酷な条件にもかかわらず、センサは長期にわたって劣化
せず、センサ交換のためのコストを極力削減することが
要求される。The purpose of this vibration sensor is to detect abnormal vibration of a rotating body in a factory, to control the attitude of an automobile, etc.
The sensor is always installed and is often used under severe conditions such as high temperature. Moreover, despite such severe conditions, the sensor does not deteriorate for a long period of time, and it is required to reduce the cost for sensor replacement as much as possible.
【０００４】この振動センサの劣化の主な原因は、上記
積層体の層間剥離であると考えられている。例えば、台
座と台座側電極間、圧電体と両電極間、あるいは荷重体
側電極と荷重体間のいずれかで剥離が生じた場合には、
その剥離部分で振動が伝達されず、圧電体両側に応力変
化が発生しなくなるのである。高温下で常に振動を受け
続けるという過酷な使用条件では、そのような層間剥離
が起こり易く、センサの劣化を引き起こしている。従来
の圧電型振動センサでは、上記積層体の層間接合を確実
にするために、上記各層を貫通する穴を設け、その穴を
通して台座にネジ止めするという方法が取られていた。
しかし、その台座にネジ止めする方法は、各層間の接合
は確実に保たれるものの、振動センサを作製するために
多くの手間がかかり、量産には適していない。It is considered that the main cause of the deterioration of the vibration sensor is delamination of the laminate. For example, if peeling occurs between the pedestal and the pedestal side electrode, between the piezoelectric body and both electrodes, or between the load body side electrode and the load body,
Vibration is not transmitted at the peeled portion, and stress change does not occur on both sides of the piezoelectric body. Under severe operating conditions in which it is constantly subjected to vibrations at high temperatures, such delamination easily occurs, causing deterioration of the sensor. In the conventional piezoelectric vibration sensor, in order to ensure the interlayer bonding of the laminate, a method of providing a hole penetrating each of the layers and screwing it to a pedestal through the hole has been adopted.
However, the method of screwing to the pedestal is not suitable for mass production because it takes a lot of time and labor to manufacture the vibration sensor, although the bonding between the layers is surely maintained.
【０００５】そこで、上記積層体の層間接合を確実に
し、なおかつ量産に適したセンサとして、次のようなも
のが知られている。それは、圧電体シートの両側に電極
を接着し、場合によりその両面に支持板を接着して積層
シートとし、この積層シートをダイシング・ソー等の切
断手段によってチップ状に切断することにより、センサ
検知部を一括製造したものである。このようなセンサで
は、各層間は接着剤で確実に接合されており、なおかつ
量産性にも優れたものとなっている。Therefore, the following sensor is known as a sensor that ensures interlayer bonding of the above-mentioned laminated body and is suitable for mass production. Electrodes are bonded to both sides of the piezoelectric sheet, and in some cases support plates are bonded to both sides to form a laminated sheet, and this laminated sheet is cut into chips by a cutting means such as a dicing saw. The parts are manufactured collectively. In such a sensor, the layers are securely bonded with an adhesive, and the mass productivity is excellent.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、上記各
層を接着する方法では、通常の使用条件では問題ないも
のの、例えば９０℃以上で長期間連続使用した場合には
各接着層で剥離が生じ、検知部が分解するおそれがあっ
た。よって、本発明の目的は、量産化が可能であり、な
おかつ高温での耐久性に極めて優れた圧電型振動センサ
を提供することにある。However, in the method of adhering each of the above layers, although there is no problem under normal use conditions, for example, when continuously used at 90 ° C. or more for a long period of time, peeling occurs in each adhesive layer and detection is performed. There was a risk that the parts would disassemble. Therefore, it is an object of the present invention to provide a piezoelectric vibration sensor that can be mass-produced and that has excellent durability at high temperatures.
【０００７】[0007]
【課題を解決するための手段】上記課題を解決するため
に、本発明の圧電型振動センサは、台座に台座側電極と
圧電体と荷重体側電極と荷重体を順次積層した積層体か
らなる検知部と、この検知部を内部に収納するパッケー
ジと、このパッケージと前記検知部との間に配設され、
前記検知部の積層体を押圧する方向の付勢力を有する弾
性体からなることを特徴としている。In order to solve the above-mentioned problems, a piezoelectric vibration sensor of the present invention comprises a pedestal having a pedestal side electrode, a piezoelectric body, a load body side electrode, and a load body which are sequentially laminated. A part, a package that houses the detection part therein, and a package that is disposed between the package and the detection part.
It is characterized by being made of an elastic body having an urging force in a direction of pressing the laminated body of the detection unit.
【０００８】以下に、本発明の圧電型振動センサについ
て詳細に説明する。図１は本発明の圧電型振動センサの
一実施例を示す図である。図中１は検知部であり、中空
の直方体状であるパッケージ２内部に収納され、その検
知部１上面とパッケージ２の上面２ｂとの間に弾性体３
が挟まれて設けられている。The piezoelectric vibration sensor of the present invention will be described in detail below. FIG. 1 is a diagram showing an embodiment of a piezoelectric vibration sensor of the present invention. In the figure, reference numeral 1 denotes a detector, which is housed inside a package 2 having a hollow rectangular parallelepiped shape, and an elastic body 3 is provided between the upper surface of the detector 1 and the upper surface 2b of the package 2.
Are sandwiched between.
【０００９】検知部１は、平板状のアルミブロックであ
る台座４、台座側電極５、圧電体６、荷重体側電極７、
及び所定の質量を有する真ちゅうブロックである荷重体
８を順次積層させて構成されており、それら各層間は接
着剤９により接着されている。 また、その検知部１
は、台座４の下面とパッケージの底面２ａとが密着する
ようにパッケージ２内に収納されており、その密着面に
おいて、台座４とパッケージ２が接着剤９により接着さ
れている。The detecting portion 1 is a pedestal 4 which is a flat aluminum block, a pedestal side electrode 5, a piezoelectric body 6, a load body side electrode 7,
And a load body 8 which is a brass block having a predetermined mass are sequentially laminated, and the respective layers are adhered by an adhesive agent 9. In addition, the detection unit 1
Is accommodated in the package 2 such that the lower surface of the pedestal 4 and the bottom surface 2a of the package are in close contact with each other, and the pedestal 4 and the package 2 are adhered to each other by the adhesive 9 at the intimate contact surface.
【００１０】また、そのように配設された検知部１の上
端の荷重体８上面と、パッケージ２の上面２ｂとの間に
は、弾性体３が上下に圧縮された状態で挟まれて設けら
れている。さらに、パッケージ２の上面２ｂの、弾性体
３が当接する部分の周囲には、円環状の突起２ｃが形成
されており、弾性体３のズレを防止している。ここで、
弾性体３が圧縮された状態とは、弾性体３が弾性による
付勢力を発生する状態にあることを意味している。例え
ば、この弾性体３がバネである場合、バネに何も力が作
用していないときのバネの長さをｌ1、バネが弾性を示
す最小の長さをｌ0とすると、圧縮された状態のバネの
長さｌは、ｌ0＜ｌ＜ｌ1の範囲にある。前記荷重体８の
上面とパッケージ２の上面２ｂとの間隔は、この範囲に
なるよう設定されている。ここで、パッケージ２及び荷
重体８は、ステンレスや真ちゅう等の剛体で形成されて
いるため弾性による変形はなく、従って、前記圧縮され
た弾性体３の付勢力によって、パッケージ２の上面２ｂ
は上方に、荷重体８は下方に応力を受け、検知部１の積
層体は、上下から押圧された状態に保たれている。Further, the elastic body 3 is vertically sandwiched between the upper surface of the load body 8 at the upper end of the detecting portion 1 and the upper surface 2b of the package 2 in a vertically compressed state. Has been. Further, an annular protrusion 2c is formed around the portion of the upper surface 2b of the package 2 where the elastic body 3 abuts, so that the elastic body 3 is prevented from being displaced. here,
The state in which the elastic body 3 is compressed means that the elastic body 3 is in a state of generating a biasing force due to elasticity. For example, when the elastic body 3 is a spring, if the length of the spring when no force is applied to the spring is l 1 and the minimum length of elasticity of the spring is l 0 , it is compressed. The length l of the spring in the state is in the range of l 0 <l <l 1 . The distance between the upper surface of the load body 8 and the upper surface 2b of the package 2 is set within this range. Here, since the package 2 and the load body 8 are formed of a rigid body such as stainless steel or brass, they are not deformed by elasticity, and thus the upper surface 2b of the package 2 is urged by the urging force of the compressed elastic body 3.
Is applied to the upper part and the load body 8 is applied to the lower part, and the stacked body of the detection unit 1 is kept pressed from above and below.
【００１１】なお、図示しないが、パッケージ２内部に
は、インピーダンス変換回路が設けられており、そのイ
ンピーダンス変換回路に前記台座側電極５及び荷重体側
電極７が接続されている。また、そのインピーダンス変
換回路には、低インピーダンス化された出力を外部に取
り出すためのケーブルが設けられ、そのケーブルは、パ
ッケージ２の側面を貫通して外部まで延設されている。Although not shown, an impedance conversion circuit is provided inside the package 2, and the pedestal side electrode 5 and the load body side electrode 7 are connected to the impedance conversion circuit. Further, the impedance conversion circuit is provided with a cable for taking out the output having the lowered impedance to the outside, and the cable penetrates the side surface of the package 2 and extends to the outside.
【００１２】この圧電型振動センサは、前記パッケージ
２底面を被測定物体１０に密着させるようにして、ネジ
止め等の方法により被測定物体１０に剛に取り付けられ
る。そして、センサから延設されたケーブルを測定装置
に接続し、被測定物体１０の振動加速度に応じて発生す
る電荷量あるいは電圧変動を測定することにより被測定
物体の振動の大きさを検知する。The piezoelectric vibration sensor is rigidly attached to the object to be measured 10 by screwing or the like so that the bottom surface of the package 2 is brought into close contact with the object to be measured 10. Then, the cable extending from the sensor is connected to the measuring device, and the magnitude of the vibration of the measured object is detected by measuring the amount of charge or the voltage fluctuation generated according to the vibration acceleration of the measured object 10.
【００１３】このような圧電型振動センサによれば、検
知部の積層体を、荷重体とパッケージの間に挟まれた弾
性体の付勢力で上下から押圧しているため、各層間の接
着剤が剥離しても積層体自体が分離することはなく、た
とえ高温下での連続使用といった過酷な条件下でも、長
期にわたって劣化することがない。According to such a piezoelectric vibration sensor, since the laminated body of the detection portion is pressed from above and below by the urging force of the elastic body sandwiched between the load body and the package, the adhesive between the layers Even if peeled off, the laminate itself does not separate, and does not deteriorate over a long period of time even under severe conditions such as continuous use at high temperature.
【００１４】また、このような圧電型振動センサによれ
ば、その実装工程が、作製した検知部をパッケージ内に
接着した後、バネのような弾性体をその検知部とパッケ
ージの間に配設するだけの極めて簡単な工程で済むた
め、従来のネジ止めに比較して作業効率が向上し、量産
に適したものとなる。Further, according to such a piezoelectric type vibration sensor, in the mounting step, after the manufactured detecting portion is bonded inside the package, an elastic body such as a spring is arranged between the detecting portion and the package. Since it is a very simple process that requires only the operation, the work efficiency is improved as compared with the conventional screw fastening, and it becomes suitable for mass production.
【００１５】上記説明では、本発明の一実施例について
述べたが、本発明の圧電型振動センサの形状、材料は、
これに限られるものではない。本発明の圧電型振動セン
サ検知部に用いられる圧電体は、チタン酸ジルコン酸鉛
（ＰＺＴ）、チタン酸鉛（ＰＴ）等のセラミック圧電体
や、ポリフッ化ビニリデン（ＰＶＤＦ）、シアン化ビニ
リデン・酢酸ビニル共重合体、ナイロン７、ナイロン１
１等のプラスチック圧電体、あるいはそれらの混合物を
使用することができる。In the above description, one embodiment of the present invention has been described, but the shape and material of the piezoelectric vibration sensor of the present invention are as follows.
It is not limited to this. The piezoelectric body used in the piezoelectric vibration sensor detection unit of the present invention is a ceramic piezoelectric body such as lead zirconate titanate (PZT) or lead titanate (PT), polyvinylidene fluoride (PVDF), vinylidene cyanide / acetic acid. Vinyl copolymer, nylon 7, nylon 1
It is possible to use a plastic piezoelectric substance such as No. 1 or a mixture thereof.
【００１６】台座は、上述のアルミブロック等の金属材
料や、プラスチック材料等、種々のものが用いられる
が、被測定物体の振動を効率良く伝達するために、剛体
を用いるのが好ましい。また、荷重体は、所定の質量を
有するものならば、いかなる材質のものでも良いが、セ
ンサ全体の小型化を考慮すると、比重の大きな材料を選
び、同じ重量でも体積が小さくなるようにするのが好ま
しい。As the pedestal, various materials such as the above-mentioned metal materials such as the aluminum block and plastic materials are used, but it is preferable to use a rigid body in order to efficiently transmit the vibration of the object to be measured. Further, the load body may be made of any material as long as it has a predetermined mass, but in consideration of downsizing of the whole sensor, a material having a large specific gravity is selected so that the volume is small even with the same weight. Is preferred.
【００１７】また、上記圧電体と電極間、電極と台座あ
るいは荷重体間、台座とパッケージ間を接着する接着剤
は、それら各層間を確実に接着できるものならば、いか
なる材質でも良いが、振動を伝達する媒体になることを
考慮すると、硬化後の粘弾性が小さい接着剤を用いるの
が好ましい。ただし、圧電体と電極間を接着する接着剤
は、圧電体に発生した出力を伝えるため、導電性を付与
したものが好ましい。The adhesive for adhering the piezoelectric body and the electrode, the electrode and the pedestal or the load body, and the pedestal and the package may be made of any material as long as it can reliably adhere the layers. Considering that it becomes a medium for transmitting, it is preferable to use an adhesive having a small viscoelasticity after curing. However, it is preferable that the adhesive that bonds the piezoelectric body and the electrode to impart electrical conductivity to impart an output generated in the piezoelectric body.
【００１８】パッケージは、ステンレス等の金属材料か
らなるものでも良いし、プラスチック材料でも良いが、
外乱ノイズの影響をなくすために、電磁シールドされた
ものを用いるのが好ましい。弾性体は、上記説明のよう
な、つるまきバネ、あるいは板バネ等のバネ弾性を有す
るものでも良いが、前記パッケージ中に収納され、検知
部の積層体を押圧する目的が達成されれば、その材料、
形状は特に限定されない。例えば、ゴム弾性を有する弾
性体を圧縮した状態で配設しても良い。The package may be made of a metal material such as stainless steel or a plastic material,
In order to eliminate the influence of disturbance noise, it is preferable to use an electromagnetic shield. The elastic body may be one having spring elasticity such as a spiral spring or a leaf spring as described above, but if the object to be housed in the package and to press the laminated body of the detection unit is achieved, Its material,
The shape is not particularly limited. For example, an elastic body having rubber elasticity may be arranged in a compressed state.
【００１９】また、上記説明では、パッケージ内にイン
ピーダンス変換回路を収納したが、それだけにとどまら
ず、例えば増幅回路も組み込んで、センサ出力を向上さ
せても良い。また、それらの回路を形成した基板を、上
記台座として使用し、センサ全体の小型化を図っても良
い。Further, in the above description, the impedance conversion circuit is housed in the package, but the present invention is not limited to this. For example, an amplifier circuit may be incorporated to improve the sensor output. Further, the substrate on which those circuits are formed may be used as the pedestal to reduce the size of the entire sensor.
【００２０】以下に、具体例を挙げて本発明の圧電型振
動センサを説明する。 （実施例１〜３）大きさ５０ｍｍ×５０ｍｍで、厚さ
０．５ｍｍであるＰＺＴシートを用意し、その上下両面
に、３種のエポキシ接着剤を用いて、厚さ３０μｍの銅
箔を接着して３層積層体シートを３種類作製した。各々
のシートを１０ｍｍ×１０ｍｍの大きさに切断し、両面
を銅箔に挟まれた圧電体からなるセンサチップとした。
それらセンサチップの一方の銅箔を台座側電極とし、他
方の銅箔を荷重体側電極として、台座側電極に３０ｍｍ
×３０ｍｍ×２０ｍｍのアルミブロックを接着し台座と
した。また、荷重体側電極に６ｍｍ×６ｍｍ×３ｍｍの
大きさで質量１ｇの真ちゅうブロックを接着して荷重体
とした。この５層積層体を検知部とする。検知部の前記
２つの電極をインピーダンス変換回路に接続した。４０
ｍｍ×４０ｍｍ×４０ｍｍの大きさで、上面の開口した
ステンレス製のパッケージに、前記検知部とインピーダ
ンス変換回路を収納した。その際、検知部の台座の下面
をパッケージの底面に密着するように接着した。次に、
パッケージ中の検知部の荷重体上面にバネを置き、その
バネが圧縮されるようにステンレス板をパッケージの上
面に固定して開口部を塞ぎ、振動センサを完成した。The piezoelectric vibration sensor of the present invention will be described below with reference to specific examples. (Examples 1 to 3) A PZT sheet having a size of 50 mm × 50 mm and a thickness of 0.5 mm is prepared, and a copper foil having a thickness of 30 μm is bonded to the upper and lower surfaces thereof by using three kinds of epoxy adhesives. Then, three types of three-layer laminate sheets were produced. Each sheet was cut into a size of 10 mm × 10 mm to form a sensor chip composed of a piezoelectric body sandwiched between copper foils.
One copper foil of those sensor chips was used as the pedestal side electrode, the other copper foil was used as the load body side electrode, and the pedestal side electrode was 30 mm.
An aluminum block of × 30 mm × 20 mm was adhered to form a pedestal. Further, a brass block having a size of 6 mm × 6 mm × 3 mm and a mass of 1 g was adhered to the load body side electrode to form a load body. This 5-layer laminated body is used as a detection unit. The two electrodes of the detector were connected to an impedance conversion circuit. 40
The detection unit and the impedance conversion circuit were housed in a stainless steel package having a size of mm × 40 mm × 40 mm and having an opening on the upper surface. At that time, the lower surface of the pedestal of the detection unit was adhered to the bottom surface of the package. next,
A vibration sensor was completed by placing a spring on the upper surface of the load body of the detection unit in the package, fixing a stainless plate on the upper surface of the package so as to compress the spring, and closing the opening.
【００２１】以上の３種類のセンサを、振動発生機に取
り付け、出力ケーブルを電圧測定装置に接続してセンサ
出力を測定した。測定は、温度１５０℃の条件下で、周
波数５００Ｈｚ、加速度５Ｇの振動を連続して与えなが
ら、センサ出力を連続測定する方法で行った。耐久性の
評価は、センサの出力変動が、測定開始時の出力の±１
０％を越えるまでの時間（ｔ150）により行った。さら
に、その時間から、次式（１）を用いて、９０℃で同様
の振動を与えた場合にセンサの出力変動が、測定開始時
の出力の±１０％を越えるまでの時間（ｔ90）を算出
し、それをセンサの予測耐久時間とした。 ｔ90＝ｔ150×Ａ(150-90)・B （１） 但し、Ａ、Ｂは実験により求められる係数である。その
結果を表１に示す。The above three types of sensors were attached to a vibration generator, and the output cable was connected to a voltage measuring device to measure the sensor output. The measurement was performed under the condition of a temperature of 150 ° C. by continuously measuring the sensor output while continuously applying a vibration having a frequency of 500 Hz and an acceleration of 5 G. For durability evaluation, the sensor output fluctuation is ± 1 of the output at the start of measurement.
It was carried out depending on the time (t 150 ) until it exceeded 0%. Further, from that time, using the following equation (1), the time until the output fluctuation of the sensor exceeds ± 10% of the output at the start of measurement (t 90 ) when the same vibration is applied at 90 ° C. Was calculated and used as the predicted durability time of the sensor. t 90 = t 150 × A (150-90) · B (1) where A and B are coefficients obtained by experiments. The results are shown in Table 1.
【００２２】（比較例１〜３）検知部を押圧するバネを
入れなかった以外は、実施例１〜３と同様に作製した３
種類の振動センサ、即ち、各層を接着しただけで、積層
体を押圧する手段を設けていないセンサを使用し、実施
例１〜３と同様の測定を行った。結果を表１に示す。(Comparative Examples 1 to 3) 3 manufactured in the same manner as in Examples 1 to 3 except that the spring for pressing the detecting portion was not provided.
The same measurement as in Examples 1 to 3 was carried out using a type of vibration sensor, that is, a sensor in which each layer was simply bonded and a means for pressing the laminate was not provided. The results are shown in Table 1.
【００２３】 [0023]
【００２４】これらの結果からも明らかなように、比較
例のように検知部である積層体を押圧する手段を設けな
い場合には、９０℃での連続使用で、最長６年の耐久性
しか持たないが、実施例のように、バネによって積層体
を押圧した場合には、たとえ同じ接着剤を用いても、耐
久時間が２倍から３倍以上に延びており、最長で１５年
弱の耐久性を有するようになる。As is clear from these results, in the case where the means for pressing the laminated body which is the detecting portion is not provided as in the comparative example, the durability is only 6 years at the longest with continuous use at 90 ° C. Although not having it, when the laminated body is pressed by the spring as in the example, even if the same adhesive is used, the durability time is extended from 2 times to 3 times or more, and the maximum is less than 15 years. It becomes durable.
【００２５】[0025]
【発明の効果】本発明の圧電型振動センサは、台座と、
台座側電極と、圧電体と、荷重体側電極と荷重体を順次
積層してなる検知部をパッケージの中に収納し、そのパ
ッケージと検知部との間に圧縮された弾性体が挟まれて
設けられているため、その弾性体の付勢力によって検知
部の積層体が上下に押圧された状態に保たれている。従
って、センサを過酷な条件下で連続使用しても、各層間
が分離することはなく、層間剥離によるセンサ出力の低
下を防ぐことができる。よって、高温での連続使用時の
耐久性が大幅に向上する。The piezoelectric vibration sensor of the present invention includes a pedestal,
A pedestal-side electrode, a piezoelectric body, and a detection unit formed by sequentially stacking a load-side electrode and a load body are housed in a package, and a compressed elastic body is sandwiched between the package and the detection unit. Therefore, the laminated body of the detection unit is kept pressed vertically by the urging force of the elastic body. Therefore, even if the sensor is continuously used under severe conditions, the layers are not separated from each other, and it is possible to prevent a decrease in sensor output due to delamination. Therefore, the durability during continuous use at high temperature is significantly improved.
【００２６】[0026]
【図１】は、本発明の圧電型振動センサの一実施例を表
す断面図である。FIG. 1 is a sectional view showing an embodiment of a piezoelectric vibration sensor of the present invention.
１…検知部、２…パッケージ、３…弾性体、４…台座、
５…台座側電極、６…圧電体、７…荷重体側電極、８…
荷重体、９…接着剤、１０…被測定物1 ... Detector, 2 ... Package, 3 ... Elastic body, 4 ... Pedestal,
5 ... Pedestal side electrode, 6 ... Piezoelectric body, 7 ... Load body side electrode, 8 ...
Load body, 9 ... Adhesive, 10 ... Object to be measured
Claims (1)
極と荷重体を順次積層した積層体からなる検知部と、こ
の検知部を内部に収納するパッケージと、このパッケー
ジと前記検知部との間に配設され、前記検知部の積層体
を押圧する方向の付勢力を有する弾性体からなることを
特徴とする圧電型振動センサ。1. A detection unit including a laminated body in which a pedestal-side electrode, a piezoelectric body, a load-side electrode, and a load body are sequentially laminated on a pedestal, a package that houses the detection unit, a package and the detection unit. A piezoelectric vibration sensor, characterized in that the piezoelectric vibration sensor is arranged between the two and is made of an elastic body having an urging force in a direction of pressing the laminated body of the detection unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4293461A JPH06148011A (en) | 1992-10-30 | 1992-10-30 | Piezoelectric vibration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4293461A JPH06148011A (en) | 1992-10-30 | 1992-10-30 | Piezoelectric vibration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06148011A true JPH06148011A (en) | 1994-05-27 |
Family
ID=17795049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4293461A Pending JPH06148011A (en) | 1992-10-30 | 1992-10-30 | Piezoelectric vibration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06148011A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988004493A1 (en) * | 1986-12-12 | 1988-06-16 | Fanuc Ltd | Speed controller |
| JP2004245781A (en) * | 2003-02-17 | 2004-09-02 | Denso Corp | Pressure detection device |
| US7152482B2 (en) | 2002-10-01 | 2006-12-26 | National Institute Of Advanced Industrial Science & Technology | Piezoelectric sensor and input device including same |
| JP2008539811A (en) * | 2005-04-30 | 2008-11-20 | アエスキュラップ アーゲー | Implantable device for measuring intracranial pressure |
-
1992
- 1992-10-30 JP JP4293461A patent/JPH06148011A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988004493A1 (en) * | 1986-12-12 | 1988-06-16 | Fanuc Ltd | Speed controller |
| US7152482B2 (en) | 2002-10-01 | 2006-12-26 | National Institute Of Advanced Industrial Science & Technology | Piezoelectric sensor and input device including same |
| JP2004245781A (en) * | 2003-02-17 | 2004-09-02 | Denso Corp | Pressure detection device |
| JP2008539811A (en) * | 2005-04-30 | 2008-11-20 | アエスキュラップ アーゲー | Implantable device for measuring intracranial pressure |
| JP4778040B2 (en) * | 2005-04-30 | 2011-09-21 | アエスキュラップ アーゲー | Implantable device for measuring intracranial pressure |
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