JPH06147864A - Biaxial photoelectric autocollimator - Google Patents

Abstract

PURPOSE:To ensure a wide measuring range and a large working distance through simple structure at low cost by selecting any one of Y-direction slit for yawing detection or X-direction slit for pitching detection and displaying the selected one. CONSTITUTION:A liquid display 4, which can display a Y-direction slit 12 for yawing detection and an X-direction slit 13 for pitching detection, is employed as a slit forming unit. A slit selecting unit 9 selects any one of the Y-direction slit 12 or the X-direction slit 13 and a selected slit is displayed on the liquid display 4. Since the visual field is not required to be divided into yawing measuring region and pitching measuring region, a wide measuring range can be ensured and since both slits are not remote from the center of visual field, a large working distance can be obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a biaxial photoelectric autocollimator.

[0002]

2. Description of the Related Art FIG. 7 shows a conventional two-axis photoelectric autocollimator.
FIG. 8A is a diagram showing the slits of the focusing screen, and FIG. 8B is a diagram for explaining the relationship between the slit image and the light receiving surface of the CCD line sensor. The conventional two-axis photoelectric autocollimator includes a focusing plate 104 arranged at a rear focal position of the objective lens 106, an illumination system for irradiating the focusing plate 104 with light, and a rear optical path of the objective lens 106. A CCD line sensor 108 arranged in a position conjugate with the focusing screen 104 and a controller 111 for processing an output signal from the CCD line sensor 108 are provided.

The light source 102 and the condenser lens 103 form an illumination system and illuminate the focusing screen 104. Focusing screen 10
As shown in FIG. 8A, an X-direction slit 113 for vertical and a Y-direction slit 112 for horizontal which is perpendicular to the X-direction slit 113 are formed on the surface 4. The light that has passed through the focusing screen 104 is reflected by the half prism 105, becomes a parallel light flux by the objective lens 106, and exits from the housing 101 of the autocollimator. The parallel light flux emitted from the housing 101 is reflected by the external mirror 107 of the object to be measured and again the objective lens 1
After being incident on 06, it becomes convergent light, and after passing through the half prism 105, slit images 112a and 113a are formed on the light receiving surface of the CCD line sensor 108 as shown in FIG. 8B.
Tie The image forming positions of the slit images 112a and 113a move on the light receiving surface of the CCD line sensor 108 according to the inclination of the external mirror 107. The movement amount Δ has a relationship of Δ = 2fθ, where f is the focal length of the objective lens 106 and θ is the inclination angle of the external mirror 107.

Now, consider a case where the external mirror 107 is given an angular displacement in the horizontal plane, that is, a yawing amount θ _H. FIG. 8B shows slit images 112b and 113b before giving a yawing amount to the external mirror 107, and a slit image 11 after giving a yawing amount to the external mirror 107.
2a and 113a, and the movement amount Δ of each slit image is 2f
θ _H. Here, the slit image 11 for pitching detection
Focusing on 3a and 113b, the light receiving position of the CCD line sensor 108 does not change despite the movement of the slit image. On the other hand, the CCD line sensor 108 for the slit images 112a and 112b for yawing detection is used.
The light receiving position of changes.

On the contrary, when the external mirror 107 is given an angular displacement in the vertical plane, that is, a pitching amount θ _V , C for the slit image 113a for pitching detection is given.
Although the light receiving position of the CD line sensor 108 changes,
The light receiving position of the CCD line sensor 108 with respect to the slit image 112a for detecting the ing does not change.

Therefore, information on the yawing amount θ _H and the pitching amount θ _V can be independently obtained from the output signal from the CCD line sensor 108.

An output signal from the CCD line sensor 108 is sent to a controller 111 via a cable 110 and processed by the controller 111, and a yawing amount θ _H and a pitching amount θ _V are calculated. It is displayed on the display unit (not shown) of the printer 111.

FIG. 9 is an overall configuration diagram of a conventional biaxial photoelectric autocollimator, FIG. 10A shows the slit of the focusing screen 125, and FIG. 10B shows the slit of the focusing screen 124. 11A is a diagram for explaining the relationship between the light receiving surface of the CCD line sensor 108 and the slit image 212a for yawing detection, and FIG. 11B is the CCD line sensor 11
9 is a diagram for explaining a relationship between 9 and a slit image 213a for pitching detection. FIG.

This biaxial photoelectric autocollimator is shown in FIG.
Unlike the two-axis photoelectric autocollimator of No. 2, two focusing plates 125, 12 for yaw detection and pitching detection.
4, two illumination systems corresponding to both focusing plates 125 and 124, and two CCDs corresponding to the slits 212 and 213, respectively.
The line sensors 108 and 119 are provided. As shown in FIG. 10A, a slit 212 for yawing detection is formed on one focusing screen 125, and the other focusing screen 124 is formed.
As shown in FIG. 10B, a slit 213 for pitching detection is formed in the groove. The focusing screen 125 is the light source 10.
2 and the condenser lens 103, and the focusing screen 124 is illuminated by the illumination system composed of the light source 122 and the condenser lens 123. Each slit 212, 213 of the focusing screen 125, 124
The light emitted from the light source is divided into different wavelength regions λ ₁ and λ ₂ by the dichroic prism 117, and then combined and travels to the half prism 105. The light emitted from the dichroic prism 117 is reflected by the half prism 105, becomes a parallel light flux by the objective lens 106, and is emitted from the housing 101 of the autocollimator. Housing 10
The parallel luminous flux emitted from the external mirror 1 is the external mirror-1 of the measuring object.
The light is reflected by 07, enters the objective lens 107 again, becomes convergent light, and passes through the half prism 105. The light transmitted through the half prism 105 is divided by the dichroic prism 118 into the wavelength ranges λ ₁ and λ ₂ . The light in the wavelength range λ ₁ transmitted through the dichroic prism 118 reaches the CCD line sensor 108, and the light in the wavelength range λ ₂ reflected by the dichroic prism 118 reaches the CCD line sensor 119.

When the spectral characteristics of the dichroic prisms 117 and 118 are the same, the dichroic prism 1
Assuming that the wavelength range transmitted through 17 is λ ₁ and the wavelength range reflected by the dichroic prism 117 is λ ₂ , the focusing screen 125
Wavelength range λ ₁ exiting slit 212 for detecting yawing of
The light of the CCD line sensor 1 as shown in FIG.
Slit image 212 for yaw detection on the light receiving surface of 08
The light in the wavelength region λ ₁ which has formed a and has exited the slit 213 for pitching detection of the focusing screen 124 has a slit image 213a for pitching detection on the light receiving surface of the CCD line sensor 119 as shown in FIG. 11B. To form.

[0011]

SUMMARY OF THE INVENTION The biaxial photoelectric type of FIG.
In the tocollimator, as described above, one focusing screen 104 having the slit 112 for yaw detection and the slit 113 for pitch detection and one CCD line sensor 1108 are used for yaw measurement and measurement. Since the pitching measurement is performed, the field of view must be allocated to the yawing measurement area and the pitching measurement area, which inevitably limits the measurement ranges of yawing and pitching to ½ or less. there were.

Further, it is generally known that as the distance between the objective lens 106 and the external mirror 107, the so-called working distance, becomes longer, the light emitted from a position farther from the center of the visual field is less likely to return to the objective lens 106. However, in the focusing screen 104 of the two-axis photoelectric autocollimator of FIG. 7, a slit 112 for yawing detection is used.
Also, since the slits 113 for pitching detection are located away from the center of the visual field, it is difficult to obtain a large working distance.

On the other hand, in the biaxial photoelectric autocollimator shown in FIG. 9, the measuring range and the working distance are sufficiently obtained, but the structure is complicated, the manufacturing cost is increased, and the width is wide. There is a problem that high accuracy cannot be obtained unless optical aberration is suppressed over the wavelength range, and complicated operation for suppressing optical aberration is required to obtain high accuracy.

The present invention has been made in view of the above circumstances, and its object is to secure a wide measuring range and a large working distance, and to have a simple structure and an inexpensive biaxial photoelectric autocollimator. Is to provide.

[0015]

In order to solve the above-mentioned problems, a biaxial photoelectric autocollimator according to the invention described in claim 1 measures the inclination of a reflecting member arranged in front of the objective lens. In the axial photoelectric autocollimator, a first target that can be arranged at a focal position of the objective lens and emits an X-axis ray to the reflecting member via the objective lens when arranged at the focal position; A second target that can be arranged at the focal position of the lens and emits a Y-axis ray to the reflecting member via the objective lens when arranged at the focal position; and a first target and a second target. Selecting means for selectively selecting one of the focal points; light receiving means for receiving the X-axis ray or the Y-axis ray reflected by the reflecting member via the objective lens; And a slit selection means for forming either one of the slits of the X-direction slit and the Y-direction slit in preparative forming apparatus.

The biaxial photoelectric autocollimator of the second aspect of the invention is a biaxial photoelectric autocollimator for measuring the inclination of a reflecting member arranged in front of an objective lens.
A slit forming means for selectively forming an X-axis slit and a Y-axis slit, an illuminating means for irradiating the slit forming means with light, and one of the X-axis slit and the Y-axis slit. And a selecting means for selectively selecting.

[0017]

It is not necessary to allocate the visual field to the pitching measurement area and the yawing measurement area, and a wide measurement range can be secured, and the X-direction slit for pitching detection and the Y-direction slit for yawing detection are Since they are not far from the center of the visual field, a large working distance can be obtained. Furthermore, one slit detection means is enough,
The structure is simple.

If a self-luminous device using a light emitting element is used as the focusing screen, an illumination system for irradiating the focusing plate with light is not required, and the simplification of the structure can be promoted.

[0019]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is an overall configuration diagram of a biaxial photoelectric autocollimator according to a first embodiment of the present invention. The biaxial photoelectric autocollimator irradiates the liquid crystal display device 4 as a slit forming device which functions as a focusing screen arranged at the back focal position of the objective lens 6 and the liquid crystal display device 4. An illumination system, a CCD line sensor 8 as slit detection means arranged at a position conjugate with the liquid crystal display device 4 in the rear optical path of the objective lens 6, and a slit selection device 9 connected to the liquid crystal display device 4, The slit selection device 9 and the CCD line sensor 8 are connected via a cable 10, and a controller 11 for sending a drive signal to the slit selection device 9 and processing an output signal from the CCD line sensor 8 is provided. I have it.

The light source 2 and the condenser lens 3 constitute an illumination system and illuminate the liquid crystal display device 4. Liquid crystal display device 4
2 can display a Y-direction slit 12 for yawing detection and an X-direction slit 13 for pitching detection, as shown in FIGS. The liquid crystal display device 4 is shown in FIG.
As shown in (a) and (b), slit patterns 4a,
4c, 4d, 4e, a center pattern 4b and a background pattern 4f. When yawing is detected, the slit selection device 9 is used to perform the operation shown in FIG.
Slit patterns 4a and 4c and center pattern shown in FIG.
2b is activated to form the Y-direction slit 12 for yawing detection shown in FIG. 2A, and when pitching detection is performed, the slit pattern 4d shown in FIG.
4e and the center pattern 4b are activated, as shown in FIG.
The X-direction slit 13 for pitching detection shown in (b) is formed. That is, the light source 2 and the condenser lens 3
And a slit in the X direction constitute a first target, and a light source 2, a condenser lens 3, and a slit in the Y direction form a second target.
You are configuring the target.

The CCD line sensor 8 is shown in FIG.
And (b), they are arranged so as to be inclined by 45 degrees with respect to the Y-direction slit image 12a and the X-direction slit image 13a on the image plane.

The controller 11 includes a control section 11a for sending a drive signal to the slit selection device 9, and a calculation section 11b for calculating a yawing amount and a pitching amount based on the output signal from the CCD line sensor 8. , A yawing amount and a pitching amount are displayed on the display unit 11c.

Next, the operation of the biaxial photoelectric autocollimator of this embodiment will be described.

For example, the slit selection device 9 according to the drive signal sent from the controller 11a of the controller 11.
Sends a selection signal for selecting the Y direction slit 12 for yaw detection to the liquid crystal display device 4,
Is a slit pattern 4a, 4c and a center pattern 4
b is activated to form the Y-direction slit 12 for yaw detection shown in FIG.

The light transmitted through the Y-direction slit 12 of the liquid crystal display device 4 is reflected by the half prism 5, and the objective lens 6
Then, it becomes a parallel light beam and is emitted from the housing 1 of the autocollimator. The parallel light flux emitted from the housing 1 is reflected by an external mirror 7 as a reflecting member, enters the objective lens 6 again, becomes convergent light, passes through the half prism 5, and then is received by the CCD line sensor 8. A slit image 12a for yawing detection is formed on the top.

Now, with this state as the initial state, the external mirror
7 Yo - when given queued amount theta _H, as shown in FIG. 3 (a), Yo - slit image 12a for queuing detection moves on only image plane movement amount Δ _{H =} 2fθ _H.

[0028] Conversely, when given the pitching amount theta _V outside mirror -7 from the initial state, yo - the slit image 12a for queuing detection on only image plane moving amount delta _{V =} f [theta] _V Moving. Here Yo - Focusing on the intersection i.e. receiving position of the slit image 12a and a CCD line sensor 8 for queuing detection, the external mirror -7 Yo - if gave queuing amount theta _H yo - the queuing amount theta _H change occurs in proportion to the light receiving position, the light receiving position when given pitching amount theta _V outside mirror -7 is not changed. Therefore, pitching does not occur when yawing is detected. In this way, when the slit selection device 9 selects the Y-direction slit 12 for yaw detection, the CCD line sensor 8 detects only the yawing of the external mirror 7.

Further, since the arithmetic unit 11b of the controller 11 is supplied with a synchronizing signal synchronized with the drive signal sent to the slit selecting device 9, the arithmetic unit 11b is connected to the cable 10.
The angular displacement information received from the CCD line sensor 8 via is recognized as yawing and is calculated. Computing unit 11b
The calculation result at is sent to the display unit 11c, and the display unit 11c displays the yawing amount θ _H.

On the other hand, the controller 1 of the controller 11
When the slit selection device 9 selects the X-direction slit 13 for pitching detection in accordance with the drive signal from 1a, the liquid crystal display device 4 activates the slit patterns 4d and 4e and the center pattern 4b, as shown in FIG. The X-direction slit 13 for pitching detection shown in b) is formed.

The light transmitted through the X-direction slit 13 of the liquid crystal display device 4 forms a slit image 13a for pitching detection on the light receiving surface of the CCD line sensor 8 as shown in FIG. 3 (b). Unlike the case described above, when the slit selection device 9 selects the X-direction slit 13 for pitching detection, the CCD line sensor 8 detects only the pitching of the external mirror 7. Since the synchronizing signal synchronized with the drive signal sent to the slit selecting device 9 is given to the computing unit 11b of the controller 11, the computing unit 11b recognizes the angular displacement information received from the CCD line sensor 8 as pitching, and performs the computation. To do. The calculation result is transmitted to the display unit 11c, the display unit 11c displays the pitching amount theta _V.

According to the biaxial photoelectric autocollimator of the first embodiment, the Y-direction slit 12 for yaw detection is used.
And a liquid crystal display device 4 capable of displaying an X-direction slit 13 for pitching detection are adopted as a slit forming device, and the liquid crystal display device 4 is provided with a slit selection device 9 for Y-direction slit 12 for yawing detection and pitching detection. Since only one of the X-direction slits 13 is selectively displayed, it is not necessary to allocate the field of view to the yawing measurement area and the pitching measurement area, and a wide measurement range can be secured. -Y-direction slit 12 for ing detection and X-direction slit 1 for pitching detection
Since 3 is not far from the center of the visual field (see FIG. 2), a large working distance can be obtained. Further, the liquid crystal display device 4 functioning as a focusing screen and the CCD line sensor 8 as a slit detecting means are respectively 1
Since the number of pieces is sufficient, the structure is simple, and since no dichroic prism is used, high accuracy can be obtained without requiring a complicated adjustment work for suppressing optical aberrations.

Although the liquid crystal display device 4 is used as the slit forming device in the above-described embodiment, instead of this, a focusing screen having one linear slit passing through the center of the visual field and the focusing screen. A slit forming device constituted by a rotation driving means for rotating 90 degrees in the forward and reverse directions with the center as the rotation center is adopted, and the focusing plate is rotated by driving the rotation driving means by the slit selecting device, and the yaw is moved.
Y direction slit for ing detection and X for pitching detection
Either one of the directional slits may be selected.

Further, in the above-mentioned embodiment, the case where the light source 2 and the condenser lens 3 and the liquid crystal display device 4 functioning as a focusing plate are used as the illumination system has been described, but instead of these, a light emitting element (eg LED) is used as the focusing plate. ) Are arranged along an X direction and a Y direction which are orthogonal to each other, and a light emitting element selecting unit instead of the slit selecting device 9 is used to emit light emitting elements and Y along the X direction of the self light emitting apparatus. If one of the light emitting elements along the direction is turned on, the light source 2 and the condenser lens 3 are unnecessary, and the structure can be further simplified.

FIG. 5 is an overall block diagram of a biaxial photoelectric autocollimator according to the second embodiment of the present invention. The same parts as those in the above-described embodiment are designated by the same reference numerals and the description thereof will be omitted. In this embodiment, the rear optical path of the objective lens 6 is branched into three by the Hough prisms 5 and 14, and the focusing plates 4 and 24 and the CCD line sensor 8 are arranged at the conjugate focal positions of the objective lens 6 in each optical path. Has been done. One focusing screen 4 is formed with a Y-direction slit for yawing detection, and the other focusing screen 24 is formed with an X-direction slit for pitching detection. Light source 2 and condenser lens 3
And the focusing screen 4 constitute a first target, and the light source 22
The condenser lens 23 and the focusing screen 24 constitute a second target. In addition, the light sources 2 and 22 for both illumination systems
Are connected to the illumination system selection device 29, respectively. The illumination system selection device 29 selectively turns on one of the light sources 2 and 22 in accordance with a drive signal from the controller 11a of the controller 11. According to the biaxial photoelectric autocollimator of this embodiment, the same effect as that of the embodiment of FIG. 1 can be obtained.

In this embodiment, the case where the light sources 2 and 22, the condenser lenses 3 and 23, and the focusing screens 4 and 24 are used has been described. Instead of these, a light emitting element (for example, LED) is used as the focusing screen 4 in the Y direction. A first self-luminous device arranged along the light-emitting device, and a light-emitting element (for example, L
ED) is arranged along the X direction orthogonal to the Y direction, and the second self-luminous device is adopted. If only one of the light emitting element and the light emitting element of the second self light emitting device is turned on, the light sources 2 and 22 and the condenser lenses 3 and 23 are formed.
Is unnecessary, and the structure can be simplified.

FIG. 6 is an overall block diagram of a biaxial photoelectric autocollimator according to the third embodiment of the present invention. The same parts as those of the embodiment of FIG. 5 are designated by the same reference numerals and the description thereof will be omitted.

A focusing screen 4 having a Y-direction slit for yawing detection, a focusing screen 24 having a Y-direction slit for pitching detection, and two illumination systems corresponding to the focusing screens 4 and 24 are provided. Although it is common to the embodiment of FIG. 5 in that it is provided, as an optical path blocking means for blocking the optical path of either one of the two illumination systems between the half prism 15 and the focusing plates 4 and 24. 5 is different from the embodiment of FIG. 5 in that the chopper mechanism 16 is provided and the chopper mechanism 16 is operated by an optical path selecting device 39 as an optical path selecting means. The chopper mechanism 16 includes a shaft 16a rotatably supported by a bearing 16b, a rotary plate 16c fixed to the shaft 16a, and a drive unit (not shown) that rotationally drives the shaft 16a. Hole 16d
Is provided. Both the light sources 2 and 22 of the two illumination systems are constantly lit, and the control unit 11 of the controller 11
The optical path selection device 39 applies a driving force to the shaft 16a to rotate the rotary plate 16c in response to the drive signal from a to select the optical path of one of the two illumination systems and select the other of the illumination systems. The light path is blocked. 2 of this embodiment
According to the axial photoelectric autocollimator, the same effect as that of the above-described embodiment can be obtained.

In this embodiment, the case where the light sources 2 and 22, the condenser lenses 3 and 23, and the focusing screens 4 and 24 are used has been described. Instead of these, a light emitting element (for example, LED) is used as the focusing screen 4 in the Y direction. A first self-luminous device arranged along the light-emitting device, and a light-emitting element (for example, L
ED) is arranged along the X direction orthogonal to the Y direction, and a second self-luminous device of the first self-luminous device and the second self-luminous device is adopted by the optical path selection device 39. If the optical path of the light emitting element of one of the light emitting elements and the light emitting element is blocked, the light sources 2 and 22 and the condenser lenses 3 and 23 are unnecessary, and the structure can be simplified. Also in this case, the light emitting elements of both self light emitting devices are always made to emit light.

If an observation system using an eyepiece lens is provided in each of the above-described embodiments, the afterimage effect of the eye can be obtained by setting the switching frequency for picking and yawing or the frequency for switching pitching and yawing to several tens Hz or more. By this, a cross-shaped slit image is obtained, which facilitates alignment work.

[0041]

As described above, according to the biaxial photoelectric autocollimator of the present invention, a wide measuring range and a large working distance are secured, and the structure is simplified and the cost is reduced. be able to.

[Brief description of drawings]

FIG. 1 is an overall configuration diagram of a biaxial photoelectric autocollimator according to a first embodiment of the present invention.

FIG. 2 is a diagram showing slits in a focusing screen.

FIG. 3 is a diagram for explaining a relationship between a slit image and a light receiving surface of a CCD line sensor.

FIG. 4 is a front view of a focusing screen.

FIG. 5 is an overall configuration diagram of a biaxial photoelectric autocollimator according to a second embodiment of the present invention.

FIG. 6 is an overall configuration diagram of a biaxial photoelectric autocollimator according to a third embodiment of the present invention.

FIG. 7 is an overall configuration diagram of a conventional biaxial photoelectric autocollimator.

FIG. 8 is a diagram showing a slit of a focusing screen and a diagram for explaining a relationship between a slit image and a light receiving surface of a CCD line sensor.

FIG. 9 is an overall configuration diagram of another conventional two-axis photoelectric type autocollimator.

FIG. 10 is a diagram showing slits in a focusing screen.

FIG. 11 is a diagram showing a relationship between a slit image and a light receiving surface of a CCD line sensor.

[Explanation of symbols]

 2 Light source 3 Condenser lens 4 Liquid crystal display device 6 Objective lens 7 External mirror 8 CCD line sensor 9 Slit selection device 11 Controller

Claims (2)

[Claims] 1. A two-axis photoelectric autocollimator for measuring the inclination of a reflecting member arranged in front of an objective lens, wherein the two-axis photoelectric autocollimator can be arranged at a focal position of the objective lens, and when arranged at the focal position. A first target that emits an X-axis light beam to the reflection member via an objective lens, and a first target that can be arranged at a focal position of the objective lens, and is arranged at the reflection member via the objective lens when arranged at the focal position. A second target that emits a Y-axis ray; a selection unit that selectively selects one of the first target and the second target at the focal position; the X-axis ray or the Y-axis reflected by the reflecting member. A two-axis photoelectric autocollimator, comprising: a light receiving means for receiving an axial light beam through the objective lens. 2. A two-axis photoelectric autocollimator for measuring the inclination of a reflecting member arranged in front of an objective lens, comprising slit forming means for selectively forming an X-axis slit and a Y-axis slit, A biaxial photoelectric device, comprising: an illuminating means for irradiating the slit forming means with light; and a selecting means for selectively selecting one of the X-axis slit and the Y-axis slit. Type auto collimator.