JPH0614493A - Shaft sealing equipment - Google Patents

Shaft sealing equipment

Info

Publication number
JPH0614493A
JPH0614493A JP4168998A JP16899892A JPH0614493A JP H0614493 A JPH0614493 A JP H0614493A JP 4168998 A JP4168998 A JP 4168998A JP 16899892 A JP16899892 A JP 16899892A JP H0614493 A JPH0614493 A JP H0614493A
Authority
JP
Japan
Prior art keywords
magnet
magnetic
rotary shaft
magnetic poles
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4168998A
Other languages
Japanese (ja)
Inventor
Hideo Mitai
日出男 三田井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP4168998A priority Critical patent/JPH0614493A/en
Publication of JPH0614493A publication Critical patent/JPH0614493A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent foreign materials such as a broken piece of a magnet from coming into a small space between a rotary shaft and a magnetic pole where a magnetic fluid exists and then being mixed in the magnetic fluid. CONSTITUTION:Pairs of magnetic poles 2, 3 which are formed at a little distance along an axial direction of a rotary shaft 1 are located around the rotary shaft 1 with a little space delta formed between the rotary shaft 1 and the magnetic poles. Between the magnetic poles 2 and 3 in each pair, tame plurality of magnets are set in the circumferential direction. In the little space delta, a magnetic fluid exists. In such a shaft sealing equipment, at least a face of at least one magnet 4 which faces the rotary shaft 1 is covered and a shielding body 11 which shields a space between each magnet 4 and the little space delta is installed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、回転機械の回転軸周り
を磁性流体を用いて軸封して、真空又はガス封じをする
軸封装置に関し、更に詳細には、磁性流体が介在する回
転軸と磁極との間の微小隙間に磁石の破片などの異物が
侵入して磁性流体に混入するのを防止する技術に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shaft sealing device for vacuum or gas sealing by axially sealing a rotating machine using a magnetic fluid around a rotary shaft, and more specifically, to a rotary machine in which a magnetic fluid is interposed. The present invention relates to a technique for preventing foreign matter such as magnet fragments from entering a minute gap between a shaft and a magnetic pole and mixing with a magnetic fluid.

【0002】[0002]

【従来の技術】近年、磁性流体を用いる軸封装置の開発
の機運が高まってきており、とりわけ回転機械ではその
回転軸周りに磁性流体シールを適用することは、回転非
接触の構成として小型化かつ信頼性の向上が図れるの
で、その積極的な開発が行われている。
2. Description of the Related Art In recent years, the momentum of development of a shaft sealing device using magnetic fluid has been increasing, and in particular, in a rotating machine, applying a magnetic fluid seal around the rotating shaft reduces the size as a rotational non-contact structure. And since it can improve reliability, it is being actively developed.

【0003】図16及び図17(図16のC−C線断面
図)は、回転機械に用いられている従来の軸封装置の一
例を示す。これらの図において、1が回転機械の回転軸
であり、この回転軸1の軸方向に沿って間隔を置いた一
対の磁極2、3が該回転軸1の周りに微小隙間δを置い
て配置されていると共に、これら磁極2、3間には周方
向に複数の磁石4が介装されて、前記微小隙間δに磁性
流体5が介在されている。すなわち、磁石4により一方
の磁極2から回転軸1、そして他方の磁極3へ流れる回
路とする磁界を形成して、各磁極2、3と回転軸1との
間の微小隙間δに磁場を形成し、ここに磁性流体5を介
在させて、回転軸1と磁極2、3とを非接触にし軸封す
るものである。なお、各磁極2、3は回転機械のハウジ
ング6に固定されている。
16 and 17 (cross-sectional view taken along the line CC in FIG. 16) show an example of a conventional shaft sealing device used in a rotary machine. In these drawings, 1 is a rotary shaft of a rotary machine, and a pair of magnetic poles 2 and 3 spaced apart along the axial direction of the rotary shaft 1 are arranged around the rotary shaft 1 with a minute gap δ. A plurality of magnets 4 are provided in the circumferential direction between the magnetic poles 2 and 3, and a magnetic fluid 5 is interposed in the minute gap δ. That is, a magnetic field is formed by the magnet 4 from the one magnetic pole 2 to the rotary shaft 1 and then to the other magnetic pole 3, and a magnetic field is formed in the minute gap δ between the magnetic poles 2 and 3 and the rotary shaft 1. Then, the magnetic fluid 5 is interposed between the rotary shaft 1 and the magnetic poles 2 and 3 so that the rotary shaft 1 and the magnetic poles 2 and 3 are not in contact with each other and the shaft is sealed. The magnetic poles 2 and 3 are fixed to the housing 6 of the rotary machine.

【0004】[0004]

【発明が解決しようとする課題】ところで、このような
回転非接触で磁性流体により軸封する装置では、使用す
る磁性流体のそのものの特性、磁場の強さ、回転周速な
ど、様々な条件により磁極と回転軸との間の微小隙間の
値が適正に決められる。しかし、この微小隙間に磁性流
体以外の物質が存在すると、磁性流体が破壊され、その
特質が損なわれてしまう。また、磁性流体が健全であっ
ても、磁極と回転軸との間の微小隙間に固形異物が存在
又は侵入すると、該隙間部(軸封部)が損傷して軸封装
置そのものが破壊されてしまう。
By the way, in such a device which seals with a magnetic fluid in a rotating non-contact manner, the magnetic fluid to be used has various characteristics such as the characteristics of the magnetic fluid itself, the strength of the magnetic field, and the rotating peripheral speed. The value of the minute gap between the magnetic pole and the rotary shaft is properly determined. However, if a substance other than the magnetic fluid is present in the minute gap, the magnetic fluid is destroyed and its characteristics are impaired. Further, even if the magnetic fluid is sound, if solid foreign matter is present or enters the minute gap between the magnetic pole and the rotary shaft, the gap (shaft seal part) is damaged and the shaft seal device itself is destroyed. I will end up.

【0005】しかるに、図16及び図17に示した従来
の軸封装置では、磁極2、3と回転軸1との間の微小隙
間δに磁石4の破片又は他の異物が侵入するのを防止す
る構成を特別に採っていないために、磁石4の破片又は
他の異物が磁極2、3と回転軸1との間の微小隙間δに
侵入して磁性流体5に混入し、軸封機能が阻害されるば
かりではなく、該隙間部δに損傷を与え、軸封装置その
ものが破壊される問題があった。
However, in the conventional shaft sealing device shown in FIGS. 16 and 17, it is possible to prevent fragments of the magnet 4 or other foreign matter from entering the minute gap δ between the magnetic poles 2 and 3 and the rotary shaft 1. Since no special configuration is adopted, the debris of the magnet 4 or other foreign matter enters the minute gap δ between the magnetic poles 2 and 3 and the rotating shaft 1 and mixes with the magnetic fluid 5, so that the shaft sealing function is improved. Not only is it hindered, but the gap δ is damaged and the shaft sealing device itself is broken.

【0006】特に、磁石4は一般に硬くてもろい材料で
作られているため、、軸方向の力や軸系の回転振動、或
は何等かの条件により割れやかけらを生じ易く、かつ該
微小隙間δが磁場であるために、磁石4の破片や磁性粉
が磁極2、3と回転軸1との間の微小隙間δに侵入する
ことが多かった。
In particular, since the magnet 4 is generally made of a hard and brittle material, cracks and fragments are likely to occur due to axial force, rotational vibration of the shaft system, or some other condition, and the minute gap Since δ is a magnetic field, fragments of the magnet 4 and magnetic powder often intrude into the minute gap δ between the magnetic poles 2 and 3 and the rotating shaft 1.

【0007】本発明は、このような従来技術の課題を解
決するためになされたもので、磁性流体が介在する回転
軸と磁極との間の微小隙間に磁石の破片などの異物が侵
入して磁性流体に混入するのを防止するようにした軸封
装置を提供することを目的とする。
The present invention has been made in order to solve the problems of the prior art as described above, and foreign matter such as fragments of magnets intrudes into a minute gap between the rotating shaft and the magnetic pole in which the magnetic fluid intervenes. An object of the present invention is to provide a shaft sealing device that is prevented from being mixed with a magnetic fluid.

【0008】[0008]

【課題を解決するための手段】上記の課題を解決するた
めに、本発明は、回転軸の軸方向に沿って間隔を置いた
一対の磁極を該回転軸の周りに微小隙間を置いて配置す
ると共に、前記一対の磁極間には周方向に複数の磁石を
介装して、前記微小隙間に磁性流体を介在して成る軸封
装置において、少なくとも一つの磁石の、少なくとも回
転軸と対面する面を覆って、各磁石と前記微小隙間との
間を遮蔽する遮蔽体を設けたものである。
In order to solve the above-mentioned problems, the present invention has a pair of magnetic poles arranged at intervals along the axial direction of a rotary shaft with a minute gap around the rotary shaft. In addition, in a shaft sealing device in which a plurality of magnets are interposed in the circumferential direction between the pair of magnetic poles and a magnetic fluid is interposed in the minute gap, at least one magnet faces at least the rotating shaft. A shield that covers the surface and shields between each magnet and the minute gap is provided.

【0009】[0009]

【作用】上記の手段によれば、各磁石と、磁極及び回転
軸間の微小隙間との間に遮蔽体を設けてそれらの間を遮
蔽しているので、磁石の破片などの異物が該微小隙間に
侵入して磁性流体に混入することはなくなり、健全な軸
封機能を維持することができる。
According to the above means, since a shield is provided between each magnet and the minute gap between the magnetic pole and the rotary shaft to shield them from each other, foreign matter such as broken pieces of the magnet can be eliminated. Since it will not enter the gap and mix into the magnetic fluid, a sound shaft sealing function can be maintained.

【0010】[0010]

【実施例】以下、図面を参照して本発明の実施例につい
て詳細に説明する。
Embodiments of the present invention will now be described in detail with reference to the drawings.

【0011】図1は本発明の第1実施例に係る軸封装置
を示す断面図、図2は図1のA−A線断面図であり、図
16、図17に示したものと同一の部分には同一の符号
を付して重複する説明は省略する。
FIG. 1 is a sectional view showing a shaft sealing device according to a first embodiment of the present invention, and FIG. 2 is a sectional view taken along the line AA of FIG. 1, which is the same as that shown in FIGS. The same parts are designated by the same reference numerals, and duplicate description will be omitted.

【0012】本実施例は、複数の磁石4と、磁極2、3
及び回転軸1間の微小隙間δとの間を遮蔽する遮蔽体と
して、非磁性材から成る薄肉円筒状又はリング状の遮蔽
体11を用いたものである。この遮蔽体11は、回転軸
1の周りに配置されている複数の磁石4の環状磁石構体
の内周側、すなわち各磁石4の回転軸1と対面する面に
接してこれら面を覆うようにして、一対の磁極2、3の
相対する側面に形成した突起12、13上に置かれてい
る。したがって、この遮蔽体11は各磁石4と、磁極
2、3及び回転軸1間の微小隙間δとの間を遮蔽し、磁
石4の破片や磁性粉が磁極2、3と回転軸1との間の微
小隙間δに侵入して磁性流体5に混入するのを防止す
る。
In this embodiment, a plurality of magnets 4 and magnetic poles 2, 3 are used.
Further, a thin cylindrical or ring-shaped shield 11 made of a non-magnetic material is used as a shield that shields between the minute gap δ between the rotating shafts 1. The shield 11 is in contact with and covers the inner peripheral side of the annular magnet assembly of the plurality of magnets 4 arranged around the rotation axis 1, that is, the surface of each magnet 4 facing the rotation axis 1. And is placed on the protrusions 12 and 13 formed on the opposite side surfaces of the pair of magnetic poles 2 and 3. Therefore, the shield 11 shields each magnet 4 from the minute gap δ between the magnetic poles 2 and 3 and the rotary shaft 1, and the fragments or magnetic powder of the magnet 4 separate the magnetic poles 2 and 3 from the rotary shaft 1. This prevents the magnetic fluid 5 from entering the minute gap δ between them and mixing into the magnetic fluid 5.

【0013】なお、遮蔽体11は弾性材料で形成するこ
とにより磁極2、3との密着を強くして遮蔽効果を一層
高めることができ、またその断面形状は図1に示した矩
形状に限らず、図3の(a)、(b)、(c)に示すよ
うに円形状など、種々の形状にすることができ、更に
(d)に示すようにその外周面、すなわち磁石4と対面
する側の面に接着剤14を塗布し、異物を吸着するよう
にすることもできる。
By forming the shield 11 from an elastic material, the close contact with the magnetic poles 2 and 3 can be strengthened to further enhance the shielding effect, and the cross-sectional shape is not limited to the rectangular shape shown in FIG. However, it can be formed into various shapes such as a circular shape as shown in FIGS. 3A, 3B and 3C, and as shown in FIG. It is also possible to apply the adhesive 14 to the surface on the side to be adsorbed to absorb the foreign matter.

【0014】次に、図4は本発明の第2実施例に係る軸
封装置を示す要部の断面図、図5は図4のB−B線断面
図であり、図16、図17に示したものと同一の部分に
は同一の符号を付して重複する説明は省略する。
Next, FIG. 4 is a cross-sectional view of an essential part showing a shaft sealing device according to a second embodiment of the present invention, and FIG. 5 is a cross-sectional view taken along the line BB of FIG. 4, and FIGS. The same parts as those shown are designated by the same reference numerals, and duplicate description will be omitted.

【0015】本実施例は、複数の磁石4と、磁極2、3
及び回転軸1間の微小隙間δとの間を遮蔽する遮蔽体
として、各磁石4をそれぞれ独立して完全に被覆する複
数の遮蔽体(被覆体)21を用いたものであり、各遮蔽
体21は非磁性の磁力透過材料により形成される。これ
ら遮蔽体21は磁石4を被覆して磁石4の割れやかけら
が生じた際にその破片の飛散を防止することによって、
磁石4の破片が磁極2、3と回転軸1との間の微小隙間
δに侵入して磁性流体5に混入するのを防止する。ま
た、これら遮蔽体21は割れ易い磁石4を保護すると共
にその取り扱いを容易にする。次に、図6〜図15を参
照して上記第2実施例の変形例についてを述べる。
In this embodiment, a plurality of magnets 4 and magnetic poles 2, 3 are used.
And a shield for shielding between the minute gap δ between the rotating shaft 1
As the above, a plurality of shields (covers) 21 that completely cover each magnet 4 independently are used, and each shield 21 is formed of a nonmagnetic magnetic force transmitting material. These shields 21 cover the magnet 4 to prevent scattering of fragments when the magnet 4 is cracked or broken.
This prevents fragments of the magnet 4 from entering the minute gap δ between the magnetic poles 2 and 3 and the rotating shaft 1 and mixing with the magnetic fluid 5. Further, these shields 21 protect the magnets 4 which are easily broken and facilitate their handling. Next, a modified example of the second embodiment will be described with reference to FIGS.

【0016】まず、上記第2実施例では複数の磁石4を
複数の遮蔽体21でそれぞれ独立して被覆したが、図6
及び図7に示すようにドーナツ状の単一の遮蔽体22で
すべての磁石4を被覆して、又は該遮蔽体22を図8に
示すように周方向に幾つかに分割してそれぞれ磁石4を
数個づつ被覆して、取り扱い及び組み立てを一層容易と
することもできる。
First, in the second embodiment, the plurality of magnets 4 are independently covered with the plurality of shields 21, respectively.
And all magnets 4 are covered with a single doughnut-shaped shield 22 as shown in FIG. 7, or the shield 22 is divided into several pieces in the circumferential direction as shown in FIG. Can be coated in groups of several to make handling and assembly easier.

【0017】また、上記第2実施例では各磁石4の全
体、即ちその外周面及び両側面を各遮蔽体21で完全に
被覆したが、図9及び図10に示すように各磁石4の外
周面のみを覆う遮蔽体23で磁石4を囲んで、取り扱い
及び組み立てを一層容易にすると共に磁石4の側面を目
視できるようにしても良い。また、該遮蔽体23を弾性
材料で形成する場合には、図11に示すように、遮蔽体
23の軸方向長さを磁石4のそれよりも弾性材料の縮み
代だけ長くする。
In addition, in the second embodiment, the entire magnet 4, that is, the outer peripheral surface and both side surfaces thereof are completely covered with the respective shields 21, but as shown in FIGS. The magnet 4 may be surrounded by a shield 23 that covers only the surface to make handling and assembly easier and to make the side surface of the magnet 4 visible. When the shield 23 is made of an elastic material, the axial length of the shield 23 is made longer than that of the magnet 4 by the shrinkage margin of the elastic material, as shown in FIG.

【0018】更に、これらの図9〜図11では複数の磁
石4の外周面を複数の遮蔽体23でそれぞれ独立して囲
んだが、図12、図13及び図14に示すようにこれら
独立する遮蔽体23を連ねてすべての磁石4を装填した
遮蔽体24を設けるか、又は該遮蔽体24を図15に示
すように周方向に幾つかに分割して磁石4を数個づつ充
填して、取り扱い及び組み立てを一層容易とすることも
できる。
Further, in FIGS. 9 to 11, the outer peripheral surfaces of the plurality of magnets 4 are individually surrounded by the plurality of shields 23. However, as shown in FIGS. 12, 13 and 14, these independent shields are provided. A shield 24 in which all the magnets 4 are loaded is provided by connecting the bodies 23, or the shield 24 is divided into several pieces in the circumferential direction as shown in FIG. It may also be easier to handle and assemble.

【0019】[0019]

【発明の効果】以上述べたように、本発明は、回転軸の
軸方向に沿って間隔を置いた一対の磁極を該回転軸の周
りに微小隙間を置いて配置すると共に、前記一対の磁極
間には周方向に複数の磁石を介装して、前記微小隙間に
磁性流体を介在して成る軸封装置において、少なくとも
一つの磁石の、少なくとも回転軸と対面する面を覆っ
て、各磁石と前記微小隙間との間を遮蔽する遮蔽体を設
けて、磁石の破片などの異物が前記微小隙間に侵入しな
いようにしているので、磁石の破片などの異物が磁性流
体に混入するのを防止して、健全な軸封機能を維持する
ことができ、よって磁性流体を用いる軸封装置の品質を
向上させ、信頼性を高めることができるなど、非常に優
れた効果を奏する。
As described above, according to the present invention, a pair of magnetic poles spaced apart along the axial direction of the rotary shaft are arranged with a minute gap around the rotary shaft, and the pair of magnetic poles are arranged. In a shaft sealing device in which a plurality of magnets are interposed in the circumferential direction, and a magnetic fluid is interposed in the minute gap, each magnet covers at least a surface facing a rotation axis of each magnet. Since a shield is provided to shield between the magnet and the minute gap to prevent foreign matter such as magnet fragments from entering the minute gap, it is possible to prevent foreign matter such as magnet fragments from entering the magnetic fluid. As a result, a sound shaft sealing function can be maintained, and therefore, the quality of the shaft sealing device using the magnetic fluid can be improved, and the reliability can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例に係る軸封装置を示す要部
の断面図である。
FIG. 1 is a sectional view of an essential part showing a shaft sealing device according to a first embodiment of the present invention.

【図2】図1のA−A線断面図である。FIG. 2 is a sectional view taken along the line AA of FIG.

【図3】(a)、(b)、(c)及び(d)はそれぞれ
上記第1実施例で用いられる遮蔽体の変形例を示す要部
の断面図である。
3 (a), (b), (c) and (d) are cross-sectional views of a main part showing a modified example of the shield used in the first embodiment.

【図4】本発明の第2実施例に係る軸封装置を示す要部
の断面図である。
FIG. 4 is a cross-sectional view of essential parts showing a shaft sealing device according to a second embodiment of the present invention.

【図5】図4のB−B線断面図である。5 is a sectional view taken along line BB of FIG.

【図6】上記第2実施例で用いられる遮蔽体の変形例を
示す要部の断面図である。
FIG. 6 is a cross-sectional view of a main part showing a modified example of the shield used in the second embodiment.

【図7】図6の一部側面図である。FIG. 7 is a partial side view of FIG.

【図8】図7の変形例を示す図である。FIG. 8 is a diagram showing a modification of FIG. 7.

【図9】上記第2実施例で用いられる遮蔽体の他の変形
例を示す断面図である。
FIG. 9 is a cross-sectional view showing another modification of the shield used in the second embodiment.

【図10】図9の側面図である。FIG. 10 is a side view of FIG. 9.

【図11】図9の変形例を示す図である。FIG. 11 is a diagram showing a modification of FIG. 9.

【図12】上記第2実施例で用いられる遮蔽体の更に他
の変形例を示す断面図である。
FIG. 12 is a cross-sectional view showing still another modified example of the shield used in the second embodiment.

【図13】図12の変形例を示す図である。FIG. 13 is a diagram showing a modified example of FIG.

【図14】図12又は図13の側面図である。FIG. 14 is a side view of FIG. 12 or FIG.

【図15】図14の変形例を示す図である。FIG. 15 is a diagram showing a modified example of FIG.

【図16】従来の軸封装置を示す断面図である。FIG. 16 is a cross-sectional view showing a conventional shaft sealing device.

【図17】図16のC−C線断面図である。17 is a cross-sectional view taken along the line CC of FIG.

【符号の説明】[Explanation of symbols]

1 回転軸 2、3 磁極 4 磁石 5 磁性流体 6 ハウジング 11 遮蔽体 12、13 突起 14 接着剤 21、22、23、24 遮蔽体 δ 磁極と回転軸との間の微小隙間 DESCRIPTION OF SYMBOLS 1 rotary shaft 2, 3 magnetic poles 4 magnets 5 magnetic fluid 6 housing 11 shields 12, 13 protrusions 14 adhesives 21, 22, 23, 24 shield δ minute gap between magnetic poles and rotary shafts

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 回転軸の軸方向に沿って間隔を置いた一
対の磁極を該回転軸の周りに微小隙間を置いて配置する
と共に、前記一対の磁極間には周方向に複数の磁石を介
装して、前記微小隙間に磁性流体を介在して成る軸封装
置において、少なくとも一つの磁石の、少なくとも回転
軸と対面する面を覆って、各磁石と前記微小隙間との間
を遮蔽する遮蔽体を設けたことを特徴とする軸封装置。
1. A pair of magnetic poles spaced apart along the axial direction of a rotating shaft are arranged with a minute gap around the rotating shaft, and a plurality of magnets are circumferentially arranged between the pair of magnetic poles. In a shaft sealing device in which a magnetic fluid is interposed in the minute gaps, at least one surface of at least one magnet facing the rotation axis is covered to shield each magnet from the minute gaps. A shaft sealing device, which is provided with a shield.
JP4168998A 1992-06-26 1992-06-26 Shaft sealing equipment Pending JPH0614493A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4168998A JPH0614493A (en) 1992-06-26 1992-06-26 Shaft sealing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4168998A JPH0614493A (en) 1992-06-26 1992-06-26 Shaft sealing equipment

Publications (1)

Publication Number Publication Date
JPH0614493A true JPH0614493A (en) 1994-01-21

Family

ID=15878462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4168998A Pending JPH0614493A (en) 1992-06-26 1992-06-26 Shaft sealing equipment

Country Status (1)

Country Link
JP (1) JPH0614493A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009130943A (en) * 2007-11-19 2009-06-11 Shinko Electric Co Ltd Linear actuator
CN110380564A (en) * 2019-08-06 2019-10-25 新昌县管富机械有限公司 A kind of novel anti-deviation device of three-phase motor shaft

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009130943A (en) * 2007-11-19 2009-06-11 Shinko Electric Co Ltd Linear actuator
CN110380564A (en) * 2019-08-06 2019-10-25 新昌县管富机械有限公司 A kind of novel anti-deviation device of three-phase motor shaft

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