JPH06137373A - Actuator level adjusting mechanism for magnetic levitation system vibration resistant device - Google Patents

Abstract

PURPOSE:To install actuators easily on the same level in a simple structure by erecting a half mirror so that one surface can be situated on a vertical surface being at an equal distance and an equal angle to a set of electromagnetic actuators, and arranging a reading microscope to find level deviation from images by the transmitted light and reflected light. CONSTITUTION:A reading microscope 8 is installed in a position where transmitted light A from an actuator 1 can be observed. An image (a) by the transmitted light A from the actuator 1 and an image (b) by reflected light B from an actuator 2 are projected in a visual field 9 of the microscope 8. When a level of the actuator 2 is low, a shim equivalent to level deviation E is inserted in the bottom part, and the level is adjusted so that the images (a and b) can coincide with each other. Next, a half mirror 6 is rotated by 135 degrees in a clockwise direction, and is inclined by 45 degrees to the actuator 1 being a reference to the axis X, and the microscope 8 is moved, and a level of an actuator 3 is adjusted similarly to the actuator 1. A level of an actuator 4 is adjusted similarly.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic levitation type vibration isolator for levitationally supporting a vibration isolation table by a plurality of electromagnetic actuators.

[0002]

BACKGROUND OF THE INVENTION With respect to a magnetic levitation type vibration isolator, the applicant of the present invention has proposed a magnetic vibration proof device using a magnetic bearing as an electromagnetic actuator in Japanese Patent Application Laid-Open No. 2-203040.

[0003]

For example, when a pair of the above-mentioned electromagnetic actuators are arranged in two orthogonal directions, respectively, and when the vibration isolation table is supported by these electromagnetic actuators, the four electromagnetic actuators are installed at exactly the same level. Required to do so. However, adjustment to the same level requires a complicated mechanism, and adjustment is troublesome.

An object of the present invention is to provide an actuator level adjusting mechanism for a magnetic levitation vibration isolator, which has a simple structure and allows a plurality of electromagnetic actuators to be easily installed at the same level.

[0005]

According to the present invention, in a magnetic levitation type vibration isolator in which a vibration isolation table is levitationally supported by a plurality of electromagnetic actuators, an equal distance, etc., to a set of the electromagnetic actuators to be relatively adjusted. A reading mirror is provided in which a half mirror is erected so that one surface is positioned on a vertical surface of an angle, and a level deviation is obtained from an image formed by transmitted light and reflected light from the half mirror to adjust the level.

[0006]

In the actuator level adjusting mechanism for the magnetic levitation type vibration isolator constructed as described above, for example, when four electromagnetic actuators are arranged on the two orthogonal axes at equal distances from the intersections, two orthogonal actuators are used. A half mirror is erected via self-leveling so that one surface is located on a vertical surface standing at the intersection of the axes.

When adjusting the levels of a pair of opposing electromagnetic actuators, one surface of the half mirror is made orthogonal to the straight line connecting both actuators. Therefore, a reading microscope is installed at an arbitrary position, the level deviation is visually recognized from the images of the transmitted light and the reflected light of both actuators, and if the adjustment side is lower than the reference side, the level of the adjustment side is increased by shims or the like.

Next, when adjusting the level on the side orthogonal to the reference side, the half mirror is rotated to a position of 45 degrees with respect to both sides, and the level is adjusted in the same manner as described above.
Adjust the level of each actuator.

[0009]

Embodiments of the present invention will be described below with reference to the drawings.

In FIG. 1 and FIG. 2, a plurality (four in the illustrated example) of first to fourth electromagnetic actuators 1, 2, 3 and 4 are arranged at equal distances L from an intersection point P on two orthogonal axes X and Y. A vibration isolation table (not shown) is supported by these actuators 1 to 4.

A half mirror 6 is erected via a self-leveling mechanism 7 so that one surface is located on a vertical surface 5 passing through the intersection P and orthogonal to the axis X. The self-leveling mechanism 7 is provided with a mechanism (not shown) for rotating the half mirror 6. A reading microscope 8 for adjusting the levels of the actuators 1 and 2 is provided at the position shown.

Opposed actuators 1, 2 or 3, 4
When adjusting the level of the actuator (the figure shows a case where the level of the actuator 2 is adjusted with the level of the actuator 1 as a reference), the position shown in the figure (the transmitted light A from the actuator 1 can be observed at this position). The reading microscope 8 is installed at any position. Then, as shown in FIG. 3, an image a by the transmitted light A from the actuator 1 and an image b by the reflected light B from the actuator 2 are transferred to the field of view 9 of the microscope 8. Therefore, in the illustrated example, since the level of the actuator 2 is low, a shim (not shown) corresponding to the level deviation E is inserted at the bottom of the actuator 2 to adjust the level so that the image b matches the image a.

Next, as shown in FIG. 4, the half mirror 6 is rotated clockwise by 135 degrees from the state of FIG. 1, and the actuator 1 serving as a reference is tilted with respect to the axis X at 45 degrees. Then, the reading microscope 8 is moved to the illustrated position, and the level of the actuator 3 is adjusted with respect to the actuator 1 in the same manner as described above.

Finally, the half mirror 6 and the reading microscope 8
Is moved to the target position with respect to the axis X, and the level of the actuator 4 is adjusted with respect to the actuator 1 to finish.

5 and 6 show an embodiment of the level adjusting device for the actuator 10, in which level adjusting bolts 13 are provided near the body mounting bolts 12 provided at the four corners of the lower flange 11, and the body mounting bolts are provided. After temporarily tightening with 12, the bolt 13 is screwed and loosened to raise and lower the level of the actuator 10, and then the main body mounting bolt 12 is finally tightened.

[0016]

Since the present invention is configured as described above, a plurality of electromagnetic actuators can be easily adjusted to the same level with a simple structure.

[Brief description of drawings]

FIG. 1 is a top view of an opposing actuator according to an embodiment of the present invention when a level is adjusted.

FIG. 2 is a side view of FIG.

FIG. 3 is a view showing an example of a field of view of a reading microscope.

FIG. 4 is a plan view when adjusting the levels of adjacent actuators.

FIG. 5 is a top view showing an example of a level adjusting device for an actuator.

6 is a side view of FIG.

[Explanation of Codes] A ... Transmitted light a, b ... Image B ... Reflected light E ... Level deviation P ... Intersection 1, 2, 3, 4, 10 ... Electromagnetic actuator 5・ ・ ・ Vertical surface 6 ・ ・ ・ Half mirror 7 ・ ・ ・ Self-leveling 8 ・ ・ ・ Reading microscope 9 ・ ・ ・ Field of view 11 ・ ・ ・ Lower flange 12 ・ ・ ・ Main body mounting bolt 13 ・ ・ ・ Level adjustment bolt

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kenichi Yasuno 2-1-1, Tobita-cho, Chofu-shi, Tokyo Inside Kashima Construction Co., Ltd. (72) Inventor Kei Kei Ando 2-1-1-1, Tobita, Chofu-shi, Tokyo No. Kashima Construction Co., Ltd. Technical Research Institute (72) Inventor Kaoru Ueno 1-2-7 Moto-Akasaka, Minato-ku, Tokyo Within Kashima Construction Co., Ltd. (72) Inventor Taiichi Tsuji, Moto-Akasaka 1-2-chome, Minato-ku, Tokyo No. 7 Kashima Construction Co., Ltd. (72) Inventor Naoto Adachi No. 19-1 Tobita, Chofu-shi, Tokyo Kashima Construction Co., Ltd. Technical Research Institute

Claims (1)

[Claims] 1. In a magnetic levitation type vibration isolator that floats and supports an anti-vibration table by a plurality of electromagnetic actuators, one surface is positioned on a vertical surface that is equidistant and equiangular to a set of the electromagnetic actuators that are relatively adjusted. An actuator level adjustment for a magnetic levitation vibration eliminator, characterized in that a half mirror is provided upright on the disk and a reading microscope is provided for performing level adjustment by obtaining a level deviation from an image formed by transmitted light and reflected light from the half mirror. mechanism.