JPH0613142U - Wafer cassette gripper - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention is a cassette gripping tool for semiconductor wafers. [Structure] A fixed grip portion is provided which is bent outward from the lower portion of the fixed handle in an L-shape, a fitting hollow portion is provided at the lower portion of the fixed handle, and a movable grip portion which is bent outward in an L-shape is provided in the movable handle. A cassette gripping tool characterized in that an integrally provided member is fitted into and supported by the fitting hollow portion, and a stopper is provided below a fixed handle.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a cassette gripping tool for semiconductor wafers.

[0002]

[Prior art]

 Conventionally, various kinds of cassette grippers for semiconductor wafers have been developed, but they have the following problems such as a complicated structure and difficulty in disassembly and cleaning.

[0003]

[Problems to be solved by the device]

 The present inventor has conducted various studies to eliminate the drawbacks of the conventional wafer cassette gripping tools, and as a result, has completed a cassette gripping tool having a simple structure and easy to clean.

[0004]

[Means for Solving the Problems]

 Next, a cassette gripper according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a cassette gripper according to the present invention. Reference numeral 1 is a fixed grip, 2 is a fixed grip, 3 is a movable grip, 3a is a notch stopper, 4 is a movable grip, 5 is a stopper, 6 and 7 are cassette grip grooves, and 8 is a support.

FIG. 2 is an exploded view of the cassette gripper according to the present invention, in which the fixed grip 2 is bent outward in an L-shape from the lower end of the fixed grip 1. Further, a fitting hollow portion 9 for fitting a movable handle 3 which will be described later is provided in the lower portion of the fixed handle 1. A locking device 10 is provided on the fixed handle 1 so as to rotate. Then, since the locking device 10 does not come off from the movable handle 3, the cut 3a is made. A concave portion 11 into which the bottom portion of the movable handle 3 is fitted is provided on the L-shaped upper fixed handle portion side of the fixed grip portion 2. In some cases, the recess 11 need not be provided by changing the position at which the movable handle 3 is supported by the fixed handle 1. In that case, the movable gripping portion 4 becomes larger than the fixed gripping portion 2 and is not symmetrical, which is not very aesthetically pleasing.

Under the fixed grip portion 2 and the movable grip portion 4, there are provided cassette grip grooves 6 and 7 that fit into the flanges of the wafer cassette. Further, a flexible sheet-like member 12 such as a soft PVC sheet for the purpose of a cushion function and a non-slip function is provided on the wafer cassette sandwiching surface of the fixed grip portion 2 and the movable grip portion 4.

A stopper 5 is provided below the fixed handle 1 at a position of an angle of 90 ° with the fixed grip 2. The stopper 5 may be integrally formed with the fixed handle 1 and the fixed grip portion 2 in advance, but only the stopper 5 is formed and is integrally provided when the movable handle 3 described later is supported by the fixed handle 1. May be.

In FIG. 2, the movable handle 3 is adjusted to have a thickness that allows the movable handle 3 to be fitted into the fitting hollow portion 9 of the fixed handle 3. The grip portion of the movable handle 3 may have the same thickness as the fixed handle 1.

In order to combine the fixed handle 1 and the movable handle 3, the hole 13 provided in the lower part of the movable handle 3 and the hole provided through the upper part of the stopper 5 to the lower part of the fixed handle 1 are put together. As described above, the movable handle 3 is fitted into the fitting hollow portion 9 of the fixed handle 1 and the screw 14 is passed through this hole and tightened with a nut. In the normal state, the movable gripper 4 of the cassette gripper thus integrally configured is in an open state, but it is movable by pulling the movable grip 3 toward the fixed grip 1 to grip the wafer cassette. The holding part 4 can move toward the fixed holding part 2 side to hold the wafer cassette.

As shown in FIG. 3, the cassette holder according to the present invention is provided with a dustproof cover 15 inside the upper portions of the fixed gripper 2 and the movable gripper 4. In this case, it is sufficient to fix it only with the screw 16 on the fixed grip portion 2 side. The dustproof cover 15 can enhance the dustproof effect by making it slightly larger than the size of the wafer cassette. The material of the dustproof cover 15 is not particularly limited, but a transparent plastic plate that allows the wafers and the like in the cassette to be seen is preferable.

[0011]

[Effect of device]

 According to the cassette gripper of the present invention, the wafer can be freely moved or set in the machine vertically, horizontally, or with one hand without completely touching the wafer, and also has a stopper when the cassette is moved. Therefore, the wafer can be prevented from dropping. Further, since the cassette gripper of the present invention is a fully assembled type, it is easy to clean, and if synthetic resin (particularly PVC) is used, less dust and dirt are generated.

[0012]

[Brief description of drawings]

FIG. 1 is a perspective view of a cassette gripper according to the present invention.

FIG. 2 is an exploded view of the cassette gripper of the present invention

FIG. 3 is a front view of the cassette grip of the present invention when a dust cover is provided.

[Explanation of symbols]

 1 fixed grip 2 fixed grip 3 movable grip 4 movable grip 5 stopper 6, 7 cassette grip groove

Claims (3)

[Scope of utility model registration request] 1. A movable grip that is provided with a fixed grip portion that is bent outward from the lower portion of the fixed handle in an L-shape, is provided with a fitting hollow portion at the lower portion of the fixed grip, and is bent outward in an L shape in the movable handle. A cassette gripping tool, characterized in that a support part of a member integrally provided with the support part is fitted into and supported by the fitting hollow part, and a stopper is provided below the fixed handle. 2. A movable grip that is provided with a fixed grip portion that is bent outward from the bottom of the fixed handle in an L-shape, has a fitting hollow portion in the lower part of the fixed handle, and that is bent outward in an L-shape in the movable grip. A cassette gripping tool characterized in that a supporting part of a member having an integrally formed part is fitted into and supported by the fitting hollow part, and further a stopper is provided below a fixed handle of the fixed gripping part and the movable gripping part. A cassette gripping tool characterized in that a flexible sheet-like member is provided on a wafer cassette holding surface, and a stopper is provided below a fixed handle. 3. A movable gripping part provided with an L-shaped fixed gripping portion outward from a lower part of the fixed grip, a fitting hollow part provided at a lower part of the fixed gripping part, and a movable gripping part curved outwardly in an L-shape on the movable grip. A support part of a member integrally provided with is inserted into and supported by the fitting hollow part, and a flexible sheet-like member is provided on the wafer cassette holding surface of the fixed gripping part and the movable gripping part. A cassette gripping tool characterized in that a stopper is provided on the.