JPH06131032A - Robot device and teaching method for robot device - Google Patents

Abstract

PURPOSE:To easily attain the correcting operation of the teaching position and attitude of a robot by a tool and a simple operation in a field. CONSTITUTION:The grip part 1402 of an inside unit 1403 is gripped by a robot hand 1002, and an outside unit 1404 surrounding the inside unit 1403 is disposed on a working stand. Then, a distance and inclination between the inside unit 1403 and the outside unit 1404 is measured by sensors 1210a-1210f, the relative position and attitude of the inside unit 1403 to the outside unit 1404 are calculated by a robot controller 1004, so that the position and attitude of a robot hand can be corrected.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot device and a robot system, and more particularly, to a robot device and a robot system of a system which measures the position and posture of a robot hand for grasping a work and performs teaching playback.

[0002]

2. Description of the Related Art Although a robot operates based on teaching data stored in advance, it is difficult to move it to a position / posture according to a command due to mechanical errors such as size and rotation angle. For this reason, teaching work is indispensable when introducing a robot to the site, and simplification thereof is one of the challenges of robot automation.
In addition, it is desired that after the introduction of the robot at the site, the correction work in the case where the robot main body or the surrounding environment has some change is completed in a minimum time without stopping the line.

Japanese Unexamined Patent Publication No. 63-193203 discloses a method of reteaching only one representative point of the work locus to correct the mechanical parameter after the robot hand is replaced. In addition, Japanese Patent Application Laid-Open No. 1-175608 discloses that
A method of actually measuring the mechanical parameters of the robot hand before and after the replacement and correcting the coordinate conversion matrix is disclosed.

[0004]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
The method disclosed in Japanese Unexamined Patent Publication No. 3203 has a problem that only a skilled worker can perform the work of exactly matching the position / posture of the teaching point before and after the robot hand replacement. Further, in the method disclosed in JP-A-1-175608, it is necessary to measure the attachment error of the robot hand with a large three-dimensional measuring instrument, and it is practically difficult to bring this measuring instrument into the operation line. was there.

On the other hand, the type of manufacturing apparatus targeted for the work is limited, such as the transfer operation of a wafer cassette in a semiconductor pre-process bay using a self-propelled robot, and there are a plurality of manufacturing apparatuses of the same type. In such a case, even though the position / orientation of the robot at the gripping points are similar, each manufacturing apparatus must be corrected individually. An object of the present invention is to provide a robot apparatus and a robot system that can perform the work of correcting the teaching position / orientation of the robot by using a jig that can be used in the field, and can further simplify and facilitate the operation. To do.

[0006]

In order to solve the above-mentioned problems, an inner unit, an outer unit arranged on the outer periphery of the inner unit, a plurality of displacement sensors fixed to the outer unit or the inner unit, and an arithmetic unit. The robot hand position / orientation measuring device is configured by the, the outer unit is fixed on the work table in the same way as the work object, the inner unit is attached to the gripping claw of the robot hand, and the outer unit is connected to the outer unit by the output of each displacement sensor. Measure the distance between the inner units to calculate the position / orientation value of the robot hand.

Further, the inner unit has three outer units.
It should have three faces that are approximately parallel to one face. Further, the grip portion of the inner unit has the same shape as the grip portion of the work object such as the semiconductor wafer holder. Further, the workbench installation surface of the outer unit has the same shape as the workbench installation surface of the work object. Further, the inner unit is made to have the same weight as the work object.

Further, an inclination sensor is provided in the outer unit or the inner unit, and the distance and angle between the outer unit and the inner unit are measured by the output of each displacement sensor and the inclination sensor to calculate the position / orientation value of the robot hand. To do so. Further, a display unit for displaying the position / orientation data of the robot hand calculated by the calculation unit and / or an interface unit for transferring the position / orientation data of the robot hand to the robot controller are provided.

Also, the position / orientation data of the outer unit and / or the inner unit before and after replacement are stored,
The position and orientation data of both units before and after replacement are compared to correct the mechanical parameters of the robot hand after replacement. Also, the position / orientation data before and after replacement of the robot hand is stored, and the position / orientation data before and after replacement of the robot hand is compared to correct the mechanical parameter of the robot hand after replacement. .

Further, the coordinate conversion matrix of the robot hand for each mounting position is stored to correct the mechanical parameter of the robot hand. Further, for a plurality of the above robot devices, the robot hand mechanical parameters of the robot device having teaching data, the measurement values obtained from the robot hand position / orientation measuring device, and the robot hand of the robot having no teaching data. The mechanical parameter of the robot hand of the robot having no teaching data is corrected from the measured value obtained from the position / orientation measuring device.

[0011]

The robot hand grips the inner unit without slack by making the grip of the inner unit into the same shape as the grip of the work object such as the semiconductor wafer holder. Also,
By making the workbench installation surface of the outer unit the same shape as the workbench installation surface of the work object, the outer unit is installed on the workbench without slack. Further, by making the inner unit have the same weight as the work target, the robot hand grips the inner unit under the same condition as the work target.

Further, each displacement sensor and inclination sensor detect a distance and a twist between three substantially parallel surfaces of the inner unit and the outer unit. The calculation unit calculates the position / orientation value of the robot hand, and further compares the position / orientation data of the outer unit, inner unit, robot hand, etc. before and after replacement to correct the mechanical parameters of the robot hand after replacement. To do.

Further, for the plurality of robot devices, the arithmetic unit provides the teaching parameter with the robot hand mechanism parameter of the robot device having teaching data, the measurement value obtained from the robot hand position / orientation measuring device, and the teaching data. The mechanical parameter of the robot hand of the robot having no teaching data is corrected from the measurement value obtained from the robot hand position / orientation measuring device of the robot having no robot.

[0014]

【Example】

[Embodiment 1] FIG. 1 is a perspective view of a robot position / orientation measuring apparatus according to the present invention, FIGS. 2 and 3 are sectional views taken along the line AA and BB in FIG. 1, and FIG. Explanatory drawing, FIG. 5 is a perspective view of the inner unit of FIG.

In FIG. 1, the robot hand position / orientation measuring device comprises an inner unit 11 in which three flat plates are combined at right angles to each other, a robot hand 21, a gripping claw portion 14,
A box-shaped outer unit 12 that is connected to and surrounds the inner unit 11, six displacement sensors 13 (13a to 13f) attached to the inner surface of the outer unit 12, and a data computing unit 15 that fetches and computes each displacement sensor output. , A data display unit 16 for displaying the calculation result, and an interface unit 17 for transferring position / orientation information to the robot controller.

A robot hand 21 is attached to the tip of the robot arm 22, and the robot hand 21 holds the holding claw portion 14. It is desirable that the overall shape of this portion is the same as the shape of the gripping claw used when gripping the actual gripping target. Further, the gripping claw portion 14 and the inner unit 1
The total weight of 1 is set to be approximately the same as the weight of the object to be gripped by the robot in the actual work. Further, the outer unit 12 has a box shape capable of accommodating the inner unit 11, and the lower portion thereof has the same shape as the lower portion of the object to be grasped during actual work.

As shown in FIGS. 2 and 3, the outer unit 12
Six laser type displacement sensors 13a to 13f are attached to predetermined positions inside the. FIG. 4 shows various coordinate systems in FIG. 1, and includes three displacement sensors 13a to 13c.
Are mounted so that they are not collinear on the surface Oxy, and each measures the distance from the surface O'x'y 'of the inner unit 11. Further, the two displacement sensors 13e and 13d are attached so that the direction vector of the straight line connecting them to the surface Oxz does not coincide with the normal vector of the surface O'x'y 'of the inner unit 11. Inner unit 11
Measure the distance from the plane O'x'z '.

Further, one displacement sensor 13f has a surface Oyz.
It is mounted on the top and measures the distance from the surface O'y'z 'of the inner unit 11. The data calculation unit 15 includes sensors 13a-1
Each output from 3f is stored and calculated, and the calculation result is displayed on the data display unit 16 and simultaneously transferred to the robot controller via the interface unit 17. Next, the operation of the robot position / orientation data measuring device in this embodiment will be described. Unless otherwise specified, the coordinates below will be described based on the Cartesian coordinate system O-xyz fixed to the outer unit 12.

As shown in FIG. 1, the outer unit 12 of the robot position / orientation data measuring device works in the same manner as when the actual gripping object is fixed on the work station 23. Station 2
It is fixed on the work station 23 by engaging with the recess 23 a on the upper part 3. After that, the grip 21 is grasped by the hand 21 by the teaching data of the robot or the manual operation, and the position / orientation data of the inner unit 11 is calculated by the data calculator 15 from the measured values of the sensors 13a to 13f.

Since the dimensions of the outer unit 11 and the mounting positions of the respective sensors are known, first of all, the displacement sensors 13a to 13a.
The three points on the plane O'x'y 'of the inner unit 11 are measured by c and the plane O'x'y' is calculated by the equation (1).

[Equation 1] However, P ₁ (x ₁ , y ₁ , z ₁ ), P ₂ (x ₂ , y ₂ , z ₂ ), P ₃ (x ₃ ,
y ₃ , z ₃ ) is a plane measured by the displacement sensors 13a to 13c
It is a point on O'x'y '. Further, the displacement sensors 13d and 13e
Planes O'x'y 'that make up each output and inner unit 11
The plane forming the inner unit 11 from the orthogonal relationship with
Equation (2) of O'x'z 'is calculated.

Further, P ₄ (x ₄ , y ₄ , z ₄ ), P ₅ (x ₅ , y ₅ ,
z ₅ ) is a measurement point on the plane O'x'z 'by the displacement sensors 13d and 13e, and (A ₁ , B ₁ , C ₁ ) is the plane O'x'y' of the plane O'x'y 'obtained by the equation (1). It is a normal vector. In addition, the output from the displacement sensor 13f and the plane forming the inner unit 11
The plane O'y'z 'forming the inner unit 11 is calculated from the orthogonal relationship with O'x'y' and O'x'z 'as in Expression (3). However, P ₆ (x ₆ , y ₆ , z ₆ ) is the measurement point of the displacement sensor 13f, and (A ₂ , B ₂ , C ₂ ) is the plane obtained by the equation (2).
It is a normal vector on O'x'z '.

Equations (1)-(3) can be transformed into standard forms such as equations (4)-(6).

[Equation 2]

[Equation 3]

[Equation 4] From the above, the equations for the three planes that form the inner unit 11 can be obtained, so the known outer unit coordinate system O− shown in FIG.
The inner unit coordinate system O'−x'y'z 'for xyz is determined.

Since the origin of the inner unit coordinate system O'-x'y'z 'is the intersection of the planes O'x'y', O'y'z ', O'x'z', the inner unit coordinate system The coordinates on O'-x'y'z 'can be described by the outer unit coordinate system O-xyz shown in equation (7).

[Equation 5] Further, since the normal vectors on the three planes forming the inner unit 11 indicate the respective axial directions of the inner unit coordinate system, the position / orientation relationship of the inner unit coordinate system with respect to the outer unit coordinate system is expressed by the formula (8). It becomes like the transformation matrix of 4 rows and 4 columns shown in.

[Equation 6]

From equation (8), for example, the Euler angle defined in "Robot Manipulator" (RP Paul, translated by Tsuneo Yoshikawa, Corona Publishing Co. (1984), pp. 43-46) (Φ, θ, ψ) is as in formula (9), and roll pitch yaw (φ, θ, ψ) is as in formula (10).
Is calculated as follows.

[Equation 7]

[Equation 8]

The data calculation unit 15 performs each of the above calculations to obtain the position / orientation of the robot hand when the robot hand 21 holds the robot hand holding claw portion 14, and the required calculation result is displayed on the data display unit 16. Send and display. As a result, the robot can be taught while monitoring the measurement results from the robot position / orientation data measuring device, so that the teaching work that has hitherto relied on visual inspection can be made more efficient and optimized. Further, the teaching data is corrected in the robot controller by correcting the teaching data by displaying the data on the data display section 16 or transferring the calculation result to the robot controller via the interface section 17.
The position of 1 can be corrected.

Further, the position / orientation deviation of the hand 21 corresponding to the position / orientation change of the robot body or the hand 21 can be clarified. Therefore, the conversion matrix obtained at the time of teaching the robot or the conversion matrix calculated from the above measurement data immediately after the teaching is stored, and the conversion matrix calculated from this and the measurement data after the position / orientation change of the robot body, the hand 21, etc. Using and, the conversion matrix indicating the position / orientation change of the hand shown in Expression (11) is obtained.

[0026]

[Equation 9] The suffix A in the equation (11) shows the state before the change, and the suffix B shows the state after the change. Further, the product of the inverse matrix of TA and TB is a conversion matrix showing the change in position / posture of the hand. In the present invention, the teaching data is corrected on-line or off-line based on the information of the equation (11) in response to the position / orientation change of the robot body or the robot hand.

Further, since the total weight of the robot hand gripping claw portion 14 and the inner unit 11 is set to be the same as the weight of the object to be gripped by the robot in the actual work, the load applied to the robot is the same as in the actual work. can do. In addition,
In the above-described embodiment, the three flat plates forming the inner unit 11 are arranged so as to be orthogonal to each other. However, if they are not orthogonal to each other, coordinate conversion may be performed and the same measurement may be performed thereafter.

[Embodiment 2] Three displacement sensors may be attached to each of the three planes forming the outer unit 12. Assuming that points obtained from each of the nine displacement sensors are P _{1 to} P ₉ , each plane is expressed by equations (12) to (1).
It can be expressed as in 4).

[Equation 10] Since the formulas (12), (13), and (14) have the same format, the calculation program of the data calculation unit 15 can be made common and the efficiency can be further improved. Furthermore, the formula (13) can be expressed by the formula (12).
Since the calculation result of is not used, the calculation error is not accumulated. Further, since the detected surface information increases with the increase in the number of sensors, the information to the operator at the time of teaching the robot also increases.

[Embodiment 3] FIG. 6 is a perspective view showing a case where the inner unit 11 is formed into a hexahedron shape to facilitate manufacture. It is possible to obtain the same effects as those of the first and second embodiments.

[Embodiment 4] FIG. 7 shows a case where each displacement sensor 13 is attached to the inner unit 11 side. In this case, the coordinate transformation matrix of the outer unit coordinate system with respect to the inner unit coordinate system is obtained, which is the inverse matrix of equation (8).

[Fifth Embodiment] FIG. 8 shows the displacement sensor 13 described above.
This is the case where the tilt sensor 81 is provided in addition to a to 13d.
If the most preferable position / orientation of the coordinate system O'-x'y'z 'with respect to the coordinate system O-xyz is when the plane O'x'y' is parallel to the plane Oxy, then the plane O ' The normal vector of x'y 'is an expression
It becomes like (15).

[Equation 11] Attach the tilt sensor 81 to the bottom of the inner unit 11,
The rotation θ around the y axis and the rotation ψ around the x axis when the plane O′x′y ′ rotates φ around the z axis are measured. Plane O'x'y 'at measurement
Assuming that the normal vector of is expressed by equation (16), the relationship between equations (15) and (16) is expressed by equation (17).

The normal vector of the plane O'x'y 'is obtained from the equation (17), and the plane O'x'y' is calculated from the output of the sensor 13a and the equation (3) or the equation (6). Plane O'y'z and plane
O'z'x 'is obtained in the same manner as in Example 1, and the position / orientation of the coordinate system O'-x'y'z' with respect to the coordinate system O-xyz is obtained. In this embodiment, the number of displacement sensors and the amount of calculation for obtaining the plane can be reduced.

[Embodiment 6] In this embodiment, displacement sensors 13a to 13d are arranged in a horizontal articulated SCARA robot 90 as shown in FIG. Most of the scalar-shaped robots are four-degree-of-freedom robots, so two of the three parameters representing the posture of the robot hand are known. Therefore, in this embodiment, the robot hand position / orientation data is set to 4
Become individual. [Embodiment 7] FIG. 10 shows an example of the system configuration when the teaching position / orientation data correction method according to the present invention is applied to a multi-joint robot for wafer cassette transfer work. Articulated robot 1001, robot hand 1002, robot hand position / orientation measuring device 100
3, robot controller 1004, gripper 1005
And a pair of tabs 1006. [0035] FIG. 11 is a joint configuration diagram of the articulated robot 1001. 6 joints J1, J2, J3, J4, J
5, J6, L1, L2, L3, L4, LY1, LY
2, LY3 and LX are the mechanical parameters. The robot coordinate system and coordinate transformation matrix are defined as follows. _{O 0 -X 0 Y 0 Z 0} : coordinate system fixed to the robot base O _i -X _i Y _i Z _i: Robot i-th coordinate system fixed to the driven part O ₆ -X ₆ Y ₆ Z _6: fixed to the robot hand 1002 attached surface coordinate system _{O t -X t Y t Z t} : fixed to the robot hand 1002 coordinate system (tool coordinate system) T _i: from O _i -X _i Y _i Z _i O
_i-1 -X _i-1 Y _i-1 Z _i-1 coordinate conversion matrix [0036] As is well known, an arbitrary point is coordinate system O ₀ -X ₀ Y.
_The vector X ₀ represented by ₀ Z ₀ and the coordinate system O ₆ -X ₆ Y ₆ Z ₆
There is a relation of Expression (18) between the vector X ₆ represented. T is a matrix with 4 rows and 4 columns, and θ1, θ2, θ3, θ4, θ
5, θ6 is the rotation angle of each joint. In addition, T is given by the equation (19).
Define as follows.

[Equation 12] The X ₆ in the coordinate O _t -X _t Y _t Z T _t here are obtained [0037] the relationship between the _t those expressed on the a X _t Equation (20) is a matrix of 4 rows and 4 columns, alpha, β, γ
The coordinate system O ₆ -X ₆ Y ₆ coordinate system expressed in Z ₆ O _t -X _t Y _t
It is an angle representing the posture of Z _t , and may be, for example, an Euler angle. Further, Px, Py, Pz are coordinate system O ₆ −.
It is the position of the coordinate system O _t expressed by X ₆ Y ₆ Z ₆ . Therefore, the equation (21) is obtained from the equations (18) and (20).
By setting X _t to the center position of the robot hand 1002 and performing coordinate conversion of the equation (21), the robot controller 1004 causes the coordinate system O ₀ −X ₀ Y determined by the position of the taught robot and T, T _{t. The} posture with respect to ₀ Z ₀ is obtained and stored in the storage device, and at the time of playback, the formula (21) is inversely transformed to obtain the angular joint angle, and the articulated robot 1001 is operated. [0038] FIG. 12 is a block diagram of the robot controller 1004. In the storage device 1202 of the robot controller 1004, an operator teaches a teaching box 1208.
Off-line data obtained from teaching data, CAD information, etc., which are previously taught by using, and an operation sequence are stored. The CPU 1201 performs coordinate conversion of these data to calculate the target angle of the angular joint, and the D / A converter 1 so that the current value of the angular joint angle obtained from the counter 1206 of the encoder 1207 becomes the target value.
Command to 203, servo amplifier 1204, motor 1
205 is driven to operate the articulated robot 1001. [0039] FIG. 13 is a perspective view of a wafer cassette 1301 as a target work. The wafer cassette 1301 is formed of Teflon, polypropylene or the like, has an opening at its upper end, and a groove 1 for storing semiconductor wafers in parallel therein.
It is equipped with 302. Further, a gripped portion 1303 protruding to the outside is provided at the upper end of the opening, and the gripped portion 130 is further provided.
Protrusion 130 parallel to the semiconductor wafer housed vertically in 3
Have 4. The claw 1006 of the robot hand 1002 is provided with a guide portion that matches the shape of the gripped portion 1303 of the wafer cassette 1301 and the protrusion 1304, and is inserted into the gripped portion 1303 to grip the wafer cassette 1301. [0040] FIG. 14 is a block diagram of a robot hand position / orientation measuring apparatus 1003 according to the present invention. The robot hand position / orientation measuring device 1003 includes a grasped part 1402,
It is composed of an inner unit 1403, an outer unit 1404, and sensors 1210a to 1210f. Grasped part 1
The shape of 402 is the same as the gripped portion 1303 of the wafer cassette. The inner unit 1403 is molded integrally with the gripped portion 1402 and is composed of at least three surfaces that are not parallel to each other, and the weight thereof is almost the same as that of the wafer cassette 1301. [0041] The shape of the portion 1405 to be mounted at the mounting position of the manufacturing apparatus of the outer unit 1404 is changed to the wafer cassette 13
01 lower part 1305 and inner unit 1403
Of the six sensors 1210a ...
1212f is attached and the distance between the inner unit 1403 and the outer unit 1404 is measured. [0042] FIG. 15 is a diagram showing a coordinate system of the robot hand position / orientation measuring apparatus 1003, which is defined as follows. Os-XsYsZs: Robot hand position / orientation measuring device 1
Coordinate system Ow-XwYwZw fixed to the outer unit 1404 of 003: Robot hand position / orientation measuring device 1
The coordinate system sensors 1210a to 1210c fixed to the inner unit 1403 of 003 are attached so as not to be linearly aligned with the surface Os-XsYs, and the opposite surfaces Ow-Xw.
Measure the distance from Yw. [0043] In the sensors 1210d and 1210e, the direction vector of the straight line connecting them is the plane O of the inner unit 1403.
It is attached to the surface Os-YsZs so as not to coincide with the normal vector of w-YwZw, and the distance from the surface Ow-YwZw is measured. The sensor 1210f is attached to the surface Os-XsZs and measures the distance from the opposite surface Ow-XwZw. Next, a procedure for measuring the position / orientation of the robot hand 1002 with respect to the coordinate system Os-XsYsZs fixed to the outer unit 1404 will be described. [0044] First, the robot hand position / orientation measuring apparatus 1003 is attached to the attachment location of the manufacturing apparatus, and the articulated robot 1001 is operated using the teaching data or the teaching BOX 1208 stored in the storage apparatus 1202, and the robot hand 1002 is operated. The grip portion 1402 is gripped. Dimensions of outer unit 1404, sensor 12
Since the mounting positions of 10a to 1210f are known, three points on the plane Ow-XwYw of the inner unit are measured from the outputs of the sensors 1210a to 1210c to calculate the equation (22) of the plane Ow-XwYw. [0045]

[Equation 13] Here, P ₁ (X ₁ , Y ₁ , Z ₁ ), P ₂ (X ₂ , Y ₂ , Z ₂ ), P ₃
(X ₃ , Y ₃ , Z ₃ ) is a point on the plane Ow-XwYw obtained from the outputs of the sensors 1210a to 1210c. Further, the equation (23) of the plane Ow-YwZw is calculated from the orthogonal relationship between the outputs of the sensors 1210d and 1210e and the planes Ow-XwYw and Ow-YwZw of the inner unit 1403. P
₄ (X ₄ , Y ₄ , Z ₄ ) and P ₅ (X ₅ , Y ₅ , Z ₅ ) are the sensors 121.
This is a point obtained from the outputs of 0d and 1210e, and (A
₁ , ₁ , B ₁ , C ₁ ) are normal vectors of the plane Ow-XwYw. [0046] Also, the output of the sensor 1210f and the planes Ow-XwYw, Ow-YwZw, Ow- of the inner unit 1403.
From the orthogonal relationship between XwZw, the equation (24) of the plane Ow-XwZw
To calculate. Note that P ₆ (X ₆ , Y ₆ , Z ₆ ) is the sensor 121.
It is a point obtained from the output of 0f, and (A ₂ , B ₂ , C ₃ ) is a normal vector of the plane Ow-YwZw. Equation (25),
(26) and (27) are equations (22), (23) and (24).
Is a standard system rewritten. [0047]

[Equation 14]

[Equation 15]

[Equation 16] Since the equations for the three planes of the inner unit 1403 orthogonal to each other have been obtained by the above procedure, the inner unit coordinate system Ow-XwYwZw for the coordinate system Os-XsYsZs fixed to the outer unit 1404 is determined. [0048] The origin of the inner unit coordinate system is the plane Ow-Xw.
Since it is the intersection of Yw, Ow-XwZw, and Ow-YwZw, it is described by the outer unit coordinate system as shown in Expression (28). Also, planes Ow-XwYw, Ow-YwZw, Ow-XwZ
w normal vectors (A ₁ B ₁ , C ₁ ), (A ₂ , B ₂ , C ₂ ),
_{(A 3, B 3, C} 3) indicates the direction of each axis of the inner unit coordinate system, which from the position and orientation of the inner unit coordinate system with respect to the outer unit coordinate system of four rows and four columns as shown in equation (29) It becomes a coordinate transformation matrix. [0049]

[Equation 17]

[Equation 18] Further, since the positional relationship between the inner unit 1403 and the grasped portion 1402 is known, the position / orientation of the robot hand 1002 can be similarly obtained. [0050] Next, a teaching data correction method according to the present invention when the robot hand 1002 is replaced will be described. When the multi-joint robot 1001 is introduced to the site and the transfer work becomes possible, the robot hand position / orientation measuring device 1003 is used to set the outer unit 1 of the robot hand 1002 for each wafer cassette mounting position.
The position / orientation with respect to 404 is measured, and the storage device 1202
Remember. Since the lower portion 1405 of the outer unit 1404 has the same shape as the lower portion 1305 of the wafer cassette 1301, the robot hand position / orientation measuring device 1003 can be firmly attached to the working position. [0051] Further, since the shape of the gripped portion 1402 is the same as that of the wafer cassette 1301, the robot hand 100
2 can be measured without replacement. Furthermore, since the weight of the inner unit 1403 is the same as the weight of the wafer cassette 1301, the load on the articulated robot 1001 is the same as the actual work. Therefore, the conditions for actual work and measurement are the same. Here, consider a case where the robot hand 1002 is deformed due to a collision or the like and is replaced. [0052] FIG. 16 shows the positions of the grip points of the articulated robot 1001 before and after the replacement of the robot hand 1002.
It is a figure which shows a posture. If the deformation is only the robot hand 1002, the mechanism parameters other than the robot hand 1002 are the same as those in the previous teaching. Therefore, the articulated robot 1001 itself moves in the position / posture before the collision according to the equation (18). However, when the robot hand 1002 is replaced, even if the robot hand 1002 has the same shape, Tt of the equation (20) changes due to dimensional error and mounting error.
As shown in 6, the position / posture is different from that in the previous teaching, and the carrying operation cannot be performed as it is. [0053] Then, the teaching position / posture is corrected. First, the articulated robot 1001 is moved to one of the mounting positions, and the gripped portion 1 of the inner unit 1403 of the robot hand position / orientation measuring device 1003 mounted at the mounting position
The robot hand 1002 holds 402. Since the robot hand position / orientation measuring device 1003 has a sufficient gap between the inner unit 1403 and the outer unit 1404, even if the position / orientation of the robot hand 1002 deviates from the position / orientation of the previous teaching, the inner unit 1403. The gripped portion 1402 of the outer unit 140
4 can be gripped without shifting. [0054] Next, the robot hand position / orientation measuring apparatus 1003 obtains the position / orientation of the robot hand 1002 with respect to the coordinate system Os-XsYsZs fixed to the outer unit 1404. FIG. 17 shows the relationship between the coordinate system Os-XsYsZs of the outer unit 1404 and the coordinate systems before and after the robot hand 1002 is replaced. Here, the coordinate transformation matrix is defined as follows. [0055] T _t : O _t −X _t Y before robot hand replacement
_t Z _t from O ₆ -X ₆ Y ₆ coordinate transformation matrix T _t to Z ₆ ': after the robot hand replacement _{O t' -X t 'Y t} ' Z t ' from O ₆ -X ₆ Y ₆ Z ₆ coordinate transformation matrix to Ts: Os-XsYsZs from O ₀ -X ₀ Y ₀ coordinate transformation matrix to Z ₀ Tw: Ow-XwYwZw from O _t -X _t Y _t coordinate transformation matrix to Z _t T _R1: robot hand Coordinate conversion matrix T _R2 from Ow-XwYwZw to Os-XsYsZs detected by the robot hand position / orientation measuring device 1003 before replacement: Ow-XwYwZw detected by the robot hand position / orientation measuring device 1003 after robot hand replacement since the kinematic parameters of the coordinate transformation matrix to Os-XsYsZs [0056] multi-joint robot 1001 not changed from the position and attitude of the O ₆ -X ₆ Y ₆ Z ₆ is also unchanged. _{However, O t -X t Y t Z} t for kinematic parameters of the robot hand 1002 is changed O _t '-X _t'
It is changed to Y _t 'Z _t' '. Note that Ow-XwYwZw has not changed. Therefore, from FIG. 17, equation (30),
The relationship of (31) is established, and from this, the coordinate conversion matrix Tt 'equation (32) after the robot hand exchange is obtained. [0057]

[Formula 19] FIG. 18 is a system configuration diagram of this embodiment. When the deformation is limited to only the robot hand _, the values of T _{R1 and} T _R2 are the same regardless of the mounting positions, so that the position / orientation for all the mounting positions can be corrected by measuring one mounting position. At this time, the robot controller 1004
18 shows the storage device 1 based on the measurement data sent from the robot hand position / orientation measurement device 1003 as shown in FIG.
It is only necessary to update Tt in 202 to Tt ', and it is not necessary to change teaching data by re-teaching work. [0057] [Embodiment 8] Next, a correction method when the deformation extends not only to the robot hand 1002 but also to the articulated robot 1001 will be described. When the deformation reaches the articulated robot 1001, the robot hand 1
In addition to the mechanical parameters of 002, an articulated robot 1001
It is necessary to modify the mechanism parameter of. [0058] Then, the articulated robot 1001 is moved to the mounting position, and the robot hand position
The gripped portion 1402 of the inner unit 1403 of the posture measuring apparatus 1003 is gripped by the robot hand 1002, and the position / posture of the robot hand 1002 is obtained. However,
At the time when the articulated robot 1001 is introduced to the site and the transfer work becomes possible, the robot hand position / orientation measuring device 1
Robot hand 1002 for each mounting position using 003
The position and orientation of the outer unit 1404 of the
It is stored in the storage device 1202 in advance. [Embodiment 9] FIG. 19 is a perspective view of a manufacturing apparatus having four mounting positions. Therefore, the manufacturing apparatus 19 for the robot hand 1002 of the articulated robot 1001
The gripping points for 05 are mounting positions 1901, 190
There are four such as 2, 1903 and 1904. [0060] FIG. 20 shows the robot hand 100 with respect to the coordinate system of the outer unit 1404 at the mounting position 1901.
2 shows the relationship between the coordinate system before and after the exchange of No. 2. Since the mechanical parameter of the articulated robot 1001 changes due to the collision, and the position / orientation of O ₆ -X ₆ Y ₆ Z ₆ also changes,
It is not possible to correct the movement of all areas by measuring one mounting position. Therefore, here, the mechanism parameters of the articulated robot 1001 are measured and the coordinate transformation matrix T ₀ ,
_{T 1, T 2, T 3} , T 4, T 5, but should be modified to T ₆ and the like, this is a difficult task requiring a long time. [0061] Therefore, it is considered that the displacement due to the deformation of the articulated robot 1001 and the displacement due to the exchange of the robot hand 1002 are converted into the displacement of the robot hand itself to correct the position / orientation. FIG. 21 is a system configuration diagram of this embodiment. The coordinate transformation matrix Tt obtained by the measurement for one mounting position cannot correct all the motion areas of the articulated robot 1001. However, FIG.
As shown in FIG. 5, the coordinate conversion matrix Tt of each mounting position is stored in the storage device 1202 as table data (TtI, TtII, TtIII, TtI).
V), and the CPU 1201 selects the coordinate conversion matrix of the robot hand at each mounting position to correct the teaching position / posture. [0062] [Embodiment 10] A description will be given of correction in the case of replacing the articulated robot 1001 that has failed due to a collision or the like with the same type. Here, as shown in FIG. 22, an articulated robot 2201 having teaching data and an articulated robot 2 of the same type having no teaching data
Consider replacing the 202. Strictly speaking, since the mechanical parameters of the articulated robot 2201 and 2202 are not the same, even if the teaching data of the articulated robot 2201 is copied to the same 2202, it does not move in the same way. [0063] Therefore, after copying the teaching data of the articulated robot 2201 to the storage device 1202 of the same 2202, the position / orientation of the robot hand 2202 is corrected. As shown in FIG. 23, the stage 23
01 and the robot hand position / orientation measuring device 1003 are used to teach representative points to the articulated robot 2201, and the position / orientation of the robot hand 1002 at each representative point of the outer unit 1404 is stored in the storage device 1202. [0064] Since the structure of the manufacturing apparatus on which the articulated robot 2201 works is known, the point at which the articulated robot 2201 grips the wafer cassette 1301 is selected as the representative point. Articulated robot 220
If 1 fails, a replacement articulated robot 2202
Then, the same teaching point as that of the articulated robot 2201 is held and the position / orientation thereof is obtained. [0065] FIG. 24 is a relational diagram of the coordinate system of the articulated robot 2201 and the robot hand 1002 of the same 2202 at the representative point of the outer unit 1404. The coordinate system and its coordinate transformation matrix are as follows. _{O tA -X tA Y tA Z tA} : multi-coordinate is fixed to the robot hand articulated robot 2201 based _{O tB -X tB Y tB Z tB} : a multi-joint coordinate system fixed to the robot hand of the robot 2202 T _tA: Multi O _tA of robot hand of joint robot 2201
-X _tA Y _tA Z _tA to O ₆ -X ₆ Y ₆ Z ₆ coordinate conversion matrix T _tB : O _tB of robot hand of articulated robot 2202
Coordinate conversion matrix from -X _tB Y _tB Z _tB to O ₆ -X ₆ Y ₆ Z ₆ [0066] Although the mechanism parameters of the multi-joint robot 2201 and the same 2202 are not exactly the same, both of them are represented for all representative points. If the relationship of the coordinate system fixed to the robot hand of the robot is known, the deviation due to the replacement of the robot can be corrected by the calculation of the coordinate conversion matrix similar to the first embodiment. As shown in FIG. 22, before the on-site loading of the articulated robot 2202 from the teaching data of the articulated robot 2201 and the table data (TtIB, TtIIB, TtIIIB, TtIVB) of the coordinate conversion matrix of the robot hand of the articulated robot B2202. In addition, since the above correction can be easily performed, the line stop time can be reduced. [0067] [Embodiment 11] FIG. 25 is a diagram for explaining a case where a manufacturing apparatus that has been taught is replaced with an unteached manufacturing apparatus due to a failure or the like. Because the installation error and the processing error of the device are included in the replacement, the articulated robot 1 that operates the manufacturing device 2502 after the replacement with the teaching data for the manufacturing device 2501 before the replacement
The position / posture of the robot hand does not become the same even if it is made to work in 001. [0068] Therefore, the teaching position / posture data is corrected. In the present invention, the positional deviation of the manufacturing apparatus is corrected as if the mechanical parameter of the robot hand has changed. First, the articulated robot 1001 is manufactured by the manufacturing device D2.
The robot moves to the position 502, grips the gripped portion 1402 of the inner unit 1403 of the robot hand position / orientation measuring apparatus 1003 mounted at the mounting position, and obtains the position / orientation of the robot hand 1002. [0069] As shown in FIG. 25, the manufacturing apparatus 2501
Data of the articulated robot 1001 for the robot and the robot controller 1 selected by the CPU 1201
Manufacturing device D2502 stored in the storage device 1202 of No. 04.
Table data of the coordinate conversion matrix of the robot hand of the articulated robot 1001 (T _ID ,
Correct the teaching position / posture of each mounting position from T _{I ID} , T _IIID , T _IVD ). [0070] [Embodiment 12] FIG.
The teaching position of a self-propelled robot in a bay type semiconductor pre-process line where there are many manufacturing equipment like
It can also be applied to posture correction. In FIG. 26, the self-propelled robot 2601 is, for example, a manufacturing apparatus 1905.
With the teaching data of, the above position / orientation correction method is applied to other manufacturing equipment. As a result, the correction work can be made efficient. [0071] [Embodiment 13] FIG. 27 is a block diagram of another robot hand position / orientation measuring apparatus according to the present invention.
The arithmetic unit 2701 calculates the relative positions and orientations of the inner unit 1403 and the outer unit 1404 from the outputs of the sensors 1210a to 1210f, and the storage unit 2702 stores the calculation result and the mounting position number of the manufacturing apparatus. The interface unit 2703 is the robot controller 10.
Information is exchanged via 04 and the I / O unit. [0072] FIG. 28 is a block diagram of the robot controller 1004. Robot hand position / orientation measuring device 10
Since the teaching position and posture are automatically corrected after gripping the gripped portion 1402 of the inner unit 1403 of No. 03, teaching work is unnecessary. Further, in this embodiment, the load on the CPU 1201 can be reduced and the capacity of the storage device 1202 can be reduced as compared with the first embodiment. [Embodiment 14] An embodiment of a robot teaching position / orientation data correction method using the robot hand position / orientation measuring apparatus of the present invention will be described with reference to the drawings. FIG. 29 is a mechanism diagram of the robot. The 6-degree-of-freedom articulated robot 2901 includes rotary joints # 1 to # 6 and a robot hand 2902. θ1 to θ6 are rotation angles of each joint. The coordinate system of the robot 2901 and the coordinate transformation matrix and vector are as follows. _{O 0 -X 0 Y 0 Z 0} : a reference coordinate system fixed to the base of the robot _{2901 O i -X i Y i Z} i: i -th coordinate system fixed to the driven portion of the robot 2901 O _H -X _H Y _H Z _H: coordinates fixed to the robot hand 2902 system _{T i: O i -X i Y} i coordinate transformation matrix from Z _i to _{O i-1 -X i-1} Y i-1 Z i-1 _{T H: O H -X H Y} H Z H from O ₆ -X ₆ Y ₆ coordinate transformation matrix X ₀ to _{Z 6: O 0 -X 0 Y} 0 Z 0 at represents the inhomogeneous position vector X _H: O _H -X _H Y _H inhomogeneous position vector expressed by Z _H [0074] these vectors satisfy the relationship of formula (33). However, T is defined by the equation (34).

[Equation 20] T ₁ through T ₆ depends on the joint rotation angle and kinematic parameters of the robot 2901, T _H is dependent on the shape parameters of the robot hand 2902. The position of the robot 2901 is X _H
Can be obtained as the hand center position vector, and the posture of the robot 2901 is the posture angle of the robot hand 2902 with respect to the reference coordinates. Therefore, this posture angle (for example, Euler angle) can be obtained from the coordinate transformation matrix T. [0075] As shown in FIG. 30 (a), the robot hand position / orientation measuring apparatus 3001 includes an inner unit 3001.
b and an outer unit 3001a to which a distance sensor is attached, and the inner unit 3001b is the outer unit 30.
Any position / posture can be taken within 01a. Figure 3
As shown in FIG. 2, the operator selects the outer unit 3001a.
Is positioned on the device 3201 so that the robot 2901 grips the upper part of the inner unit 3001b. In order to perform teaching and measurement at the same time, the outer unit 3001
The shapes of the positioning portion a and the robot gripping portion of the inner unit 3001b are the same as those of the actual transfer work. For example, the transfer work of the robot is the wafer cassette 33 of FIG.
In the case of 01, the robot hand position / orientation measuring device 300
The shape of 1 is as shown in FIG. [0076] FIG. 30 (b) is a graph showing the relationship between the structure and the coordinate system of the external unit _{3001a O S -X S Y S Z} S. Three distance sensors 3002a, 3002 on the inner plane X _S Y _S
b, 3002c, two distance sensors 30 on the plane Y _S Z _S
02d, 3002e, one distance sensor 3 on the plane Z _S X _S
002f is attached, the mounting plane and the inner unit 3001
Measure the distance between the planes of b. Figure 30 (c) is a graph showing the relationship between the structure and the coordinate system of the inner unit _{3001b O W -X W Y W Z} W. [0077] FIG. 31 is a coordinate system O _S -X _S Y _S Z _S and O _W -X _W
It is a relationship diagram of a Y _W Z _W. 3 points on the plane X _W Y _W are P ₁ ,
P ₂ , P ₃ , two points on the plane Y _W Z _W , P ₄ , P ₅ , plane Z _W X _W
Let P _{6 be the} upper point and P be an arbitrary point in space. Here, the vectors P _i (i = 1 to 6), P, and P ₀ are defined as in Expression (35). First, three points P ₁ , P ₂ , P ₃ on the plane X _W Y _W
The standard form of the equation of the plane passing through is as in equation (36). N _Z is a unit vector orthogonal to the plane X _W Y _W ,
d _Z is the distance from the origin O _S onto the plane X _W Y _W. Similarly,
The standard form of the equation of the plane passing through the two points P ₄ and P ₅ on the plane Y _W Z _W and containing the vector N _Z is as shown in equation (37). [0078]

[Equation 21] N _X is a unit vector orthogonal to the plane Y _W Z _W , and d _X
Is the distance from the origin O _S to the plane Y _W Z _W. Similarly, the standard form of the equation of the plane passing through the point P ₆ on the plane Z _W X _W and containing the vectors N _Z and N _X is as shown in equation (38). N _Y is a unit vector orthogonal to the plane Z _W X _W , and d _Y is the origin O _S
To the plane Z _W X _W. The vector P ₀ is the intersection of the three planes and is given by equation (39). Here, the non-homogeneous position vector represented by the coordinates O _S −X _S Y _S Z _{S S} of an arbitrary point P is X _S , and the non-homogeneous position vector represented by the coordinates O _W −X _W Y _W Z _W. if put a X _W, coordinates O _S -X _S Y _S Z _S and O _W
The coordinate conversion with −X _W Y _W Z _W is given by equation (40). Here, T _R is a 4 × 4 coordinate transformation matrix, R _R is a 3 × 3 matrix that represents the rotation of coordinates, and P _R is a three-dimensional vector that represents the coordinate translation. The vector N _x ,
N _Y, N _Z and P ₀ coordinate O _S -X _S Y _S Z _S coordinate transformation matrix T _R Expressed in a formula (41).

[Equation 22] [0080] If the coordinate transformation matrix T _R when the outer unit 3001a is positioned and the robot holds the upper portion of the inner unit 3001b is T _Ra , the coordinate transformation matrix T _R1
Can be calculated from the equation (41) using the shape data of the outer unit 3001a and the inner unit 3001b of the measuring device 3. Here, the coordinate transformation matrix is defined as follows. T _a : Expression (3 in the position / posture you want to teach
4) Coordinate transformation matrix represented by T _b : Coordinate transformation matrix represented by equation (34) in the current position / orientation of the robot T _Rb : Coordinate transformation matrix T calculated by equation (41) in the current position / orientation of the robot T _{W: O W -X W Y W} O from Z _{W H} -X _H Y _H Z coordinate transformation matrix to _H T _S: from O _S -X _S Y _S Z _S to O ₀ -X ₀ Y ₀ Z ₀ Coordinate Transformation Matrix [0081] FIG. 34 is a diagram showing the relationship between these coordinate systems and the coordinate transformation matrix. Here, the coordinate transformation matrix is shown as a vector connecting the origins for convenience. This is true. T _W is a coordinate conversion matrix showing a positional relationship when the robot hand 2902 holds the inner unit 3001b. The coordinate transformation matrix Ta represented by the equation (34) at the position / posture to be taught from the equation (42) is as shown in the equation (43), and the position data of the position / posture to be taught can be calculated from the equation (44). it can. The posture angle of the position / posture to be taught can be obtained from the coordinate conversion matrix Ta. For example, the Euler angle is the rotation angle φ around the Z axis, the rotation angle θ around the Y axis after φ rotation, and the Z after the θ rotation.
If the rotation angle ψ about the axis is used and the coordinate conversion matrix Ta is defined as in Expression (45), the Euler angle can be obtained from Expression (46). [0082]

[Equation 23] [0083] [Embodiment 15] FIG. 35 is a system configuration diagram according to the present invention. During manual operation, CPU 3501
Receives the movement direction information from the teaching box 3506 via the interface 3507, calculates the target angle of each joint, and commands the D / A converter 3503 so that the current value of each joint angle from the counter 3505 becomes the target value. Then, the amplifier 3504 and the motor are driven to operate the robot 2901. [0084] During automatic operation, the CPU 3501 calculates the target angle of each joint from the position / orientation teaching data stored in the memory 3502 and the operation sequence, and drives the robot 2901 in the same manner as during manual operation. Further, at the time of teaching and when the teaching position / orientation is corrected, the CPU 3501 receives the values of the sensors 3002a to 3002f from the robot hand position / orientation measuring device 3001 gripped by the robot hand 2902 through the interface 3
The coordinate conversion matrix T _RB is calculated by using Expression (41), and the teaching position / orientation is calculated from Expressions (44) and (46). [0085] FIG. 36 is a flowchart for the above teaching. First, the outer unit 3001a of the robot hand position / orientation measuring device 3001 is positioned at the position / orientation desired to be taught, and the robot 2901 is guided to the approximate position / orientation. Then the inner unit 3001
b is grasped by the robot hand 2902, the output of the robot hand position / orientation measuring device 3001 is fetched, and the expression (4
1) is used to calculate the coordinate transformation matrix T _RB , and equation (44)
The teaching position / orientation is calculated from (46) and stored in the memory 3502. [0086] FIG. 37 is a flow chart when the teaching position and posture are corrected. After positioning the outer unit 3001a, the robot 2901 is placed in the position / posture stored in the memory 3502. Next, the inner unit 3001b is gripped by the robot hand 2902 to position the robot hand.
The output of the posture measurement apparatus 3001 is fetched, the coordinate transformation matrix T _RB is calculated using the equation (41), and the equations (44), (4
The teaching position / posture is calculated from 6), the teaching-completed position / posture data is corrected, and the corrected teaching data is stored in the memory 3502. When a point that does not require accurate correction is near the corrected point, the position / orientation can be corrected using the coordinate conversion matrix T _RB of the corrected point. [0087] FIG. 38 is a flow chart in the case of teaching two robots. First, teach the first unit and copy the teaching position / posture data to the second unit. Then, the second robot is operated by the copied data, and similarly, the coordinate transformation matrix T _Rb is calculated from the output of the robot hand position / orientation measuring device 3001 using the equation (41), and the equation (44), The teaching position / orientation is calculated from (46) to correct the taught position / orientation data of the second robot. As a result, the teaching time of the second robot can be shortened. [0088] [Embodiment 16] FIG. 39 shows a second configuration example of the system. In FIG. 39, the CPU 3501 of FIG.
Between measuring instrument and interface 3508
1 and an interface 4002 are added. The operations during manual operation and automatic operation are the same as in the embodiment. At the time of teaching and when the teaching position / orientation is corrected, the measuring instrument CPU 4001 receives the teaching data of the current position / orientation from the CPU 3501 through the interface 400.
2, the position / orientation to be taught is calculated, and the calculation result is returned to the CPU 3501. [Embodiment 17] The robot teaching and teaching position / orientation correction method of the present invention can optimize teaching work for a through-the-wall type device. When the target device also carries out the wafer cassette transfer work, the wafer cassette 33 as shown in FIG.
There may be used a through-the-wall type device in which the mounting position of 01 is deeper than the front panel. The mounting position 4102 of the through-the-wall type device 4101 is located deeper than the front panel, and there are many gaps around the front panel, which makes it difficult for the operator to confirm the position and posture of the robot hand. For this reason, there is a problem that even a skilled worker takes a lot of time for teaching work.

[0090] First, the robot hand position / orientation measuring device 3001 is installed at the mounting position 4102, and the inner unit 3001b of the robot hand position / orientation measuring device 3001 is installed.
Gives coarse teaching data that can be grasped by the.
Since there is a sufficient gap between the inner unit 3001b and the outer unit 3001a, even if the teaching data is rough, the inner unit 3001b can be moved from the mounting position 4102.
Robot hand position / orientation measuring device 3001
Is the inner unit 300 with respect to the outer unit 3001a
The position / orientation of 1b can be measured. [0091] Further, based on the design value of the wafer cassette 3301, the inner unit 300 with respect to the outer unit 3001a.
It is also possible to find the optimum position / orientation of 1b. The robot 2901 is controlled by the outputs of the sensors 3302a to 3302f.
Is controlled to match the position / posture of the inner unit 3001b with the optimum position / posture. The above-described embodiments can be applied to not only the articulated robot for wafer cassette transfer work but also a teaching playback type industrial robot for component insertion work or the like to obtain the same effect. [0092]

According to the present invention, the teaching position / orientation is corrected based on the measured value when the inner unit of the robot hand position / orientation measuring device is gripped by the robot hand. Can be facilitated. Further, since the shape and weight of the gripped portion of the inner unit and the lower shape of the outer unit are made the same as those of the object to be gripped, it is possible to improve the measurement accuracy by making the measurement conditions during teaching and correction the same as the actual work. it can.
Furthermore, when multiple devices of the same type are installed, such as in a semiconductor pre-process bay, the teaching data of other devices can be modified with the measurement data of one device, so the teaching data modification time is reduced. It can be greatly shortened.

[Brief description of drawings]

FIG. 1 is a perspective view of a robot position / orientation data measuring device according to the present invention.

FIG. 2 is a sectional view taken along line AA in FIG.

FIG. 3 is a sectional view taken along line BB in FIG.

FIG. 4 is an explanatory diagram of a coordinate system according to the present invention.

5 is a configuration diagram of a claw portion for grasping a robot hand and an inner unit in FIG.

FIG. 6 is a perspective view of an embodiment of a robot position / orientation data measuring device according to the present invention.

7 and 8 are sectional views of an embodiment of a robot position / orientation data measuring device according to the present invention.

FIG. 9 is a sectional view of an embodiment of a robot position / orientation data measuring device for a SCARA robot according to the present invention.

FIG. 10 is a configuration diagram of an articulated robot system according to the present invention.

11 is a joint configuration diagram of FIG. 10. FIG.

FIG. 12 is a configuration diagram of a robot controller of the present invention.

FIG. 13 is a perspective view of a wafer cassette.

FIG. 14 is a sectional view of an embodiment of a robot position / orientation data measuring device according to the present invention.

FIG. 15 is a diagram showing a coordinate system fixed to a robot hand position / orientation measuring device.

FIG. 16 is a diagram showing a displacement of a robot hand.

FIG. 17 is an explanatory diagram of a coordinate system according to the present invention.

FIG. 18 is a block diagram of an embodiment of the present invention.

FIG. 19 is an external view of a manufacturing apparatus.

FIG. 20 is a vector diagram showing the relationship between the outer unit coordinate system and the robot hand coordinate system.

FIG. 21 is a block diagram of an embodiment of the present invention.

22 and 23 are operation explanatory views when the robot of the device of the present invention is replaced.

FIG. 24 is a vector diagram showing the relationship between the outer unit coordinate system and the robot hand coordinate system.

FIG. 25 is an explanatory diagram of an operation when the manufacturing apparatus of the apparatus of the present invention is replaced.

FIG. 26 is a configuration diagram of a semiconductor pre-process bay.

FIG. 27 is a sectional view of an embodiment of a robot position / orientation data measuring device according to the present invention.

FIG. 28 is a configuration diagram of a robot controller of the present invention.

FIG. 29 is a mechanical diagram of the robot.

30 and 31 are explanatory views of a coordinate system according to the present invention.

FIG. 32 is a diagram showing a state in which the robot according to the present invention holds a measuring device.

FIG. 33 is an external view of a measuring device according to the present invention.

FIG. 34 is a vector diagram showing the relationship between the outer unit coordinate system and the robot hand coordinate system.

FIG. 35 is a system configuration diagram of the device of the present invention.

36, 37 and 38 are flow charts for explaining the teaching and the position / orientation correction method of the device of the present invention.

39 and 40 are system configuration diagrams of the device of the present invention.

[Explanation of symbols]

11 ... Inner unit, 12 ... Outer unit, 13 (13
a to 13f) ... Displacement sensor, 14 ... Grasping claws, 15 ...
Data calculation unit, 16 ... Data display unit, 17 ... Interface unit, 21, 1002, 2902 ... Robot hand,
22 ... Robot arm, 23 ... Work station, 10
01 ... Articulated robot, 1003 ... Robot hand position / orientation measuring device, 1004 ... Robot controller, 1
201, 3501 ... CPU, 1202 ... Storage device, 12
10 ... Sensor, 1301, 3301, ... Wafer cassette,
1402 ... Gripping part, 1905 ... Manufacturing device, 2601 ... Self-propelled robot, 2901 ... Robot, 3001 ... Measuring device, 3001a ... Outer unit, 3001b ... Inner unit, 3201 ... Device, 3502 ... Memory, 3503 ...
D / A converter, 3504 ... Amplifier, 3505 ... Counter, 3506 ... Teaching box, 3507, 3
508, 4002 ... Interface, 4001 ... CPU for measuring instrument.

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁵ Identification code Internal reference number FI Technical display location G05B 19/18 H 9064-3H 19/403 P 9064-3H H01L 21/52 F 7376-4M 21 / 68 A 8418-4M // G01B 21/00 E 7355-2F (72) Inventor Toyohide Hamada 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Inside the Hitachi, Ltd. Institute of Industrial Science (72) Inventor, Yuuo Takahashi Kanagawa Production Engineering Laboratory, Hitachi, Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama (72) Inventor Catalog Noriyuki Yoshida-cho, 292, Totsuka-ku, Yokohama, Kanagawa Pref., Production Engineering Laboratory, Hitachi, Ltd. (72) Inventor Yamada Original 5-20-1 Kamimizuhonmachi, Kodaira-shi, Tokyo Hitachi Ltd. Musashi factory

Claims (12)

[Claims] 1. In a robot apparatus for performing work by gripping a work target by a gripping claw of a robot hand, the robot is fixed to an inner unit, an outer unit arranged on the outer periphery of the inner unit, and an outer unit or an inner unit. A plurality of displacement sensors and a calculation unit are provided, the outer unit is fixed on the work table similarly to the work object, the inner unit is attached to the gripping claw portion of the robot hand, and the outer unit is connected to the outer unit by the output of each displacement sensor. A robot apparatus characterized in that a position / orientation value of a robot hand is calculated by measuring a distance between inner units. 2. The robot apparatus according to claim 1, wherein the inner unit has three surfaces substantially parallel to the three surfaces of the outer unit. 3. The robot apparatus according to claim 1, wherein the grip portion of the inner unit has the same shape as the grip portion of the work target. 4. The method according to any one of claims 1 to 3,
A robot apparatus characterized in that the workbench installation surface of the outer unit has the same shape as the workbench installation surface of the work object. 5. The method according to any one of claims 1 to 4,
A robot apparatus characterized in that the inner unit has the same weight as the work object. 6. The method according to any one of claims 1 to 5,
Providing an inclination sensor on the outer unit or inner unit,
A robot device characterized in that the position and orientation values of a robot hand are calculated by measuring the distance, angle, etc. between the outer unit and the inner unit by the output of each displacement sensor and tilt sensor. 7. The method according to any one of claims 1 to 6,
A robot apparatus, comprising: a display unit for displaying the position / orientation data of the robot hand calculated by the calculation unit; and / or an interface unit for transferring the position / orientation data of the robot hand to a robot controller. 8. The method according to claim 1, wherein
A robot apparatus, wherein the work object is a semiconductor wafer holder. 9. A teaching method for a robot apparatus using the robot apparatus according to claim 1, wherein position / orientation data before and after replacement of the outer unit and / or the inner unit is stored, and both are stored. A teaching method for a robot apparatus, characterized in that position / orientation data before and after replacement of a unit are compared to correct a mechanical parameter of a robot hand after replacement. 10. The robot according to claim 9, wherein position / orientation data before and after replacement of the robot hand is stored, and the position / orientation data before and after replacement of the robot hand is compared with each other. A teaching method for a robot apparatus, characterized in that a mechanism parameter is modified. 11. A teaching method for a robot apparatus according to claim 9 or 10, wherein the coordinate transformation matrix of the robot hand for each mounting position is stored to correct the mechanical parameter of the robot hand. 12. The mechanism parameter of a robot hand of a robot device having a plurality of the robot devices, wherein the robot device has teaching data, and a measurement value obtained from the robot hand position / orientation measuring device according to any one of claims 9 to 11. And the measured values obtained from the robot hand position / orientation measuring device of the robot having no teaching data, the mechanism parameter of the robot hand of the robot having no teaching data is corrected. Teaching method.