JPH061307Y2 - 吸着パツトの割り付け装置 - Google Patents
吸着パツトの割り付け装置Info
- Publication number
- JPH061307Y2 JPH061307Y2 JP1987027869U JP2786987U JPH061307Y2 JP H061307 Y2 JPH061307 Y2 JP H061307Y2 JP 1987027869 U JP1987027869 U JP 1987027869U JP 2786987 U JP2786987 U JP 2786987U JP H061307 Y2 JPH061307 Y2 JP H061307Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- transparent plate
- allocating
- pad
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 11
- 230000037431 insertion Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987027869U JPH061307Y2 (ja) | 1987-02-25 | 1987-02-25 | 吸着パツトの割り付け装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987027869U JPH061307Y2 (ja) | 1987-02-25 | 1987-02-25 | 吸着パツトの割り付け装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63133943U JPS63133943U (enrdf_load_stackoverflow) | 1988-09-01 |
| JPH061307Y2 true JPH061307Y2 (ja) | 1994-01-12 |
Family
ID=30830304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987027869U Expired - Lifetime JPH061307Y2 (ja) | 1987-02-25 | 1987-02-25 | 吸着パツトの割り付け装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH061307Y2 (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6011730U (ja) * | 1983-07-06 | 1985-01-26 | 三菱重工業株式会社 | 真空吸着クランプ |
| JPS60131335U (ja) * | 1984-02-10 | 1985-09-03 | ヤマハ株式会社 | ワ−ク吸引保持装置 |
-
1987
- 1987-02-25 JP JP1987027869U patent/JPH061307Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63133943U (enrdf_load_stackoverflow) | 1988-09-01 |
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