JPH0612949A - Improper vacuum detecting device - Google Patents

Improper vacuum detecting device

Info

Publication number
JPH0612949A
JPH0612949A JP17248092A JP17248092A JPH0612949A JP H0612949 A JPH0612949 A JP H0612949A JP 17248092 A JP17248092 A JP 17248092A JP 17248092 A JP17248092 A JP 17248092A JP H0612949 A JPH0612949 A JP H0612949A
Authority
JP
Japan
Prior art keywords
vacuum
circuit
detecting
waveform
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17248092A
Other languages
Japanese (ja)
Inventor
Chiyomi Kawaguchi
千代美 川口
Yuusaku Oonishi
有策 大西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17248092A priority Critical patent/JPH0612949A/en
Publication of JPH0612949A publication Critical patent/JPH0612949A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide an improper vacuum detecting device whereby normal operation and misoperation can be discriminated in detecting an improper vac uum. CONSTITUTION:Of a discharge waveform detected in an improper vacuum, the crest voltage of a discharge waveform component is detected by a discharge waveform detecting circuit 14, and in AC waveform component is detected by an AC component detecting circuit 16, to display an output value of the discharge waveform detecting circuit 14 in a discharge waveform peak value display circuit 15. A vacuum pressure decision circuit 18 calculates a vacuum pressure in an improper vacuum detection range and at improper vacuum detection time based on output signals from these detecting circuit and output circuit 11.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、真空不良検出装置に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum defect detecting device.

【0002】[0002]

【従来の技術】従来の真空遮断器の真空バルブ真空不良
検出装置は、例えば図6に示すようなものがある。同図
において、1は例えば図示しない絶縁物をモールドした
銅板で真空バルブの真空圧力を検出する検出センサ、2
は検出センサ1からの出力信号を入力としてAC分電圧
と放電パルス電圧に変換する検出インピーダンス回路、
3は検出インピーダンス回路2および後述する自己診断
回路6を選択する選択スイッチである。4は検出インピ
ーダンス回路2からのAC分電圧出力を入力とし、AC
波から放電パルスの発生位置にデータの窓に、いわゆる
ウインドをかけるウインド波形回路、5は真空バルブの
真空圧力が低下したときに、図示しない真空バルブ内の
接点とシールド板へ放電した時に発生する放電パルスを
検出インピーダンス回路2からの放電パルス出力を入力
として波形整形する放電波形整形回路、6は真空バルブ
の真空圧力が低下したときの波形を模擬的に発生し装置
の健全性を確認する自己診断回路、7は放電波形整形回
路5からの出力を入力とし、入力電圧が真空不良電圧に
至ったら真空不良と判定する放電波形判定回路である。
2. Description of the Related Art A conventional vacuum valve vacuum defect detecting device for a vacuum circuit breaker is shown in FIG. In the figure, reference numeral 1 is, for example, a copper plate molded with an insulator (not shown), which is a detection sensor for detecting the vacuum pressure of the vacuum valve,
Is a detection impedance circuit for converting an output signal from the detection sensor 1 into an AC component voltage and a discharge pulse voltage,
Reference numeral 3 is a selection switch for selecting the detection impedance circuit 2 and a self-diagnosis circuit 6 described later. 4 receives the AC voltage output from the detection impedance circuit 2 as input
A waveform waveform circuit 5 applies a so-called window to a data window at a position where a discharge pulse is generated from a wave, when a vacuum pressure in the vacuum valve is reduced, and a discharge occurs in a contact and a shield plate in a vacuum valve (not shown). A discharge waveform shaping circuit for shaping the discharge pulse by using the discharge pulse output from the detection impedance circuit 2 as an input, and 6 is a self-check for confirming the soundness of the device by simulating the waveform when the vacuum pressure of the vacuum valve drops. A diagnostic circuit 7 is a discharge waveform determination circuit that receives the output from the discharge waveform shaping circuit 5 and determines a vacuum defect when the input voltage reaches the vacuum defect voltage.

【0003】8は、ウインド波形回路4と放電波形判定
回路7からの出力を入力とし、両出力が同時に出力され
たときに信号を出力するAND回路、9はAND回路8
からの出力を入力としてカウントアップするカウンター
回路、10はカウンター回路からの出力を入力とし、真空
不良出力が所定の時間だけ連続して発生しているか否か
を判定するカウンター判定回路、11はカウンタ回路9か
らの出力を入力とし、真空不良出力が入力されると、真
空不良表示または外部真空不良出力接点を出力する出力
回路である。また、12は真空遮断器、13は主回路であ
る。
Reference numeral 8 is an AND circuit that receives the outputs from the window waveform circuit 4 and the discharge waveform determination circuit 7 and outputs a signal when both outputs are simultaneously output, and 9 is an AND circuit 8
A counter circuit that counts up the output from the input, 10 is a counter determination circuit that receives the output from the counter circuit as an input and determines whether or not a vacuum defect output is continuously generated for a predetermined time, 11 is a counter It is an output circuit which outputs an output from the circuit 9 and outputs a vacuum defect display or an external vacuum defect output contact when a vacuum defect output is input. Further, 12 is a vacuum circuit breaker, and 13 is a main circuit.

【0004】すなわち、図示しない真空バルブ近傍に検
出センサ1を配置する。真空バルブが正常であればAC
波形しか出力されないが、例えば真空バルブに小さい穴
が発生して真空バルブ内の圧力が高真空状態から大気圧
まで変化する真空不良状態に至った場合は、真空バルブ
と内部シールド板へ放電が発生する。検出センサ1の出
力として、この放電がAC波形と重って検出インピーダ
ンス回路2に出力される。この真空不良時の検出インピ
ーダンス回路2からの出力に対して、ウインド波形回路
4でAC波形より放電部分だけを検出するデータの窓を
作り、放電波形整形回路5及び放電波形判定回路7で放
電パルス電圧の大きさで真空不良信号と判定する。その
後、ウインド波形回路4と放電波形判定回路7からの出
力をAND回路8でピックアップし、ある所定の時間継
続的にAND回路8より出力されると、真空バルブの真
空不良として使用者に警報を与えることできる。
That is, the detection sensor 1 is arranged near a vacuum valve (not shown). AC if the vacuum valve is normal
Although only waveforms are output, if a small hole is created in the vacuum valve, for example, and the pressure inside the vacuum valve changes from high vacuum to atmospheric pressure, the vacuum valve and internal shield plate are discharged. To do. As the output of the detection sensor 1, this discharge is output to the detection impedance circuit 2 along with the AC waveform. With respect to the output from the detection impedance circuit 2 when the vacuum is defective, the window waveform circuit 4 creates a data window for detecting only the discharge portion from the AC waveform, and the discharge waveform shaping circuit 5 and the discharge waveform determination circuit 7 generate the discharge pulse. A vacuum failure signal is determined based on the magnitude of the voltage. Then, when the outputs from the window waveform circuit 4 and the discharge waveform determination circuit 7 are picked up by the AND circuit 8 and continuously output from the AND circuit 8 for a predetermined time, the user is warned that the vacuum valve is defective in vacuum. Can be given.

【0005】[0005]

【発明が解決しようとする課題】従来の真空不良検出装
置では、次のような問題があった。
The conventional vacuum defect detecting device has the following problems.

【0006】すなわち、真空遮断器の真空バルブの真空
不良を真空不良検出装置で検出し警報出力しても、正常
に動作、あるいは、外来ノイズ等による誤検出の判定は
できない。また真空不良検出後は、真空バルブの真空圧
をチェックするために遮断器の負荷側を停止し真空バル
ブ極間に商用周波耐電圧試験を実施しなければならい。
従って、このような検証を実施するためには、時間が長
くかかることで使用者の経済的な負担が大きかった。本
発明の目的は、正常動作か誤検出かの判定ができる高信
頼性の真空不良検出装置を提供することにある。
That is, even if the vacuum defect of the vacuum valve of the vacuum circuit breaker is detected by the vacuum defect detection device and an alarm is output, it is not possible to normally operate or determine erroneous detection due to external noise or the like. In addition, after detecting a vacuum defect, the load side of the circuit breaker must be stopped and a commercial frequency withstand voltage test must be performed between the vacuum valve electrodes to check the vacuum pressure of the vacuum valve.
Therefore, it takes a long time to carry out such verification, which imposes a heavy financial burden on the user. An object of the present invention is to provide a highly reliable vacuum defect detecting device capable of determining whether it is a normal operation or an erroneous detection.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に本発明は、真空容器内に接離自在の一対の電極を有す
る真空遮断器に接続され、真空容器内の真空不良時に検
出される放電波形と正常時に検出される交流波形とから
異常を検出する真空不良検出装置において、放電波形中
の交流波分の波高値を検出する第1の検出手段と、放電
波形中の放電波分の波高値から真空不良の開始時を検出
する第2の検出手段と、放電波形が継続的に発生するの
を検出する第3の検出手段と、第1、第2および第3の
検出手段からの出力信号に基づいて真空不良検出範囲内
および真空不良検出時の真空圧力値を検出する判別手段
とで構成することを要旨とする。
In order to achieve the above object, the present invention is connected to a vacuum circuit breaker having a pair of electrodes which can be freely contacted and separated in a vacuum container, and is detected when a vacuum in the vacuum container is defective. In a vacuum defect detecting device for detecting an abnormality from a discharge waveform and an AC waveform detected under normal conditions, a first detecting means for detecting a peak value of an AC wave component in the discharge waveform and a discharge wave component in the discharge waveform. The second detecting means for detecting the start time of the vacuum defect from the peak value, the third detecting means for detecting the continuous generation of the discharge waveform, and the first, second and third detecting means. The gist is that it is constituted by a discriminating means for detecting a vacuum pressure value within the vacuum defect detection range and at the time of vacuum defect detection based on the output signal.

【0008】[0008]

【作用】このような構成において、放電波形中の交流波
分を検出する第1の検出手段と、真空不良の開始時を検
出する第2の検出手段と、放電波形が継続的に発生する
のを検出する第3の検出手段の各々の出力信号により、
判別手段が真空不良検出範囲内および真空不良検出時の
真空圧力値を検出するので、誤検出を防ぐことができ信
頼性が向上する。
In such a structure, the first detecting means for detecting the AC wave component in the discharge waveform, the second detecting means for detecting the start time of the vacuum defect, and the discharge waveform are continuously generated. By the output signal of each of the third detecting means for detecting
Since the determination means detects the vacuum pressure value within the vacuum defect detection range and at the time of vacuum defect detection, erroneous detection can be prevented and reliability is improved.

【0009】[0009]

【実施例】以下、本発明の一実施例について図面を参照
して詳細に説明する。尚、従来の機器及び回路等と同一
のものは図6と同一符号で示して説明を省略する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings. The same components and circuits as those in the related art are designated by the same reference numerals as those in FIG. 6 and their description is omitted.

【0010】図1は本発明の真空不良検出装置の構成図
である。同図において、14は選択スイッチ3より出力さ
れた信号により真空不良に至った場合に発生する放電パ
ルス波高値を検出する放電波形検出回路、15は放電波形
検出回路14の出力を入力として、例えばLED数値表示
する放電波形波高値表示回路、16は選択スイッチ3より
出力された信号によりAC分波形を検出するAC分検出
回路、17はAC分検出回路16の出力を入力として、例え
ばLED数値表示するAC分波高値表示回路である。
FIG. 1 is a block diagram of a vacuum defect detecting device of the present invention. In the figure, reference numeral 14 is a discharge waveform detection circuit for detecting a discharge pulse crest value generated when a vacuum failure is caused by a signal output from the selection switch 3, and 15 is an output of the discharge waveform detection circuit 14, Discharge waveform peak value display circuit for displaying an LED numerical value, 16 is an AC minute detecting circuit for detecting an AC minute waveform by the signal output from the selection switch 3, and 17 is an input of the output of the AC minute detecting circuit 16, for example, an LED numerical value display It is an AC demultiplexing value display circuit.

【0011】また、18は出力回路11からの信号と、放電
波形検出回路14およびAC分検出回路16の出力を入力と
して、真空不良検出点の真空圧または真空不良検出範囲
内の真空圧力を判定する真空圧力判定回路、19は真空不
良検出範囲内の真空圧力を例えばLED数値表示する真
空圧力表示回路、20は真空不良検出点の真空圧を例えば
LED数値表示する真空不良検出時の真空圧力表示回路
である。次に、以上のように構成された実施例の動作に
ついて説明する。
Further, 18 receives the signal from the output circuit 11 and the outputs of the discharge waveform detection circuit 14 and the AC component detection circuit 16 to determine the vacuum pressure at the vacuum defect detection point or the vacuum pressure within the vacuum defect detection range. Vacuum pressure determination circuit, 19 is a vacuum pressure display circuit that displays the vacuum pressure within the vacuum defect detection range, for example, with an LED numerical value, and 20 is a vacuum pressure display that displays the vacuum pressure at the vacuum defect detection point, for example, with an LED numerical value when vacuum defect is detected Circuit. Next, the operation of the embodiment configured as described above will be described.

【0012】図示しない真空バルブの接点近傍に配置し
た検出センサ1は、真空バルブの接点が開極閉極状態に
かかわらず、例えば真空バルブに微小な穴が発生して真
空バルブの真空圧力が高真空から大気圧へ変化する間
に、真空バルブ接点とシールド板に放電する時の放電波
形を検出する。検出センサ1からの出力を検出インピー
ダンス回路2で積分し、検出しやすい信号へ変換する。
この時の検出インピーダンス回路の出力波形は、主回路
電圧周波数より位相が90゜進んだAC波に放電波形が加
算された波形となる。検出インピーダンス回路2からの
出力信号は、選択スイッチ3に出力される。選択スイッ
チ3が真空不良検出側にオンされているとき、ウインド
波形回路4と放電波形整形回路5、および放電波形検出
回路14とAC分検出回路16へ出力される。放電波形検出
回路14では、真空不良に至ったときに発生する放電パル
スの波高値を検出し、放電波形波高値表示回路15と真空
圧力判定回路18へ出力する。放電波形波高値表示回路15
では、放電パルスの波高値をLED数値表示し、検出を
開始していることを表示する。AC分検出回路16では、
AC分の波高値を検出しAC分波高値表示回路17と真空
圧力判定回路18へ出力する。AC分波高値表示回路17で
はAC分の波高値をLED数値表示する。真空圧力判定
回路18では、出力回路11と放電波形検出回路14とAC分
検出回路16の出力を演算し、真空不良検出時の真空圧力
を真空不良検出時の真空圧力表示回路20と、真空不良検
出範囲内で真空圧力を表示する真空圧力表示回路19へ出
力する。真空圧力表示回路19及び真空不良検出時の真空
圧力表示回路20はいずれも真空圧力をLED数値表示す
る。これらの関係をタイムチャートで示すと図2のよう
になる。
The detection sensor 1 arranged near the contact of a vacuum valve (not shown) has a high vacuum pressure regardless of whether the contact of the vacuum valve is open or closed. While changing from vacuum to atmospheric pressure, detect the discharge waveform when discharging to the vacuum valve contact and the shield plate. The output from the detection sensor 1 is integrated by the detection impedance circuit 2 and converted into a signal that is easy to detect.
The output waveform of the detection impedance circuit at this time is a waveform in which the discharge waveform is added to the AC wave whose phase is advanced by 90 ° from the frequency of the main circuit voltage. The output signal from the detection impedance circuit 2 is output to the selection switch 3. When the selection switch 3 is turned on to the vacuum defect detection side, it is output to the window waveform circuit 4, the discharge waveform shaping circuit 5, and the discharge waveform detection circuit 14 and the AC component detection circuit 16. The discharge waveform detection circuit 14 detects the peak value of the discharge pulse generated when a vacuum defect is reached, and outputs it to the discharge waveform peak value display circuit 15 and the vacuum pressure determination circuit 18. Discharge waveform peak value display circuit 15
Then, the peak value of the discharge pulse is displayed on the LED numerical value to indicate that the detection is started. In the AC minute detection circuit 16,
The AC peak value is detected and output to the AC peak value display circuit 17 and the vacuum pressure determination circuit 18. The AC peak value display circuit 17 displays the AC peak value in LED numerical values. In the vacuum pressure determination circuit 18, the outputs of the output circuit 11, the discharge waveform detection circuit 14, and the AC component detection circuit 16 are calculated, and the vacuum pressure when the vacuum defect is detected is the vacuum pressure display circuit 20 when the vacuum defect is detected, and the vacuum defect. It outputs to the vacuum pressure display circuit 19 which displays the vacuum pressure within the detection range. Both the vacuum pressure display circuit 19 and the vacuum pressure display circuit 20 when a vacuum defect is detected display the vacuum pressure in LED numerical values. A time chart showing these relationships is as shown in FIG.

【0013】すなわち、真空遮断器が開極、閉極状態に
あるときの主回路電圧波形Aが常に印加されている。真
空不良時は、この主回路電圧に対して検出インピーダン
ス回路2の出力波形Bのようになり、90゜進みAC分に
放電パルスが加算されたような波形になる。ここで、C
はウインド波形、Dは放電波形判定回路7の出力、Eは
AND回路8の出力をそれぞれ表わす。
That is, the main circuit voltage waveform A is always applied when the vacuum circuit breaker is in the open and closed states. When the vacuum is defective, an output waveform B of the detection impedance circuit 2 is obtained with respect to the main circuit voltage, and the waveform is such that a discharge pulse is added to the AC portion by 90 °. Where C
Is a window waveform, D is the output of the discharge waveform determination circuit 7, and E is the output of the AND circuit 8.

【0014】また図3に真空圧力とバルブ極間の放電電
圧、図4に真空圧力と真空不良信号のAC分波高電圧、
図5に真空圧力と放電パルス波高電圧の関係を示す。な
お、図3から図5中のx,yは真空不良検出点を示す。
Further, FIG. 3 shows the vacuum pressure and the discharge voltage between the valve poles, and FIG. 4 shows the vacuum pressure and the AC demultiplexed high voltage of the vacuum failure signal.
FIG. 5 shows the relationship between the vacuum pressure and the discharge pulse wave high voltage. Note that x and y in FIGS. 3 to 5 indicate vacuum defect detection points.

【0015】本実施例は、図2の検出インピーダンス回
路2の出力波形が真空圧により図4、図5に示すa2,
a3の特性を有することを応用して真空圧力判定回路18
で判定し、真空不良時の真空圧表示及び検出範囲での真
空圧力表示が可能となる。
In this embodiment, the output waveform of the detection impedance circuit 2 of FIG. 2 is a2 as shown in FIGS. 4 and 5 due to the vacuum pressure.
Vacuum pressure judgment circuit 18 by applying the characteristics of a3
It is possible to display the vacuum pressure when the vacuum is defective and the vacuum pressure within the detection range.

【0016】したがって、真空遮断器の真空バルブに真
空不良が発生した場合は、放電波形波高値表示回路15の
数値表示LEDが表示を開始し、真空不良検出装置で検
出を開始したことが判断できる。また真空圧がさらに上
昇すると、ある動作点で検出動作し、その真空圧力を真
空不良検出時の真空圧力表示回路20で数値表示し、ホー
ルドする。真空不良検出範囲内の真空圧力は、真空圧力
表示回路19で常に数値表示する。
Therefore, when a vacuum failure occurs in the vacuum valve of the vacuum circuit breaker, it can be determined that the numerical value display LED of the discharge waveform crest value display circuit 15 has started displaying and the vacuum failure detection device has started detection. . When the vacuum pressure further rises, detection operation is performed at a certain operating point, and the vacuum pressure is numerically displayed and held by the vacuum pressure display circuit 20 when a vacuum defect is detected. The vacuum pressure within the vacuum defect detection range is always displayed numerically by the vacuum pressure display circuit 19.

【0017】この各表示により、真空不良検出装置が正
常に動作していることが判断でき、さらに真空不良検出
後の真空バルブ極間へ商用周波耐電圧試験を実施するこ
となく、使用者の経済的なデメリットを軽減することが
可能になる。
From each of these indications, it can be determined that the vacuum defect detection device is operating normally, and the commercial frequency withstand voltage test is not performed between the vacuum valve poles after the detection of the vacuum defect. It becomes possible to reduce the disadvantages.

【0018】[0018]

【発明の効果】以上説明したように本発明によれば、真
空遮断器の遮断部に使用される真空バルブが真空不良に
至った場合、確実に真空不良を検出でき、さらに真空不
良発生後の調査に多大な時間を費すことがなくなり、使
用者の時間的・経済的な負担を軽減することができる真
空不良検出装置を得られる。
As described above, according to the present invention, when the vacuum valve used in the breaking portion of the vacuum circuit breaker has a defective vacuum, the defective vacuum can be surely detected, and after the defective vacuum occurs, It is possible to obtain a vacuum defect detection device that does not require a great deal of time for investigation and can reduce the user's time and financial burden.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の真空不良検出装置の一実施例の構成を
示すブロック図。
FIG. 1 is a block diagram showing a configuration of an embodiment of a vacuum defect detecting device of the present invention.

【図2】〔図1〕の動作を説明するための図。FIG. 2 is a diagram for explaining the operation of FIG.

【図3】〔図1〕の真空圧力とバルブ極間の放電電圧と
の特性図。
FIG. 3 is a characteristic diagram of the vacuum pressure in FIG. 1 and the discharge voltage between the valve poles.

【図4】〔図1〕の真空圧力と真空不良信号のAC分波
高電圧との特性図。
FIG. 4 is a characteristic diagram of the vacuum pressure of FIG. 1 and the AC demultiplexing high voltage of the vacuum defect signal.

【図5】〔図1〕の真空圧力と放電パルス波高電圧との
特性図。
FIG. 5 is a characteristic diagram of the vacuum pressure and the discharge pulse wave high voltage of FIG. 1.

【図6】従来の真空不良検出装置の構成を示すブロック
図。
FIG. 6 is a block diagram showing a configuration of a conventional vacuum defect detecting device.

【符号の説明】[Explanation of symbols]

1…検出センサ、2…検出インピーダンス回路、11…出
力回路、14…放電波形検出回路、16…AC分検出回路、
18…真空圧力判定回路。
1 ... Detection sensor, 2 ... Detection impedance circuit, 11 ... Output circuit, 14 ... Discharge waveform detection circuit, 16 ... AC component detection circuit,
18 ... Vacuum pressure judgment circuit.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 真空容器内に接離自在の一対の電極を有
する真空遮断器に接続され、前記真空容器内の真空不良
時に検出される放電波形と正常時に検出される交流波形
とから異常を検出する真空不良検出装置において、前記
放電波形中の交流波分の波高値を検出する第1の検出手
段と、前記放電波形中の放電波分の波高値から前記真空
不良の開始時を検出する第2の検出手段と、前記放電波
形が継続的に発生するのを検出する第3の検出手段と、
前記第1、第2および第3の検出手段からの出力信号に
基づいて真空不良検出範囲内および真空不良検出時の真
空圧力値を検出する判別手段とを備えたことを特徴とす
る真空不良検出装置。
1. A vacuum circuit breaker having a pair of electrodes which can be freely contacted and separated from each other in a vacuum container, and detects an abnormality from a discharge waveform detected when the vacuum in the vacuum container is defective and an AC waveform detected when the vacuum container is normal. In a vacuum defect detecting device for detecting, a first detecting means for detecting a peak value of an AC wave in the discharge waveform and a start time of the vacuum defect from a peak value of a discharge wave in the discharge waveform. Second detecting means, and third detecting means for detecting that the discharge waveform is continuously generated,
Vacuum defect detection, comprising: a determination unit that detects the vacuum pressure value within the vacuum defect detection range and the vacuum pressure value when the vacuum defect is detected based on the output signals from the first, second, and third detection units. apparatus.
JP17248092A 1992-06-30 1992-06-30 Improper vacuum detecting device Pending JPH0612949A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17248092A JPH0612949A (en) 1992-06-30 1992-06-30 Improper vacuum detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17248092A JPH0612949A (en) 1992-06-30 1992-06-30 Improper vacuum detecting device

Publications (1)

Publication Number Publication Date
JPH0612949A true JPH0612949A (en) 1994-01-21

Family

ID=15942774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17248092A Pending JPH0612949A (en) 1992-06-30 1992-06-30 Improper vacuum detecting device

Country Status (1)

Country Link
JP (1) JPH0612949A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7492447B2 (en) 2002-10-30 2009-02-17 Atago Co., Ltd. Refractometer
CN111940335A (en) * 2020-09-24 2020-11-17 台州市椒江蒙特智能装备有限公司 Factory valve detects and screening classification equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7492447B2 (en) 2002-10-30 2009-02-17 Atago Co., Ltd. Refractometer
CN111940335A (en) * 2020-09-24 2020-11-17 台州市椒江蒙特智能装备有限公司 Factory valve detects and screening classification equipment

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