JPH06120274A - Pickup - Google Patents

Abstract

PURPOSE:To prevent the adhesion of a foreign matter to a pellet rear face and damage to the pellet rear face by equipping a cleaning means for cleaning the tip of a needle. CONSTITUTION:When a needle 13 rises in a needle unit 12, the needle passes through a cleaner chamber 16 in the upper part of the needle unit 12. When the tip of the needle 13 passes through a cleaner 17 part in the cleaner chamber 16, the tip is wiped by the cleaner 17 so that a foreign matter is removed and the tip is cleansed by a cleaning liquid 21 with which the cleaner 17 is impregnated. When the tip of the needle 13 cleansed by the cleaner 17 further passes through an air chamber 18 above the cleaner chamber 16, air is blown from a blowout hole 22 against the tip so that the foreign matter is removed and the tip is dried. Thus, it is possible to prevent foreign matters from being attached to the rear face of the pellet or the pellet rear face from being damaged by the tip of the needle 13 at the time of pickup of the pellet by the needle 13.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pickup device, and more particularly to a technique for picking up a small number of small articles attached to an adhesive sheet from the adhesive sheet. For example, dicing is performed in a semiconductor manufacturing process. The present invention relates to a technique effectively used for picking up semiconductor pellets (hereinafter, simply referred to as pellets) from an adhesive sheet.

[0002]

2. Description of the Related Art In a semiconductor manufacturing process, a pickup device for picking up diced pellets from a sticking sheet pushes up the pellet on which the sticking sheet is stuck by one or a plurality of needles such as tungsten needles. As a result, the pellets are peeled off from the adhesive sheet, and the pellets pushed up by the needles are vacuum suction-held from above by the transport collet arranged above the needles.

As an example that describes a technique for picking up pellets from an adhesive sheet, Realize Co., Ltd., issued on Sep. 5, 1986, "Latest Technology Collection of Ultra LSI Factory (Vol. 2, Latest Process and Automation)" Pp.252-
Page 254 and "Electronic Materials", published by the Industrial Research Institute Co., Ltd. 1
There are pages 94 to 98 of the October 990 separate volume (VLSI manufacturing / testing equipment guidebook).

[0004]

In the above-mentioned pickup device, when the needle pierces the adhesive sheet and pushes up the pellet to separate it from the adhesive sheet, the tip of the needle is applied to the back surface of the adhesive sheet. Adhesives may adhere or chipped pellets may adhere. If these are left unattended, the sticking material attached to the tip of the needle may adhere to the back surface of the pellet or scratch the back surface of the pellet when the needle is pushed up.

Therefore, although it is necessary to regularly clean the needle, the conventional pick-up device does not have a needle cleaning mechanism. Therefore, conventionally, an operator visually confirms the dirt of the needle,
Cleaning the needle.

An object of the present invention is to provide a pickup device capable of automatically cleaning the tip of the needle.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0008]

The typical ones of the inventions disclosed in the present application will be outlined below.

That is, a sticking sheet to which a large number of small articles are stuck is fixedly held, and a needle for sticking the sticking sheet from the back surface side to separate the small article from the sticking sheet is a needle. A pickup device, which is housed in the unit so as to be movable up and down and projectable from the needle unit, is equipped with cleaning means for cleaning the tip of the needle.

[0010]

According to the above-mentioned means, the tip portion of the needle is cleaned by the cleaning means, and the adhesive material of the adhesive sheet and the chipped pellets attached to the tip of the needle are removed. It is possible to prevent foreign matter from adhering to the back surface of the pellet or scratching the back surface of the pellet at the time of pushing up.

[0011]

1 is a view showing a pickup device according to an embodiment of the present invention, (a) is a front view and (b) is bb.
It is the expanded plane sectional view which follows the line. 2A and 2B are views for explaining the operation, wherein FIG. 2A is an enlarged cross-sectional view of an enlarged main part, and FIG. 2B is a state in which the needle unit is lifted from the state of FIG. FIG. 6 is a front cross-sectional view showing a state in which the needle is projected from the needle unit and the pellet is peeled from the adhesive sheet in a state where the sheet is pressed against the sheet.

In the present embodiment, the pickup device 10 according to the present invention is configured to pick up one diced pellet from the adhesive sheet in the semiconductor manufacturing process. This pickup device 10
Adhesive sheet with pellets as work in
Sometimes called work. ) 1 is configured as follows.

In a so-called pre-process in the manufacturing process of a semiconductor device, a wafer (not shown) in which a transistor, a diode, a semiconductor integrated circuit device, an optical semiconductor device, etc. are formed for each pellet 2 is electrically processed in the wafer inspection process. The product is sorted into non-defective pellets and defective pellets by a static characteristic test or visual inspection. At this time, the defective pellets are marked.

In the sheet sticking step, the sticking sheet 3 is stuck to the back surface of the wafer thus inspected. The adhesive sheet 3 includes a sheet base material 4 which is made of a material having elasticity such as resin and is formed in a thin film shape having a diameter larger than that of a wafer. A suitable adhesive material is applied to the surface to form the adhesive material layer 5.

Then, in the dicing process, the wafer is divided into pellets 2 as small articles. At this time, since the sticking sheet 3 stuck to the back surface of the wafer is not cut by dicing, the pellet 2 group is not separated but is in a group.

Next, in the jig mounting step, the ring 6 is mounted on the outer peripheral portion of the adhesive sheet 3. The ring 6 is made of a rigid material such as stainless steel and is formed in a circular ring shape having a diameter larger than that of the wafer. The adhesive sheet 3 is arranged so as to face the inside of the frame of the ring 6, and then is stretched outward in the radial direction, and its outer peripheral portion is fixed to the ring 6. At this time, the adjacent pellets 2 are separated from each other as the adhesive sheet 3 stretches.

The pick-up device 10 is provided with a table 11 for holding the work 1 on which the ring 6 is mounted. The table 11 is constructed so that the held work 1 can be moved in the XYZ directions by a driving device (not shown). Has been done.

A needle unit 12 is arranged below the table 11. The needle unit 12 accommodates four needles 13 as detaching means. Further, the upper surface of the needle unit 12 is formed into a convex spherical surface to form the adhesive sheet pressing surface 14. The needles 13 are arranged vertically, and the needles 13 are dispersed in four directions at appropriate intervals so that the pellets 2 can be evenly pierced. It is vertically movably inserted into each of the guide holes 15 formed in.

Each needle 13 is vertically driven in the needle unit 12 by a driving device (not shown), and at the lower limit position thereof, a cleaner 17 to be described later is provided.
Although it is stored at a lower position than that, it is adapted to project upward from the adhesive sheet pressing surface 14 at the upper limit position. Further, the needle unit 12 is configured to be movable in the vertical direction by a driving device (not shown).

A cleaner chamber 16 and an air chamber 18 are formed in the upper portion of the needle unit 12, and the cleaner chamber 16 is loaded with a cleaner 17.

The cleaner 17 is formed of a flame-retardant felt having elasticity, and needle holes 19 through which the tip ends of the needles 13 are inserted are formed so as to vertically pass therethrough. Then, the cleaner 17 has a volatile cleaning liquid 21 from a cleaning liquid injection port 20 formed on the side surface of the needle unit 12.
Is to be injected. This cleaning liquid 2
1 is a material having a high degree of electrical insulation, for example, a surfactant containing alcohol as a main component is used. This kind of cleaning liquid is used, for example, when wiping a connector of a computer with cotton. The cleaning liquid 21 is injected from the cleaning liquid injection port 20 to sufficiently impregnate the entire cleaner 17.

In the air chamber 18 formed above the cleaner chamber 16, an air outlet 22 and an air inlet 23 are formed so as to face the side surface of the needle unit 12, and the air outlet 22 is formed. Is connected to a compressed air source (not shown) by a pipe 24, and the air suction port 23 is connected to a pipe 25.
Is connected to an exhaust duct (not shown). Therefore, air is blown from the air outlet 22 into the air chamber 18, and this air is sucked from the air chamber 18 to the suction port 23 and discharged to the exhaust duct.

A collet 26 is provided directly above the needle 13, and the collet 26 is constructed so that the pellet 2 pushed up by the needle 13 can be vacuum-adsorbed and held from above. Further, the collet 26 is configured to be moved from a position directly above the needle 13 to a position where the pellets should be transferred by an appropriate moving device (not shown).

Next, the operation will be described. When the work 1 to which the ring 6 is attached is held on the table 11 with the pellet 2 on the upper side and properly aligned, as shown in FIG.
As shown in (b), the needle unit 12 is raised, and the adhesive sheet pressing surface 14 on the upper surface presses the adhesive sheet 3 of the work 1. Adhesive sheet pressing surface 14
Is formed on a convex spherical surface, the adhesive sheet 3 is curved upward along the convex spherical surface.

Subsequently, the four needles 13 are raised from the needle unit 12 and project upward from the adhesive sheet pressing surface 14. As a result, the portion of the adhesive sheet 3 that is pierced by the needle 13 is pierced by the needle 13, and the pellet 2 on the upper surface of the pierced adhesive sheet 3
Is peeled from the adhesive sheet 3 by the needle 13. At this time, since the sticking sheet pressing surface 14 is formed into a convex spherical surface, the pellet 2 pushed up by the needle 13 is located at the highest position, so that the surrounding pellet 2 group does not lift up.

At this time, as shown in FIG. 2A, as the needle 13 rises in the needle unit 12, the cleaner chamber 16 is located above the needle unit 12.
Pass through. The tip of the needle 13 is the cleaner chamber 1
At the time of 6, the cleaner 17
The foreign matter is removed by wiping with a cleaning liquid 21 and cleaned by the cleaning liquid 21 impregnated in the cleaner 17. When the tip of the needle 13 cleaned by the cleaner 17 further passes through the air chamber 18 above the cleaner chamber 16, air is blown from the air outlet 22 to remove foreign matter and dry.

In this way, the needle 13 passes through the cleaner chamber 16 and the air chamber 18 to remove and clean the foreign matter attached to the tip end thereof. Therefore, when the needle 13 pushes up the pellet 2, The tip of 13 prevents foreign matters from adhering to the back surface of the pellet 2 and scratches on the pellet 2.

The pellets 2 pushed up by the needles 13 and peeled from the adhesive sheet 3 as described above.
Is vacuum-sucked and held by the collet 26 that is standing by thereabove, and is delivered to the collet 26 as the needle 13 descends.

The collet 26 delivered with the pellet 2 is moved from a position directly above the needle 13 to a predetermined position such as a tray or a tab of a lead frame by an appropriate moving device, and the pellet is delivered to the tray or the tab there. . Then, the collet 26 is returned to the position directly above the needle 13,
Wait for the next pick-up operation.

On the other hand, when the needle 13 is lowered and drawn into the needle unit 12, and when the needle unit 12 is lowered, the table 11 is appropriately moved in the XYZ directions, and the pellet 2 to be picked up next time is needled. Directly above 13 is arranged. The needle 13
When the needle 13 is lowered, the tip of the needle 13 is cleaned by the air chamber 18 and the cleaner chamber 16 in the same manner as when the needle 13 is raised.

Thereafter, by repeating the above operation, one pellet 2 is picked up from the adhesive sheet 3 and each needle 13 causes the needle chamber 13 and the air chamber 18 to be picked up every time the pickup is operated.
Is automatically cleaned in.

According to the above embodiment, the following effects can be obtained. A cleaner 17 impregnated with the cleaning liquid 21 is provided in the needle unit 12.
Since the needle 13 is configured to penetrate through the seven portions, the needle 1 is not moved when the needle 13 is raised or lowered.
The cleaning liquid 21 impregnated in the cleaner 17 is wiped by the cleaner 17 to remove foreign matters from the tip of the cleaning liquid 21.
Is cleaned by. As a result, when the needle 13 pushes up the pellet 2, the tip of the needle 13 causes foreign matter to adhere to the back surface of the pellet 2 or the pellet 2
It is possible to prevent scratches on the.

Since the air chamber 18 is formed above the cleaner chamber 16 in the needle unit 12,
The tip of the needle 13 cleaned by the cleaner 17 is further blown with air in the air chamber 18 so that foreign matter is blown off and dried.

Since the cleaning operation of the needle 13 is automatically performed as described above, the operator does not need to perform the cleaning operation of the needle 13.

3A and 3B are views showing a pickup device according to a second embodiment of the present invention. FIG. 3A is a front sectional view and FIG. 3B is an enlarged plan view of a main part.

Pickup device 10A according to the second embodiment
The sticking sheet pressing surface 14 of the needle unit 12
A high-pressure air blowing device 30 that blows high-pressure air from the side is provided on the tip of the needle 13 protruding upward from the needle 13. The high-pressure air blowing device 30 includes a nozzle 31 connected to an air compression source (not shown) by a pipe, and the nozzle 31 has a tip of a needle 13 protruding upward from a sticking sheet pressing surface 14 of the needle unit 12. It is configured to blow high pressure air to the part from the side. An exhaust duct 32 is provided on the opposite side of the nozzle 31, and the exhaust duct 32 sucks the air ejected from the nozzle 31 and blown onto the needle 13.

Then, the nozzle 31 and the exhaust duct 32
The high-pressure air spraying device 30 provided with is configured to be arranged from the retracted position to the lateral position of the needle 13 when the needle 13 is cleaned by a moving device (not shown).

In the second embodiment, the high-pressure air spraying device 30 is arranged at the side position of the needle 13 during the transition from the previous pickup work to the next pellet pickup work. Subsequently, the needle 13 is projected upward from the sticking sheet pressing surface 14 of the needle unit 12, and high pressure air is blown onto the tip of the needle 13 from the nozzle 31 of the high pressure air blowing device 30. By this spraying, foreign matter such as an adhesive material attached to the tip of the needle 13 can be automatically removed. The foreign matter such as the adhesive material blown off by the air rides on the air and is collected in the exhaust duct 32.

When this cleaning operation is completed, the nozzle 31 and the exhaust duct 32 of the high-pressure air blowing device 30 are moved from the cleaning position to the retracted position. By the retreat movement of the high-pressure air blowing device 30, the next pellet pick-up work can be performed.

FIG. 4 is a diagram showing a main part of a pickup device according to a third embodiment of the present invention, in which (a) is a front sectional view.
(B) is an enlarged plan view of a main part.

Pickup device 10B according to the third embodiment
The sticking sheet pressing surface 14 of the needle unit 12
A vacuum suction device 33 that vacuum-sucks foreign matter attached to the tip of the needle 13 protruding upward from above is provided. The vacuum suction device 33 includes a vacuum duct 34 connected to a vacuum source (not shown) by a pipe 35. The vacuum suction duct 34 is a needle projecting upward from the sticking sheet pressing surface 14 of the needle unit 12. It is arranged at a position above the tip portion of 13. The vacuum suction duct 34 is configured to be moved from the retracted position to a position above the needle 13 by a moving device (not shown) when the needle 13 is cleaned.

In the third embodiment, the vacuum suction duct 34 is arranged above the needle 13 during the transition from the previous pickup work to the next pellet pickup work. Subsequently, the needle 13 is projected upward from the sticking sheet pressing surface 14 of the needle unit 12, and foreign matter such as an adhesive material attached to the tip of the needle 13 is automatically removed by vacuum suction.

When this cleaning operation is completed, the vacuum suction duct 34 is moved from the cleaning position to the retracted position. By retreating the vacuum suction duct 34,
The next pellet pick-up operation can be performed.

FIG. 5 is a front sectional view showing a main part of a pickup device according to a fourth embodiment of the present invention.

Pickup device 10C according to the fourth embodiment
The sticking sheet pressing surface 14 of the needle unit 12
A high-pressure water jetting device 36 for spraying high-pressure water from above is provided at the tip of the needle 13 protruding upward from the above. The high-pressure water jetting device 36 is provided with a nozzle 37 connected to a water storage tank via a pump (not shown) by a pipe, and the nozzle 37 is a needle projecting upward from the sticking sheet pressing surface 14 of the needle unit 12. High-pressure water is sprayed from above onto the tip portion of 13. In addition, a water receiver 3 is provided around the needle unit 12.
8 is formed, and the water receiver 38 is configured so that the water is discharged to a predetermined place by the drain pipe.

The nozzle 37 is arranged so as to be located above the needle 13 from the retracted position when the needle 13 is cleaned by a moving device (not shown).

In the fourth embodiment, the nozzle 37 of the high-pressure water jetting device 36 is arranged above the needle during the transition from the previous pickup work to the next pellet pickup work. Subsequently, the needle 13 is projected upward from the sticking sheet pressing surface 14 of the needle unit 12, and high pressure water is sprayed from the nozzle 37 of the high pressure water jetting device 36 onto the tip portion of the needle 13. By this spraying, foreign matter such as an adhesive material attached to the tip of the needle 13 is removed. Water after cleaning is needle unit 1
2 falls on a water receiver 38 formed around the water and is discharged to a predetermined place by a discharge pipe.

When this cleaning operation is completed, the nozzle 37 of the high-pressure water jetting device 36 is moved from the cleaning position to the retracted position. By the retreat movement of the nozzle 37, the next pellet pickup operation can be performed.

Although the invention made by the present inventor has been specifically described based on the embodiments, the invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention. Needless to say.

For example, in the first embodiment, the cleaner chamber 16
Although the air chamber 18 and the air chamber 18 are provided, the air chamber 18 may be omitted.

Further, a foreign matter adhesion sensor for the needle may be provided in combination with the above-mentioned cleaning mechanism so that the presence or absence of foreign matter on the tip of the needle can always be grasped.

In the above description, the case where the invention made by the present inventor is mainly applied to the pickup technology of semiconductor pellets which is the field of application which is the background of the invention has been described, but the present invention is not limited thereto and a minute electron is used. The present invention can be applied to general pickup technology for sticking sheets of small articles such as parts and electronic devices.

[0053]

The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.

Since the tip of the needle is always cleaned by providing the cleaning means for cleaning the tip of the needle, foreign matter adheres to the back surface of the pellet by the tip of the needle when the pellet is picked up by the needle. It is also possible to prevent the back surface of the pellet from being scratched.

[Brief description of drawings]

FIG. 1 is a diagram showing a pickup device according to an embodiment of the present invention, in which (a) is a front sectional view and (b) is an enlarged plan sectional view taken along line bb.

2A and 2B are views for explaining the operation thereof, in which FIG. 2A is an enlarged cross-sectional view of an enlarged main part, and FIG. 2B is a needle unit rising from the state of FIG. FIG. 6 is a front cross-sectional view showing a state in which a needle protrudes from the needle unit and a pellet is peeled off from the adhesive sheet with the surface pressed against the adhesive sheet.

3A and 3B are views showing a pickup device which is Embodiment 2 of the present invention, in which FIG. 3A is a front sectional view and FIG. 3B is an enlarged plan view of a main part.

4A and 4B are views showing a pickup device which is Embodiment 3 of the present invention, in which FIG. 4A is a front sectional view and FIG. 4B is a plan view thereof.

FIG. 5 is a front sectional view showing a pickup device which is Embodiment 4 of the present invention.

[Explanation of symbols]

1 ... Work, 2 ... Pellet, 3 ... Adhesive sheet, 4 ... Sheet base material, 5 ... Adhesive layer, 6 ... Ring, 10, 10A, 1
0B, 10C ... Pickup device, 11 ... Table, 1
2 ... Needle unit, 13 ... Needle, 14 ... Adhesive sheet pressing surface, 15 ... Guide hole, 16 ... Cleaner chamber, 1
7 ... Cleaner, 18 ... Air chamber, 19 ... Needle hole, 20
... Cleaning liquid inlet, 21 ... Cleaning liquid, 22
... Blowout port, 23 ... Suction port, 24, 25 ... Piping, 26 ... Collet, 30 ... High pressure air blowing device, 31 ... Nozzle, 32
... Exhaust duct, 33 ... Vacuum suction device, 34 ... Vacuum suction duct, 35 ... Piping, 36 ... High-pressure water ejection device, 37 ... Nozzle, 38 ... Water receiver.

Claims (6)

[Claims] 1. A needle holding a sticking sheet to which a large number of small articles are stuck, and sticking the sticking sheet from the back side to separate the small articles from the sticking sheet. A pickup device housed in a unit so as to be movable up and down and projectable from a needle unit, comprising a cleaning means for cleaning a tip portion of the needle. 2. The cleaning means is provided with a cleaner chamber at a needle passage portion in the needle unit, and a cleaner for wiping the needle is attached to the cleaner chamber. Pickup device. 3. The cleaning means includes a cleaner chamber at a needle passage portion in the needle unit and an air chamber for blowing high-pressure air to the needle, and a cleaner for wiping the needle is provided in the cleaner chamber. The pickup device according to claim 1, which is mounted. 4. The cleaning means comprises a high-pressure air blowing device for blowing high-pressure air to the tip of the needle protruding from the needle unit, and the high-pressure air blowing device is movably provided to the needle unit portion. The pickup device according to claim 1, wherein the pickup device is provided. 5. The cleaning means includes a vacuum suction device that vacuum-sucks foreign matter attached to the tip of the needle protruding from the needle unit, and the vacuum suction device is provided so as to be movable to the needle unit portion. The pickup device according to claim 1, wherein the pickup device is provided. 6. The cleaning means comprises a high-pressure water jetting device for jetting high-pressure water to the tip of the needle protruding from the needle unit, and the high-pressure water jetting device is provided so as to be movable to the needle unit part. The pickup device according to claim 1, wherein