JPH06114225A - Method and device for removing dust - Google Patents
Method and device for removing dustInfo
- Publication number
- JPH06114225A JPH06114225A JP3307286A JP30728691A JPH06114225A JP H06114225 A JPH06114225 A JP H06114225A JP 3307286 A JP3307286 A JP 3307286A JP 30728691 A JP30728691 A JP 30728691A JP H06114225 A JPH06114225 A JP H06114225A
- Authority
- JP
- Japan
- Prior art keywords
- filter
- dust
- fine dust
- removing dust
- reinforced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 7
- 238000001914 filtration Methods 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 239000003814 drug Substances 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000002787 reinforcement Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】 本発明は、半導体製造業、製薬製造業、食品製造業等従
来の粉塵ろ過装置では不可能であった微粉塵（０．３μ
以下）ろ過を長期に渡って安定に行うことを目的とした
粉塵除去方法とその装置を提供するものである。従来、
一般的な微粉塵用フィルター（ヘパフィルター等）は、
表面積を大きく取り長期渡って目詰まりを起こさない構
造とする為、ギャザー構造等種々の工夫をこらした再生
不可能な使い捨てフィルターであり非常に高価である等
の問題があった。しかも、フィルターの組合せの選定が
非常に困難で、使用可能時間を予測することは不可能に
近く、使用可能時間も短かった。そこで、より長期に渡
って使用する為逆圧クリーニング等種々の工夫をこらし
た再生機能付きフィルターを使用していた。しかし、逆
圧によるクリーニング方式は比較的大きな粉塵（１μ以
上）を対称とすることが多く、本発明の目的とする微粉
塵（０．３μ以下）を対象とした場合は、クリーニング
用の逆圧をかなり高くする必要がある。この為、フィル
ターが傷み、微粉塵（０．３μ以下）を濾過できなくな
る等の問題があったまた、逆圧ではフィルター表面を一
様にクリーニングする事は不可能であり、フィルター表
面積を有効に使用することができなかった。本発明は、
従来の粉塵ろ過装置では不可能であった微粉塵（０．３
μ以下）ろ過を安全なクリーニング機構を付けることに
より長期に渡って安定に行い、構造を単純化し、製造コ
ストをさげ、表面積を最大限に有効に活用できるフィル
ター構造を使用した粉塵除去方法とその装置を提供する
ものである。基本的な構造は、含微粉塵気流中（０．３
μ以下）から微粉塵をろ過する為の固定補強あるいは強
化（フィルターの補強とはパンチング板／金網等による
補強を示し、強化とはは樹脂等で鴈芯することを意味す
る。）された円柱状・円錐状・平面状等の単純な形状の
のフィルター−Ｉとフィルター−Ｉの表面にろ過捕集さ
れた微粉塵の取り除く機能及び前処理フィルターの機能
をあわせもつ可動（回転運動・直線運動等）可能なブラ
シ等からなるフィルター−ＩＩを備えるものである。以
下、本発明の一実施例を示し、その説明をする。図にお
いては含塵気流入口で、はろ過済気流出口である。
の気流入口から入った含塵気流はのブラシ部分によ
り粉塵を粗取りろ過され、のフィルターにより完全に
ろ過される。こののブラシ部分及びのフィルター内
面にろ過された粉塵をのモーターに直結されたのブ
ラシ（回転運動）によりの粉塵タンクに集められる。DETAILED DESCRIPTION OF THE INVENTION The present invention is capable of producing fine dust (0.3 μm) that has not been possible with conventional dust filters such as semiconductor manufacturing, pharmaceutical manufacturing, and food manufacturing.
The present invention provides a dust removing method and an apparatus for the purpose of performing stable filtration over a long period of time. Conventionally,
General fine dust filters (hepa filters, etc.)
Since it has a large surface area and has a structure that does not cause clogging for a long period of time, it has a problem that it is a non-reproducible disposable filter that has been devised in various ways such as a gather structure and is very expensive. Moreover, it is very difficult to select the combination of filters, it is almost impossible to predict the usable time, and the usable time is short. Therefore, in order to use the filter for a longer period of time, a filter with a regenerating function that has been devised in various ways such as back pressure cleaning has been used. However, a cleaning method using a back pressure often makes relatively large dust particles (1 μ or more) symmetrical, and when the target is fine dust particles (0.3 μ or less), the back pressure for cleaning is Needs to be quite high. Therefore, there was a problem that the filter was damaged and fine dust (0.3μ or less) could not be filtered. Moreover, it is impossible to uniformly clean the filter surface by back pressure, and the filter surface area is effectively used. Could not be used. The present invention is
Fine dust (0.3
(μ or less) Stable filtration over a long period of time by attaching a safe cleaning mechanism, simplifying the structure, reducing manufacturing costs, and using a filter structure that can maximize the effective use of surface area and its removal method A device is provided. The basic structure is (0.3
Fixed or reinforced for filtering fine dust from (μ or less) (reinforcement of the filter means reinforcement by a punching plate / metal mesh, etc., and reinforcement means coring with resin etc.). Movable (rotary motion / linear motion) that has both a filter-I of a simple shape such as a column, a cone, and a flat surface, and a function of removing fine dust collected on the surface of the filter-I and a function of a pretreatment filter. Etc.) A filter-II composed of a possible brush or the like is provided. Hereinafter, an embodiment of the present invention will be shown and described. In the figure, is a dust-containing airflow inlet and is a filtered airflow outlet.
The dust-containing airflow that has entered from the airflow inlet of is roughly dust-filtered by the brush portion of and is completely filtered by the filter of. The dust filtered on the brush portion and the inner surface of the filter is collected in the dust tank by the brush (rotational motion) directly connected to the motor.
図は本発明の実施例を示す概略図である。 ………含塵気流入口 ………ろ過済気流出口 ………フィルター ………モーター ………ブラシ ………粉塵タンク The drawing is a schematic view showing an embodiment of the present invention. ………… Dust-containing air flow inlet ………… Filtered air flow outlet ………… Filter ………… Motor ………… Brush ………… Dust tank
Claims (1)
は強化されたフィルター−Ｉ（円柱状、円錐状、平面状
等）及び前処理用のフィルターとフィルター−Ｉ表面の
粉塵を取り除く両方の機能を持つ可動式ブラシ等（回転
運動及び直線運動）から成るフィルター−ＩＩを備える
構造を持つ粉塵除去方法とその装置。尚、本方法とその
装置は単数或いは複数を組み合わせて使用してもよい。Fixed-reinforced or reinforced filter-I (cylindrical, conical, planar, etc.) for collecting and collecting dust from the dust-containing airflow, and a filter for pretreatment and removal of dust on the filter-I surface A dust removing method and apparatus having a structure including a filter-II including a movable brush having a function (rotational movement and linear movement). The method and the apparatus thereof may be used singly or in combination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3307286A JP2850169B2 (en) | 1991-09-09 | 1991-09-09 | Dust removal method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3307286A JP2850169B2 (en) | 1991-09-09 | 1991-09-09 | Dust removal method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06114225A true JPH06114225A (en) | 1994-04-26 |
| JP2850169B2 JP2850169B2 (en) | 1999-01-27 |
Family
ID=17967305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3307286A Expired - Lifetime JP2850169B2 (en) | 1991-09-09 | 1991-09-09 | Dust removal method and device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2850169B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08182910A (en) * | 1994-12-28 | 1996-07-16 | Toshio Awaji | Dust removal and device therefor |
| JP2000140539A (en) * | 1998-11-04 | 2000-05-23 | Toshio Awaji | Treatment apparatus and treatment method of dust- containing exhaust gas |
-
1991
- 1991-09-09 JP JP3307286A patent/JP2850169B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08182910A (en) * | 1994-12-28 | 1996-07-16 | Toshio Awaji | Dust removal and device therefor |
| JP2000140539A (en) * | 1998-11-04 | 2000-05-23 | Toshio Awaji | Treatment apparatus and treatment method of dust- containing exhaust gas |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2850169B2 (en) | 1999-01-27 |
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