JPH0611333A - Method for calibrating glide tester - Google Patents

Abstract

PURPOSE:To highly reliably calibrate a glide tester even in a low floating area. CONSTITUTION:By using a plurality of reference disks 1 respectively provided with reference projections 1a formed in a prescribed length area in the radial direction and having different heights, a reference degree of detection which is the degree of detection of a reference glide head 3 against the reference projections 1a is found. Then a calibrated degree of detection which is the degree of a glide head to be calibrated against the projections 1a is found and a glide tester is adjusted so that the calibrated degree of detection can coincide with the reference degree of detection within a prescribed extent.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for calibrating a glide tester for detecting abnormal protrusions on the surface of a substrate such as a magnetic disk.

[0002]

2. Description of the Related Art Conventionally, as one of the quality evaluations of magnetic disks and the like, a glide test has been carried out to inspect the surface of magnetic disks and the like or abnormal projections made of foreign matters and the like that adhere to the surfaces during film formation. . This glide test is usually performed by a glide tester. This glide tester chucks a magnetic disk substrate on a spindle to rotate it, and causes the glide head placed on the surface of the magnetic disk substrate to levitate to a certain height by the air flow caused by the rotation. The presence or absence of is detected. The glide head is attached to the tip of a support made of a long elastic piece whose base end is fixed to a fixed part, and the surface facing the surface of the magnetic disk substrate is formed into a shape that can be floated by an air flow and In addition, a piezoelectric element (vibration detection device) is attached to the back surface. When the air bearing surface comes into contact with or approaches an abnormal protrusion or the like, the shock vibration is transmitted to the piezoelectric element, and an electric signal corresponding to the shock vibration is transmitted from the piezoelectric element. Since the magnitude of this electric signal depends on the size of the abnormal protrusion and the peripheral speed of the magnetic disk substrate, the electric signal is guided to a predetermined signal processing device so that the signal exceeds a predetermined detection level (slice level). The abnormal projection is detected as an abnormal projection signal.

Here, the flying height of the glide head is often different for each glide head. If the flying height is different, even if the glide head comes into contact with or approaches the same protrusion, the magnitude of the electric signal sent from the piezoelectric element will be different. In addition, it may be considered that the method of transmitting the vibration from the floating portion to the piezoelectric element is different for each glide head. Therefore, when the glide head is replaced, the glide tester is calibrated by using the glide test reference disk having the reference protrusion before the glide test. As a method of calibrating this glide tester, for example, the method described in Japanese Patent Laid-Open No. 3-5919 is known. This method uses a glide test reference disk that has protrusions of a standard height, protrusions of a height slightly lower than the reference height, and protrusions of a minute height higher than the reference height on the same radius. And then
At that time, the slice level or the flying height is set so that a signal based on a protrusion having a height lower than the reference height is not reliably detected as an abnormal protrusion signal, and a signal having a height higher than the reference height is always detected. In this way, accurate calibration can be performed.

[0004]

By the way, in recent years, with the increasing density of magnetic disks and the like, there has been an increasing demand for a reduction in the flying height of the head. Therefore, the glide test is also performed in the low flying area, and the glide head is inevitably calibrated in the low flying area. However, it has been found that the above-described conventional calibration method cannot always perform sufficiently accurate calibration in the low flying height region. That is, in the above-described conventional calibration method, a protrusion having a specific height is determined based on a signal generated by one protrusion formed at a designated radial position. However, in the low flying height region, variations may occur in the relationship between the height of the protrusion and the magnitude of the detection signal obtained by the protrusion. Therefore, in the calibration using only the data of one protrusion formed at the designated radial position, accurate information between the height of the protrusion and the magnitude of the detection signal may not be obtained, and the reliability of the calibration is high. There was a problem that it lacked.

The present invention has been made under the above-mentioned background, and an object thereof is to provide a calibration method for a glide tester capable of performing highly reliable calibration even in a low flying region. is there.

[0006]

In order to solve the above-mentioned problems, a calibration method for a glide tester according to the present invention comprises:
(1) The disc to be inspected is rotated to levitate the glide head arranged on the surface thereof to a predetermined height by the air flow caused by the rotation, and at that time, the glide head is checked for the presence or absence of an abnormal protrusion that comes into contact with or approaches the glide head. A calibration method of a glide tester for calibrating a glide tester that detects by a signal transmitted from an attached vibration detection device, wherein reference projections formed in a predetermined length region in a radial direction and having different heights from each other are provided. Using a plurality of reference discs provided, when the glide test is performed using the reference glide head in the glide tester, the degree of detecting the reference protrusion of each of these reference discs as an abnormal protrusion is obtained as the reference detection degree. In addition, using the glide head to be calibrated, the reference protrusion as an abnormal protrusion for each of the reference disks The degree of detection is determined and used as the calibration detection degree. Thereafter, the glide tester is adjusted so that the calibration detection degree and the reference detection degree match within a predetermined range.

As an aspect of this configuration 1, (2)
In the calibration method of the glide tester according to configuration 1, in the plurality of reference disks, the height of the reference protrusion has a reference height, and the height of the reference protrusion is slightly lower than the reference height. And a reference projection whose height is slightly higher than the reference height.

Further, as an aspect of the configuration 1 or 2,
(3) In the calibration method for a glide tester according to configuration 1 or 2, a reference detection number obtained by actually measuring the number of reference protrusions detected as abnormal protrusions by the reference glide head is used as the reference detection degree. As a calibration detection degree, a calibration detection number obtained by actually measuring the number of reference protrusions detected as abnormal protrusions by the calibration target glide head is used, and (4) configuration 1
Alternatively, in the calibration method of the glide tester according to 2, when each of the reference disks is rotated to float the reference glide head to a predetermined height, and the reference glide head is moved in a predetermined range at a predetermined pitch in a radial direction. The theoretical detected number obtained by calculating the total detected number for each reference disk assuming that the reference protrusion is always detected as an abnormal protrusion each time the reference glide head passes over the reference protrusion, and the reference glide. A value corresponding to the ratio of the reference detection number obtained by actually measuring the number of reference protrusions detected by the head as abnormal protrusions is calculated for each reference disk and used as the standard value of the detection rate. Is used as the detection degree, and the number of calibration detections obtained by actually measuring each reference disk using the glide head to be calibrated and the previous This was a calibration value of the detected rate seeking a value corresponding to the ratio between the theoretical number of detected, has a structure that is characterized by using the calibration value for the detection rate as the calibration detection degree.

Further, as an aspect of configuration 4, (5) in the calibration method of the glide tester of configuration 4, measurement of the reference detection number using the reference glide head and measurement of the calibration detection number using the calibration target glide head. Is performed a plurality of times for each reference disk to obtain a value having a predetermined width as the standard value of the detection rate and the calibration value of the detection rate.

As a mode of the configurations 1 to 5,
(6) In the calibration method for a glide tester according to any one of configurations 1 to 5, the adjustment of the glide tester is performed as follows.
The configuration is characterized in that the flying height of the glide head is adjusted or the detection level of a signal transmitted from a vibration detection device attached to the glide head is adjusted.

[0011]

According to the above configuration 1, when focusing on a protrusion having a specific height, the degree of detection is obtained for a region of a predetermined length in the radial direction, so that the conventional method based on the measurement at one radial position is used. As compared with the calibration method, more reliable calibration becomes possible. Further, according to the configuration 2, the calibration is performed while confirming the detection degree in the case of the reference height and the detection degree in the case where the height is slightly lower or higher than the reference height as a boundary. It is possible to perform more reliable calibration because it is possible. Further, according to the configuration 3, the calibration can be performed by a relatively simple measurement, and according to the configuration 4, since the detection degree is standardized and used as the detection rate, the absolute number of the detected numbers becomes a problem. It can be applied without any need, and calibration is easy. Further, according to the configuration 5, since it is possible to calibrate each reference protrusion based on a plurality of detection degrees, it is possible to perform more accurate probabilistic calibration. Moreover, according to the configuration 6, the calibration can be easily performed.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram showing a procedure of a method for calibrating a glide tester according to an embodiment of the present invention, FIG. 2 is a block diagram showing an entire configuration of the glide tester, and FIG. 3 is a partially enlarged view of FIG. 4 is a plan view of the reference disc, and FIG. 5 is IV of FIG.
6 is a cross-sectional view taken along the line IV, FIGS. 6 to 9 are explanatory views of the manufacturing process of the reference disk, and FIG. 10 is a graph showing the standard value of the detection rate. Hereinafter, with reference to these drawings, first, the structure of a glide tester to which the method of one embodiment is applied will be described, then, the structure of a reference disk and its manufacturing method will be described, and then the method of one embodiment will be described. The procedure will be described.

Structure of Glide Tester In FIG. 2, reference numeral 1 is a reference disk, and the reference disk 1 is chucked by a spindle portion 2 and the spindle portion 2 is rotationally driven by a spindle rotation driving portion 2a. There is. Further, the glide head 3 can be arranged on the surface of the reference disk 1. The glide head 3 is fixed to the tip of a glide head support piece 4 made of an elastic member, and the base end of the glide head support piece 4 is connected to the glide head drive unit 5 through a support rod 4a. The glide head drive unit 5 freely controls the position of the glide head 3 through the glide head support rod 4a and the glide head support piece 4. That is, the glide head 3
Is controlled by the glide head drive unit 5 so that it can freely move in the radial direction on the reference disk 1. The spindle rotation drive unit 2a and the glide head drive unit 5 are controlled by a command signal sent from the signal processing / control device unit 6.

As shown in FIG. 3, the glide head 3 has a flying base 3a formed on the surface of the head base 3a facing the reference disk 1, and on the surface opposite to the surface on which the floating top 3b is formed. The piezoelectric element 3c, which is a vibration detection device, is fixed.

When the glide head 3 is arranged on the surface of the reference disk 1 and the reference disk 1 is rotated, the flying portion 3b has a function of floating the glide head 3 by utilizing the air flow generated by this rotation. Is. In this case, the flying height depends on the elastic force of the glide head supporting piece 4, the shape of the flying portion 3b, the rotation speed of the reference disk 1, and the like.
The elastic force of the glide head support piece 4 and the levitation force due to the air flow become a predetermined value that balances each other. Therefore, the flying height can be selected within a certain range by appropriately selecting the elastic force of the glide head support piece 4 and the rotation speed of the reference disk. Here, when the reference disk 1 is rotated and the flying surface 3b is levitated to a flying height where the flying surface 3b forms a predetermined distance from the surface of the reference disk 1, a height close to this flying height is set on the surface of the reference disk 1. If there is a projection of or a projection having a height exceeding this, the glide head 3 comes into contact with or approaches this projection.

The piezoelectric element 3c detects a shock vibration received by the head base 3a due to this contact or approach, converts it into an electric signal corresponding to the vibration, and converts it into a signal processing / control device section 6
Send to. The magnitude of the signal transmitted from the piezoelectric element 3c depends on the height of the protrusion that comes into contact with or approaches the signal when the flying height is constant. Therefore, whether or not the height of the protrusion formed on the reference disk 1 is above a certain level is determined by determining whether or not the magnitude of the signal transmitted from the piezoelectric element 3c is above a predetermined level. be able to.

The signal processing / control device section 6 includes a piezoelectric element 3c.
Discriminating circuit for discriminating whether or not the pulse crest value of the pulse-like signal transmitted from the device is equal to or higher than a predetermined slice level, a counting circuit for cumulatively counting the number of pulses exceeding the slice level, a spindle rotation drive unit 2a and a glide. It includes a control circuit for controlling the head drive unit 5 and a microprocessor or other information processing element for controlling each of these circuits according to a predetermined program and performing a predetermined calculation or processing.

As is clear from the above description, this glide tester uses, for example, the reference protrusion 1a formed on the surface of the reference disk 1 and having a known reference height,
When the reference protrusion 1a contacts or approaches the glide head 3, the slice level is adjusted based on the magnitude of the signal sent from the piezoelectric element 3c, or the slice level is kept constant and the glide head 3 floats. By adjusting the amount, even if the glide head is replaced, it is possible to perform calibration so as to detect a protrusion having a height higher than the reference height as an "abnormal protrusion". An example of such a glide tester is RG550 manufactured by Hitachi Electronics Engineering Co., Ltd.

Structure of Reference Disk 1 As shown in FIGS. 4 and 5, the reference disk 1 is a disk body having a chuck hole 1b at its center, and has a predetermined length in the radial direction on its surface. The reference protrusion 1a is formed. This reference disc 1 has an outer diameter of 65 mm,
A ridge 1d of a Cr film having a predetermined length, width and height on a predetermined portion of the surface of a donut-shaped aluminosilicate glass substrate 1c having an inner diameter of 20 mm and a thickness of 0.89 mm.
After the formation, the entire surface is sequentially covered with a protective layer 1e made of carbon and a lubricating layer 1f. Here, ridge 1d
The protruding portion becomes the reference protrusion 1a. The reference protrusion 1a is a ridge that is extended in the radial direction, and the distances from the center of the reference disc 1 at both ends in the longitudinal direction are R ₁ = 16.0 mm and R ₂ = 26.0 m, respectively.
m (length 10 mm), the width is 20 μm, and the height is different for each of the reference disks 1 to be prepared. In this embodiment, as the reference disc 1, the reference protrusion 1a has a height of 500 angstroms, and two kinds every 100 angstroms before and after 500 angstroms, that is, 300 angstroms,
400 Å, 500 Å, 6
Five kinds of 00 angstrom and 700 angstrom were prepared.

Method of Manufacturing Reference Disk 1 The reference disk 1 was manufactured by the following procedure.

(1) First, a predetermined film thickness Cr10d is formed on the surface of the substrate 1c by a sputtering method using Cr as a target.
A film was formed, and a positive photoresist (AZ-1350 manufactured by Hoechst Co., Ltd.) was applied on the Cr film 10d by spin coating to form a resist layer 10g having a film thickness of 5000 Å (see FIG. 6). .

(2) Next, the pattern of the reference protrusions 1a was exposed using an exposure mask and developed with a developer for AZ to form a resist pattern 1g (see FIG. 7).

(3) Next, 165 g of ceric ammonium nitrate and 42 ml of perchloric acid (70%) were added with pure water to make 1000 ml, and the Cr film 10d was made into 60% with the resist pattern 1g as a mask. After etching for 2 seconds, the resist pattern 1g was peeled off with hot concentrated sulfuric acid to form a Cr ridge 1d (FIG. 8).
reference).

(4) Next, a carbon protective layer 1e having a film thickness of 200 to 250 angstrom is formed on the entire surface of the substrate 1c on which the ridges 1d are formed by a magnetron sputtering method in which carbon is targeted. Fluorocarbon type lubricant (AM2001 made by Nippon Montedison Co., Ltd.) is applied on the top by dip coating method,
A reference layer 1 was obtained by forming a lubricating layer 1f having a film thickness of 18 Å (see FIG. 9).

Procedure of Calibration Method of Glide Tester According to One Embodiment Next, a method of calibrating the above glide tester using the above reference disk will be described with reference to FIG.
Note that the calibration method described below is 2 μinch (about 50 μm).
This is a calibration method of a glide tester for performing a glide test that guarantees that there is no abnormal protrusion of 0 angstroms or more.

(1) First, the reference glide head is mounted on the glide tester (step 101).

(2) Next, the above-mentioned five kinds of reference disks 1 are prepared, and one of them is chucked on the spindle portion 2 (step 102).

(3) Next, the moving area A (see FIG. 3) in the radial direction of the glide head and the feed pitch P are set.
This setting is performed in the signal processing / control device unit 6 according to a predetermined command (step 103).

(4) Next, the theoretical detection number is calculated based on the set values of the glide head moving area A and the feed pitch P. The theoretically detected number is the total number of the glide heads 3 passing over the reference protrusion 1a in the area A as described above, and thus can be immediately obtained by calculation from A and P. This calculation is also performed in the signal processing / control device unit 6 according to a predetermined command (step 10).
4).

(5) Next, the reference detection number is measured.
In this measurement, the glide head moving area A and the feed pitch P are set to the above-described set values, and the reference disk 1 chucked on the spindle portion 2 is rotated at a rotational speed such that the peripheral speed becomes approximately 4.0 m / s, and the reference is obtained. The glide head is levitated to a predetermined height, the slice level in the signal processing / control device unit 6 is set to a predetermined value, and the number of pulses exceeding this slice level is counted, and the counted number is used as a reference detection number. And This measurement is repeated a plurality of times with respect to one reference disk, and a value having a predetermined width is obtained, which is obtained with respect to all the reference disks (step 10).
5).

(6) Next, the standard value of the detection rate is obtained. In this method, the percentage of the reference detection number with respect to the theoretical detection number is obtained for each of the reference discs, and the value of the percentage is associated with the height of the reference protrusion of each reference disc. This calculation is also performed in the signal processing / control device unit 6 according to a predetermined command (step 10).
6). The results obtained for the above-mentioned reference disc were as follows.

When the height of the reference protrusion 1a is 700 Å; 100% When the height of the reference protrusion 1a is 600 Å; 80 to 100% When the height of the reference protrusion 1a is 500 Å; 30 to 70% When the height of the protrusion 1a is 400 Å; 0 to 20% When the height of the reference protrusion 1a is 300 Å; 0% FIG. 10 is a graph showing the standard value of the detection rate thus obtained. . In FIG. 10, the vertical axis represents the standard value (unit:%) of the detection rate, and the horizontal axis represents the height of the reference protrusion (unit: Angstrom).

(7) Next, the reference glide head is replaced with the glide head to be calibrated (step 107).

(8) Next, the glide head to be calibrated repeats the same procedure as steps 102 to 106 to obtain a calibration value of the detection rate (step 108). The calibration value of the detection rate thus obtained is represented by a graph similar to the graph of FIG.

(9) Next, the slice level is adjusted so that the calibration value of the obtained detection rate matches the standard value of the detection rate. This adjustment can be performed by trial and error changing the slice level until the calibration value of the detection rate matches the standard value of the detection rate, but for example, if the degree of change of the detection rate with respect to the change of the slice level is checked in advance. , The target slice level can be adjusted by only once obtaining the calibration value of the detection rate. The flying height of the glide head may be adjusted instead of adjusting the slice level.

According to the calibration method of the embodiment described in detail above, when the glide head is replaced in the glide tester for performing the glide test ensuring that there is no abnormal protrusion of 2 μ inch (about 500 angstrom) or more. It has become possible to perform an accurate and reliable glide test even in.

When a dot-shaped projection is used as the reference projection 1a as in the conventional method, the projection may be small, resulting in detection omission, and in order to prevent this, it is long in the circumferential direction. In this case, one protrusion may be erroneously detected as a plurality of protrusions, but in the method of the above-described embodiment, the reference protrusion 1a has a predetermined length in the radial direction and a width in the circumferential direction. Since the narrow one of 20 μm is used, it is possible to reliably prevent the possibility of erroneous detection of one protrusion as a plurality of protrusions while preventing detection omission. Furthermore, since the glass substrate is used as the substrate 1c, the surface is excellent in flatness, and the surface is covered with the protective layer and the lubricating layer, so that it has high durability.

In the above-mentioned one embodiment, an example in which the present invention is applied to a glide tester for performing a glide test that guarantees that there are no abnormal protrusions of 2 μ inches (500 angstroms) or more, is described. It has been confirmed that a remarkable effect can be obtained when applied to a glide tester for performing a glide test that guarantees the absence of abnormal protrusions of 3 μ inches (about 700 angstroms) or less.

Further, in the above-mentioned one embodiment, although an example using five kinds of reference disks is mentioned, this may be five kinds or less, but it is needless to say that the more kinds there are, the more preferable. . In this case, when applying to a glide tester that guarantees that there are no abnormal protrusions above a certain height,
It is desirable to use a reference disc having reference protrusions of that height and the heights before and after it. Furthermore, it is desirable to set such that the difference in height between the protrusions is not too large. For example, when the height before and after the height of 500 angstroms is set as the center, it is desirable that the difference in height is 200 angstroms or less.

Further, in the above-mentioned one embodiment, the protrusion having a continuous length in the radial direction is used as the reference protrusion, but this is not limited to the protrusions arranged in a line in a predetermined length region in the radial direction. It may be an aggregate and is not necessarily a continuous body.

Further, in the above-mentioned embodiment, the protrusion of Cr is formed on the glass substrate to form the reference protrusion, but Ta, Ti, MoSi or the like having a hardness of a certain level or more is used instead of Cr. You may use the thing of the other material which has.
The width of the reference protrusion is preferably 100 μm or less. This is because, when the width is 100 μm or more, the flying of the head becomes unstable, and thus one projection is more likely to be detected as two or more projections. Further, the length of the protrusion in the radial direction is not particularly limited. Substrate materials are aluminosilicate glass, soda lime glass,
Quartz glass In addition to glass or ceramics, an Al substrate may be used in some cases, but a glass substrate is most suitable because an extremely smooth substrate having a surface roughness of about 30 Å is desired.

Further, in the above-mentioned one embodiment, one reference disk is provided with one reference projection, but a plurality of projections may be provided, but if there are many projections, the flying of the glide head is not possible. Since it tends to be stable, it is desirable that the number be as small as possible from this viewpoint.

[0043]

As described above in detail, according to the present invention, a plurality of reference discs having reference protrusions formed in a predetermined length region in the radial direction and having different heights are used. The reference detection degree which is the detection degree of the reference glide head with respect to is calculated, then the calibration detection degree which is the detection degree of the glide head to be calibrated with respect to the reference protrusion is obtained, and then this calibration detection degree matches the reference detection degree. By adjusting the glide tester as described above, it is possible to perform highly reliable calibration even in the low flying region.

[Brief description of drawings]

FIG. 1 is a diagram showing a procedure of a calibration method for a glide tester according to an embodiment of the present invention.

FIG. 2 is a block diagram showing an overall configuration of a glide tester.

FIG. 3 is a partially enlarged view of FIG.

FIG. 4 is a plan view of a reference disc.

5 is a sectional view taken along line IV-IV in FIG.

FIG. 6 is a drawing explaining the manufacturing process of the reference disk.

FIG. 7 is an explanatory diagram of the manufacturing process of the reference disc.

FIG. 8 is a drawing explaining the manufacturing process of the reference disk.

FIG. 9 is an explanatory diagram of the manufacturing process of the reference disc.

FIG. 10 is a diagram showing a graph of standard values of detection rates.

[Explanation of symbols]

1 ... Reference disk, 1a ... Reference protrusion, 3 ... Glide head, 3c ... Piezoelectric element, 6 ... Signal processing / control device section.

Claims (6)

[Claims] 1. A glide head disposed on the surface of a disc to be inspected is rotated to levitate to a predetermined height by an air flow caused by the rotation, and at that time, the presence or absence of an abnormal protrusion that comes into contact with or approaches the glide head is detected. A glide tester calibration method that calibrates a glide tester that is detected by a signal sent from a vibration detection device attached to a head, and is a standard that is formed in a predetermined radial length region and has different heights. When using multiple reference disks with protrusions and performing a glide test using the reference glide head in the glide tester, the degree to detect the reference protrusions of each of these reference disks as abnormal protrusions is obtained as the reference detection degree. , Next, using the glide head to be calibrated, abnormally project the reference protrusion for each of the reference disks. The degree of detection is calculated as the calibration detection degree, and thereafter, the glide tester is adjusted so that the calibration detection degree and the reference detection degree match within a predetermined range. Calibration method. 2. The method for calibrating a glide tester according to claim 1, wherein the plurality of reference disks have a height of the reference protrusion having a reference height, and the height of the reference protrusion has a height of the reference protrusion. A method for calibrating a glide tester, comprising: one having a height slightly lower than the height and one having a height of the reference protrusion slightly higher than the reference height. 3. The glide tester calibration method according to claim 1, wherein the reference detection degree is a reference detection number obtained by actually measuring the number of detections of the reference protrusion by the reference glide head as an abnormal protrusion. A calibration method for a glide tester, characterized in that a calibration detection number obtained by actually measuring the number of detection of the reference protrusion as an abnormal protrusion by the calibration target glide head is used as the calibration detection degree. 4. The glide tester calibration method according to claim 1, wherein each of the reference disks is rotated to levitate the reference glide head to a predetermined height, and the reference glide head is moved in a predetermined radial direction. The total number of detections is calculated for each reference disk assuming that the reference protrusions are detected as abnormal protrusions every time the reference glide head passes over the reference protrusions when the reference glide head is moved within a predetermined range at a pitch. A value corresponding to the ratio of the theoretical detected number obtained and the reference detected number obtained by actually measuring the number of the reference glide head detecting the reference protrusion as an abnormal protrusion is obtained for each reference disk, and this is calculated as the detection rate. The standard value of this detection rate is used as the detection degree, and the glide head to be calibrated is used in the same manner for each reference disk. Of the glide tester characterized in that a value corresponding to the ratio between the number of calibration detections obtained by the above and the theoretical number of detections is obtained as a calibration value of the detection rate, and the calibration value of this detection rate is used as the calibration detection degree. Calibration method. 5. The method for calibrating a glide tester according to claim 4, wherein the measurement of the reference detection number using the reference glide head and the measurement of the calibration detection number using the calibration target glide head are performed for each reference disk. A method for calibrating a glide tester, characterized in that a value having a predetermined range is obtained as a standard value of the detection rate and a calibration value of the detection rate by performing a plurality of times. 6. The calibration method for a glide tester according to claim 1, wherein the adjustment of the glide tester is performed by adjusting a flying height of a glide head or a vibration detecting device attached to the glide head. A method for configuring a glide tester, which is characterized by adjusting a detection level of a signal to be transmitted.