JPH06110976A - Sizing processing method for graphic data - Google Patents
Sizing processing method for graphic dataInfo
- Publication number
- JPH06110976A JPH06110976A JP4256596A JP25659692A JPH06110976A JP H06110976 A JPH06110976 A JP H06110976A JP 4256596 A JP4256596 A JP 4256596A JP 25659692 A JP25659692 A JP 25659692A JP H06110976 A JPH06110976 A JP H06110976A
- Authority
- JP
- Japan
- Prior art keywords
- hypotenuse
- sizing
- shifted
- axial direction
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＣＡＤ（computer aid
ed design）により作成された図形データ、例えば、集
積回路を製造する場合に使用される露光用の図形データ
についてサイジング処理を行う場合に適用される図形デ
ータのサイジング処理方法に関する。BACKGROUND OF THE INVENTION The present invention relates to CAD (computer aid).
The present invention relates to a graphic data sizing method applied when performing sizing processing on graphic data created by ed design), for example, exposure graphic data used when manufacturing an integrated circuit.
【０００２】[0002]
【従来の技術】図３は斜辺部を有する図形をサイジング
処理する場合の従来の方法を説明するための図であり、
斜辺部を有する図形の斜辺部の一部分を示している。図
中、実線１は斜辺部、矢印２はサイジングの方向、矢印
２の長さＬはサイジング量を示している。2. Description of the Related Art FIG. 3 is a diagram for explaining a conventional method for sizing a graphic having a hypotenuse,
It shows a part of the hypotenuse portion of a figure having a hypotenuse portion. In the figure, the solid line 1 indicates the hypotenuse, the arrow 2 indicates the sizing direction, and the length L of the arrow 2 indicates the sizing amount.
【０００３】従来においては、斜辺部１については、実
線３に示すような階段形状に階段近似処理を行い、この
階段形状部３をＸ軸方向に距離Ｌ、Ｙ軸方向に距離Ｌだ
けシフトするようにして斜辺部１を有する図形のサイジ
ング処理をしていた。Conventionally, with respect to the hypotenuse part 1, a step approximation process is performed in a step shape as shown by a solid line 3, and the step shape part 3 is shifted by a distance L in the X axis direction and a distance L in the Y axis direction. In this way, the sizing process of the figure having the hypotenuse 1 is performed.
【０００４】この結果、階段形状部３は破線４で示す位
置にシフトされることになる。ここに、破線５は破線４
の位置にシフトされた階段形状部３により近似される斜
辺部を示しているが、本来、階段形状部３をシフトさせ
た場合、シフト後の階段形状部３により近似される斜辺
部は実線６の位置になければならない。As a result, the step-shaped portion 3 is shifted to the position shown by the broken line 4. Here, broken line 5 is broken line 4
Although the hypotenuse part approximated by the staircase-shaped part 3 shifted to the position is shown, originally, when the staircase-shaped part 3 is shifted, the hypotenuse part approximated by the staircase-shaped part 3 after the shift is a solid line 6 Must be in the position.
【０００５】[0005]
【発明が解決しようとする課題】このように、従来のサ
イジング処理方法では、斜辺部を階段形状部に近似して
斜辺部を有する図形をサイジング処理する場合、斜辺部
についてのサイジング量は、斜辺部に直交する方向に指
定されるにも関わらず、斜辺部を階段近似処理してなる
階段形状部をＸ軸方向に距離Ｌ、Ｙ軸方向に距離Ｌだけ
シフトさせるようにしているので、階段形状部を、本
来、シフトさせるべき位置にシフトさせることができ
ず、シフト位置に誤差が生じ、精度の高いサイジングを
行うことができないという問題点があった。As described above, according to the conventional sizing processing method, when sizing a figure having a hypotenuse portion by approximating the hypotenuse portion to a step-shaped portion, the sizing amount for the hypotenuse portion is Despite being specified in a direction orthogonal to the stairs, the staircase-shaped part obtained by performing the staircase approximation process on the hypotenuse part is shifted by the distance L in the X-axis direction and the distance L in the Y-axis direction. There has been a problem that the shape portion cannot be shifted to the position where it should be originally shifted, an error occurs in the shift position, and accurate sizing cannot be performed.
【０００６】本発明は、かかる点に鑑み、斜辺部を有す
る図形についても、精度の高いサイジング処理を行うこ
とができるようにした図形データのサイジング処理方法
を提供することを目的とする。In view of the above point, an object of the present invention is to provide a graphic data sizing method capable of performing highly accurate sizing processing even for a graphic having a hypotenuse.
【０００７】[0007]
【課題を解決するための手段】本発明による図形データ
のサイジング処理方法は、斜辺部を有する図形につい
て、斜辺部を階段形状部に階段近似処理してサイジング
処理を行う場合、斜辺に直交する方向に指定されたサイ
ジング量のＸ軸方向成分及びＹ軸方向成分を求め、斜辺
部を階段近似処理してなる階段形状部については、Ｘ軸
方向及びＹ軸方向にそれぞれサイジング量のＸ軸方向成
分及びＹ軸方向成分だけシフトさせてサイジング処理を
行う、というものである。According to the method of sizing graphic data according to the present invention, in the case of a graphic having a hypotenuse part, when the sizing process is performed by approximating the hypotenuse part to a step shape part, the direction orthogonal to the hypotenuse For the staircase shape part obtained by obtaining the X-axis direction component and the Y-axis direction component of the sizing amount specified in step S, and performing the approximation process on the hypotenuse part, the X-axis direction component of the sizing amount in the X-axis direction and the Y-axis direction, respectively. And sizing processing is performed by shifting only the Y-axis direction component.
【０００８】[0008]
【作用】本発明では、斜辺部を階段近似処理してなる階
段形状部については、Ｘ軸方向及びＹ軸方向にそれぞれ
サイジング量のＸ軸方向成分及びＹ軸方向成分だけシフ
トさせるとしているので、斜辺部を階段近似処理した階
段形状部を、本来、シフトすべき位置にシフトさせるこ
とができる。According to the present invention, the staircase-shaped portion obtained by performing the staircase approximation processing on the hypotenuse portion is shifted in the X-axis direction and the Y-axis direction by the X-axis direction component and the Y-axis direction component of the sizing amount, respectively. It is possible to shift the staircase-shaped portion obtained by subjecting the hypotenuse portion to the staircase approximation to the position that should originally be shifted.
【０００９】[0009]
【実施例】図１は本発明の一実施例を示すフローチャー
トであり、本実施例においては、まず、図形データが入
力され（ステップＰ１）、各図形の各頂点の座標が抽出
される（ステップＰ２）。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a flow chart showing an embodiment of the present invention. In this embodiment, first, graphic data is input (step P1), and the coordinates of each vertex of each graphic are extracted (step P1). P2).
【００１０】次に、各図形について、斜辺部を有する図
形（０度及び９０度以外の任意角の辺を有する図形）で
あるか否かが判断され（ステップＰ３）、斜辺部を有し
ない図形については、指定されたサイジング量に従って
従来の方法でサイジング処理が行われる（ステップＰ
４）。Next, it is judged whether or not each figure is a figure having a hypotenuse (a figure having sides of an arbitrary angle other than 0 and 90 degrees) (step P3), and a figure having no hypotenuse. Sizing process is performed by the conventional method according to the designated sizing amount (step P).
4).
【００１１】これに対して、斜辺部を有する図形につい
ては、斜辺部のＸ軸に対する角度が算出され（ステップ
Ｐ５）、斜辺部を階段形状部に近似する階段近似処理が
行われる（ステップＰ６）と共に、斜辺部に直交する方
向に指定されたサイジング量のＸ軸方向成分及びＹ軸方
向成分が算出される（ステップＰ７）。On the other hand, for a figure having a hypotenuse part, the angle of the hypotenuse part with respect to the X-axis is calculated (step P5), and the staircase approximation process for approximating the hypotenuse part to the staircase shape part is performed (step P6). At the same time, the X-axis direction component and the Y-axis direction component of the sizing amount designated in the direction orthogonal to the hypotenuse are calculated (step P7).
【００１２】ここに、斜辺部を有する図形のサイジング
処理が行われるが、斜辺部を階段近似処理してなる階段
形状部については、Ｘ軸方向にはサイジング量のＸ軸方
向成分だけシフトさせ、Ｙ軸方向にはサイジング量のＹ
軸方向成分だけシフトさせてサイジング処理が行われる
（ステップＰ４）。Here, the sizing process of the figure having the hypotenuse part is performed. Regarding the staircase shape part obtained by performing the staircase approximation process on the hypotenuse part, the X-axis direction component of the sizing amount is shifted in the X-axis direction, Sizing amount Y in the Y-axis direction
Sizing processing is performed by shifting only the axial component (step P4).
【００１３】このようにしてサイジング処理が終了する
と、サイジング処理済の図形データが出力され（ステッ
プＰ８）、次の処理、例えば、露光の必要なデータ処理
過程に移行される（ステップＰ９）。When the sizing process is completed in this way, the sizing processed graphic data is output (step P8), and the process proceeds to the next process, for example, a data processing process requiring exposure (step P9).
【００１４】ここに、図２は本実施例のサイジング方法
を説明するための図であり、斜辺部を有する図形の斜辺
部の一部分を示している。図中、実線７は斜辺部、矢印
８はサイジングの方向、矢印８の長さＬはサイジング量
を示している。FIG. 2 is a diagram for explaining the sizing method of this embodiment, showing a part of the hypotenuse part of a figure having a hypotenuse part. In the figure, the solid line 7 indicates the hypotenuse, the arrow 8 indicates the sizing direction, and the length L of the arrow 8 indicates the sizing amount.
【００１５】本実施例では、斜辺部７は階段形状部９に
階段近似処理されると共に、サイジング量ＬのＸ軸方向
成分Ｌｘ＝Ｌcos（９０−θ）＝Ｌsinθと、サイジング
量ＬのＹ軸方向成分Ｌｙ＝Ｌsin（９０−θ)＝Ｌcosθ
が算出され、階段形状部８について、Ｘ軸方向に距離Ｌ
ｘ、Ｙ軸方向に距離Ｌｙだけシフトされる。なお、θは
斜辺部７がＸ軸に対してなす角度である。In this embodiment, the hypotenuse portion 7 is stepwise approximated to the stepped portion 9, and the component Lx = Lcos (90−θ) = Lsinθ of the sizing amount L and the Y axis of the sizing amount L. Directional component Ly = Lsin (90−θ) = Lcosθ
Is calculated, and the distance L in the X-axis direction is calculated for the staircase shape portion 8.
The distance Ly is shifted in the x and Y axis directions. Note that θ is an angle formed by the hypotenuse portion 7 with respect to the X axis.
【００１６】この結果、階段形状部９は、破線１０で示
す位置にシフトされる。ここに、破線１１は、破線１０
の位置にシフトされた階段形状部９により近似される斜
辺部を示している。As a result, the staircase shape portion 9 is shifted to the position shown by the broken line 10. Here, the broken line 11 is the broken line 10.
The hypotenuse part approximated by the staircase-shaped part 9 shifted to the position is shown.
【００１７】なお、二点鎖線１２は、従来の方法で、階
段形状部９をＸ軸方向及びＹ軸方向に共に距離Ｌだけシ
フトした場合の階段形状部９のシフト位置、二点鎖線１
３は階段形状部９を二点鎖線１２の位置にシフトさせた
場合に近似される斜辺部を示している。The chain double-dashed line 12 indicates the shift position of the staircase-shaped part 9 when the staircase-shaped part 9 is shifted by the distance L in both the X-axis direction and the Y-axis direction by the conventional method.
Reference numeral 3 denotes a hypotenuse approximated when the staircase-shaped portion 9 is shifted to the position of the chain double-dashed line 12.
【００１８】このように、本実施例によれば、斜辺部７
を階段近似処理してなる階段形状部９を、本来、シフト
すべき位置にシフトすることができるので、斜辺部７を
有する図形について精度の高いサイジング処理を行うこ
とができる。As described above, according to this embodiment, the hypotenuse portion 7
Since the staircase-shaped portion 9 obtained by performing the staircase approximation processing can be shifted to the position where it should be originally shifted, it is possible to perform highly accurate sizing processing on the figure having the hypotenuse portion 7.
【００１９】[0019]
【発明の効果】本発明によれば、斜辺部を有する図形に
ついて、斜辺部を階段形状部に近似してサイジング処理
を行う場合、斜辺部を階段近似処理してなる階段形状部
については、Ｘ軸方向及びＹ軸方向にそれぞれサイジン
グ量のＸ軸方向成分及びＹ軸方向成分だけシフトさせて
サイジング処理を行うとしたことにより、斜辺部を近似
してなる階段形状部を、本来、シフトすべき位置にシフ
トさせることができるので、斜辺部を有する図形につい
て、精度の高いサイジング処理を行うことができる。According to the present invention, when a sizing process is performed by approximating the hypotenuse part to the staircase shape part for a figure having the hypotenuse part, the staircase shape part obtained by performing the staircase approximating process on the hypotenuse part is X Since the sizing process is performed by shifting the sizing amount by the X-axis direction component and the Y-axis direction component in the axial direction and the Y-axis direction, respectively, the stair-shaped portion that approximates the hypotenuse should be originally shifted. Since it is possible to shift to a position, it is possible to perform highly accurate sizing processing on a graphic having a hypotenuse.
【図１】本発明の一実施例を示すフローチャートであ
る。FIG. 1 is a flowchart showing an embodiment of the present invention.
【図２】本発明の一実施例を説明するための図である。FIG. 2 is a diagram for explaining an example of the present invention.
【図３】従来の図形データのサイジング処理方法を説明
するための図である。FIG. 3 is a diagram for explaining a conventional graphic data sizing method.
７ 斜辺部 ９ 斜辺部を階段近似処理してなる階段形状部 １０ 実施例による階段形状部のシフト位置 １１ 実施例によりシフトされた階段形状部により近似
される斜辺部 １２ 従来の方法による階段形状部のシフト位置 １３ 従来の方法によりシフトされた階段形状部により
近似される斜辺部7 hypotenuse part 9 staircase shape part obtained by performing a staircase approximation process on the hypotenuse part 10 shift position of the staircase shape part according to the example 11 oblique side part approximated by the staircase shape part shifted according to the example 12 staircase part according to a conventional method Shift position 13 The hypotenuse approximated by the staircase-shaped part shifted by the conventional method
───────────────────────────────────────────────────── フロントページの続き (72)発明者 宮内 徹 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toru Miyauchi 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Fujitsu Limited
Claims (1)
を階段形状部に階段近似処理してサイジング処理を行う
場合、前記斜辺に直交する方向に指定されたサイジング
量のＸ軸方向成分及びＹ軸方向成分を求め、前記斜辺部
を階段近似処理してなる階段形状部については、Ｘ軸方
向及びＹ軸方向にそれぞれ前記サイジング量のＸ軸方向
成分及びＹ軸方向成分だけシフトさせてサイジング処理
を行うことを特徴とする図形データのサイジング処理方
法。1. When a sizing process is performed on a figure having a hypotenuse part by approximating the hypotenuse part to a staircase-shaped part and performing sizing processing, the X-axis direction component and Y of the sizing amount designated in the direction orthogonal to the hypotenuse part. For the staircase-shaped part obtained by obtaining the axial component and performing the staircase approximation process on the hypotenuse part, the sizing process is performed by shifting the sizing amount by the X-axis direction component and the Y-axis direction component respectively in the X-axis direction and the Y-axis direction. A method of sizing graphic data, characterized by performing the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4256596A JPH06110976A (en) | 1992-09-25 | 1992-09-25 | Sizing processing method for graphic data |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4256596A JPH06110976A (en) | 1992-09-25 | 1992-09-25 | Sizing processing method for graphic data |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06110976A true JPH06110976A (en) | 1994-04-22 |
Family
ID=17294831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4256596A Withdrawn JPH06110976A (en) | 1992-09-25 | 1992-09-25 | Sizing processing method for graphic data |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06110976A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016063580A1 (en) * | 2014-10-21 | 2016-04-28 | 日本コントロールシステム株式会社 | Pattern correction amount calculation device, pattern correction amount calculation method, and recording medium |
-
1992
- 1992-09-25 JP JP4256596A patent/JPH06110976A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016063580A1 (en) * | 2014-10-21 | 2016-04-28 | 日本コントロールシステム株式会社 | Pattern correction amount calculation device, pattern correction amount calculation method, and recording medium |
| JP2016082150A (en) * | 2014-10-21 | 2016-05-16 | 日本コントロールシステム株式会社 | Pattern correction amount calculation device, pattern correction amount calculation method and program |
| KR20180002585A (en) * | 2014-10-21 | 2018-01-08 | 니폰 컨트롤 시스템 가부시키가이샤 | Pattern correction amount calculation device, Pattern correction amount calculation method, and recording medium |
| EP3211479A4 (en) * | 2014-10-21 | 2018-06-06 | Nippon Control System Corporation | Pattern correction amount calculation device, pattern correction amount calculation method, and recording medium |
| US10241395B2 (en) | 2014-10-21 | 2019-03-26 | Nippon Control System Corporation | Pattern correction amount calculating apparatus, pattern correction amount calculating method, and storage medium |
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