JPH06110025A - External optical modulator - Google Patents

External optical modulator

Info

Publication number
JPH06110025A
JPH06110025A JP28105492A JP28105492A JPH06110025A JP H06110025 A JPH06110025 A JP H06110025A JP 28105492 A JP28105492 A JP 28105492A JP 28105492 A JP28105492 A JP 28105492A JP H06110025 A JPH06110025 A JP H06110025A
Authority
JP
Japan
Prior art keywords
optical fiber
substrate
piezoelectric element
sound wave
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28105492A
Other languages
Japanese (ja)
Inventor
Toshiya Higami
俊哉 樋上
Shoichi Negami
昭一 根上
Matsue Murata
松枝 村田
Shigeaki Nishikawa
重昭 西川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP28105492A priority Critical patent/JPH06110025A/en
Priority to PCT/JP1993/000148 priority patent/WO1993022706A1/en
Priority to CA002112480A priority patent/CA2112480A1/en
Priority to US08/170,346 priority patent/US5506721A/en
Priority to EP93903316A priority patent/EP0591540A4/en
Publication of JPH06110025A publication Critical patent/JPH06110025A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To modulate light, passing through an optical fiber, extremely efficiently since a flat substrate can be filmed with a piezoelectric element part, the piezoelectric element part with uniform characteristics can easily be manufactured, and a sound wave generated by the piezoelectric element part can be converged on the optical fiber. CONSTITUTION:The modulator consists of the optical fiber 1, the substrate 15 which has the same acoustic impedance with the clad layer of the optical fiber 1 while the optical fiber 1 is connected to one surface, and the piezoelectric element part 9 which is provided on the other surface of the substrate 15; and the substrate 15 is constituted by joining two media 15A and 15B which differ in sound wave propagation speed and a curved surface 19a which converges the sound wave emitted by the piezoelectric element part 15 on the optical fiber 1 is provided on their joined surface 19.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光ファイバ中を伝搬す
る光を変調する光外部変調器に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical external modulator for modulating light propagating in an optical fiber.

【0002】[0002]

【従来の技術】光通信等に使用される光変調器としては
従来、光源である半導体レーザー素子または発光ダイオ
ード等への印加電流を変化させて、その出力光を直接変
調する直接変調方式のものが一般的であったが、最近、
光ファイバ中を伝搬する直流光源からの光に外部から信
号を印加し、間接的に変調する光外部変調器が開発され
ている。
2. Description of the Related Art Conventionally, an optical modulator used for optical communication or the like is of a direct modulation type in which an output current is directly modulated by changing an applied current to a semiconductor laser element or a light emitting diode which is a light source. Was common, but recently
An external optical modulator has been developed in which a signal is externally applied to light from a DC light source propagating in an optical fiber to indirectly modulate the signal.

【0003】このような光外部変調器の一例としては、
基板材料にニオブ酸リチウム等を使用し、かつ電気光学
効果を用いた光導波路型のものがある。しかしこのタイ
プの光外部変調器は、高周波領域での変調特性には優れ
ているが、温度依存性が大きい上に非常に高価であると
いう欠点を有している。
As an example of such an optical external modulator,
There is an optical waveguide type in which lithium niobate or the like is used as a substrate material and an electro-optical effect is used. However, this type of external optical modulator has excellent modulation characteristics in a high frequency region, but has a drawback that it is very expensive in addition to being highly dependent on temperature.

【0004】そこで、このような欠点を解消するものと
して音響光学効果を利用した図6または図7のような光
外部変調器が提案されている。図6の光外部変調器は、
光ファイバ1の外周面に、アルミニウム等からなる下部
電極3、酸化亜鉛等からなる圧電膜5、クロム−金合金
等からなる上部電極7をこの順で積層被覆して圧電素子
部9を形成したものである。また図7の光外部変調器
は、厚さ1mm程度の石英ガラス基板11の一方の面に溝
13を形成して光ファイバ1を配置すると共に、石英ガ
ラス基板11の他方の面に下部電極3、圧電膜5、上部
電極7をこの順で積層して圧電素子部9を形成したもの
である。いずれも光伝送系への挿入損失がきわめて少な
く、安価である。
Therefore, an optical external modulator as shown in FIG. 6 or 7 utilizing the acousto-optic effect has been proposed as a solution to such a drawback. The optical external modulator of FIG.
On the outer peripheral surface of the optical fiber 1, a lower electrode 3 made of aluminum or the like, a piezoelectric film 5 made of zinc oxide or the like, and an upper electrode 7 made of chromium-gold alloy or the like are laminated in this order to form a piezoelectric element portion 9. It is a thing. In the optical external modulator of FIG. 7, the optical fiber 1 is arranged by forming the groove 13 on one surface of the quartz glass substrate 11 having a thickness of about 1 mm, and the lower electrode 3 is formed on the other surface of the quartz glass substrate 11. The piezoelectric film 5 and the upper electrode 7 are laminated in this order to form the piezoelectric element portion 9. All of them are low in insertion loss to the optical transmission system and inexpensive.

【0005】[0005]

【発明が解決しようとする課題】しかしながら従来のこ
の種の光外部変調器には次のような問題があった。すな
わち図6の光外部変調器は、下部電極3、圧電膜5、上
部電極7を真空蒸着やスパッタリングにより成膜してい
るが、光ファイバ1の表面が曲面であるため均一な膜を
形成することが困難であった。
However, the conventional optical external modulator of this type has the following problems. That is, in the optical external modulator of FIG. 6, the lower electrode 3, the piezoelectric film 5, and the upper electrode 7 are formed by vacuum vapor deposition or sputtering, but since the surface of the optical fiber 1 is a curved surface, a uniform film is formed. Was difficult.

【0006】また図7の光外部変調器は、駆動周波数が
高いと圧電素子部9で発生する音波の指向性がきわめて
鋭く、音波が石英ガラス基板11内を直進するため、光
ファイバ1中の光を変調するのに寄与する圧電素子部は
ごく限られた部分のみとなり、効率がわるい。これを改
善するには圧電膜の縦横比を大きくして光ファイバに対
する有効長を長くすればよいが、そうすると圧電膜の幅
が小さくなるため、圧電膜と光ファイバとの相対位置に
高い精度が要求され、組立が困難になる。
In the optical external modulator of FIG. 7, when the driving frequency is high, the directivity of the sound wave generated in the piezoelectric element section 9 is extremely sharp and the sound wave travels straight through the quartz glass substrate 11, so that the optical fiber 1 in the optical fiber 1 has The piezoelectric element portion that contributes to light modulation is limited to a very limited portion, and the efficiency is poor. To improve this, the aspect ratio of the piezoelectric film may be increased to increase the effective length of the optical fiber. However, since the width of the piezoelectric film is reduced, a high degree of accuracy is required for the relative position of the piezoelectric film and the optical fiber. Required and difficult to assemble.

【0007】[0007]

【課題を解決するための手段】本発明は、上記のような
課題を解決した光外部変調器を提供するもので、その構
成は、光ファイバと、その光ファイバが一方の面に接合
され、その光ファイバのクラッド層とほぼ同じ音響イン
ピーダンスを有する基板と、その基板の他方の面に下部
電極、圧電膜、上部電極の順で積層された圧電素子部と
からなり、前記基板は音波の伝搬速度が異なる複数の媒
質を接合したものからなり、その接合面に圧電素子部か
ら放射される音波を光ファイバに向けて集束する曲面を
設けたことを特徴とするものである。
DISCLOSURE OF THE INVENTION The present invention provides an optical external modulator which solves the above-mentioned problems, and has a structure in which an optical fiber and the optical fiber are bonded to one surface, A substrate having substantially the same acoustic impedance as the clad layer of the optical fiber, and a piezoelectric element portion in which the lower electrode, the piezoelectric film, and the upper electrode are laminated in this order on the other surface of the substrate, and the substrate propagates sound waves. It is characterized in that a plurality of media having different velocities are joined, and a curved surface for focusing the sound wave emitted from the piezoelectric element portion toward the optical fiber is provided on the joining surface.

【0008】[0008]

【作用】このようにすると、下部電極、圧電膜、上部電
極を平面上に成膜できるため均一な膜が形成できると共
に、圧電素子部から発生した音波を光ファイバに向けて
集束できるため変調効率がよくなる。
By doing so, since the lower electrode, the piezoelectric film, and the upper electrode can be formed on a flat surface, a uniform film can be formed, and at the same time, the sound wave generated from the piezoelectric element portion can be focused toward the optical fiber and the modulation efficiency can be improved. Will get better.

【0009】[0009]

【実施例】以下、本発明の実施例を図面を参照して詳細
に説明する。図1は本発明の一実施例を示す。この光外
部変調器は、音波の伝搬速度が異なる二つの媒質15A
と15B接合した基板15の一方の面に圧電素子部9を
一体に設け、他方の面に、被覆層を剥いでクラッド層が
むき出しになった光ファイバ1を接着材17により音響
的に接合したものである。
Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 shows an embodiment of the present invention. This optical external modulator includes two media 15A having different propagation speeds of sound waves.
The piezoelectric element portion 9 is integrally provided on one surface of the substrate 15 that is bonded to the optical fiber 1 and the optical fiber 1 in which the clad layer is exposed by peeling off the coating layer is acoustically bonded to the other surface by the adhesive material 17. It is a thing.

【0010】基板15を構成する二つの媒質15Aと1
5Bは、光ファイバ1のクラッド層とほぼ同じ音響イン
ピーダンス(媒質の密度と音波の伝搬速度の積)を有し
ているが、一方の媒質15Aは例えば石英ガラスからな
り、他方の媒質15Bは例えばフリントガラス15Bか
らなっていて、前者の方が音波の伝搬速度が高い。二つ
の媒質15Aと15Bの接合面19には媒質15B側が
凸の曲面19aを設けてある。
Two mediums 15A and 1 constituting the substrate 15
5B has substantially the same acoustic impedance (the product of the density of the medium and the propagation velocity of the sound wave) as the cladding layer of the optical fiber 1, but one medium 15A is made of, for example, quartz glass, and the other medium 15B is made of, for example. The flint glass 15B is used, and the former has a higher sound wave propagation speed. A curved surface 19a having a convex surface on the medium 15B side is provided on the joint surface 19 between the two media 15A and 15B.

【0011】このような基板15は、例えば石英ガラス
の粉末を型に入れて曲面19aができるように固めた
後、その上にフリントガラスの粉末を積層し、高圧をか
けたまま昇温して溶融させることにより作ることができ
る。基板15の厚さは例えば2mmであり、曲面19aの
曲率半径は1.25mm、高さは0.5mmである。なお曲
面19aは図2に示すように球面の一部のようなもので
もよく、図3に示すように光ファイバ1の長手方向に伸
びる円筒面の一部のようなものでもよい。要するに曲面
19aは圧電素子部9の形状に合わせた形とする。
For such a substrate 15, for example, quartz glass powder is put into a mold and hardened so that a curved surface 19a is formed, and then flint glass powder is laminated thereon, and the temperature is raised while applying a high pressure. It can be made by melting. The substrate 15 has a thickness of 2 mm, for example, and the curved surface 19a has a radius of curvature of 1.25 mm and a height of 0.5 mm. The curved surface 19a may be a part of a spherical surface as shown in FIG. 2 or a part of a cylindrical surface extending in the longitudinal direction of the optical fiber 1 as shown in FIG. In short, the curved surface 19a has a shape that matches the shape of the piezoelectric element portion 9.

【0012】圧電素子部9は、基板15の音波伝搬速度
の高い媒質(石英ガラス)15A側の面に、下部電極
3、圧電膜5、上部電極7をこの順で積層したものであ
る。下部電極3および上部電極7は厚さ0.2μm のア
ルミニウムからなり、圧電膜5は厚さ7μm の酸化亜鉛
からなる。膜の形成方法は真空蒸着やスパッタリングに
よる。
The piezoelectric element portion 9 is formed by laminating a lower electrode 3, a piezoelectric film 5 and an upper electrode 7 in this order on the surface of the substrate 15 on the medium (quartz glass) 15A side having a high sound wave propagation velocity. The lower electrode 3 and the upper electrode 7 are made of aluminum having a thickness of 0.2 μm, and the piezoelectric film 5 is made of zinc oxide having a thickness of 7 μm. The film is formed by vacuum vapor deposition or sputtering.

【0013】光ファイバ1は、基板15の音波伝搬速度
の低い媒質(フリントガラス)15B側の面に、石英ガ
ラス粉末の焼成体からなる接着材17により音響的に接
合されている。音響的に接合とは両者の音響インピーダ
ンスがほぼ等しいことをいう。
The optical fiber 1 is acoustically joined to the surface of the substrate 15 on the side of the medium (flint glass) 15B having a low sound wave propagation velocity by an adhesive 17 made of a fired body of quartz glass powder. Acoustically joining means that the acoustic impedances of both are almost equal.

【0014】次にこの光外部変調器の動作を説明する。
圧電素子部9で発生する音波が例えば200MHz程度
の高周波では、発生する音波は平面波とみなせる。基板
15内を直進する音波は接合面19で反射、屈折を起こ
し、その際の入射角、屈折角は二つの媒質15A、15
Bの音波の伝搬速度で定まる。図1のように媒質15B
より媒質15Aの音波の伝搬速度を高くし、両媒質の接
合面19に媒質15B側が凸の曲面19aを設けておく
と、音波は光ファイバ1に向けて集束するようになる。
Next, the operation of this optical external modulator will be described.
When the sound wave generated in the piezoelectric element portion 9 is a high frequency of about 200 MHz, the sound wave generated can be regarded as a plane wave. The sound wave traveling straight in the substrate 15 is reflected and refracted at the joint surface 19, and the incident angle and refraction angle at that time are two media 15A and 15A.
It is determined by the propagation velocity of the B sound wave. Medium 15B as shown in FIG.
When the propagation speed of the sound wave of the medium 15A is further increased and a curved surface 19a having a convex surface on the medium 15B side is provided on the joint surface 19 of both media, the sound wave is focused toward the optical fiber 1.

【0015】したがって直流光源から光ファイバ1に光
を入射し、下部電極3と上部電極7間に所定周波数の電
圧を印加すると、圧電素子部9から発生する音波が基板
15中を伝搬するうちに集束され、光ファイバ1内を通
過する光をきわめて効率よく変調することができる。
Therefore, when light is incident on the optical fiber 1 from the DC light source and a voltage of a predetermined frequency is applied between the lower electrode 3 and the upper electrode 7, the sound wave generated from the piezoelectric element section 9 propagates through the substrate 15. The light that is focused and passes through the optical fiber 1 can be modulated very efficiently.

【0016】図4に示す測定系により、この光外部変調
器の変調出力を測定したところ従来のものに比べ12d
B以上の向上が認められた。図4において、21は上記
実施例の光外部変調器、23は波長1.33μm の半導
体レーザー素子、25は偏光子、27は光外部変調器2
1の駆動電源、29は検光子、31は光−電気変換器、
33はスペクトラムアナライザ、35はオシロスコープ
である。
The modulation output of this optical external modulator was measured by the measurement system shown in FIG.
An improvement of B or more was recognized. In FIG. 4, 21 is the optical external modulator of the above embodiment, 23 is a semiconductor laser device having a wavelength of 1.33 μm, 25 is a polarizer, and 27 is the optical external modulator 2.
1, a driving power source, 29 is an analyzer, 31 is an optical-electrical converter,
33 is a spectrum analyzer and 35 is an oscilloscope.

【0017】なおこの光外部変調器は、基板15内の接
合曲面19aの曲率を選ぶことにより、音波の集束の精
度をやや落とし、光ファイバ1の取付け精度の公差をゆ
るくすることが可能である。
In this optical external modulator, by selecting the curvature of the joining curved surface 19a in the substrate 15, it is possible to slightly reduce the focusing accuracy of the sound wave and loosen the tolerance of the mounting accuracy of the optical fiber 1. .

【0018】次に図5を参照して本発明の他の実施例を
説明する。この光外部変調器は、基板15として圧電素
子部9側に音波の伝搬速度が低い媒質(例えばフリント
ガラス)15Bを、光ファイバ1側に音波の伝搬速度が
高い媒質(例えば石英ガラス)15Aを使用したもので
ある。この場合は、両媒質の接合面19に図示のように
媒質15B側が凸の曲面19aを設けることにより、音
波を光ファイバ1に向けて集束させることができる。
Next, another embodiment of the present invention will be described with reference to FIG. In this optical external modulator, as the substrate 15, a medium (for example, flint glass) 15B having a low sound wave propagation speed is provided on the piezoelectric element 9 side, and a medium (for example, quartz glass) 15A having a high sound wave propagation speed is provided on the optical fiber 1 side. It was used. In this case, the sound wave can be focused toward the optical fiber 1 by providing a curved surface 19a having a convex surface on the medium 15B side on the joint surface 19 of both media as shown in the figure.

【0019】[0019]

【発明の効果】以上説明したように本発明によれば、圧
電素子部を平らな基板上に成膜できるため、特性の均一
な圧電素子部を容易に作製できると共に、圧電素子部よ
り発生した音波を光ファイバに向けて集束できるため、
光ファイバ内を通過する光をきわめて効率よく変調する
ことができる。
As described above, according to the present invention, since the piezoelectric element portion can be formed on the flat substrate, the piezoelectric element portion having uniform characteristics can be easily manufactured and the piezoelectric element portion is generated. Since the sound waves can be focused toward the optical fiber,
The light passing through the optical fiber can be modulated very efficiently.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明に係る光外部変調器の一実施例を示す
断面図。
FIG. 1 is a sectional view showing an embodiment of an optical external modulator according to the present invention.

【図2】 本発明の光外部変調器における基板内の接合
面の形状の一例を示す斜視図。
FIG. 2 is a perspective view showing an example of the shape of a joint surface in a substrate in the optical external modulator of the present invention.

【図3】 同じく基板内の接合面の形状の他の例を示す
斜視図。
FIG. 3 is a perspective view showing another example of the shape of the bonding surface in the substrate as well.

【図4】 光外部変調器の変調出力の測定系を示すブロ
ック図。
FIG. 4 is a block diagram showing a measurement system of a modulation output of an optical external modulator.

【図5】 本発明に係る光外部変調器の他の実施例を示
す断面図。
FIG. 5 is a sectional view showing another embodiment of the optical external modulator according to the present invention.

【図6】 従来の光外部変調器の一例を示す斜視図。FIG. 6 is a perspective view showing an example of a conventional optical external modulator.

【図7】 従来の光外部変調器の他の例を示す斜視図。FIG. 7 is a perspective view showing another example of a conventional optical external modulator.

【符号の説明】[Explanation of symbols]

1:光ファイバ 3:下部電極 5:圧電膜 7:上部電極 9:圧電素子部 15:基板 15A:音波の伝搬速度が高い媒質 15B:音波の伝搬速度が低い媒質 17:接着材 19:接合面 19a:曲面 1: Optical fiber 3: Lower electrode 5: Piezoelectric film 7: Upper electrode 9: Piezoelectric element part 15: Substrate 15A: Medium with high propagation speed of sound waves 15B: Medium with low propagation speed of sound waves 17: Adhesive material 19: Bonding surface 19a: curved surface

───────────────────────────────────────────────────── フロントページの続き (72)発明者 西川 重昭 東京都千代田区丸の内2丁目6番1号 古 河電気工業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shigeaki Nishikawa 2-6-1, Marunouchi, Chiyoda-ku, Tokyo Furukawa Electric Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】光ファイバと、その光ファイバが一方の面
に接合され、その光ファイバのクラッド層とほぼ同じ音
響インピーダンスを有する基板と、その基板の他方の面
に下部電極、圧電膜、上部電極の順で積層された圧電素
子部とからなり、前記基板は音波の伝搬速度が異なる複
数の媒質を接合したものからなり、その接合面に圧電素
子部から放射される音波を光ファイバに向けて集束する
曲面を設けたことを特徴とする光外部変調器。
1. An optical fiber, a substrate having the optical fiber bonded to one surface thereof and having substantially the same acoustic impedance as the cladding layer of the optical fiber, and a lower electrode, a piezoelectric film, and an upper surface on the other surface of the substrate. The substrate is composed of a piezoelectric element portion laminated in the order of electrodes, and the substrate is formed by joining a plurality of media having different propagation speeds of sound waves, and the acoustic wave radiated from the piezoelectric element portion is directed to the optical fiber on the joint surface. An external optical modulator characterized in that a curved surface for focusing is provided.
JP28105492A 1992-04-28 1992-09-28 External optical modulator Pending JPH06110025A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP28105492A JPH06110025A (en) 1992-09-28 1992-09-28 External optical modulator
PCT/JP1993/000148 WO1993022706A1 (en) 1992-04-28 1993-02-05 External modulator for optical communication
CA002112480A CA2112480A1 (en) 1992-04-28 1993-02-05 External modulator for optical communication
US08/170,346 US5506721A (en) 1992-04-28 1993-02-05 External modulator for optical communication
EP93903316A EP0591540A4 (en) 1992-04-28 1993-02-05 External modulator for optical communication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28105492A JPH06110025A (en) 1992-09-28 1992-09-28 External optical modulator

Publications (1)

Publication Number Publication Date
JPH06110025A true JPH06110025A (en) 1994-04-22

Family

ID=17633669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28105492A Pending JPH06110025A (en) 1992-04-28 1992-09-28 External optical modulator

Country Status (1)

Country Link
JP (1) JPH06110025A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8004485B2 (en) 2006-11-16 2011-08-23 Au Optronics Corp. Liquid crystal display and gate modulation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8004485B2 (en) 2006-11-16 2011-08-23 Au Optronics Corp. Liquid crystal display and gate modulation method thereof
US8558823B2 (en) 2006-11-16 2013-10-15 Au Optronics Corp. Liquid crystal display and gate modulation method thereof

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