JPH06109952A - Production of optical fiber array - Google Patents

Production of optical fiber array

Info

Publication number
JPH06109952A
JPH06109952A JP25989192A JP25989192A JPH06109952A JP H06109952 A JPH06109952 A JP H06109952A JP 25989192 A JP25989192 A JP 25989192A JP 25989192 A JP25989192 A JP 25989192A JP H06109952 A JPH06109952 A JP H06109952A
Authority
JP
Japan
Prior art keywords
optical fiber
groove
substrate
wafer
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25989192A
Other languages
Japanese (ja)
Other versions
JP2824176B2 (en
Inventor
Takashi Ota
隆 太田
Nobutsugu Fukuyama
暢嗣 福山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP4259891A priority Critical patent/JP2824176B2/en
Priority to US08/070,619 priority patent/US5379360A/en
Priority to DE69320541T priority patent/DE69320541T2/en
Priority to EP93304295A priority patent/EP0573288B1/en
Publication of JPH06109952A publication Critical patent/JPH06109952A/en
Application granted granted Critical
Publication of JP2824176B2 publication Critical patent/JP2824176B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To provide the process for production of the optical fiber array with ease of assembly without generating a polishing angle defect and chipping defect. CONSTITUTION:Several groups of optical fiber housing grooves 11 and level difference grooves 13 in a direction perpendicular thereto are formed on one sheet of wafer 10. On the other hand, horizontally long upper integrating substrates 14 formed with coating part housing grooves on their rear surfaces are previously produced. These substrates are adhered to the level difference grooves 13 of the wafer 10. After optical fibers are inserted into respective groups of the optical fiber housing grooves 11, the front surfaces thereof are fixed by optical fiber fixing substrates 16. After the end faces thereof are polished, the substrates are cut in the direction parallel with the optical fiber housing grooves 11 to chips. The optical fiber array is thus produced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光ファイバを光学素子
と接続する場合等に、光ファイバを整列固定する目的で
使用する光ファイバアレイの製造方法に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an optical fiber array used for aligning and fixing optical fibers when the optical fibers are connected to optical elements.

【0002】[0002]

【従来の技術】光ファイバと光学素子との接続に使用さ
れる従来の光ファイバアレイは、図5に示されるように
V溝基板50と上基板51とから構成されたもので、V溝基
板50には裸ファイバを収納するための光ファイバ収納溝
52と、光ファイバの被覆部を収納するための座ぐり部53
とが形成され、また上基板51の下面にも光ファイバの被
覆部を収納するための座ぐり部54を形成したものであっ
た。
2. Description of the Related Art A conventional optical fiber array used for connecting an optical fiber and an optical element comprises a V-groove substrate 50 and an upper substrate 51 as shown in FIG. 50 is an optical fiber storage groove for storing a bare fiber
52 and a counterbore 53 for accommodating the optical fiber coating.
And a counterbore portion 54 for accommodating the coating portion of the optical fiber on the lower surface of the upper substrate 51.

【0003】しかしこのような従来の光ファイバアレイ
は、セラミックス等に座ぐり部53、54を超音波加工する
必要があるために加工の手数とコストがかかること、座
ぐり部53、54を大きめに作るので光ファイバの先端が光
ファイバ収納溝52に正しく乗らないおそれがあること、
V溝基板50と上基板51との間で位置ずれが生じるおそれ
があること等の問題があった。
However, in such a conventional optical fiber array, since it is necessary to ultrasonically machine the counterbore portions 53 and 54 on ceramics or the like, it takes time and cost for machining, and the counterbore portions 53 and 54 are large. Since it is made, the tip of the optical fiber may not fit correctly into the optical fiber storage groove 52,
There is a problem that a positional shift may occur between the V-groove substrate 50 and the upper substrate 51.

【0004】このような問題点を解決するために、本発
明者は図6に示されるような構造の光ファイバアレイを
先に発明し、特願平4-142682号として出願中である。こ
れは、上部平面4に光ファイバ収納溝7を形成するとと
もに、これに段差5を介して下部平面6を設けたV溝基
板1と、上部平面4の上に載せられて裸ファイバを固定
するファイバ固定基板2と、下部平面6の上に載せられ
て光ファイバの被覆部を固定する上基板3とから構成さ
れたもので、図4のものに比較して加工が容易であるう
えに段差5を利用してV溝基板1に対する上基板3の位
置決めを容易に行えるようにしたものである。
In order to solve such a problem, the present inventor first invented an optical fiber array having a structure as shown in FIG. 6, and has applied for a patent as Japanese Patent Application No. 4-142682. This is a V-groove substrate 1 in which an optical fiber housing groove 7 is formed in the upper flat surface 4 and a lower flat surface 6 is provided on the upper flat surface 4 via a step 5, and a bare fiber is fixed on the upper flat surface 4 by fixing it. It is composed of a fiber fixing substrate 2 and an upper substrate 3 which is placed on the lower plane 6 and fixes the coating portion of the optical fiber, and is easier to process than that of FIG. 5 is used to easily position the upper substrate 3 with respect to the V-groove substrate 1.

【0005】ところがその後に実用化を図るうえで、こ
の光ファイバアレイには次の問題があることが判明し
た。 V溝基板1に対する上基板3の位置決めは、段差5
を利用して縦方向には容易に行えるが、横方向の位置決
めに時間がかかること。 光ファイバ収納溝7に対して直角に端面を研磨する
必要があるため、V溝基板1の端面を基準面として利用
して研磨を行っているが、そのためにはV溝基板1の側
面が必ず外側に出ている必要がある。しかし上基板3が
わずかでもずれてその端面が出てしまうと研磨基準面が
正確に確保できず、研磨角度不良となること。 上基板3をV溝基板1に接着した接着剤が基準面に
滲み出し易く、これを後加工で除去する際にカケ不良が
生じ易いこと。
After that, however, it was found that this optical fiber array had the following problems in practical use. The upper substrate 3 is positioned with respect to the V-groove substrate 1 by using the step 5
It can be easily done in the vertical direction by using, but it takes time to position in the horizontal direction. Since it is necessary to polish the end surface at a right angle to the optical fiber housing groove 7, the end surface of the V-groove substrate 1 is used as a reference surface for polishing. It must be outside. However, if the upper substrate 3 is slightly displaced and its end face comes out, the polishing reference plane cannot be accurately secured, resulting in a defective polishing angle. The adhesive that adheres the upper substrate 3 to the V-groove substrate 1 is likely to seep out to the reference surface, and chipping defects are likely to occur when removing this by post-processing.

【0006】[0006]

【発明が解決しようとする課題】本発明は上記した先願
の光ファイバアレイの問題点を解消し、組立工数を大幅
に削減することができるとともに、研磨角度不良がな
く、また接着剤の滲み出しに伴うカケ不良も防止できる
光ファイバアレイの製造方法を提供するために完成され
たものである。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the optical fiber array of the prior application, can significantly reduce the number of assembling steps, has no polishing angle defect, and has no adhesive bleeding. The present invention has been completed in order to provide a method for manufacturing an optical fiber array that can prevent chipping defects caused by the ejection.

【0007】[0007]

【課題を解決するための手段】上記の課題を解決するた
めになされた本発明は、数群の光ファイバ収納溝と、こ
れに対して直角方向に形成された段差溝とを備えたウエ
ハーを製作し、このウエハーの各光ファイバ収納溝に対
応する位置の下面に被覆部収納溝が形成された横長の上
部集積基板を前記段差溝に位置合わせして接着し、次に
各群の光ファイバ収納溝に光ファイバを挿入した後、そ
の上面を光ファイバ固定基板で固定し、これを端面研磨
後に光ファイバ収納溝と平行方向に切断してチップ化す
ることを特徴とするものである。
SUMMARY OF THE INVENTION The present invention, which has been made to solve the above-mentioned problems, provides a wafer provided with several groups of optical fiber housing grooves and step grooves formed at right angles to the grooves. A horizontally elongated upper integrated substrate having a covering portion storage groove formed on the lower surface of the wafer at a position corresponding to each optical fiber storage groove is aligned and bonded to the step groove, and then the optical fibers of each group are bonded. The optical fiber is inserted into the housing groove, the upper surface is fixed with an optical fiber fixing substrate, and the end face is polished, and then cut in a direction parallel to the optical fiber housing groove to form a chip.

【0008】[0008]

【実施例】以下に本発明を図示の実施例に沿って更に詳
細に説明する。まず図1に示すように、ガラス板8の上
面にワックス9によってセラミック製の1枚のウエハー
10を固定し、このウエハー10の上面に、数群の光ファイ
バ収納溝11を平行に形成する。実施例では5芯の光ファ
イバに対応する光ファイバ収納溝11が4群形成されてい
る。この溝加工は、研削砥石によって精度よくかつ効率
よく行うことができる。次にこれらの光ファイバ収納溝
11に対して直角方向に、段差12を持たせて段差溝13を形
成する。その数は実施例では2列であるが、任意に増減
させることができ、1列であってもよい。この結果、図
1に示すようなウエハーが得られる。しかしこのような
ウエハーの製作方法は実施例に限定されるものではな
く、段差溝13を持つウエハー10に数群の光ファイバ収納
溝11を平行に形成する等の方法を取ることもできる。
The present invention will be described in more detail below with reference to the illustrated embodiments. First, as shown in FIG. 1, one wafer made of ceramic is coated on the upper surface of the glass plate 8 with wax 9.
10 is fixed, and several groups of optical fiber housing grooves 11 are formed in parallel on the upper surface of the wafer 10. In the embodiment, four groups of optical fiber housing grooves 11 corresponding to the five-core optical fiber are formed. This grooving can be performed accurately and efficiently with a grinding wheel. Next, these optical fiber storage grooves
A step groove 13 is formed with a step 12 in a direction perpendicular to 11. Although the number is two columns in the embodiment, it can be arbitrarily increased or decreased and may be one column. As a result, a wafer as shown in FIG. 1 is obtained. However, such a wafer manufacturing method is not limited to the embodiment, and a method of forming several groups of optical fiber housing grooves 11 in parallel on the wafer 10 having the step groove 13 may be adopted.

【0009】これとは別に、図2に示されるような横長
の上部集積基板14を作製しておく。この上部集積基板14
は図4に示されるような上基板15が複数個一体化された
もので、実施例では2×4の上基板15が一体化された形
状となっている。各上基板15は門型の形状であり、その
中央下面には上記の光ファイバ収納溝11に対応させて、
光ファイバの被覆部を収納するための被覆部収納溝が形
成されている。また本実施例では、各上基板15に半円形
状の樹脂注入溝17が形成されている。このように樹脂注
入溝17をR形状としておけば、接着剤の硬化時に発生す
る収縮応力が緩和され、クラックの発生を防止すること
ができる。しかしこの樹脂注入溝17は本発明の必須要件
ではない。
Separately from this, a horizontally long upper integrated substrate 14 as shown in FIG. 2 is prepared. This upper integrated substrate 14
4 has a plurality of upper substrates 15 integrated as shown in FIG. 4, and has a 2 × 4 upper substrate 15 integrated shape in the embodiment. Each upper substrate 15 has a gate-like shape, and the lower surface of the center thereof corresponds to the above-mentioned optical fiber storage groove 11,
A coating portion housing groove for housing the coating portion of the optical fiber is formed. Further, in this embodiment, the semicircular resin injection groove 17 is formed in each upper substrate 15. By thus forming the resin injection groove 17 in the R shape, the contraction stress generated at the time of curing the adhesive can be relaxed and the generation of cracks can be prevented. However, this resin injection groove 17 is not an essential requirement of the present invention.

【0010】この上部集積基板14は、図2に示すように
前記したウエハー10の段差溝13にエポキシ樹脂系等の接
着剤を利用して正確に接着固定される。そして実施例で
は、その後に図2に一点鎖線で示すように光ファイバ収
納溝11に対して直角方向に上部集積基板14とウエハー10
とを同時切断する。この結果、図3の下段に示されるよ
うな細長い形状の中間製品が得られる。
As shown in FIG. 2, the upper integrated substrate 14 is accurately bonded and fixed to the step groove 13 of the wafer 10 using an adhesive such as epoxy resin. In the embodiment, thereafter, the upper integrated substrate 14 and the wafer 10 are formed in a direction perpendicular to the optical fiber housing groove 11 as shown by a chain line in FIG.
And disconnect simultaneously. As a result, an elongated intermediate product as shown in the lower part of FIG. 3 is obtained.

【0011】次に上部集積基板14とウエハー10との間の
被覆部収納溝から、多芯 (実施例では5芯) の光ファイ
バを挿入すると、各光ファイバの先端の裸ファイバ部が
正確に位置決めされた状態でウエハー10の光ファイバ収
納溝11に入る。このようにして裸ファイバ部が光ファイ
バ収納溝11に収納された後、図3に示されるような光フ
ァイバ固定基板16を光ファイバ収納溝11に接着して裸フ
ァイバ部を固定する。なお、光ファイバ固定基板16は実
施例では4枚がバラバラになったものを使用している。
このように個別の光ファイバ固定基板16を使用すること
により、光ファイバ収納溝11や光ファイバ径のバラツキ
にかかわらず正確に裸ファイバ部の固定が可能となる。
しかし用途によっては2〜10μm程度のズレは許容され
る場合があり、そのようなときには4枚が連続した光フ
ァイバ固定基板16を使用することもできる。
Next, when a multi-core (5-core in the embodiment) optical fiber is inserted from the groove for accommodating the covering portion between the upper integrated substrate 14 and the wafer 10, the bare fiber portion at the tip of each optical fiber becomes accurate. In the positioned state, it enters the optical fiber storage groove 11 of the wafer 10. After the bare fiber portion is housed in the optical fiber housing groove 11 in this manner, an optical fiber fixing substrate 16 as shown in FIG. 3 is adhered to the optical fiber housing groove 11 to fix the bare fiber portion. In the embodiment, the optical fiber fixing substrate 16 is made up of four pieces.
By using the individual optical fiber fixing substrates 16 as described above, the bare fiber portion can be accurately fixed regardless of variations in the optical fiber housing groove 11 and the optical fiber diameter.
However, a deviation of about 2 to 10 μm may be allowed depending on the application, and in such a case, it is possible to use the optical fiber fixing substrate 16 having four continuous optical fibers.

【0012】以上の工程を経て、図4に示された形状の
ものが得られるので、次にその端面を研磨する。この端
面研磨は実施例では4個分を同時に行うことができ、大
幅な研磨時間の短縮化を図ることができる。そして研磨
の終了後、図4に鎖線で示すように上部集積基板14とウ
エハー10とを同時に、光ファイバ収納溝11と平行方向に
切断してチップ化する。この結果、光ファイバ収納溝11
に裸ファイバ部が収納されて光ファイバ固定基板16によ
り固定され、また光ファイバの被覆部は上部集積基板14
が切断された上基板15によって固定された光ファイバ付
きの光ファイバアレイが複数個同時に得られることとな
る。この光ファイバアレイは他の光学機器と光ファイバ
とを接続するために従来と同様に使用される。
After the steps described above, the shape shown in FIG. 4 is obtained, and the end face is then polished. In the embodiment, this end surface polishing can be performed for four pieces at the same time, and the polishing time can be shortened significantly. After the polishing is completed, the upper integrated substrate 14 and the wafer 10 are simultaneously cut in the direction parallel to the optical fiber storage groove 11 to form a chip, as shown by a chain line in FIG. As a result, the optical fiber storage groove 11
The bare fiber portion is housed in and fixed by the optical fiber fixing substrate 16, and the covering portion of the optical fiber is the upper integrated substrate 14
A plurality of optical fiber arrays with optical fibers fixed by the upper substrate 15 which has been cut are obtained at the same time. This optical fiber array is conventionally used to connect an optical fiber with other optical equipment.

【0013】[0013]

【発明の効果】以上に説明したように、本発明の光ファ
イバアレイの製造方法によれば、従来方法に比較して次
の通りの多くの利点を得ることができる。 従来は上基板3を1枚ずつ別々に加工、切断してい
たのに対して、本発明では上部集積基板14を一度に切断
することによって多数の光ファイバアレイを製造するこ
とができ、加工の工数や時間を大幅に削減することがで
きる。 特に、加工上多くの手数を必要としていた個々の上
基板3の固定作業がなくなり、組立時間の大幅な低減が
可能となる。 ウエハー10に上部集積基板14と光ファイバ固定基板
16とを接着して組立た後に全体を切断するので、ウエハ
ー10が切断されたV溝基板、上部集積基板14が切断され
た上基板15、光ファイバ固定基板16の3者間のズレを完
全になくすることができる。 組立完了後に切断するため、接着剤のはみ出しを完
全になくすることができる。このためにはみ出して接着
剤の除去作業に伴うカケやキズがなくなり、強度劣化、
外観悪化等のないきれいな製品を得ることができる。 一度に数個ずつ研磨することができるので、研磨作
業の大幅な削減が可能となる。 組立を数個ずつ一度に行えるので作業性が向上し、
光ファイバ固定基板16の調整も切断幅(例えば1mm) ま
での横ズレは切断により吸収できるので、従来の比較し
て調整が楽になる。 連続した光ファイバ固定基板16を使用することがで
きる場合には、更に大幅な工程削減を図ることができ
る。
As described above, according to the method of manufacturing the optical fiber array of the present invention, the following many advantages can be obtained as compared with the conventional method. In the past, the upper substrate 3 was individually processed and cut one by one, whereas in the present invention, a large number of optical fiber arrays can be manufactured by cutting the upper integrated substrate 14 at one time. The man-hours and time can be significantly reduced. In particular, the work of fixing the individual upper substrates 3 which requires a large number of processes for processing is eliminated, and the assembly time can be greatly reduced. Upper integrated substrate 14 and optical fiber fixed substrate on wafer 10.
Since the whole is cut after the 16 and 16 are bonded and assembled, there is a complete gap between the V groove substrate cut from the wafer 10, the upper substrate 15 cut from the upper integrated substrate 14 and the optical fiber fixing substrate 16. It can be lost in Since the cutting is performed after the assembly is completed, the adhesive can be completely prevented from protruding. For this reason, there is no chipping or scratches due to the work of removing the adhesive and the strength deterioration,
It is possible to obtain a clean product without deterioration in appearance. Since it is possible to polish several pieces at a time, it is possible to significantly reduce the polishing work. Assembling several pieces at once improves workability,
As for the adjustment of the optical fiber fixing substrate 16, the lateral deviation up to the cutting width (for example, 1 mm) can be absorbed by cutting, so that the adjustment becomes easier as compared with the conventional method. If the continuous optical fiber fixing substrate 16 can be used, the number of steps can be further reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】ウエハーに溝加工した状態を示す斜視図であ
る。
FIG. 1 is a perspective view showing a state where a groove is formed on a wafer.

【図2】ウエハーに上部集積基板を接着した状態を示す
斜視図である。
FIG. 2 is a perspective view showing a state in which an upper integrated substrate is bonded to a wafer.

【図3】接着されたウエハーと上部集積基板とを光ファ
イバ収納溝に対して直角方向に切断した状態と、光ファ
イバ固定基板を示す斜視図である。
FIG. 3 is a perspective view showing an optical fiber fixed substrate and a state in which the bonded wafer and upper integrated substrate are cut in a direction perpendicular to the optical fiber housing groove.

【図4】接着されたウエハーと上部集積基板と光ファイ
バ固定基板とを切断してチップ化する状態を示す斜視図
である。
FIG. 4 is a perspective view showing a state in which the bonded wafer, upper integrated substrate and optical fiber fixing substrate are cut into chips.

【図5】従来の光ファイバアレイを示す斜視図である。FIG. 5 is a perspective view showing a conventional optical fiber array.

【図6】先願の光ファイバアレイを示す斜視図である。FIG. 6 is a perspective view showing an optical fiber array of the prior application.

【符号の説明】[Explanation of symbols]

10 ウエハー 11 光ファイバ収納溝 13 段差溝 14 上部集積基板 16 光ファイバ固定基板 10 Wafer 11 Optical fiber storage groove 13 Step groove 14 Upper integrated substrate 16 Optical fiber fixed substrate

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 数群の光ファイバ収納溝と、これに対し
て直角方向に形成された段差溝とを備えたウエハーを製
作し、このウエハーの各光ファイバ収納溝に対応する位
置の下面に被覆部収納溝が形成された横長の上部集積基
板を前記段差溝に位置合わせして接着し、次に各群の光
ファイバ収納溝に光ファイバを挿入した後、その上面を
光ファイバ固定基板で固定し、これを端面研磨後に光フ
ァイバ収納溝と平行方向に切断してチップ化することを
特徴とする光ファイバアレイの製造方法。
1. A wafer having several groups of optical fiber storage grooves and a step groove formed in a direction perpendicular to the optical fiber storage grooves is manufactured, and a wafer is formed on the lower surface of the wafer at a position corresponding to each optical fiber storage groove. The horizontally-long upper integrated substrate having the covering portion accommodating groove is aligned with the step groove and bonded, and then the optical fiber is inserted into the optical fiber accommodating groove of each group. A method for manufacturing an optical fiber array, which comprises fixing and, after polishing the end face, cutting in the direction parallel to the optical fiber housing groove to form a chip.
JP4259891A 1992-06-03 1992-09-29 Manufacturing method of optical fiber array Expired - Fee Related JP2824176B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP4259891A JP2824176B2 (en) 1992-09-29 1992-09-29 Manufacturing method of optical fiber array
US08/070,619 US5379360A (en) 1992-06-03 1993-06-02 Optical fiber connector and method of manufacturing the same
DE69320541T DE69320541T2 (en) 1992-06-03 1993-06-03 Fiber optic connector and its manufacturing method
EP93304295A EP0573288B1 (en) 1992-06-03 1993-06-03 Optical fiber connector and method of manufacturing the same

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040006756A (en) * 2002-07-15 2004-01-24 삼성전자주식회사 Fabrication method of optical fiber block

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6356619A (en) * 1986-08-27 1988-03-11 Sumitomo Electric Ind Ltd Coupling method for multicore optical connector and multicore optical connector ferrule used for the same
JPS63104007A (en) * 1986-10-22 1988-05-09 Sumitomo Electric Ind Ltd Forming method for optical connector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6356619A (en) * 1986-08-27 1988-03-11 Sumitomo Electric Ind Ltd Coupling method for multicore optical connector and multicore optical connector ferrule used for the same
JPS63104007A (en) * 1986-10-22 1988-05-09 Sumitomo Electric Ind Ltd Forming method for optical connector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040006756A (en) * 2002-07-15 2004-01-24 삼성전자주식회사 Fabrication method of optical fiber block

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