JPH0610972B2 - Microwave discharge device - Google Patents
Microwave discharge deviceInfo
- Publication number
- JPH0610972B2 JPH0610972B2 JP60199028A JP19902885A JPH0610972B2 JP H0610972 B2 JPH0610972 B2 JP H0610972B2 JP 60199028 A JP60199028 A JP 60199028A JP 19902885 A JP19902885 A JP 19902885A JP H0610972 B2 JPH0610972 B2 JP H0610972B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge device
- cavity resonator
- microwave discharge
- microwave
- coaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Circuit Arrangements For Discharge Lamps (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、マイクロ波放電装置に係り、特に、紫外線等
を発生させる放電管をマイクロ波により無電極で放電さ
せる機構に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microwave discharge device, and more particularly to a mechanism for causing a discharge tube for generating ultraviolet rays or the like to discharge with microwaves without electrodes.
半導体に回路パターンを形成するためのフォトレジスト
やある種の塗料などは、紫外線を照射すると、急速に硬
化あるいは不溶物化させることができる。紫外線はま
た、殺菌などにも広く利用されている。この紫外線等を
発生させるには、一般にガス入り放電管が用いられる。A photoresist for forming a circuit pattern on a semiconductor, a certain kind of paint, or the like can be rapidly cured or insolubilized when irradiated with ultraviolet rays. Ultraviolet rays are also widely used for sterilization and the like. A gas-filled discharge tube is generally used to generate the ultraviolet rays and the like.
従来の放電管は、金属電極を封入し、これに電圧を加え
て放電を発生させていた。そのため、電極の耐電力以上
の電力を加えることができず、高出力が得られなかっ
た。また、ハロゲンやハライドなどの腐蝕性ガスを封入
できないで、利用可能な封入ガスの種類が限定され、所
望のスペクトル成分が得られない問題点もあった。In a conventional discharge tube, a metal electrode is enclosed and a voltage is applied to the metal electrode to generate a discharge. Therefore, it was not possible to apply a power higher than the power resistance of the electrode, and high output could not be obtained. Further, there is also a problem that a corrosive gas such as halogen or halide cannot be enclosed, the types of usable enclosed gas are limited, and a desired spectral component cannot be obtained.
本発明は、従来の放電管の種々の欠点が主に封入された
金属電極に起因することに着目し、無電極放電管により
それらの問題点を解決するために、マイクロ波放電装置
を提供することを目的とする。The present invention focuses on the fact that various drawbacks of the conventional discharge tube are mainly caused by the enclosed metal electrode, and provides a microwave discharge device in order to solve those problems by the electrodeless discharge tube. The purpose is to
本発明は、上記目的を達成するために、誘電対にガスを
封入した無電極放電管を、半同軸型空胴共振器の中空同
軸部に挿入設置し、この共振器にマイクロ波を導入する
ことにより、無電極で放電を発生させるマイクロ波放電
装置を提案する。In order to achieve the above object, the present invention inserts and installs an electrodeless discharge tube in which a gas is sealed in a dielectric pair in a hollow coaxial portion of a semi-coaxial cavity resonator and introduces a microwave into the resonator. In this way, we propose a microwave discharge device that generates a discharge without electrodes.
第４図は、半同軸型空胴共振器の断面図である。図にお
いて、１は入力導入線路（入力用導波管）、２は空胴共
振器の本体、３は同軸部である。入力用導波管１からマ
イクロ波を導入すると、同軸部３に強い電界が集中す
る。そこで、この同軸部３を中空管とし、その中に放電
管を挿入すると、強電界部のガスはエネルギーを付与さ
れて放電することになる。従って、金属電極を封入して
おく必要はない。FIG. 4 is a sectional view of a semi-coaxial cavity resonator. In the figure, 1 is an input introduction line (input waveguide), 2 is a cavity resonator main body, and 3 is a coaxial portion. When a microwave is introduced from the input waveguide 1, a strong electric field concentrates on the coaxial portion 3. Therefore, when the coaxial portion 3 is formed as a hollow tube and a discharge tube is inserted therein, energy is imparted to the gas in the strong electric field portion to discharge the gas. Therefore, it is not necessary to encapsulate the metal electrode.
この場合、効率の良い放電発光を生じさせるためには、
空胴共振器全体の同調をとる必要がある。以下の実施例
には、いくつかの同調方式を示すことにする。In this case, in order to generate efficient discharge light emission,
It is necessary to tune the entire cavity resonator. The following examples will show some tuning schemes.
次に、第１図〜第３図により、本発明の実施例を説明す
る。Next, an embodiment of the present invention will be described with reference to FIGS.
第１図は、空胴共振器２の中空同軸部にガス放電管５を
挿入し、プランジャ方式の同調用可動板６と可動形式の
同軸部７とを併設した実施例を示している。ここでは、
図示の便宜上、両者を併設してあるが、同調用可動板６
と可動同軸部７とをそれぞれ単独に設置しても、本発明
の目的は充分に達せられる。FIG. 1 shows an embodiment in which a gas discharge tube 5 is inserted into the hollow coaxial portion of the cavity resonator 2 and a plunger type tuning movable plate 6 and a movable type coaxial portion 7 are provided side by side. here,
For convenience of illustration, both are provided side by side, but the tuning movable plate 6
Even if the movable coaxial portion 7 and the movable coaxial portion 7 are independently installed, the object of the present invention can be sufficiently achieved.
なお４は、空胴共振器２から光を取出す部分に設けた網
目構造部材である。その網目のピッチは、放電光をでき
るだけ透過させる一方、マイクロ波を外部に漏らさない
寸法にしてある。Reference numeral 4 is a mesh structure member provided in a portion for extracting light from the cavity resonator 2. The mesh pitch is such that the discharge light is transmitted as much as possible while the microwaves are not leaked to the outside.
さて、第１図実施例では、半同軸共振器２の底部に挿入
したプランジャ６を出し入れして同調をとる。これに代
えて、可動同軸部（同軸管）７を空胴内に出し入れして
同調をとってもよい。Now, in the embodiment shown in FIG. 1, the plunger 6 inserted into the bottom of the semi-coaxial resonator 2 is taken in and out for tuning. Instead of this, the movable coaxial portion (coaxial tube) 7 may be put in and taken out of the cavity for tuning.
第２図は、空胴共振器２の外部に、同調用インピーダン
ス調整回路８を付加した実施例を示し、第３図は、空胴
共振器２への入力用導波管１にインピーダンス調整回路
９を付加した実施例を示している。FIG. 2 shows an embodiment in which a tuning impedance adjusting circuit 8 is added to the outside of the cavity resonator 2, and FIG. 3 shows an impedance adjusting circuit in the input waveguide 1 to the cavity resonator 2. An example in which 9 is added is shown.
インピーダンス調整回路８は具体的には副共振器であ
り、９はスリースタブチューナやＥＨチューナなどのイ
ンピーダンス調整装置である。The impedance adjusting circuit 8 is specifically a sub-resonator, and 9 is an impedance adjusting device such as a three-stub tuner or an EH tuner.
いずれの実施例においても、各同調装置により空胴共振
器の同調をとると、空胴内の同軸部の端部３に、強いマ
イクロ波電界が発生する。この電界は、その部分に挿入
したガス放電管を放電発光させるのに充分な強度であ
る。In any of the embodiments, when the cavity resonator is tuned by each tuning device, a strong microwave electric field is generated at the end 3 of the coaxial portion in the cavity. This electric field is of sufficient intensity to cause the gas discharge tube inserted in that portion to discharge light.
半同軸型空胴共振器の同調が充分にとれた状態では、そ
の同軸端部に強い電界が発生し、この部分にガス放電管
を挿入すれば、強い放電発光が得られる。その際に、 (1) 放電管に金属電極を封入しない無電極放電である
から、耐電力が増し、高出力の光を取出すことができ
る。When the semi-coaxial cavity resonator is sufficiently tuned, a strong electric field is generated at its coaxial end, and a strong discharge emission can be obtained by inserting a gas discharge tube in this part. At that time, (1) since the electrodeless discharge does not enclose the metal electrode in the discharge tube, the withstand power is increased and a high output light can be extracted.
(2) ハロゲン等の腐蝕性ガスを封入し、従来は得られ
なかったスペクトル成分を利用できる。(2) Encapsulating a corrosive gas such as halogen, it is possible to use spectral components that were not obtained in the past.
第１図は同調用として空胴共振器内にに可動板と可動同
軸部とを併設した本発明によるマイクロ波放電装置の一
実施例を示す図、第２図は同調用として空胴共振器外部
にインピーダンス調整回路を設けた本発明によるマイク
ロ波放電装置の一実施例を示す図、第３図は同調用とし
て入力導入線路の一部にインピーダンス調整回路を設け
た本発明によるマイクロ波放電装置の一実施例を示す
図、第４図は半同軸型空胴共振器の断面図である。 １……入力導入線路、２……空胴共振器 ３……同軸部の端部、４……網目構造 ５……ガス放電管 ６……同調用可動板（プランジャ） ７……可動同軸部 ８……空胴共振器外部インピーダンス調整回路 ９……入力導入線路インピーダンス調整回路FIG. 1 is a diagram showing an embodiment of a microwave discharge device according to the present invention in which a movable plate and a movable coaxial portion are provided inside a cavity resonator for tuning, and FIG. 2 is a cavity resonator for tuning. FIG. 3 is a diagram showing an embodiment of a microwave discharge device according to the present invention in which an impedance adjusting circuit is provided outside, and FIG. 3 is a microwave discharge device according to the present invention in which an impedance adjusting circuit is provided in a part of an input introduction line for tuning. FIG. 4 is a sectional view of a semi-coaxial type cavity resonator. 1 ... Input lead-in line, 2 ... cavity resonator 3 ... end of coaxial part, 4 ... mesh structure 5 ... gas discharge tube 6 ... movable plate (plunger) for tuning 7 ... movable coaxial part 8: Cavity resonator external impedance adjustment circuit 9: Input introduction line impedance adjustment circuit
Claims (6)
器と、誘電体にガスを封入して形成され前記中空同軸部
を貫通して設置される放電管とからなり、前記空胴共振
器にマイクロ波を導入し、空胴内同軸部先端の強電界に
より放電を発生させることを特徴とするマイクロ波放電
装置。1. A semi-coaxial cavity resonator having a hollow coaxial portion formed therein, and a discharge tube formed by enclosing a gas in a dielectric material and installed through the hollow coaxial portion. A microwave discharge device characterized in that a microwave is introduced into a cavity resonator and a discharge is generated by a strong electric field at the tip of a coaxial portion in a cavity.
置において、空胴共振器の内部に可動板を設け、その位
置を変えて同調をとることを特徴とするマイクロ波放電
装置。2. The microwave discharge device according to claim 1, wherein a movable plate is provided inside the cavity resonator and the position is changed to perform tuning.
クロ波放電装置において、空胴共振器の同軸部を可動に
形成し、その長さを変えて同調をとることを特徴とする
マイクロ波放電装置。3. The microwave discharge device according to claim 1 or 2, wherein the coaxial portion of the cavity resonator is movably formed and the length thereof is changed to perform tuning. Microwave discharge device.
置において、空胴共振器の外部の一部にインピーダンス
調整回路を設け、同調をとることを特徴とするマイクロ
波放電装置。4. The microwave discharge device according to claim 1, wherein an impedance adjusting circuit is provided in a part of the outside of the cavity resonator for tuning.
置において、入力導入線路の一部にインピーダンス調整
回路を設け、同調をとることを特徴とするマイクロ波放
電装置。5. The microwave discharge device according to claim 1, wherein an impedance adjusting circuit is provided in a part of the input introduction line to perform tuning.
クロ波放電装置において、空胴共振器の光を取出す器壁
が光透過性でマイクロ波を通過させない網目構造である
ことを特徴とするマイクロ波放電装置。6. The microwave discharge device according to claim 1, wherein a wall of the cavity resonator for extracting light has a mesh structure that is light-transmissive and does not allow microwaves to pass therethrough. Microwave discharge device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60199028A JPH0610972B2 (en) | 1985-09-09 | 1985-09-09 | Microwave discharge device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60199028A JPH0610972B2 (en) | 1985-09-09 | 1985-09-09 | Microwave discharge device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6261261A JPS6261261A (en) | 1987-03-17 |
| JPH0610972B2 true JPH0610972B2 (en) | 1994-02-09 |
Family
ID=16400913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60199028A Expired - Lifetime JPH0610972B2 (en) | 1985-09-09 | 1985-09-09 | Microwave discharge device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610972B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5977712A (en) * | 1996-01-26 | 1999-11-02 | Fusion Lighting, Inc. | Inductive tuners for microwave driven discharge lamps |
| JP5493101B2 (en) * | 2008-12-04 | 2014-05-14 | 株式会社オーク製作所 | Microwave discharge lamp |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5535825A (en) * | 1978-09-06 | 1980-03-13 | Itsuki Ban | Lighter equipped with watch |
-
1985
- 1985-09-09 JP JP60199028A patent/JPH0610972B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5535825A (en) * | 1978-09-06 | 1980-03-13 | Itsuki Ban | Lighter equipped with watch |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6261261A (en) | 1987-03-17 |
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