JPH06109022A - Formation of solid lubricating film for part using rolling body - Google Patents
Formation of solid lubricating film for part using rolling bodyInfo
- Publication number
- JPH06109022A JPH06109022A JP4285195A JP28519592A JPH06109022A JP H06109022 A JPH06109022 A JP H06109022A JP 4285195 A JP4285195 A JP 4285195A JP 28519592 A JP28519592 A JP 28519592A JP H06109022 A JPH06109022 A JP H06109022A
- Authority
- JP
- Japan
- Prior art keywords
- rolling
- fine particles
- solid lubricating
- film
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H57/00—General details of gearing
- F16H57/04—Features relating to lubrication or cooling or heating
- F16H57/041—Coatings or solid lubricants, e.g. antiseize layers or pastes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/32—Balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/58—Raceways; Race rings
- F16C33/583—Details of specific parts of races
- F16C33/585—Details of specific parts of races of raceways, e.g. ribs to guide the rollers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H57/00—General details of gearing
- F16H57/04—Features relating to lubrication or cooling or heating
- F16H57/0467—Elements of gearings to be lubricated, cooled or heated
- F16H57/0469—Bearings or seals
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H57/00—General details of gearing
- F16H57/04—Features relating to lubrication or cooling or heating
- F16H57/048—Type of gearings to be lubricated, cooled or heated
- F16H57/0497—Screw mechanisms
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Rolling Contact Bearings (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、転がり軸受や、ボー
ルねじ、リニアベアリング、ボールブッシュ等の転動体
使用部品、特に半導体製造装置や宇宙機器等の真空中で
使用される転動体使用部品の固体潤滑被膜形成方法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to rolling element parts such as rolling bearings, ball screws, linear bearings and ball bushes, and particularly to rolling element parts used in a vacuum such as semiconductor manufacturing equipment and space equipment. The present invention relates to a solid lubricant film forming method.
【0002】[0002]
【従来の技術および発明が解決しようとする課題】一般
に転がり軸受は、内・外輪と転動体間および転動体と保
持器間にグリース等の潤滑剤を供給し、それぞれの間に
発生する滑り摩擦や転がり摩擦を減少させ、軸受の耐久
性を向上させるようにしている。ところが、転がり軸受
を真空中で使用する場合、グリース等の蒸気圧の高い潤
滑剤は雰囲気中に蒸発してしまうため使用に耐えない。
また、転がり軸受を清浄度の高い密封真空下で使用する
場合、潤滑剤の蒸気が環境の一つの汚染源となるため、
グリース等の流体潤滑剤を使用することが避けられてい
る。2. Description of the Related Art Generally, a rolling bearing is designed so that a lubricant such as grease is supplied between the inner and outer races and the rolling elements and between the rolling elements and a cage to cause sliding friction between them. The rolling friction is reduced and the durability of the bearing is improved. However, when the rolling bearing is used in a vacuum, a lubricant having a high vapor pressure such as grease evaporates into the atmosphere and cannot be used.
In addition, when the rolling bearing is used in a highly clean sealed vacuum, the vapor of the lubricant becomes one of the pollution sources of the environment.
The use of fluid lubricants such as grease is avoided.
【0003】そのため、このような真空用の転がり軸受
には、固体潤滑被膜を摩擦面に形成したものが使用され
る。転がり軸受に限らず、ボールねじ等、転動体を備え
た真空中使用の機械部品では、同様な問題から摩擦面に
固体潤滑被膜が形成される。固体潤滑被膜の形成には、
一般にスパッタリング法あるいはイオンプレーティング
法が採用される。Therefore, for such a vacuum rolling bearing, one having a solid lubricating coating formed on the friction surface is used. Not only rolling bearings, but also mechanical parts used in vacuum that include rolling elements such as ball screws, a solid lubricating coating is formed on the friction surface due to the same problem. To form a solid lubricating coating,
Generally, a sputtering method or an ion plating method is adopted.
【0004】しかし、スパッタリングやイオンプレーテ
ィングで被膜形成を行う場合、真空容器を中心とした設
備が必要になり、処理設備が複雑で高価なものになる。
また、バッチ処理となるために、連続して生産される軸
受部品等の被処理物の生産ライン中に、一時貯蔵設備等
の流れ調整手段が必要になる。しかも、被膜形成に要す
る時間は、実際の処理時間に合わせて、真空排気や冷却
等の時間が必要になり、全てを含めると長時間となる。
さらに、真空容器内の形状、大きさ等により、被処理物
の処理量,形状,大きさ,さらには処理治具の形状まで
制限される。However, in the case of forming a film by sputtering or ion plating, equipment centering on a vacuum container is required, and the processing equipment becomes complicated and expensive.
Further, since the batch processing is performed, a flow adjusting means such as a temporary storage facility is required in the production line of the object to be processed such as the bearing parts which are continuously produced. In addition, the time required for film formation requires vacuum evacuation, cooling, etc. in accordance with the actual processing time, and if all are included, it will be a long time.
Further, the processing amount, shape and size of the object to be processed and the shape of the processing jig are limited by the shape and size of the vacuum container.
【0005】この他の固体潤滑被膜の形成方法として、
固体潤滑物質を溶解または分散させた有機溶剤を使用す
るいわゆる浸漬法がある。しかし、有機溶剤を使用する
ため、濃度管理等の工夫を要するうえ、作業環境も良く
ないという問題点を残している。As another method for forming a solid lubricating coating,
There is a so-called dipping method using an organic solvent in which a solid lubricating substance is dissolved or dispersed. However, since the organic solvent is used, there is a problem in that the work environment is not good in addition to the need for devising the concentration control and the like.
【0006】そこで、有機溶剤を使用せず、簡易に高品
質の被膜形成が行える方法として、本出願人は次のいわ
ゆるタンブリング法を試みた。すなわち、被処理物をチ
ップ状または粒状の被膜材料と共に容器中に入れ、回転
または振動させてその衝突により被膜を形成する方法で
ある。前記の容器にはチップ状物と同じ材質の樹脂製の
ものを使用する。しかし、このタンブリング法によって
も、被膜の耐久性品質や量産性につき、さらに優れたも
のが望まれる。また、この方法では、被処理物同士の衝
突により被処理物に傷がつく可能性があり、後の検査工
程に手間がかかる。Therefore, as a method for easily forming a high-quality coating without using an organic solvent, the present applicant tried the following so-called tumbling method. That is, it is a method in which the object to be treated is put into a container together with a chip-shaped or granular coating material, and is rotated or vibrated to form a coating by the collision. The container is made of resin, which is the same material as the chip-shaped material. However, even by this tumbling method, it is desired that the film has further excellent durability quality and mass productivity. Further, in this method, there is a possibility that the objects to be processed may be damaged by the collision of the objects to be processed, and it takes time and labor for the subsequent inspection process.
【0007】また、前記のタンブリング法や、スパッタ
リング、イオンプレーティング法は、いずれも小型の軸
受ほど軸受外輪における内径面の転走面等、入り込んだ
箇所への被膜形成が難しいという問題点がある。The tumbling method, the sputtering method and the ion plating method all have a problem that the smaller the bearing is, the more difficult it is to form a coating film on the invading portion such as the rolling surface of the inner diameter surface of the bearing outer ring. .
【0008】この発明の目的は、有機溶剤を使用せず
に、高品質の固体潤滑被膜が得られ、入り込んだ箇所へ
の被膜形成も容易で、量産性にも適した転動体使用部品
の固体潤滑被膜形成方法を提供することである。The object of the present invention is to obtain a high-quality solid lubricating coating without using an organic solvent, to easily form a coating on the invading place, and to make it suitable for mass production. A method for forming a lubricating coating is provided.
【0009】[0009]
【課題を解決するための手段】この発明の固体潤滑被膜
形成方法は、転動体を使用した機械部品の転がり摩擦面
および滑り摩擦面の中の少なくとも一部の摩擦面に、軟
質金属または高分子材料の1種または2種以上の微粒子
を、ノズルから空気と共に吹き付けて固体潤滑被膜を形
成する方法である。転動体はボールであっても、ころ状
体であっても良い。転動体を使用した機械部品とは、転
がり軸受、リニアベアリング、ボールねじ、ボールブッ
シュ等のように、相対移動する部分間に転動体を介在さ
せた機械部品を言う。被膜形成を行う摩擦面は、機械部
品の転動体が接する面であっても、転動体表面であって
も良い。According to the method for forming a solid lubricating coating of the present invention, a soft metal or polymer is formed on at least a part of the rolling friction surface and the sliding friction surface of a machine part using a rolling element. In this method, one or more fine particles of a material are blown together with air from a nozzle to form a solid lubricating coating. The rolling element may be a ball or a roller. The mechanical component using the rolling element refers to a mechanical component such as a rolling bearing, a linear bearing, a ball screw, a ball bush, etc., in which the rolling element is interposed between the parts that relatively move. The friction surface on which the film is formed may be the surface in contact with the rolling element of the machine part or the surface of the rolling element.
【0010】[0010]
【作用】この方法によると、加速された微粒子が機械部
品の摩擦面である被処理面に吹き付けられて衝突するこ
とにより、その衝突エネルギで被処理面に付着して被膜
が形成される。このように高速で衝突させて被膜形成を
行うため、下地金属との付着力の強固な被膜が形成され
る。微粒子は軟質金属または高分子材料であるため、高
速で衝突させることにより、有機溶剤を必要とせずに被
膜形成が可能である。微粒子の吹き付けはノズルを用い
て行うので、入り込んだ箇所にも被膜形成が行える。According to this method, the accelerated fine particles are sprayed and collide against the surface to be treated, which is the friction surface of the mechanical component, and the collision energy adheres to the surface to be treated to form a film. Since the coating is formed by colliding at high speed in this way, a coating having a strong adhesive force with the underlying metal is formed. Since the fine particles are made of a soft metal or a polymer material, they can be formed into a film by colliding at high speed without the need for an organic solvent. Since the fine particles are sprayed by using a nozzle, it is possible to form a film even in the invaded portion.
【0011】[0011]
【実施例】この発明の一実施例を図1ないし図4に基づ
いて説明する。この実施例は、図2に示す深溝玉軸受に
おいて、内輪1、外輪2、および転動体3に適用した例
である。図1は内輪1に被膜を形成する方法を示す。こ
の方法は、内輪1を適宜の治具(図示せず)で保持して
回転させながら、転がり摩擦面である外周の転走面1a
に、吹付加工装置のノズル5から被膜材料となる微粒子
aを圧縮空気と共に吹き付け、転走面1aに同図(B)
のような固体潤滑被膜6を形成する方法である。吹付加
工装置には、市販のショットピーニング機またはサンド
ブラスト機等を使用する。吹き付け速度は、空気式で
は、空気圧5〜10Kg/cm2、また、遠心式では周速40
〜70m/s 程度が好ましい。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. This embodiment is an example applied to the inner ring 1, the outer ring 2, and the rolling elements 3 in the deep groove ball bearing shown in FIG. FIG. 1 shows a method of forming a coating on the inner ring 1. According to this method, the inner race 1 is held and rotated by an appropriate jig (not shown), and the outer raceway rolling surface 1a, which is a rolling friction surface, is rotated.
Then, the fine particles a to be the coating material are blown together with the compressed air from the nozzle 5 of the spraying machine, and the rolling surface 1a is shown in FIG.
Is a method of forming the solid lubricating coating 6 as described above. A commercially available shot peening machine, sandblasting machine, or the like is used as the spraying processing apparatus. The blowing speed is 5 to 10 kg / cm 2 for the pneumatic type and 40 for the centrifugal type.
It is preferably about 70 m / s.
【0012】図3に示すように、外輪2の場合は、内輪
1と同様に回転させながら、ノズル5より微粒子aを内
径面の転走面2aに吹き付けて固体潤滑被膜を形成す
る。図4に示すように、球形の転動体3の場合は、ガイ
ド治具7における螺旋状のV溝7aの中で、転動体3を
ランダムに自転させながらノズル5より微粒子aを転動
体表面に吹付ける。As shown in FIG. 3, in the case of the outer ring 2, while rotating like the inner ring 1, the fine particles a are sprayed from the nozzle 5 onto the rolling surface 2a of the inner diameter surface to form a solid lubricating coating. As shown in FIG. 4, in the case of the spherical rolling element 3, in the spiral V groove 7a in the guide jig 7, while the rolling element 3 is rotating at random, the fine particles a are transferred from the nozzle 5 onto the rolling element surface. Spray.
【0013】被膜材料となる微粒子aは、金属表面に被
膜を形成し易く、かつ潤滑材として作用する材質である
ことが必要であり、軟質金属または高分子材料が使用さ
れる。軟質金属としては、金,銀,鉛,亜鉛,すず,イ
ンジウム等が使用できる。高分子材料としては、ポリ四
ふっ化エチレン(PTFE)や、ペルフルオロアルコキ
シふっ素樹脂(PTA)等のふっ素樹脂が好適である。
これらの微粒子は、1種類を単独で使用しても良く、2
種類以上を混合させて使用しても良い。微粒子の大きさ
は、被処理物の形状や大きさによって選択するが、通常
は粒径が0.5〜3.0mm程度が適当であり、特に小物
では1mm以下のものを使用する。The fine particles a as the coating material must be a material that can easily form a coating on the metal surface and act as a lubricant, and a soft metal or polymer material is used. Gold, silver, lead, zinc, tin, indium, etc. can be used as the soft metal. As the polymer material, polytetrafluoroethylene (PTFE) and fluororesin such as perfluoroalkoxy fluororesin (PTA) are suitable.
These fine particles may be used alone, or 2
You may mix and use a kind or more. The size of the fine particles is selected according to the shape and size of the object to be treated, but normally a particle size of about 0.5 to 3.0 mm is suitable, and particularly small particles having a size of 1 mm or less are used.
【0014】この被膜形成方法によると、加速された微
粒子aが被処理物である内外輪1,2や転動体3に吹き
付けられて衝突することにより、その衝突エネルギで被
処理物表面に付着して被膜6(図1(B))が形成され
る。微粒子aは軟質金属または高分子材料であるため、
このように高速で衝突することにより、有機溶剤を必要
とせずに被膜6が形成される。また、高速で衝突させて
被膜6を形成するため、下地金属との付着力が強固で、
耐久性に優れた被膜6となる。微粒子aの吹き付けはノ
ズル5を用いて行うので、外輪2の転走面2aのような
入り込んだ内径面への被膜形成を容易に行える。さら
に、吹き付けによるため、量産性にも優れ、被処理物同
士の衝突による損傷の問題もない。According to this film forming method, the accelerated fine particles a are sprayed onto the inner and outer races 1 and 2 and the rolling element 3 which are objects to be processed and collide with each other. As a result, the coating film 6 (FIG. 1B) is formed. Since the fine particle a is a soft metal or a polymer material,
By colliding at high speed in this way, the coating film 6 is formed without the need for an organic solvent. Further, since the coating film 6 is formed by colliding at high speed, the adhesive force with the base metal is strong,
The film 6 has excellent durability. Since the fine particles a are sprayed by using the nozzle 5, it is possible to easily form the coating film on the inner diameter surface such as the rolling surface 2a of the outer ring 2 that has entered. Further, since it is sprayed, it is excellent in mass productivity and there is no problem of damage due to collision of objects to be processed.
【0015】実験結果につき説明する。図2の軸受にお
ける内外輪1,2と転動体3とに、図1,図3,図4と
共に前述した方法で、市販のショットピーニング機を用
い被膜形成を行った。微粒子aには、粒径が約0.5mm
のPTFE微粒子を用いた。その結果、潤滑剤の必要な
全表面、すなわち内外輪1,2の転走面1a,2aと、
転動体3の全表面とに、均一な被膜の形成が認められ
た。これらの内外輪1,2と転動体3とを軸受に組立
て、真空中で耐久性を試験し、前記従来のタンブリング
法によるPTFE系固体潤滑被膜と比較した結果、4倍
以上の耐久性が確認された。The experimental results will be described. The inner and outer races 1 and 2 and the rolling element 3 in the bearing shown in FIG. 2 were coated with a commercially available shot peening machine by the method described above with reference to FIGS. Particle a has a particle size of about 0.5 mm
PTFE fine particles were used. As a result, all necessary surfaces of the lubricant, that is, the rolling surfaces 1a, 2a of the inner and outer races 1, 2,
Formation of a uniform film was observed on the entire surface of the rolling element 3. As a result of assembling these inner and outer rings 1 and 2 and the rolling element 3 into a bearing, testing the durability in a vacuum, and comparing with the above-mentioned conventional PTFE solid lubricating coating by the tumbling method, the durability was confirmed to be four times or more. Was done.
【0016】なお、前記実施例は深溝玉軸受に適用した
場合につき説明したが、この発明は他の各種軸受や、リ
ニアベアリング、ボールねじ、ボールブッシュ、ボール
スプライン等のように、相対移動する部分間に転動体を
介在させた機械部品一般に適用することができる。例え
ば、鍔付ころ軸受における転がり摩擦面である転走面や
ころ周面、および滑り摩擦面であるころ端面や鍔面,保
持器表面等にもこの固体潤滑被膜の形成方法が適用でき
る。The above embodiment has been described for the case of being applied to a deep groove ball bearing. However, the present invention applies to various other bearings, linear bearings, ball screws, ball bushes, ball splines, and other parts that move relative to each other. It can be applied to general mechanical parts with rolling elements interposed therebetween. For example, the method for forming the solid lubricating coating can be applied to the rolling contact surface, the roller peripheral surface, which is the rolling friction surface, and the roller end surface, the flange surface, the cage surface, which are the sliding friction surfaces, in the roller bearing with collar.
【0017】図5は、この被膜形成方法を適用するリニ
アベアリングの一例を示す。このベアリングは、外輪2
1と、軸22に接するボール状の転動体23と、保持器
24とで構成される。外輪21は、内径面に軸方向に沿
う数条のボール軌道面21aと、その両端に続くボール
循環溝(図示せず)とが形成してあり、保持器24に転
動体23を循環させるボール案内溝24aが形成してあ
る。このリニアベアリングでは、転がり摩擦面である外
輪21の前記軌道面21aおよびボール循環溝や、保持
器24の案内溝24a、および転動体23等に前記の方
法で固体潤滑被膜を形成する。同図は、転動体23とし
てボールを用いた形式のものであるが、ころを用いた形
式のリニアベアリングにもこの被膜形成方法が同様に適
用できる。その場合、ころ端面や、これに接触する滑り
摩擦面にこの方法で被膜を形成しても良い。FIG. 5 shows an example of a linear bearing to which this film forming method is applied. This bearing is the outer ring 2
1, a ball-shaped rolling element 23 in contact with the shaft 22, and a retainer 24. The outer ring 21 has a plurality of ball raceway surfaces 21a along the axial direction on the inner diameter surface, and ball circulation grooves (not shown) continuing to both ends of the ball raceway surface 21a, and balls that circulate the rolling elements 23 in the cage 24. A guide groove 24a is formed. In this linear bearing, the solid lubricating coating is formed on the raceway surface 21a of the outer ring 21, which is a rolling friction surface, the ball circulation groove, the guide groove 24a of the cage 24, the rolling element 23 and the like by the method described above. Although the drawing shows a type in which balls are used as the rolling elements 23, this coating forming method can be similarly applied to a linear bearing in which rollers are used. In this case, a coating may be formed by this method on the roller end surface and the sliding friction surface that contacts the roller end surface.
【0018】図6は、この被膜形成方法を適用するボー
ルねじの一例を示す。このボールねじは、ねじ軸11
と、ナット12と、これらねじ軸11およびナット12
のねじ溝13,14間に介在させる多数のボール状の転
動体15とで構成される。ナット12は、リターンチュ
ーブ16を設けて転動体15を循環させる外部循環形式
のものである。このボールねじでは、転がり摩擦面であ
るねじ軸11およびナット12のねじ溝13,14や、
リターンチューブ16の内面等に前記の方法で固体潤滑
被膜を形成する。FIG. 6 shows an example of a ball screw to which this film forming method is applied. This ball screw has a screw shaft 11
, Nut 12, screw shaft 11 and nut 12
And a large number of ball-shaped rolling elements 15 interposed between the screw grooves 13 and 14. The nut 12 is of an external circulation type in which a return tube 16 is provided to circulate the rolling elements 15. In this ball screw, the thread grooves 13, 14 of the screw shaft 11 and the nut 12, which are rolling friction surfaces,
The solid lubricating coating is formed on the inner surface of the return tube 16 by the above method.
【0019】このように、リニアベアリングやボールね
じに適用した場合も、この発明の固体潤滑被膜形成方法
によると、前述の被膜性能の向上や生産性向上,その他
の各効果が得られる。As described above, even when applied to a linear bearing or a ball screw, according to the solid lubricant film forming method of the present invention, the above-mentioned film performance improvement, productivity improvement, and other effects can be obtained.
【0020】[0020]
【発明の効果】この発明の固体潤滑被膜形成方法は、転
動体を使用した機械部品の摩擦面に、軟質金属または高
分子材料の微粒子をノズルから空気と共に吹き付けて固
体潤滑被膜を形成する方法であるため、耐久性等に優れ
た高品質の被膜を形成することができ、量産性にも適し
ている。しかも、有機溶剤を使用せずに被膜形成が行え
る。さらに、吹き付けによるため、被処理物同士の衝突
による傷の発生の恐れもなく、また吹き付けにノズルを
使用するため、入り込んだ場所にも容易に被膜形成が行
える。The solid lubricant film forming method of the present invention is a method of forming fine particles of a soft metal or a polymer material together with air from a nozzle onto a friction surface of a machine part using a rolling element to form a solid lubricant film. Therefore, it is possible to form a high-quality coating having excellent durability and the like, which is suitable for mass production. Moreover, a film can be formed without using an organic solvent. Furthermore, since spraying is used, there is no risk of scratches due to collisions of the objects to be processed, and since a nozzle is used for spraying, it is possible to easily form a film even in the invaded place.
【図1】この発明方法を深溝玉軸受に適用した場合の軸
受内輪への被膜形成工程を示す説明図である。FIG. 1 is an explanatory view showing a process of forming a film on a bearing inner ring when the method of the present invention is applied to a deep groove ball bearing.
【図2】その深溝玉軸受の部分断面図である。FIG. 2 is a partial sectional view of the deep groove ball bearing.
【図3】同軸受の外輪への被膜形成工程を示す説明図で
ある。FIG. 3 is an explanatory view showing a process of forming a film on the outer ring of the bearing.
【図4】同軸受の転動体への被膜形成工程を示す説明図
である。FIG. 4 is an explanatory view showing a process of forming a film on a rolling element of the bearing.
【図5】この発明方法を適用するリニアベアリングの一
例の断面図である。FIG. 5 is a sectional view of an example of a linear bearing to which the method of the present invention is applied.
【図6】この発明方法を適用するボールねじの一例の部
分切欠斜視図である。FIG. 6 is a partially cutaway perspective view of an example of a ball screw to which the method of the present invention is applied.
1…内輪、1a…転走溝(転がり摩擦面)、2…外輪、
2a…転走面(転がり摩擦面)、3…転動体、5…ノズ
ル、6…固体潤滑被膜、a…微粒子1 ... Inner ring, 1a ... Rolling groove (rolling friction surface), 2 ... Outer ring,
2a ... Rolling surface (rolling friction surface), 3 ... Rolling element, 5 ... Nozzle, 6 ... Solid lubricating coating, a ... Fine particles
Claims (1)
面および滑り摩擦面の中の少なくとも一部の摩擦面に、
軟質金属または高分子材料の1種または2種以上の微粒
子を、ノズルから空気と共に吹き付けて固体潤滑被膜を
形成する転動体使用部品の固体潤滑被膜形成方法。1. A rolling surface and a sliding friction surface of a machine part using a rolling element, at least a part of the friction surface,
A method for forming a solid lubricating coating of a rolling element-using component, which comprises spraying one or more fine particles of a soft metal or a polymeric material together with air from a nozzle to form a solid lubricating coating.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4285195A JPH06109022A (en) | 1992-09-29 | 1992-09-29 | Formation of solid lubricating film for part using rolling body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4285195A JPH06109022A (en) | 1992-09-29 | 1992-09-29 | Formation of solid lubricating film for part using rolling body |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH06109022A true JPH06109022A (en) | 1994-04-19 |
Family
ID=17688340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4285195A Pending JPH06109022A (en) | 1992-09-29 | 1992-09-29 | Formation of solid lubricating film for part using rolling body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06109022A (en) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0678627U (en) * | 1993-02-25 | 1994-11-04 | 日本トムソン株式会社 | Roller with cage |
EP0695884A1 (en) * | 1994-07-27 | 1996-02-07 | SKF Industrial Trading & Development Co, B.V. | Greased rolling bearing element with solid lubricant coating |
JP2006077802A (en) * | 2004-09-07 | 2006-03-23 | Jtekt Corp | Rolling sliding member and its manufacturing method |
WO2006104015A1 (en) | 2005-03-25 | 2006-10-05 | Nsk Ltd. | Ball screw |
JP2007100870A (en) * | 2005-10-05 | 2007-04-19 | Nsk Ltd | Rolling device |
JP2007232052A (en) * | 2006-02-28 | 2007-09-13 | Nsk Ltd | Rolling bearing for business machine |
JP2007247757A (en) * | 2006-03-15 | 2007-09-27 | Nsk Ltd | Rolling device |
JP2008001930A (en) * | 2006-06-21 | 2008-01-10 | Nsk Ltd | Metal surface treatment method |
JP2008002533A (en) * | 2006-06-21 | 2008-01-10 | Nsk Ltd | Method of surface treatment of rolling transfer member |
JP2008019968A (en) * | 2006-07-12 | 2008-01-31 | Nsk Ltd | Bearing for center bearing |
JP2008019967A (en) * | 2006-07-12 | 2008-01-31 | Nsk Ltd | Clutch pilot bearing |
JP2008190696A (en) * | 2007-02-07 | 2008-08-21 | Showa Denko Kk | Sliding member, sliding part, method of manufacturing the member and the part, and magnetic recording medium manufacturing device using the member, the part, and the method |
EP2031260A1 (en) * | 2006-05-31 | 2009-03-04 | NSK Ltd. | Rolling device |
US7811002B2 (en) | 2005-01-18 | 2010-10-12 | Nsk, Ltd. | Rolling device |
JP2011089649A (en) * | 2011-02-09 | 2011-05-06 | Nsk Ltd | Bearing for center bearing |
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-
1992
- 1992-09-29 JP JP4285195A patent/JPH06109022A/en active Pending
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0678627U (en) * | 1993-02-25 | 1994-11-04 | 日本トムソン株式会社 | Roller with cage |
EP0695884A1 (en) * | 1994-07-27 | 1996-02-07 | SKF Industrial Trading & Development Co, B.V. | Greased rolling bearing element with solid lubricant coating |
NL9401234A (en) * | 1994-07-27 | 1996-03-01 | Skf Ind Trading & Dev | Roller bearing with a low friction lining. |
JP2006077802A (en) * | 2004-09-07 | 2006-03-23 | Jtekt Corp | Rolling sliding member and its manufacturing method |
US7811002B2 (en) | 2005-01-18 | 2010-10-12 | Nsk, Ltd. | Rolling device |
JP2011021756A (en) * | 2005-01-18 | 2011-02-03 | Nsk Ltd | Rolling device |
WO2006104015A1 (en) | 2005-03-25 | 2006-10-05 | Nsk Ltd. | Ball screw |
JP2007100870A (en) * | 2005-10-05 | 2007-04-19 | Nsk Ltd | Rolling device |
JP2007232052A (en) * | 2006-02-28 | 2007-09-13 | Nsk Ltd | Rolling bearing for business machine |
JP4513775B2 (en) * | 2006-03-15 | 2010-07-28 | 日本精工株式会社 | Rolling device for rolling mill roll neck |
JP2007247757A (en) * | 2006-03-15 | 2007-09-27 | Nsk Ltd | Rolling device |
US8454241B2 (en) | 2006-05-31 | 2013-06-04 | Nsk Ltd. | Rolling device |
EP2031260A4 (en) * | 2006-05-31 | 2012-11-21 | Nsk Ltd | Rolling device |
EP2031260A1 (en) * | 2006-05-31 | 2009-03-04 | NSK Ltd. | Rolling device |
JP2008002533A (en) * | 2006-06-21 | 2008-01-10 | Nsk Ltd | Method of surface treatment of rolling transfer member |
JP2008001930A (en) * | 2006-06-21 | 2008-01-10 | Nsk Ltd | Metal surface treatment method |
JP2008019967A (en) * | 2006-07-12 | 2008-01-31 | Nsk Ltd | Clutch pilot bearing |
JP2008019968A (en) * | 2006-07-12 | 2008-01-31 | Nsk Ltd | Bearing for center bearing |
JP2008190696A (en) * | 2007-02-07 | 2008-08-21 | Showa Denko Kk | Sliding member, sliding part, method of manufacturing the member and the part, and magnetic recording medium manufacturing device using the member, the part, and the method |
JP2011089649A (en) * | 2011-02-09 | 2011-05-06 | Nsk Ltd | Bearing for center bearing |
US9239078B2 (en) | 2013-11-15 | 2016-01-19 | Schaeffler Technologies AG & Co. KG | Phenolic bearing cage with self-lubricating coating and method of manufacturing phenolic bearing cage with self-lubricating coating |
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