JPH06104076A - Ultra-high temperature heating device by high frequency induction - Google Patents
Ultra-high temperature heating device by high frequency inductionInfo
- Publication number
- JPH06104076A JPH06104076A JP27665392A JP27665392A JPH06104076A JP H06104076 A JPH06104076 A JP H06104076A JP 27665392 A JP27665392 A JP 27665392A JP 27665392 A JP27665392 A JP 27665392A JP H06104076 A JPH06104076 A JP H06104076A
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- frequency
- induction
- high frequency
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- General Induction Heating (AREA)
- Furnace Details (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、加熱炉のヒータとして
作用するサセプタを高周波誘導により加熱して炉内の試
験片等を加熱して試験を行うための高周波誘導による超
高温加熱装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrahigh temperature induction heating apparatus using high frequency induction for heating a susceptor acting as a heater of a heating furnace by high frequency induction to heat a test piece or the like in the furnace for testing.
【０００２】[0002]
【従来の技術】２１世紀初頭に向けて、宇宙航空分野に
おいては、大気圏内では空気吸込式エンジンで加速し、
大気圏外ではロケットエンジンで推進する水平離着陸型
超高速輸送機（スペースプレーン）、超音速機（ＳＳ
Ｔ）、超音速輸送機（ＨＳＴ）、メタン燃料航空機等、
また新エネルギー分野においては、石炭ガス化発電、核
融合等、様々な計画がなされている。これらの実現のた
めには、超高温などの極限環境化において耐熱性、耐摩
耗性、耐衝撃性、高比剛性、耐酸化性など既存材料では
実現不可能な性能を満足する構造材料が必要不可欠とさ
れている。特に、スペースプレーンの構造材料、ガスタ
ービンの動翼、核融合炉の炉壁材などは、１０００〜２
０００℃もの高温に曝されるなど、厳しい環境下で使わ
れるので信頼性ある材料が要求されている。2. Description of the Related Art Toward the beginning of the 21st century, in the aerospace field, an air-breathing engine accelerates in the atmosphere,
Outside the atmosphere, rocket engines propel horizontal take-off and landing type ultra-high-speed transport aircraft (space plane), supersonic aircraft (SS
T), supersonic transport (HST), methane fuel aircraft, etc.
In the new energy field, various plans are being made such as coal gasification power generation and nuclear fusion. In order to realize these, structural materials that satisfy the performance that cannot be realized with existing materials such as heat resistance, wear resistance, impact resistance, high specific rigidity, and oxidation resistance in extreme environments such as ultra high temperatures are required. It is considered essential. In particular, the structural materials of the space plane, the blades of the gas turbine, the wall material of the fusion reactor, etc.
Reliable materials are required because they are used in severe environments such as exposure to temperatures as high as 000 ° C.
【０００３】前述した用途の超高温材料の開発、研究の
ための高温度特性試験に超高温加熱技術が不可欠のもの
である。特に真空中の加熱方法としてタングステンまた
はモリブデンのメッシュ・ヒータによるものが多く使用
される。また炉内でヒータとして作動するサセプタを高
周波誘導により加熱する方法も知られている。本願出願
人もサセプタとして珪化物サーメットを用いて前記高周
波誘導により加熱する方法を用いた誘導加熱炉（特公平
１−５６５１２号）を提案している。また、高周波誘導
によりサセプタを加熱して超高温（特に１８００℃以
上）で使用する場合、サセプタ材料として炭素材料（グ
ラファイト）等を使用する構造も提案されている。本願
出願人が先に提案した前記高周波誘導による超高温加熱
装置は、試験片を囲み試験片を加熱するサセプタ、サセ
プタを包囲する断熱材料よりなる断熱容器、前記断熱容
器の外側から前記サセプタを誘導加熱する加熱用の誘導
コイルを含んでいる。The ultra-high temperature heating technique is indispensable for the high-temperature characteristic test for the development and research of the ultra-high temperature material for the above-mentioned applications. In particular, as a heating method in vacuum, a method using a mesh heater of tungsten or molybdenum is often used. There is also known a method of heating a susceptor that operates as a heater in a furnace by high frequency induction. The applicant of the present application has also proposed an induction heating furnace (Japanese Patent Publication No. 1-56512) using a method of heating by high frequency induction using a silicide cermet as a susceptor. Further, a structure using a carbon material (graphite) or the like as a susceptor material has been proposed when the susceptor is heated by high frequency induction to be used at an extremely high temperature (particularly 1800 ° C. or higher). The ultra-high temperature heating device by the high frequency induction previously proposed by the applicant of the present application is a susceptor surrounding a test piece and heating the test piece, a heat insulating container made of a heat insulating material surrounding the susceptor, and guiding the susceptor from the outside of the heat insulating container. It includes an induction coil for heating to heat.
【０００４】[0004]
【発明が解決しようとする課題】このような構成におい
て、前記断熱材料（あるいは耐火材料）は文字通り高い
温度に堪え、かつ高周波電力の通過を妨げない（高周波
電力を吸収しにくい）材料でなくてはならないが前述の
高い温度に堪える材料は得難いものであった。本発明の
目的は、サセプタの材料と断熱容器の材料（あるいは耐
火材料）の組み合わせと、誘導加熱電源周波数の選択に
より試験片の超高温加熱を可能にする高周波誘導による
超高温加熱装置を提供し、高周波誘導技術の真空超高温
への応用に道を開くものである。In such a structure, the heat insulating material (or refractory material) must be a material that can withstand a high temperature literally and does not hinder the passage of high frequency power (it is difficult to absorb high frequency power). However, the material that can withstand the above-mentioned high temperature was difficult to obtain. An object of the present invention is to provide an ultra-high temperature heating apparatus by high frequency induction that enables ultra-high temperature heating of a test piece by a combination of a material of a susceptor and a material (or a refractory material) of an insulating container and selection of an induction heating power source frequency. , Opens the way to the application of high-frequency induction technology to ultra-high temperatures in vacuum.
【０００５】[0005]
【課題を解決するための手段】前記目的を達成するため
に本発明による高周波誘導による超高温加熱装置は、試
験片を囲み試験片を加熱するサセプタ、前記サセプタを
包囲する断熱材料よりなる断熱容器、前記容器の外側か
ら前記サセプタを誘導加熱する加熱用の誘導コイルおよ
び前記コイルに高周波電流を供給する高周波駆動電源よ
りなる高周波誘導による超高温加熱装置において、前記
サセプタの材料を低抵抗率、高熱伝導率を有する材料と
し、前記容器の材料を高抵抗率、低熱伝導率を有する材
料とし、前記高周波駆動電源の周波数を前記サセプタの
臨界周波数以下の領域の周波数として構成されている。
前記サセプタはグラファイトを含み、前記断熱容器の材
料を多孔質炭素材料とすることができる。In order to achieve the above-mentioned object, an ultrahigh temperature heating apparatus by high frequency induction according to the present invention comprises a susceptor surrounding a test piece and heating the test piece, and a heat insulating container made of a heat insulating material surrounding the susceptor. In an ultrahigh-temperature heating device using high-frequency induction, which comprises an induction coil for heating that induction-heats the susceptor from the outside of the container and a high-frequency drive power source that supplies a high-frequency current to the coil, a material for the susceptor has low resistivity and high heat A material having conductivity, a material for the container having high resistivity and low thermal conductivity, and a frequency of the high frequency driving power source are set to a frequency in a region below a critical frequency of the susceptor.
The susceptor may include graphite, and the material of the heat insulating container may be a porous carbon material.
【０００６】[0006]
【実施例】以下、図面等を参照して本発明による装置を
さらに詳しく説明する。図１は本発明による高周波誘導
による超高温加熱装置の実施例を示す断面図である。破
線で示す試験片４が配置される位置を中心にして円筒状
のサセプタ１、このサセプタ１の外周を取り囲む同様な
円筒状の断熱容器２が配置されている。この断熱容器２
の外周を取り囲む高周波電力を発生する加熱用誘導コイ
ル３が配置されており、このコイル３には図示しない高
周波駆動電源から高周波電流が供給されている。この実
施例では、前記サセプタ1 の材料として超微粒のグラフ
ァイトでその抵抗率が１２００μΩｃｍと低く、熱伝導
性が１００Ｋcal ／ｍ．hr. ℃と高いものを用いた。ま
た断熱容器３の材料は多孔性の特殊な炭素で抵抗率が１
３０，０００μΩｃｍと高く、熱伝導率が０．２５Ｋca
l ／ｍ．hr. ℃と低いものを用いた。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The apparatus according to the present invention will be described below in more detail with reference to the drawings. FIG. 1 is a sectional view showing an embodiment of an ultrahigh temperature heating apparatus by high frequency induction according to the present invention. A cylindrical susceptor 1 and a similar cylindrical heat insulating container 2 surrounding the outer periphery of the susceptor 1 are arranged around the position where the test piece 4 shown by the broken line is arranged. This heat insulation container 2
A heating induction coil 3 for generating high-frequency power is arranged to surround the outer periphery of the coil 3, and a high-frequency current is supplied to the coil 3 from a high-frequency drive power source (not shown). In this embodiment, as the material of the susceptor 1, ultrafine graphite is used and its resistivity is as low as 1200 μΩcm and its thermal conductivity is 100 Kcal / m. hr. ℃ and high one were used. Also, the material of the heat insulating container 3 is a special porous carbon and has a resistivity of 1
High as 30,000μΩcm and thermal conductivity of 0.25Kca
l / m. hr. ° C and low one were used.
【０００７】前記サセプタ１は前記断熱容器２の外側に
配置された水冷式の加熱用の誘導コイル３からの高周波
電力により誘導加熱される。サセプタ１の加熱用の誘導
コイル３には図示しない高周波駆動電源の周波数を前記
サセプタ１の臨界周波数以下の領域内の周波数で使用す
る。この実施例では高周波駆動電源の駆動周波数を２５
ｋＨｚとした。誘導コイル３は水冷式のアルミニュウム
管であるが表面の短絡アーク放電を防止するためにアル
ミナコーテングがなされている。この実施例で前記サセ
プタ１内の直径６ｃｍの試験片４を１８００℃に加熱す
るためには、４０ＫＷの誘導加熱電源が必要であった。
試験片４の温度制御のための温度計測にタングステンと
レニュウム（Ｗ−ＲＥ）の熱電対を用いる。前記熱電対
を試験片４に近接して配置し、試験片の温度をパイロメ
トリック技術によって測定する。The susceptor 1 is induction-heated by high-frequency electric power from a water-cooling induction coil 3 for heating arranged outside the heat insulating container 2. For the induction coil 3 for heating the susceptor 1, the frequency of a high frequency drive power source (not shown) is used within the range of the critical frequency of the susceptor 1 or less. In this embodiment, the driving frequency of the high frequency driving power source is 25
It was set to kHz. The induction coil 3 is a water-cooled aluminum tube, but is coated with alumina in order to prevent short-circuit arc discharge on the surface. In this example, in order to heat the test piece 4 having a diameter of 6 cm in the susceptor 1 to 1800 ° C., an induction heating power source of 40 KW was necessary.
A thermocouple of tungsten and rhenium (W-RE) is used for temperature measurement for controlling the temperature of the test piece 4. The thermocouple is placed close to the test piece 4 and the temperature of the test piece is measured by a pyrometric technique.
【０００８】次に図２を参照してこの実施例では高周波
駆動電源の駆動周波数の意味を説明する。図２は高周波
誘導加熱における加熱高周波の周波数とサセプタに発生
させられる電力との関係を示している。図２に示されて
いるように、高周波駆動電源の駆動周波数（ｆ）と円筒
状のサセプタの単位長さ当たりに発生させられる電力
（Ｐ）Ｗ／ｍとの間には下記の式１の示す領域と式２に
示される領域とがある。そして各領域を分ける周波数を
臨界周波数という。In this embodiment, the meaning of the driving frequency of the high frequency driving power source will be described with reference to FIG. FIG. 2 shows the relationship between the frequency of the heating high frequency in the high frequency induction heating and the electric power generated in the susceptor. As shown in FIG. 2, between the drive frequency (f) of the high frequency drive power source and the electric power (P) W / m generated per unit length of the cylindrical susceptor, There are a region shown and a region shown in Expression 2. The frequency that divides each region is called the critical frequency.
【０００９】臨界周波数以下の関係式 Ｐ＝（８π5 α4 ｆ2 μr 2 ｎ2 Ｉ2 ×１０-14 ）／ρ・・・式１ 臨界周波数以上の関係式 Ｐ＝４π2 ｎ2 Ｉ2 （ρμr ｆ）1/2 ×１０-8・・・式２ 各式において、ρは抵抗率（または比抵抗）、ｆは周波
数、ｎは単位長さ当たりの巻数、Ｉはコイル電流、α，
μr は定数である。前述した駆動周波数（ｆ＝２５ｋＨ
ｚ）は前記サセプタの臨界周波数以下の領域にある。な
お、従来のこの種の電気炉について本件発明者等が調査
したところ、駆動周波数はいずれも臨界周波数を越える
ものであった。[0009] The critical frequency following equation P = (8π 5 α 4 f 2 μ r 2 n 2 I 2 × 10 -14) / ρ ··· Formula 1 critical frequency above equation P = 4π 2 n 2 I 2 (ρμ r f) 1/2 × 10 -8 Equation 2 In each equation, ρ is the resistivity (or specific resistance), f is the frequency, n is the number of turns per unit length, I is the coil current, α,
μ r is a constant. The drive frequency described above (f = 25 kHz
z) is in the region below the critical frequency of the susceptor. When the inventors of the present invention investigated this type of conventional electric furnace, the driving frequencies were all above the critical frequency.
【００１０】本発明においては、臨界周波数以下の前記
式１に示すようにサセプタには抵抗率に逆比例する電力
が供給されることになる。したがって、抵抗率が小さい
方が容易に加熱されることになる。前述した実施例にお
いて、サセプタ1 の材料である超微粒のグラファイトの
抵抗率ρs は、ρs ＝１２００μΩｃｍと低く、断熱容
器３の材料の抵抗率ρi はρi ＝１３０，０００μΩｃ
ｍと大きい。そしてρi ／ρs はほぼ１００となるか
ら、絶縁容器は殆ど加熱されずにサセプタ１のみが加熱
されることになる。In the present invention, as shown in the equation 1 below the critical frequency, the susceptor is supplied with electric power inversely proportional to the resistivity. Therefore, the smaller the resistivity, the easier the heating. In the above-mentioned embodiment, the resistivity ρ s of ultrafine graphite which is the material of the susceptor 1 is as low as ρ s = 1200 μΩcm, and the resistivity ρ i of the material of the heat insulating container 3 is ρ i = 130,000 μΩc.
It is as large as m. And since ρ i / ρ s is almost 100, the insulating container is hardly heated and only the susceptor 1 is heated.
【００１１】以上詳しく説明した実施例の構造や材料に
ついて、本発明の範囲内で種々の変形を施すことができ
る。前記サセプタや前記断熱容器は前記実施例の他に前
記条件を満足する限りにおいて、他の種々の材料を用い
ることができる。例えば、サセプタの材料としては前記
微粒子のグラファイトの他にタングステンを用いること
ができる。The structures and materials of the embodiments described in detail above can be variously modified within the scope of the present invention. The susceptor and the heat insulating container may be made of various other materials as long as the above conditions are satisfied in addition to the above embodiment. For example, as the material of the susceptor, tungsten can be used in addition to the fine graphite particles.
【００１２】[0012]
【発明の効果】以上詳しく説明したように、本発明によ
る超高温加熱装置は、試験片を囲み試験片を加熱するサ
セプタ、前記サセプタを包囲する断熱材料よりなる断熱
容器、前記容器の外側から前記サセプタを誘導加熱する
加熱用のコイルおよび前記コイルに高周波電流を供給す
る高周波駆動電源より構成されており、前記サセプタの
材料を低抵抗率、高熱伝導率を有する材料とし、前記容
器の材料を高抵抗率、低熱伝導率を有する材料としてあ
る。したがって、前記高周波駆動電源の周波数を前記サ
セプタの臨界周波数以下の領域とすることにより、断熱
容器を殆ど加熱することなくサセプタを効果的に加熱す
ることができる。従来のように臨界周波数以上の周波数
を用いると抵抗率の高い断熱容器が加熱され易くなり、
良い結果は得られない。As described in detail above, the ultra-high temperature heating apparatus according to the present invention includes a susceptor for surrounding a test piece and heating the test piece, a heat insulating container made of a heat insulating material for surrounding the susceptor, and the outside of the container from the outside. It is composed of a heating coil for inductively heating the susceptor and a high frequency driving power source for supplying a high frequency current to the coil.The material of the susceptor is a material having low resistivity and high thermal conductivity, and the material of the container is high. It is a material having resistivity and low thermal conductivity. Therefore, by setting the frequency of the high frequency driving power source to be in the region of the critical frequency of the susceptor or less, the susceptor can be effectively heated without heating the heat insulating container. When a frequency higher than the critical frequency is used as in the past, it becomes easier to heat the heat-insulating container with high resistivity,
I don't get good results.
【図１】本発明による高周波誘導による超高温加熱装置
の実施例を示す正面断面図である。FIG. 1 is a front sectional view showing an embodiment of an ultrahigh temperature heating apparatus by high frequency induction according to the present invention.
【図２】高周波誘導加熱における加熱高周波の周波数と
サセプタに発生させられる電力との関係を示すグラフで
ある。FIG. 2 is a graph showing the relationship between the frequency of a heating high frequency in high frequency induction heating and the electric power generated in the susceptor.
１ サセプタ（ヒータ） ２ 絶縁容器 ３ 加熱用誘導コイル ４ 試験片 1 Susceptor (heater) 2 Insulation container 3 Induction coil for heating 4 Test piece
Claims (2)
タ、前記サセプタを包囲する断熱材料よりなる断熱容
器、前記容器の外側から前記サセプタを誘導加熱する加
熱用の誘導コイルおよび前記コイルに高周波電流を供給
する高周波駆動電源よりなる高周波誘導による超高温加
熱装置において、 前記サセプタの材料を低抵抗率、高熱伝導率を有する材
料とし、 前記容器の材料を高抵抗率、低熱伝導率を有する材料と
し、 前記高周波駆動電源の周波数を前記サセプタの臨界周波
数以下の領域の周波数として構成したことを特徴とする
高周波誘導による超高温加熱装置。1. A susceptor surrounding a test piece to heat the test piece, a heat insulating container made of a heat insulating material surrounding the susceptor, an induction coil for heating to induction heat the susceptor from the outside of the container, and a high-frequency current to the coil. In an ultrahigh temperature heating device by high frequency induction consisting of a high frequency driving power supply for supplying the material, the material of the susceptor is a material having low resistivity and high thermal conductivity, and the material of the container is material having high resistivity and low thermal conductivity. An ultrahigh temperature heating apparatus using high frequency induction, wherein the frequency of the high frequency driving power source is set to a frequency in a region below a critical frequency of the susceptor.
記断熱容器の材料を多孔質炭素材料とした請求項１記載
の高周波誘導による超高温加熱装置。2. The ultrahigh temperature heating apparatus by high frequency induction according to claim 1, wherein the susceptor contains graphite and the material of the heat insulating container is a porous carbon material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27665392A JPH06104076A (en) | 1992-09-21 | 1992-09-21 | Ultra-high temperature heating device by high frequency induction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27665392A JPH06104076A (en) | 1992-09-21 | 1992-09-21 | Ultra-high temperature heating device by high frequency induction |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06104076A true JPH06104076A (en) | 1994-04-15 |
Family
ID=17572456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27665392A Pending JPH06104076A (en) | 1992-09-21 | 1992-09-21 | Ultra-high temperature heating device by high frequency induction |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06104076A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010075587A3 (en) * | 2008-12-26 | 2010-10-14 | Inductotherm Corp. | Heating and melting of materials by electric induction heating of susceptors |
| CN104807743A (en) * | 2015-04-21 | 2015-07-29 | 北京航空航天大学 | Heating method for ceramic-based composite material |
| CN105737691A (en) * | 2016-02-16 | 2016-07-06 | 兰州空间技术物理研究所 | External heat flux simulation device for high-speed missile |
| CN115791865A (en) * | 2022-12-25 | 2023-03-14 | 北京工业大学 | Ultra-high temperature loading device for fatigue test of weak-conductivity composite material heat engine |
-
1992
- 1992-09-21 JP JP27665392A patent/JPH06104076A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010075587A3 (en) * | 2008-12-26 | 2010-10-14 | Inductotherm Corp. | Heating and melting of materials by electric induction heating of susceptors |
| US8350198B2 (en) | 2008-12-26 | 2013-01-08 | Inductotherm Corp. | Heating and melting of materials by electric induction heating of susceptors |
| CN104807743A (en) * | 2015-04-21 | 2015-07-29 | 北京航空航天大学 | Heating method for ceramic-based composite material |
| CN105737691A (en) * | 2016-02-16 | 2016-07-06 | 兰州空间技术物理研究所 | External heat flux simulation device for high-speed missile |
| CN115791865A (en) * | 2022-12-25 | 2023-03-14 | 北京工业大学 | Ultra-high temperature loading device for fatigue test of weak-conductivity composite material heat engine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4914276A (en) | Efficient high temperature radiant furnace | |
| Reed | Induction‐coupled plasma torch | |
| Sanders et al. | Studies of the anode region of a high‐intensity argon arc | |
| US20080308551A1 (en) | Induction furnace susceptor for heating a workpiece in an inert atmosphere or in a vacuum | |
| GB590458A (en) | Improvements in or relating to the treatment of silicon | |
| US20230110818A1 (en) | Device for melting metals | |
| US2404060A (en) | High temperature furnace | |
| Hedger et al. | Preliminary observations on the use of the induction-coupled plasma torch for the preparation of spherical powder | |
| Moore et al. | An induction furnace for operations up to 3400 C using well oriented graphite | |
| US3343027A (en) | Arc plasma device having gas cooled electrodes containing low work function material | |
| JPH06104076A (en) | Ultra-high temperature heating device by high frequency induction | |
| US3891828A (en) | Graphite-lined inert gas arc heater | |
| US3180917A (en) | Low frequency induction furnace | |
| Heberlein | Generation of thermal and pseudo-thermal plasmas | |
| US3407281A (en) | Plasma producing apparatus | |
| US3860737A (en) | Furnace and method for induction heating moving quantities of material | |
| US3781152A (en) | Apparatus for precipitating a layer of semiconductor material from a gaseous compound of the semiconductor material | |
| Asif et al. | Plasma density behavior with new graphite limiters in the Hefei Tokamak-7 | |
| US5017751A (en) | Inductively-coupled RF plasma torch | |
| Auweter-Kurtz | Plasma source development for the qualification of thermal protection materials for atmospheric entry vehicles at IRS | |
| Davenport et al. | Design and performance of electric furnaces with oxide resistors | |
| US3549353A (en) | Method and apparatus for melting reactive materials | |
| US3575633A (en) | Arc heater having a spirally rotating arc | |
| Wilder | High Temperature Laboratory Furnaces | |
| US2164024A (en) | Electric arc furnace |