JPH06102279B2 - Laser processing equipment - Google Patents

Description

Detailed Description of the Invention [Industrial applications]

The present invention relates to a structure for observing a work piece in a laser processing apparatus that cuts, welds, and the like the work piece with a laser beam.

[Prior art]

Laser light has excellent coherency both in terms of time and space, and when it is focused using optical components such as lenses and metal mirrors, extremely high power density can be obtained and appropriate optical Since the molten metal density can be freely changed by using parts, it is used for various kinds of processing such as drilling, cutting, welding and heat treatment by utilizing its wide range of variability. FIG. 2 is a schematic configuration diagram of a low-power laser processing apparatus according to a conventional example. In FIG. 2, the laser processing apparatus reflects laser light 1 by a dichroic mirror 2 that reflects laser light but transmits other light, and further condenses it with a processing lens 3 to irradiate a workpiece 4. And the work piece 4
Is cut or welded. At this time, the television camera 5 is used to observe from above through the dichroic mirror 2 and the processing lens 3. However, it is usually observed from such a processing head part that a low power laser such as a laser output is used.
Limited to 50W or less. FIG. 3 is a schematic configuration diagram of a conventional high-power laser processing apparatus. A laser beam 1 of high output, for example 500 W, is reflected by the total reflection mirror 6, and further, the processing lens 3 and the gas nozzle 11
The workpiece 4 is irradiated with the laser beam through the substrate to be processed. At this time, oxygen gas is used to reduce the reflectance due to the oxidation reaction of the workpiece and the gas, utilize the reaction heat and remove the generated molten material, and protect the processing lens from fume and spatter generated from the workpiece during cutting. Assist gas 12 such as air and air is ejected from the tip of gas nozzle 11.

[Problems to be Solved by the Invention]

When laser processing is performed using the low-power laser beam 1 as shown in FIG. 2, the diameter of the gas nozzle hole at the tip of the gas nozzle (not shown) is small and the processing position becomes dark, so that almost no observation is possible. Even if the diameter of the lens is increased to allow bright observation, the image obtained by the television camera 5 has a problem that only the focal point of the processing lens 3 can be obtained and the field of view thereof is extremely narrow. Further, when laser processing is performed using the high-power laser beam 1 as shown in FIG. 3, even if the television camera 5 and the dichroic mirror 2 are used, the diameter of the gas nozzle hole 13 formed at the tip of the gas nozzle 11 is increased. However, because it is as small as 1.5 to 3 mm,
The workpiece 4 became dark and the processing position of the workpiece 4 could not be observed. Even if the diameter of the gas nozzle hole 13 is made large and bright, an image from a television camera (not shown) can obtain only the focal point proximity of the processing lens 3,
The field of view was also very narrow. It is an object of the present invention to provide a laser processing apparatus which brightens the processing position of an object to be laser processed and which does not affect the image of the television camera depending on the focus of the processing lens.

[Means for Solving the Problems]

The above-mentioned object is to provide a processing lens that collects laser light, a reflecting mirror that reflects the laser light collected by the processing lens, and between the reflecting mirror and a workpiece that is processed by the laser light. A slide type gas nozzle which is located and is capable of ejecting an assist gas onto the workpiece and slidable in a direction perpendicular to the optical axis of the laser beam, and an illumination optical system for illuminating the workpiece from above the reflecting mirror. And an observation optical system for observing the workpiece through the reflecting mirror.

[Work]

Since the work piece is illuminated from above the reflecting mirror by the illumination optical system, the working position of the work piece can be made brighter and the work piece can be observed, and the processing lens is placed on the light source side of the laser light with respect to the reflecting mirror. Since it is arranged, the processed lens does not interfere with the observation, and the image of the TV camera is not affected by the focus of the processed lens. Further, since the assist gas is located between the reflecting mirror and the work piece, the assist gas is ejected to the work piece, and the slide type gas nozzle that can slide in the direction perpendicular to the optical axis of the laser beam is provided, When observing the work piece, the field of view can be expanded by sliding the sliding gas nozzle in the direction perpendicular to the optical axis.

【Example】

FIG. 1 is a schematic configuration diagram of a laser processing apparatus according to an embodiment of the present invention. In FIG. 1, a high-power laser beam 1
Is reflected by the total reflection mirror 6, passes through the processing lens 3, the dichroic mirror 2, and the slide type gas nozzle 20, and irradiates the workpiece 4 for cutting or welding. At this time, the high output assist gas 12 is ejected from the gas nozzle hole 21 at the tip of the slide type gas nozzle 20. The illumination optical system for illuminating the workpiece 4 is a half mirror 15,
It is composed of an optical fiber 18 and an optical fiber emitting end 19. The illumination light 23 transmitted by the optical fiber 18 and emitted from the optical fiber emitting end 19 and made into parallel light by the lens 17 is reflected by the half mirror 15 and irradiates the workpiece 4. The illumination light 23 reflected by the half mirror 15 passes through the dichroic mirror 2 and the slide type gas nozzle 20 and illuminates the surface of the workpiece 4. The observing optical system for observing the workpiece 4 comprises a television camera 5 and a filter 16. The light emitted from the illumination optical system and reflected on the surface of the workpiece 4 is observed from the television camera 5 through the slide gas nozzle 20, the dichroic mirror 2, the half mirror 15, and the filter 16 that cuts the laser light 1. Here, in order to observe the surface of the workpiece 4 with a wide field of view, the slide gas nozzle 20 is located between the reflecting mirror 2 and the workpiece 4 processed by the laser beam 1, and While ejecting the assist gas, it is slidable in the direction perpendicular to the optical axis of the laser beam 1 which is condensed by the processing lens 3, reflected by the reflecting mirror 2 and irradiated on the workpiece 4, and is slidable during laser processing. The gas nozzle 20 is placed at the position indicated by the solid line, and when the workpiece 4 is observed, the slide type gas nozzle 20 is slid in the direction of arrow A and moved to the position indicated by the dotted line. It can be observed through the TV camera 5 through. At this time, the distance between the processing lens 3 and the workpiece 4 is configured to be substantially the focal length of the processing lens 3.
The processing lens 3 is not located between the dichroic mirror 2 and the workpiece 4 as shown in FIG. 1, but is located on the light source side with respect to the dichroic mirror 2. The observation can be made clear without being influenced by the focal length of the processed lens 3.

【The invention's effect】

As described above, the laser processing apparatus of the present invention includes the illumination optical system that illuminates the workpiece from above the reflecting mirror, and the optical system that observes the workpiece through the reflecting mirror. The workpiece can be observed by illuminating. Furthermore, since the processing lens is arranged on the light source side of the laser light with respect to the reflecting mirror, the image of the television camera can be clearly observed without being affected by the focus of the processing lens. In addition, it is located between the reflector and the work piece, and has a slide-type gas nozzle that ejects assist gas to the work piece and is slidable, so that the laser beam is passed from the slide-type gas nozzle during laser processing. When processing and observing the workpiece, the sliding gas nozzle can be slid in a direction perpendicular to the optical axis to expand the field of view and observe the workpiece.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of a laser processing apparatus according to an embodiment of the present invention, FIG. 2 is a schematic configuration diagram of a low output laser processing apparatus according to a conventional example, and FIG. 3 is a high output laser processing apparatus according to a conventional example. It is a schematic block diagram. 1: laser light, 2: dichroic mirror as a reflecting mirror,
3: Processing lens, 4: Work piece, 6: Total reflection mirror, 11: Gas nozzle, 12: Assist gas, 20: Slide type gas nozzle.

Claims (1)

[Claims] 1. A processing lens for condensing laser light, a reflecting mirror for reflecting the laser light condensed by the processing lens, and a reflecting mirror and a work piece processed by the laser light. And a sloping gas nozzle capable of ejecting an assist gas to the workpiece and slidable in a direction perpendicular to the optical axis of the laser beam, and an illumination optics for illuminating the workpiece from above the reflecting mirror. A laser processing apparatus comprising: a system; and an observation optical system for observing the workpiece through the reflecting mirror.