JPH06100928A - Vacuum heat treatment furnace - Google Patents

Abstract

PURPOSE:To provide a vacuum heat treatment furnace into which cooling gas can be fed to a space for laying a material to be treated in the surroundings with heat insulating wall while changing the feeding direction variously and whose outer shape can be compacted in spite of such a furnace constitution. CONSTITUTION:In this furnace, gas outlet for two gas flow passages 21, 22 arranged along the heat insulating wall 4 is communicated with an opening part C in the heat insulating wall 4 and cooling gases passed through these gas flow passages 21, 22 are mutually collided, and thereafter, passed through the opening part so as to flow into the space for laying a material to be treated. By changing the ratio among gas quantities passing through both gas flow passages, the direction of the cooling gas flowed into the space for the laying is changed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum heat treatment furnace, and more particularly to a structure for cooling an object to be processed after heating in the vacuum heat treatment furnace.

[0002]

2. Description of the Related Art In a vacuum container, a heat insulating wall surrounding a space for storing an object to be treated is provided, and a cooling gas feeding duct is vertically connected to an opening provided in the heat insulating wall. There is a vacuum heat treatment furnace in which a swingable damper is arranged at a position facing the opening so that the cooling gas can be sent toward each part of the existing space (for example, Japanese Patent Publication No. 62-
12288).

[0003]

In this conventional vacuum heat treatment furnace, the duct must be attached to the heat insulating wall almost vertically as described above in order to allow the deflection of the cooling gas flow by the damper. However, there is a problem in that it greatly protrudes to the outside of the vacuum container and the external form becomes large, occupying a large space for installation.

The present invention has been made in order to solve the above-mentioned problems (technical problems) of the prior art. When the cooling gas is sent to the existing space in the heat insulating wall, the direction of the cooling gas can be changed. It is possible to send it to each part of the above space, and even with such a thing, the arrangement of the gas flow path for passing the cooling gas may be sideways along the heat insulating wall, and the external form is It is an object of the present invention to provide a vacuum heat treatment furnace that can be made compact.

[0005]

In order to achieve the above object, the vacuum heat treatment furnace according to the present invention is provided with a heat insulating wall surrounding the above space in a vacuum container having a space for storing an object to be processed therein. In the vacuum heat treatment furnace in which an opening for feeding a cooling gas toward the space is formed in the heat insulating wall, in the inside of the vacuum container, between the inner surface of the container and the heat insulating wall. The two gas passages are arranged along the heat insulating wall, and the gas outlets of the gas passages and the openings are communicated with each other so that the cooling gases passing through the gas passages are mutually connected. And the collided gas is allowed to flow into the space through the opening, and both gas passages have changing means for changing the ratio of the amount of gas passing through each gas passage. It is attached.

[0006]

The cooling gases passing through the two gas passages collide with each other, and the colliding gases are sent into the space for storage through the opening of the heat insulating wall. In this case, by making the ratio of the amount of cooling gas passing through both gas flow paths the same or differently, the lateral motion components of both cooling gases are canceled or one or the other motion component remains relatively large. To do. As a result, the colliding cooling gas can be fed straight into the central portion of the space, or biased to one side or the other side of the space.

[0007]

Embodiments of the present invention will be described below with reference to the drawings. 1 and 2, reference numeral 1 denotes a vacuum container. Reference numeral 2 denotes its main body, and 3 denotes a door. Reference numeral 4 denotes a heat insulating wall provided in the container 1 so as to surround the space 5 for storing the object to be treated. A heater for heating the object to be processed is provided in the heat insulating wall 4 as is well known. Reference numeral 6 is an opening for entering and leaving the object to be treated, 7 is a door, 8 is an opening for cooling gas flow provided in the upper wall of the heat insulating wall 4, 9 is a door, and 10 is cooling gas flow provided in the lower wall. The openings 11 and 11 indicate doors, respectively. Reference numeral 12 is a mounting table, and 13 is an object to be processed, which is, for example, a large number of metallic articles placed in a basket.

Next, 15 is a partition plate provided on the upper side of the heat insulating wall 4 so as to vertically partition the space between the vacuum container 1 and 16, and 17 and 17 are spaces on the other side of the space above the heat insulating wall 4. The partition walls provided to separate the space are shown. Partition wall 16
As shown in FIG. 1, the cross section is formed in an arc shape so that the gas flow is diverted as indicated by the broken line arrow. Reference numeral 21 is a first gas flow path provided along the heat insulating wall 4, and the upper and lower sides are surrounded by the partition plate 15 and the upper wall of the heat insulating wall 4, and the left and right sides are surrounded by the partition walls 17 and 17 in FIG. As shown in FIG. 1, the gas flow passage 21 is laterally oriented (in the present specification, the direction along the wall surface of the heat insulating wall 4 is laterally oriented), 21a indicates the gas inlet, and 21b indicates the gas outlet. . Reference numeral 22 denotes a second gas flow path provided along the heat insulating wall 4, and as shown in FIG. 1, a partition wall.
It is folded back at 16 and formed so as to be continuous with the lower side and the upper side of the partition plate 15. 22a shows the gas inlet, and 22b shows the gas outlet. Reference numeral 23 denotes a communication portion between the gas outlets 21b and 22b and the opening portion 8, and both gas outlets 21b and 22b are configured to face each other with a space directly above the opening portion 8 as shown in the drawing. Reference numeral 24 is a changing means for changing the ratio of the gas amounts passing through both the gas flow paths 21 and 22. As an example, as shown in the figure, the gas flow paths 21 and 22 are provided between the gas inlets 21a and 22a. It is configured with a damper that can freely swing. The changing means may be a damper provided separately in the middle of the gas flow paths 21 and 22, or any other flow rate control device.

Next, 26 is a cooler, 27 is a circulation fan, 28 is a gas passage connecting the gas outlet of the circulation fan 27 and the space above the heat insulating wall 4, 29 is a gas inlet of the cooler 26 and the heat insulating wall. Four
The gas flow paths that connect to the lower space are shown respectively. Reference numeral 31 is a well-known cooling gas supply source, and 32 is a vacuum pump.

In the above-mentioned structure, the storage space 5
In heating the object to be processed 13 and then cooling it, the openings 8 and 10 are opened as shown in the figure, and the cooling gas is sent from the supply source 31 into the vacuum container 1, and the cooler 26 and the circulation fan 27 are used.
To drive. Then, the cooling gas is circulated fan 27 → gas flow path
21 and gas flow path 22-> opening 8-> space 5 for storage-> opening 10
→ The space below the heat insulating wall 4 → the gas flow path 29 → the cooler 26 → the circulation fan 27 circulates through the path to cool the workpiece 13.

In the above case, the cooling gas passing through the gas flow passage 21 and the cooling gas passing through the gas flow passage 22 collide at the communicating portion 23 (frontal collision in this example), and the colliding cooling gas becomes the opening portion. It flows from 8 toward the space 5. Therefore damper 24
If the amount of gas passing through the gas flow passage 21 and the amount of gas passing through the gas flow passage 22 are made equal by adjusting the above, the lateral motion component of the cooling gas that exits the gas outlet 21b and the lateral movement of the cooling gas that exits the gas outlet 22b (the former gas). (In the opposite direction) to cancel each other, and as a result, the cooling gas flows straight downward from the opening 8 toward the space 5 as indicated by arrow A. Meanwhile, the damper
When the amount of the former gas is made larger than the amount of the latter gas by adjusting 24, since the leftward motion component in FIG. 1 remains after the collision, the cooling gas is directed from the opening 8 in the direction of the arrow B. Inflow. If the amount of the latter gas is made larger than the amount of the former gas, the rightward motion component remains after the collision, so that the cooling gas flows rightward from the opening 8 as shown by an arrow C. Therefore, by continuously swinging the damper 24, it is possible to uniformly send the cooling gas toward each part of the storage space 5 to uniformly cool the entire object 13 to be processed. Alternatively, the damper 24 is oscillated while being held at each position for a specific period of time, thereby increasing the amount of cooling gas blown to a portion of the object to be processed 13, which is particularly desired to be cooled, and promoting cooling there. You can also

Next, the gas passages 21 and 22 are provided in the space below the heat insulating wall 4, and the gas passages 28 and 29 are provided upside down with respect to FIG. The opening of
You may make it inflow from 10 toward the space 5 for retention.

Next, FIGS. 3 and 4 show a different embodiment of the present invention, in which the gas flow passages 21e and 22e are divided by a partition wall 35 into a plurality of (three in this example) flow passage elements 41 and 42 in the width direction. In addition, a changing element for individually changing the gas amount ratio is provided in each of the flow path elements, for example, in this example, a plurality of small dampers 36 are provided at the same position as in the previous embodiment at the inlet of each flow path element. The following shows an example. With this configuration, when the object to be processed 13e is cooled, the small dampers 36 are individually controlled, so that the symbols a, b, and
The direction of the gas flowing into the storage space 5e can be controlled in each of the portions indicated by C as described above. That is, two-dimensional control can be performed when viewed in a plane. As a result, the cooling of the object to be processed 13e can be controlled more finely for each part. In addition, parts that are considered to be the same or equivalent in configuration to those in the previous figure in terms of function are denoted by the same reference numerals as those in the previous figure with the letter e added to omit redundant description.

[0014]

As described above, according to the present invention, when the object 13 to be processed which is surrounded by the heat insulating wall 4 is cooled, the cooling gas can be sent through the opening 8. In addition to being able to cool rapidly, when feeding the cooling gas, two flows of the cooling gas, each having a lateral motion component along the heat insulating wall 4, are caused to collide with each other, and the collided gas is treated as described above. Since it is sent through the opening 8, the ratio of the amounts of both cooling gases is changed to cancel the lateral motion components of the two gases, or one or the other motion component is left relatively large, so that the heat insulating wall There is a feature that the gas can be sent toward the central portion in the inner space 5, or can be sent toward the side close to one wall or the other wall, respectively. This has a practical effect of being able to perform cooling in accordance with the actual condition of the object to be processed, such as uniformly cooling the object in the space as a whole, or cooling a part of the object in a concentrated manner.

Moreover, even if the direction of the cooling gas can be changed, the cooling gas has a lateral motion component, so that the gas flow paths 21 and 22 through which the cooling gas flows are along the heat insulating wall 4. It has a good feature of being sideways. This means that those gas flow paths can be easily accommodated in the narrow space between the vacuum container 1 and the heat insulating wall 4 therein, and as a result, the form of the vacuum heat treatment furnace becomes compact and occupied. The space is relatively small, which is sufficient.

[Brief description of drawings]

FIG. 1 is a vertical sectional view.

FIG. 2 is a sectional view taken along line II-II.

FIG. 3 is a horizontal sectional view showing another embodiment of the present invention.
Sectional drawing in the III line position.

FIG. 4 is a sectional view taken along line IV-IV.

[Explanation of symbols] 1 vacuum container 4 heat insulating wall 5 space for storage 8 opening 21, 22 gas flow path 23 communication section 24 damper

Claims (3)

[Claims] 1. A vacuum container having a space for storing an object to be processed therein is provided with a heat insulating wall surrounding the space, and the heat insulating wall is provided for feeding a cooling gas toward the space. In a vacuum heat treatment furnace in which an opening is formed, two gas passages are arranged along the heat insulating wall between the inner surface of the container and the heat insulating wall inside the vacuum container, and The gas outlets of both gas channels and the opening are communicated with each other so that the cooling gases passing through both gas channels collide with each other and the collided gas flows into the space through the opening. A vacuum heat treatment furnace characterized in that each of the gas flow passages is provided with a changing means for changing a ratio of a gas amount passing through each gas flow passage. 2. The gas inlets of the two gas passages are juxtaposed adjacent to each other, and the changing means is provided between the two gas inlets so as to exchange the gas inlets with each other. 2. The vacuum heat treatment furnace according to claim 1, wherein the damper is a damper that is provided so as to freely swing so as to exchangeably limit the inflow amount of the cooling gas into each gas inlet. 3. The two gas flow passages are each divided into a plurality of flow passage elements in the width direction, and the changing means is composed of a change element individually provided in each flow passage element. The vacuum heat treatment furnace according to claim 1.