JPH0599628A - Thickness measuring apparatus - Google Patents

Abstract

PURPOSE:To make it unnecessary to perform arithmetic each time thickness is detected so as to increase the speed of measuring action by storing data indicating calculated values of thicknesses as size data, and outputting a measurement raw signal corresponding to an input detection signal. CONSTITUTION:Plurality of unit storage areas 13a of a data storage portion 13 each have an address number A corresponding to each of digital values aligned in a predetermined B-way selected from 2<n> ways of sequences of (n)-bit detection signals 7a, and store one size data D each. When a signal 7a is input the storage portion 13 uses as a measurement raw signal 13b data D stored in an area 13. having a number A corresponding to the value S of the signal, and outputs the signal as a digital signal. Then the data D use the value S of the signal 7a corresponding to the value A to indicate the deviation g from predetermined thickness TS of the precalculated correct thickness T of a subject 5 to be measured. The deviation epsilon is input 13 from a personal computer 16. Therefore the signal 13b indicates the deviation epsilon corresponding to the value S of the signal 7a and is 14 converted into an analog measurement signal 14a so as to measure thickness.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transmission type thickness measuring device using detection radiation as infrared rays or ionizing radiation, and more particularly, to speeding up the thickness measuring operation, downsizing of the device and frequency of failure occurrence. The present invention relates to a measuring device capable of reducing

[0002]

2. Description of the Related Art FIG. 3 is a block diagram of a conventional transmission type thickness measuring device 1 which uses radiation. In FIG. 3, 2 is a beam-like radiation emitted from the radiation source 3, and 4 is a radiation as an analog signal representing the intensity I of the radiation 2 which has been incident upon the radiation 2 transmitted through the DUT 5. The radiation detector 6 which outputs the detection signal 6a, and the detection signal 7a which is the input signal 6a as an n-bit digital signal
A radiation detecting section including an AD converter 7 for converting into
Is the apparent thickness along the transmission path of the radiation 2 in the DUT 5 when the detection signal 7a is input and the signal 7a is used to perform the thickness calculation operation C1 as the operation of the right side of the equation (1) described later. A thickness calculator 9 that outputs a digital signal 9a that represents the thickness t, and a correction calculation C2 that receives the signal 9a and adds a previously calculated correction value to the apparent thickness t represented by the signal 9a are performed. The correction calculator 10 outputs a digital signal 10a representing the correct thickness T of the DUT 5 corresponding to the thickness t, and the signal 10a is inputted and the variable thickness reference value Ts is incorporated and A subtractor 11 for outputting a first original measurement signal 11a as a digital signal representing a deviation ε of the thickness T represented by 10a from a thickness reference value Ts.
And a DA converter 12 for converting the signal 11a into a measurement signal 12a as an analog signal. Then, the thickness measuring device 1 described above is a device including the respective parts shown in the figure except the measured object 5. In the measuring device 1, the intensity I of the radiation 2 represented by the radiation detection signal 6a, and thus the signal 7a, is Io when the DUT 5 is removed from between the radiation source 3 and the detector 6, Io, The absorption coefficient of the DUT 5 for the radiation 2 is represented by μ, and the thickness of the DUT 5 along the transmission path of the radiation 2 is represented by the equation (1). As a result, from the equation (1), Since the formula is obtained, the thickness calculator 9 is configured to perform the above-described operation. Then, again, in the measuring device 1, the DUT 5 is
Since the thickness t represented by the calculator output signal 9a becomes a value different from the correct thickness T due to the scattering phenomenon of the radiation 2 which occurs in the above, the above-mentioned correction calculator 10 is provided, and further, this device is provided. Since 1 is configured as an apparatus for continuously monitoring the thickness T after rolling in a facility for rolling an iron plate as the object to be measured 5 to the above-described thickness reference value Ts, The subtractor 11 described above is provided. Since the measuring device 1 is configured as described above,
It is clear that the deviation ε can be measured by the signal 12a, and that the thickness T can be measured by the calculator output signal 10a. I = Io · exp (-μt) …………………………………… (1) t = (1 / μ) ・ ln (Io / I) ………………………… ……………… (2)

[0003]

Since the measuring apparatus 1 has the above-mentioned configuration, in this case, the first measurement original signal 11a is obtained.
Is delayed with respect to the change of the detection signal 7a by the total time of the calculation time in each of the calculators 9 and 10 and the subtractor 11, and therefore, the device 1 has the operation of measuring the deviation ε or the thickness T. There is a problem that the speed is slow.
In addition, in the measuring apparatus 1, the arithmetic processing unit 8 is composed of the arithmetic units 9 and 10 and the subtractor 11, and the configuration is complicated, and is usually about 5 cm × 5 cm × 2 cm. Therefore, there is a problem in that it is difficult to reduce the size of the device 1 and reduce the frequency of failure occurrence. An object of the present invention is to provide an arithmetic processing unit 8 each time the transmitted radiation 2 is detected.
By eliminating the calculations C1 to C3 in step 1, the calculators 9 and 10 and the subtractor 11 are not required, thereby increasing the speed of the measurement operation, downsizing the thickness measuring device, and the thickness measuring device. It is intended to reduce the frequency of failure occurrence in.

[0004]

In order to achieve the above object, in the present invention, 1) detection radiation as infrared rays or ionizing radiation that has passed through an object to be measured is incident, and the intensity of the detection radiation is adjusted. A detection radiation detecting section for outputting a detection signal as an n-bit digital signal, and a plurality of unit storage areas each having an address number are provided, and of the 2 ⁿ digital values of the detection signal, One piece of dimension data is stored in each of the unit storage areas having the address number corresponding to each predetermined digital value, and when the detection signal is input, it corresponds to the digital value of the detection signal. A data storage unit that outputs a measurement original signal representing the dimension data stored in the unit storage area having the address number, A thickness measuring device for measuring the thickness along the transmission path of the detected radiation in the object to be measured based on a measurement original signal or a deviation from a predetermined thickness reference value of the thickness, wherein the dimensional data is It may be data representing the thickness of the object to be measured or the deviation of the thickness calculated in advance using the digital value of the detection signal corresponding to the address number of the unit storage area in which the dimension data is stored. And 2) a detection signal as an n-bit digital signal representing the intensity of the detected radiation upon which the detection radiation as infrared rays or ionizing radiation transmitted through the object to be measured is incident. And a detection radiation detection unit for outputting the detection signal,
Further, a thickness calculation operation is performed using the digital value of the detection signal, and then a correction operation for correcting the result of the thickness calculation operation is performed to determine the thickness along the transmission path of the detected radiation in the measured object or An arithmetic processing unit that outputs a first measurement original signal that represents one of the deviations of the thickness from a predetermined thickness reference value, and a plurality of units to which the detection signal is input and to which address numbers are attached respectively A storage area is provided, and one size data is stored in each of the unit storage areas having the address number corresponding to each predetermined digital value of the 2 ⁿ digital values of the detection signal. When the detection signal is input, the dimensional data stored in the unit storage area having the address number corresponding to the digital value of the detection signal is displayed. A data storage unit that outputs a measurement original signal, and a signal switching unit that switches and outputs the first measurement original signal and the measurement original signal, and the above-mentioned object to be measured based on the output signal of the signal switching unit. A thickness measuring device for measuring a thickness or the deviation of the thickness, wherein the dimension data uses a digital value of the detection signal corresponding to the address number of the unit storage area in which the dimension data is stored. The thickness measuring device is configured to be data representing the thickness of the object to be measured or the deviation of the thickness calculated in advance.

[0005]

With the above arrangement, in the case of the thickness measuring device having no arithmetic processing unit, each value of the digital signal 10a or 11a obtained by inputting the detection signal to the arithmetic processing unit 8 is calculated. By storing the represented data as dimension data in the data storage unit, as soon as the detection signal is input to the data storage unit, the thickness of the measured object or the thickness of the measured object corresponding to the digital value of the detection signal is immediately input. Since the measurement original signal indicating the deviation from the predetermined thickness reference value is output from the data storage unit, a thickness measuring device having a fast measuring operation can be obtained. In this case, the arithmetic units 9 and 10 described above can be obtained. And processing unit 8 including subtractor 11
Is a single data storage unit, and it is clear that this storage unit has a simpler configuration than the processing unit 8, and this data storage unit is considerably smaller than the arithmetic processing unit 8 having the aforementioned size. Therefore, it is possible to obtain a small-sized thickness measuring device with a low failure frequency. Then, further, in the case of the thickness measuring device including the arithmetic processing unit, the data storage unit, as in the data storage unit of the above-described thickness measuring device not including the arithmetic processing unit,
When the detection signal is input, the measurement raw signal is immediately output without performing the above-described calculation operations C1 to C3 such as the thickness calculation calculation. Therefore, the measurement raw signal is used as the output signal of the switching unit by the signal switching unit. Therefore, it is obvious that this thickness measuring device becomes a device having a fast measuring operation.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an explanatory view of the configuration of an embodiment of the present invention. The difference from FIG. 3 of this drawing is that a data storage unit 13 is provided instead of the arithmetic processing unit 8 of FIG. Storage unit 13
, The radiation source 3, the radiation detector 4, and the DA converter 12 described above.
That the thickness measuring device 15 is configured with the DA converter 14 corresponding to the above, and the dimension data D described later in the storage unit 13.
Since the personal computer 16 for storing the data is illustrated, the storage unit 13 is provided with a plurality of unit storage areas 13a to which the address numbers A are attached, and the data representing the dimension data D. When the signal 13C is input, the storage area 13a having the address number A corresponding to each of the predetermined B digital values S of the 2 ⁿ digital values S of the n-bit detection signal 7a.
One of the dimension data D is stored in each of
When the detection signal 7a is input, the storage area 1 having the address number A corresponding to the digital value S of the signal 7a is input.
An original measurement signal 13b as a digital signal representing the data D stored in 3a is output.
Further, the dimension data D is the area 13 in which this D is stored.
The DUT 5 calculated in advance by a calculation method described later using the digital value S of the signal 7a corresponding to the address number A of a.
Is data representing a deviation ε of the correct thickness T from a predetermined thickness reference value Ts. Then, the calculation for calculating the deviation ε of T using the digital value S is performed by the thickness calculation calculation C1 and the correction calculation C2 performed in each of the calculators 9 and 10 in the measuring apparatus 1. In the personal computer 16 shown in FIG. 1, the input unit 16
Using the digital input signal 17 to be described later input to 1 and the variable thickness reference value Ts input to the input section 162, the above operations C1, C2 and C3 are performed to obtain the deviation ε, which represents ε. The data D is stored in the storage unit 13 by inputting the output signal 16a representing the above-described dimension data D as data from the output unit 163 to the data storage unit 13 as the above-mentioned data signal 13C.
Then, the above-mentioned digital input signal 17 is either the detection signal 7a or the simulated detection signal E as a substitute signal of this signal 7a. The DA converter 14 in FIG. 1 is a converter that performs DA conversion on the input measurement original signal 13b and outputs an analog measurement signal 14a. Further, B of the B different digital values S of the detection signal 7a is the number of S within a predetermined range of S including the value Ss of the digital value S corresponding to the thickness reference value Ts, and B is A value equal to 2 ⁿ can be used. Since the thickness measuring device 15 is configured as described above, it is clear that the deviation ε can be measured by the measurement signal 14a, and in this case, when the detection signal 7a is input to the storage unit 13, the measurement is performed. Since the signal 13b representing the deviation ε corresponding to the value S of the signal 7a is immediately output from the storage unit 13 without performing the calculations C1, C2 and C3 performed in the device 1, according to the measuring device 15, This will allow measurements to be made at extremely high speeds. Then, it is clear that in this device 15, the configuration of the storage unit 13 is simpler than the configuration of the arithmetic processing unit 8 in FIG. 3 including the arithmetic units 9 and 10 and the subtractor 11, and For the processing unit 8 having a size of about 5 cm × 5 cm × 2 cm, the storage unit 13 is 2 cm × 3 cm using a random access memory (RAM).
Since the size can be about 0.5 cm, the measuring device 15 can be miniaturized and is a thickness measuring device with a low frequency of failure occurrence.

FIG. 2 is an explanatory view of the structure of an embodiment of the present invention different from the embodiment shown in FIG. 1. The difference from FIGS. 1 and 3 in this drawing is that the detection signal 7a is processed. Input to both the unit 8 and the data storage unit 13, and the first measurement original signal 11a output from the processing unit 8 can be input to the storage unit 13 as a data signal 13c; A signal switching unit 1 for switching and outputting the signals 11a and 13b
8 is provided so that the output signal of the switching unit 18 is converted by the DA converter 14 into the analog measurement signal 14a. Reference numeral 19 denotes a thickness measuring device including the respective parts shown in the figure except the object to be measured 5. Since the measurement device 19 is configured as described above, the measurement signal 1 when the signal 11a is input to the converter 14 by the signal switching unit 18
It is clear that the deviation ε can be measured by means of 4a, but in this case, the detection signal 7a
Signal 1 representing the deviation ε corresponding to the value of the signal E obtained by inputting the above-mentioned simulated detection signal E instead of
By inputting 1a as the data signal 13c into the storage unit 13, the dimension data D representing this ε is stored in the unit storage area 13a of the address number A in the storage unit 13 corresponding to the digital value of the signal E. In FIG. 2, even when the original measurement signal 13b output from the storage unit 13 is input to the converter 14 by the switching unit 18, the measurement signal 14
Obviously, the deviation ε can be measured by a, and in this latter case, ε can be measured at a high speed as in the measuring device 15. Then, in the measuring device 19, the same detection signal 7a is input to the processing unit 8 and the storage unit 13, and both of them output the signals 11a and 13b representing the deviation ε, so that this device 19 It can be said that the device is convenient for performing mutual monitoring of the signal output functions of the processing unit 8 and the storage unit 13.

In each of the above-described embodiments, the arithmetic processing unit 8 and the storage unit 13 both output the signal representing the deviation ε, but in the present invention, the subtracter 1 in the processing unit 8 is used.
By omitting 1 and allowing the dimension data D stored in the storage unit 13 to represent the thickness T of the DUT 5, the measuring devices 15 and 19 can be implemented by the measurement signal 14a representing the thickness T. The thickness measuring device may be used as an example.
Further, in the above-mentioned respective embodiments, the thickness measurement is performed by using the radiation 2, but the present invention can be applied to the transmission type thickness measurement performed by using the infrared ray.

[0009]

As described above, according to the present invention, 1) an n-bit digital signal representing the intensity of the detected radiation as infrared rays or ionizing radiation transmitted through the object to be measured is incident. A detection radiation detecting section for outputting a detection signal and a plurality of unit storage areas each having an address number, and a predetermined digital value of 2 ⁿ digital values of the detection signal is provided. One piece of dimension data is stored in each unit storage area having an address number corresponding to each, and when a detection signal is input, it is stored in the unit storage area having an address number corresponding to the digital value of this detection signal. And a data storage unit that outputs a measurement original signal representing the dimension data, and detects the radiation detected in the DUT based on the measurement original signal. A thickness measuring device for measuring a thickness along an overpath or a deviation of the thickness from a predetermined thickness reference value, wherein the dimension data corresponds to an address number of a unit storage area in which the dimension data is stored. The thickness measuring device is configured to be data representing the thickness of the measured object or the deviation of the thickness calculated in advance using the digital value of the detected signal, and 2) the measured object is transmitted. A detection radiation detecting unit that receives detection radiation as infrared rays or ionizing radiation and outputs a detection signal as an n-bit digital signal representing the intensity of the detection radiation; and the detection signal is input,
In addition, a thickness calculation operation is performed using the digital value of this detection signal, and then a correction operation for correcting the result of this thickness calculation operation is performed to determine the thickness along the transmission path of the detected radiation in the DUT or this thickness. Processing unit that outputs a first measurement original signal that represents one of the deviations from the predetermined thickness reference value, and a plurality of unit storage areas to which the detection signal is input and to which address numbers are assigned respectively Is provided, and one size data is stored in each unit storage area having an address number corresponding to each predetermined digital value of the 2 ⁿ digital values of the detection signal, and the detection signal is A data storage section for outputting a measurement original signal representing the dimension data stored in the unit storage area having an address number corresponding to the digital value of the detection signal when input; A thickness measuring device having a measurement original signal and a signal switching unit for switching and outputting the measurement original signal, and measuring the thickness of the object to be measured or the deviation of the thickness based on the output signal of the signal switching unit. The dimension data is the thickness of the object to be measured or the deviation of the thickness calculated in advance using the digital value of the detection signal corresponding to the address number of the unit storage area in which the dimension data is stored. The thickness measuring device was configured to be the data presented.

Therefore, with the above configuration, in the case of the thickness measuring device having no arithmetic processing section, the digital signal 10a or 11a obtained by inputting the detection signal to the above arithmetic processing section 8 is used. By storing the data representing each value in the data storage unit as dimension data, as soon as the detection signal is input to the data storage unit, the thickness of the object to be measured or the thickness corresponding to the digital value of the detection signal Since the measurement original signal representing the deviation of the thickness from the predetermined thickness reference value is output from the data storage unit, a thickness measuring device with a quick measurement operation can be obtained, and
In this case, it is clear that the arithmetic processing unit 8 including the arithmetic units 9 and 10 and the subtractor 11 described above becomes one data storage unit, and this storage unit has a simpler configuration than the processing unit 8. Since this data storage unit can be formed in a considerably small size as compared with the arithmetic processing unit 8 having the above-mentioned size, it is possible to obtain a small-sized thickness measuring device with a low frequency of failure occurrence. Then, in the case of the thickness measuring device further including the arithmetic processing unit, the data storage unit inputs the detection signal in the same manner as in the data storing unit of the thickness measuring device described above which does not include the arithmetic processing unit. In this case, since the measurement original signal is immediately output without performing the above-described calculation operations C1 to C3 such as the thickness calculation calculation, the measurement original signal is set as the output signal of the switching unit by the signal switching unit. It is obvious that the height measuring device is a device having a fast measuring operation. Therefore, the present invention can measure the thickness of a moving object such as a rolled iron plate with high accuracy because the measuring operation is fast. This is effective, and since the thickness measuring device is miniaturized and the frequency of failure of the device is reduced, it is possible to obtain the thickness measuring device which is easy to handle and has high reliability.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of the configuration of an embodiment of the present invention.

FIG. 2 is a structural explanatory view of another embodiment of the present invention.

FIG. 3 is a structural explanatory view of a conventional thickness measuring device.

[Explanation of symbols]

 2 radiation (detection radiation) 4 radiation detection unit (detection radiation detection unit) 5 object to be measured 7a detection signal 8 arithmetic processing unit 11a first measurement original signal 13 data storage unit 13a unit storage area 13b measurement original signal 15 thickness measuring device 18 Signal switching unit 19 Thickness measuring device A Address number D Dimension data

Claims (2)

[Claims] 1. A detection radiation detection unit which receives detection radiation as infrared rays or ionizing radiation that has passed through an object to be measured and which outputs a detection signal as an n-bit digital signal indicating the intensity of the detection radiation. A plurality of unit storage areas each provided with an address number, and the unit storage having the address number corresponding to each predetermined digital value of 2 ⁿ digital values of the detection signal One piece of dimension data is stored in each area, and when the detection signal is input, it represents the dimension data stored in the unit storage area having the address number corresponding to the digital value of the detection signal. And a data storage unit that outputs a measurement original signal, and transmits the detected radiation in the DUT based on the measurement original signal. A thickness measuring device for measuring a thickness along a path or a deviation of the thickness from a predetermined thickness reference value, wherein the dimension data is the address number of the unit storage area in which the dimension data is stored. A thickness measuring device, which is data representing the thickness of the object to be measured or the deviation of the thickness calculated in advance using the corresponding digital value of the detection signal. 2. A detection radiation detection unit which receives detection radiation as infrared rays or ionizing radiation which has passed through an object to be measured and which outputs a detection signal as an n-bit digital signal representing the intensity of the detection radiation. , The detection signal is input, and a thickness calculation calculation is performed using the digital value of the detection signal, and then a correction calculation for correcting the result of the thickness calculation calculation is performed to detect the detected radiation in the measured object. An arithmetic processing unit that outputs a first measurement original signal that indicates either the thickness along the transmission path or the deviation of this thickness from a predetermined thickness reference value, and the detection signal is input and each has an address number. A plurality of unit storage areas marked with are provided, and the address number corresponding to each predetermined digital value of the 2 ⁿ digital values of the detection signal. One piece of dimension data is stored in each of the unit storage areas having, and when the detection signal is input, it is stored in the unit storage area having the address number corresponding to the digital value of the detection signal. A data storage unit that outputs a measurement original signal representing the dimension data, and a signal switching unit that switches and outputs the first measurement signal and the measurement original signal are provided, and the target signal is output based on the output signal of the signal switching unit. A thickness measuring device for measuring the thickness of the measurement object or the deviation of the thickness, wherein the dimension data is the detection signal corresponding to the address number of the unit storage area in which the dimension data is stored. A thickness measuring device, which is data representing the thickness of the object to be measured or the deviation of the thickness calculated in advance using a digital value.