JPH0590156A - P-type semiconductor thin film - Google Patents

Abstract

PURPOSE:To obtain a p-type semiconductor thin film having crystallinity in an extremely thin film state and a high carrier density so as to enhance the performance of an amorphous solar cell. CONSTITUTION:A step of forming a thin film while irradiating a grown surface with ions generated by discharging including gas of group III element compound and a step of irradiating only with ions are repeated to obtain a p-type crystalline semiconductor thin film in which the thickness of the film formed by the one repetition of the respective steps is a range of 1 to 100Angstrom and the entire thickness is 300Angstrom or less. Thus, a crystalline semiconductor thin film having a high carrier density and a thickness of 300Angstrom or less and which was impossible according to conventional technique can be formed. The thin film is applied to the p-type layer of an amorphous solar cell thereby to improve a photoelectric conversion efficiency.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for forming a p-type crystalline semiconductor thin film having a low resistance and a high carrier density in an extremely thin film state in a high performance amorphous solar cell.

[0002]

2. Description of the Related Art Amorphous solar cells have already been put to practical use as a low-output energy supply source for driving calculators and watches. However, it cannot be said that the performance and stability are sufficient as an energy supply source with a large output of 0.1 W or more, such as solar power generation applications, and various studies have been carried out with the aim of improving performance. There is. Then, the photoelectric conversion efficiency of the solar cell is the open circuit voltage,
It is represented by the product of short circuit photocurrent and fill factor. As a result of various studies, regarding the short-circuit photocurrent and the fill factor, the currently achieved values have come close to the theoretically expected values,
That is, the open-circuit voltage has not been sufficiently improved.

In order to improve the reliability of the solar cell, a pin type amorphous solar cell having a p-layer on the light incident side has been studied in recent years. In order to improve the open-circuit voltage in this amorphous solar cell, the photoelectric characteristics of the p-type semiconductor thin film must be improved, and in particular, the optical bandgap and the electrical conductivity must be increased at the same time. Where it didn't happen, there was technical difficulty.

A microcrystalline thin film has been proposed as a material satisfying these requirements. However, a thin film of a thin film is formed under the film forming conditions in which a p-type microcrystalline thin film should be formed on a transparent electrode by using a conventional technique such as plasma CVD. Even if the formation is attempted, the open circuit voltage of the amorphous solar cell is not improved as a result. The reason for this is
50 to 30 which is necessary and sufficient as the p layer of the pin type amorphous solar cell
It has been reported that it is difficult to form a p-type microcrystalline thin film on a transparent electrode at a film thickness of 0 Å (for example, "B. Goldstein et al." Formed by ordinary RF glow discharge. Characteristics of p-type SiC: H microcrystalline thin film ", Applied Physics Letter, 53, 2672-
2674, 1988 (B. Goldstein et al., "Properties
of p + microcrystalline films of SiC: H deposited by
conventional rf glow discharge ", Applied Physics
letters, 53, p2672-2674 (1988)). That is, 50 to 300
At the film thickness of Å, it does not crystallize and has high resistance, the fill factor is low, and the improvement of open-circuit voltage cannot be obtained. on the other hand,
ECR (Electron Cyclotron Resonane) Plasma CVD
It has been reported that when the p-layer is formed by using the method, the open-end voltage is improved and the photoelectric conversion efficiency is improved. It is the current situation that the characteristics of p-type microcrystalline thin films have not been fully extracted (for example, "High-efficiency amorphous heterojunction solar cell using p-type microcrystalline SiC film formed by ECR-CVD" by Yutaka Hattori et al.
Digest of International PVSEC-3,
171-174, published in 1987 (Y. Hattori et al., "High E
fficiency Amorphous HeterojunctionSolar cell Emplo
ying ECR-CVD Produced p-Type Microcrystalline SiC
Film ", Technical Digest of the International PVSEC
-3, p. 171-174 (1987)).

In recent years, it has been reported that a microcrystalline thin film can be obtained by repeatedly treating the film with atomic hydrogen generated by microwave plasma or high frequency plasma after the film formation. For these, the total film thickness is 3
It is not mentioned whether microcrystallization is possible even below 00Å (for example, A. Asano, "Effect of hydrogen atoms on the network structure of hydrogenated amorphous silicon and microcrystalline silicon thin films", Applied Physics Letter, 56).
Volume, pp. 533-535, published in 1990 (A. Asano, "Effects of
hydrogen atoms on the network structure of hydro
genated amorphous and microcrystalline silicon thi
n films ", Applied Physics letters, 56, p.533-535
(1990)), Isamu. Shimizu et al., "Chemical reaction control for growth of crystalline silicon at low substrate temperature", Material Research Society Symposium Proceedings, 164, 195-204, published in 1990 (I. Shimizu et al.
al., "Control of Chemical Reactions for Growth of C
rystalline Si at Low Substrate Temperature, Matir
ials Research Society Symposium Proceeding Vol.16
4, p.195-204 (1990))).

It has also been reported that a microcrystalline thin film can be obtained by treating with an ion beam after forming a 900-1000Å silicon thin film. In these cases, keV
It is necessary to irradiate high-energy ions in the order of ~ MeV (for example, JS Im et al., "Crystal Nucleation by Ion Irradiation in Amorphous Silicon Thin Films", Applied Physics Letters, 57, 1766-1768).
Page, published in 1990 (JSImet al., "Ion irradiation enh
anced crystal nucleation in amorphous Si thin film
s ", Applied Physics letters, 57, p.1766 ~ 1768 (19
90)), Sea. Spinella et al. "Grain Growth Mechanism of Ion Beam Irradiation on Amorphous Silicon by Chemical Vapor Deposition" Applied Physics Letters, 57, 554-
556, published in 1990 (C. Spinella et al., "Grain growt
h kinetics during ion beam irradiation of chemical
vapor deposited amorphous silicon ", Applied Physi
cs letters, 57, p. 554-556 (1990))), damage to the base material, and the device being extremely large and expensive, which is not practical.

[0007]

DISCLOSURE OF THE INVENTION The present invention is a p-type semiconductor thin film which has crystallinity in an extremely thin film state (300 Å or less), which has been impossible in the past, and which has low resistance and high carrier density. Aim to get.

[0008]

Means for Solving the Problems The inventors of the present invention have conducted extensive studies to solve the above problems, and as a result, introduced a gas containing a gas of a group III element compound into an ion generator, and preferably introduced the gas onto the growth surface. After forming an ultra-thin film of 100 Å or less while irradiating low-energy ions of 1 keV or less, crystallization of the film is promoted by continuing ion irradiation, and by repeating the process, crystallization of even a film thickness of 300 Å or less It has been found that it is possible to form a p-type semiconductor thin film having high properties, low resistance, and high carrier density, and completed the present invention.

According to the present invention, a step of supplying a silicon-based thin film forming material to form a silicon-based thin film in an atmosphere containing charged particles obtained by discharging a mixed gas of a group III element compound and a non-depositing gas (Hereinafter, abbreviated as a film forming step),
The step of exposing the thin film forming surface to an atmosphere containing charged particles obtained by stopping the supply of the silicon-based thin film forming raw material and discharging a mixed gas of a Group III element compound and a non-depositing gas (hereinafter, referred to as (Abbreviated as "quality process"), and the total thickness of the p-type crystalline semiconductor thin film is 300 Å or less, and the thickness of the silicon-based thin film is 1 to 100 Å. It is a thing.

In the present invention, the greatest feature of the film forming step is that the thin film growth is carried out in an atmosphere containing charged particles produced by discharging a mixed gas of a Group III element compound and a non-depositing gas. The means for supplying the thin film forming raw material, and further, the film forming means itself are not particularly limited. Specifically, it is carried out by a physical film forming method such as vacuum deposition, sputtering or ion plating, or a chemical vapor deposition (CVD) method such as photo CVD or plasma CVD. The atmosphere containing charged particles is an atmosphere containing cations or anions of a group III element and / or non-depositing gas, which is generated by discharging a mixed gas of a group III element compound and a non-depositing gas. In the present invention, by means such as applying a bias voltage to the substrate during the film forming process,
It guides (collides against) the surface of the thin film formed on the substrate.

On the other hand, the reforming step is only an atmosphere containing charged particles produced by stopping the supply of the thin film forming raw material in the film forming step and discharging the mixed gas of the group III element compound and the non-depositing gas. This is a step of continuing and leading (exposing) to the thin film formation surface formed on the substrate to modify the properties of the semiconductor thin film formed in the film forming step. At this time, even if the decomposition product species of the Group III element compound covers the surface of the thin film, the effect of the present invention is not hindered.

First, an effective physical film forming method will be described below. As described above, the generation of the atmosphere containing charged particles generated by discharging the mixed gas of the group III element compound and the non-depositing gas in the film forming process is caused by the physical film forming method or the chemical vapor phase described below. Although it is performed together with the film forming method, it can be controlled independently. Since this is the same generation method as the generation method of the atmosphere containing the charged particles generated by discharging the mixed gas of the group III element compound and the non-depositing gas in the reforming step, it is effective. The generation method and the like will be described in the specific section of the reforming step described later.

Silicon as a starting material for film formation,
Silicon elements, compounds or alloys such as silicon carbide, silicon nitride, silicon-germanium alloy or composite powder, silicon-tin alloy or composite powder can be effectively used.

The film forming conditions are not particularly limited, except that the film is formed while exposing it to an atmosphere containing charged particles during thin film growth. Argon, xenon, helium,
Film formation can be performed in an atmosphere of a rare gas such as neon or krypton, hydrogen, hydrocarbon, fluorine, nitrogen, oxygen gas, or the like. As a specific condition, the gas flow rate is 0.1 to 100scc
m, the reaction pressure is in the range of 0.0001 mtorr to 100 mtorr.
Further, the film forming conditions such as the flow rate, the pressure and the electric power are appropriately selected according to the film forming rate.

The film formation temperature is controlled by controlling the substrate temperature during film formation. The temperature range is not basically limited, but it is preferable to set the temperature in conformity with the reforming process. Specifically, it is selected in the temperature range of 500 ° C or lower.

Next, a concrete example of an effective chemical vapor deposition method will be shown.

[0017] As a source gas for film formation, the general formula Si
monosilane represented by _n H _{2n + 2} (n is a natural number), disilane,
Silane compounds such as trisilane and tetrasilane, fluorinated silanes, organic silanes, hydrocarbons, germane compounds and the like are used. Further, as a diluting gas, a gas such as hydrogen, deuterium, fluorine, chlorine, helium, argon, neon, xenon, krypton, or nitrogen may be introduced together with the source gas. When these gases are used, it is effective to use them in the range of 0.01 to 100% (volume ratio) with respect to the raw material gas, and they are appropriately selected in consideration of the film formation rate and film characteristics. ..

Similar to the physical film forming method, the film forming conditions are not particularly limited except that the film formation is performed in an atmosphere containing charged particles during thin film growth. The specific conditions are disclosed below.

In photo-CVD, a raw material gas is decomposed by using an ultraviolet light source having a wavelength of 350 nm or less such as a low pressure mercury lamp, a deuterium lamp or a rare gas lamp to form a film. As film formation conditions, consider gas flow rate of 1 to 100 sccm, reaction pressure of 15 mtorr to atmospheric pressure, substrate temperature of 200 to 600 ° C, heat resistance of substrate, film formation time considered from film formation speed, temperature of reforming process, etc. Then, more preferably, it is appropriately selected in the range of 300 to 500 ° C.

The plasma CVD will be specifically described below.

As the discharge method, high frequency discharge, direct current discharge, microwave discharge, ECR discharge, etc. can be effectively used. A raw material gas flow rate of 1 to 900 sccm, a reaction pressure of 0.001 mtorr to atmospheric pressure, and an electric power of 1 mW / cm ² to 10 W / cm ² are sufficient. These film forming conditions are appropriately changed depending on the film forming rate and the discharging method. Substrate temperature is 200
It is ~ 600 ° C, more preferably 300 ~ 500 ° C.

In the present invention, the atmosphere containing these charged particles obtained by discharging the mixed gas of the group III element compound and the non-depositing gas in the reforming step and the film forming step means a group III element compound and It is an atmosphere in which charged particles composed of a group III element compound and / or cations or anions of the non-depositing gas are generated by discharge using a mixed gas of the non-depositing gas, and exposed to the growth surface. The presence of non-ionized substances in the atmosphere does not hinder the effect of the present invention. It is a more preferable means as a reforming method to expose the substrate (the upper thin film) to this discharge atmosphere and apply a bias voltage to the substrate to effectively introduce the ionized components onto the substrate. Therefore, as a method of generating discharge, high frequency discharge, direct current discharge, microwave discharge, ECR discharge, etc. can be effectively utilized. It is also a useful method in the present invention to effectively generate ions by an ion generator and guide the ions to the substrate surface. Specifically, various ion generators such as a Kauffman type ion gun and an ECR ion gun are used.

In the present invention, the gas of the group III element compound is a boron hydride such as diborane, a boron halide such as boron trifluoride, an organic boron compound such as trimethylboron, an aluminum halide such as aluminum trichloride, and the like. Organoaluminum compounds such as trimethylaluminum, etc., and non-depositing gases such as hydrogen gas, deuterium gas, hydrogen fluoride gas, fluorine gas, nitrogen trifluoride, and carbon tetrafluoride as needed for these gases. Mixing with argon gas, neon gas, helium gas, xenon gas, krypton gas, etc. does not hinder the present invention, but is a more preferable embodiment. II
The mixing ratio between the group I element compound gas and other gases is
It is properly selected in accordance with the desired conductivity and carrier density of the thin film, but usually 10 ppm to 20%, more preferably 20 ppm.
It is mixed in the range of 0 ppm to 5%. If this mixing ratio is too low, a film with a high carrier density cannot be obtained due to a shortage of group III elements, and a high resistance film is obtained. On the other hand, if the mixing ratio is too high, crystallization is hindered, and only a film having a low carrier density can be obtained, and the film has a high resistance.

Next, specific conditions for the reforming process will be disclosed. When using discharge, the discharge power is 1 to 500 W and the mixed gas of group III element compound and non-depositing gas is 5 to 500 sc
It is generated and maintained in the range of cm, pressure 0.001 mtorr to atmospheric pressure. When an ion gun is used, the flow rate of the mixed gas of the group III element compound and the non-depositing gas is 0.1 to 50 sccm, the pressure is 0.0001 mtorr to 100 mtorr, and the pressure range that produces ions and has a sufficient life is used. The ion energy is sufficient in the range of 10 to 1000 eV, preferably 100 to 600 eV. If the energy of ions is increased beyond this range, the effect of modification will be
It is not effective because the ion damage and the sputtering phenomenon become severe.

The temperature condition in the reforming process is controlled / controlled by the temperature of the substrate. This substrate temperature is the same as or lower than the substrate temperature in the film forming process, and is from room temperature to 600 ° C.
C., preferably 200 to 500.degree.

In one film forming process, 1 to 100Å,
The thickness is preferably 3 to 50 Å. Film thickness is 100Å
If it exceeds, the effect of the present invention decreases. Also, 1
A film thickness less than Å is not preferable because the number of repetitions of film formation and modification increases from the viewpoint of practicality. The time required for one cycle is not particularly limited, but 10
Within 00 seconds.

The substrate on which the semiconductor thin film of the present invention is formed is
There are no limiting conditions other than withstanding the process temperatures of the present invention. A transparent material such as soda lime glass, borosilicate glass, and quartz glass, metal, ceramics, heat-resistant polymer material, or the like can be used as the substrate. Further, it goes without saying that a substrate on which electrodes used for solar cells, sensors, etc. are formed is also effectively used in the present invention.

An example of a semiconductor thin film manufacturing apparatus preferable for carrying out the present invention is shown in FIG. Here, 1 is an electron beam vapor deposition apparatus, 2 is an ion beam generator, 3 is a shutter, 4 is a substrate, 5 is a substrate heater, 6 is a turbo molecular pump, 7 is an oil rotary pump, 8 is a gas flow meter, and 9 is Each of the substrate bias power supplies is shown. In the following examples and comparative examples, experiments were conducted using this device.

[0029]

EXAMPLE 1 An apparatus for carrying out the present invention is shown in FIG. The apparatus is composed of an electron beam vapor deposition apparatus 1 for depositing silicon and an ion generator 2 for generating ions. A shutter 3 is provided in the electron beam evaporation apparatus and the ion generator, and film formation and reforming can be repeated by opening and closing the shutter. As a starting material, high-purity silicon was set in a crucible, an electron beam was incident thereon, and the silicon was evaporated. The substrate temperature was set to 200 ° C, which is the temperature for the next reforming process. Hydrogen gas 10sccm, 2% diborane / hydrogen gas 0.5sccm as a group III element compound were introduced into the ion generator, and the pressure was adjusted to 1 × 10 ^-3 torr, and the ion beam voltage 30
An ion beam was generated by applying 0 V and an acceleration voltage of 50 V, the ion beam shutter was opened, and the substrate 4 was irradiated with the ion beam. Here, it was confirmed by the probe that ions exist near the substrate surface, that is, the substrate surface is in an atmosphere containing charged particles. At the same time, open the shutter of the electron beam evaporation system for 20 seconds,
Å A silicon thin film was deposited (deposition process). Next, the shutter of the electron beam evaporation apparatus was closed and only ion beam irradiation was performed for 10 seconds (reforming step). In this way, opening and closing of the shutter of the electron beam vapor deposition apparatus was repeated at each time interval. A thin film of about 200 Å was obtained by repeating 10 times. The substrate used here was a quartz glass substrate or a tin oxide-coated glass substrate. In order to investigate the presence or absence of crystallization of these samples, evaluation by Raman scattering spectrum was performed. The result is shown in FIG. As is clear from the figure, in this sample, a Raman scattering spectrum of 520 cm ⁻¹ due to a silicon crystal was observed, and it was confirmed that a crystalline thin film could be obtained even at a film thickness of 200 Å. The dark conductivity, carrier density and hole mobility of this thin film were measured and found to be 2.5 S / cm, 5 × 10 ¹⁹ cm ^-3 and 1 cm ² /, respectively.
It was confirmed that Vs was high conductivity, high carrier density, and high hole mobility.

Example 2 In Example 1, only the vapor deposition thickness and modification time per change were changed to about 4Å and 6 seconds, respectively.
The vapor deposition thickness was changed by changing the opening time of the shutter of the electron beam vapor deposition apparatus. In Example 1, the deposition rate by electron beam evaporation was found to be about 1 Å / sec. Therefore, in this Example, the film formation time was set to 4 seconds. Approximately 50 times between vapor deposition process and modification process
A 200Å thin film was obtained. As a result of measuring the same Raman scattering spectrum as in Example 1, a Raman scattering spectrum peculiar to the silicon crystal at 520 cm ⁻¹ was obtained in the same manner as in Example 1. This example is very effective, but the number of times of film formation-modification is more than five times that of example 1, and 520 cm ^{− with} respect to the Raman scattering spectrum of 480 cm ⁻¹ due to amorphous silicon. ^Since the ratio of the Raman scattering spectrum of ¹ was reduced by half, it is considered that the crystallization rate was reduced.
Further, due to the reduction of the crystallization rate, the dark conductivity was one digit, the carrier density and the hole mobility were about half the values.

Example 3 In Example 1, only the vapor deposition thickness and the reforming time per change were changed to about 80 Å and 10 seconds, respectively.
The vapor deposition thickness was changed by changing the opening time of the shutter of the electron beam vapor deposition apparatus. In Example 1, the deposition rate by electron beam evaporation was found to be about 1 Å / sec. Therefore, in this example, the deposition time for one time was set to 80 seconds. Approximately 2 by repeating vapor deposition process-modification process 3 times
A 40Å thin film was obtained. As a result of measuring the same Raman scattering spectrum as in Example 1, a Raman scattering spectrum peculiar to the silicon crystal at 520 cm ⁻¹ was obtained in the same manner as in Example 1. This example is very effective, and the number of times of film formation-reforming is the same as that of the example 1.
Although the process can be shortened by about 1/3 of that, the ratio of the Raman scattering spectrum at 520 cm ^{-1 to} the Raman scattering spectrum at 480 cm ^-1 due to amorphous silicon was reduced to 1/4, so the crystallization rate was reduced. It was determined that the dark conductivity was decreased, and the dark conductivity was decreased by about 2 digits, and the carrier density and the hole mobility were decreased by about 1 digit.

Comparative Example 1 In Example 1, a thickness of 200 Å was obtained without passing through the modification process of only ion irradiation in which film formation was interrupted (that is, without performing ion irradiation and film formation). Formed up. That is, the shutters of the ion beam vapor deposition apparatus and the electron beam vapor deposition apparatus were opened at the same time, and in Example 1, the vapor deposition rate by electron beam vapor deposition was found to be about 1Å / sec. Therefore, after 200 seconds, both shutters were closed to complete the formation. did. When the Raman scattering spectrum of this sample was measured in the same manner as in the example, the Raman scattering spectrum peculiar to the silicon crystal at 520 cm ^-1 was not recognized as shown in FIG. The dark conductivity of this thin film is 3 × 10 ^-5 S / cm, the carrier density is 7 × 10 ¹⁷ cm ^-3 , the hole mobility is 0.002 cm ² / Vs, and the high resistance,
The characteristics were low carrier density and low hole mobility. This comparative example clarifies that repeated film formation and modification by only ion irradiation are essential for obtaining a crystalline thin film in a state where the total film thickness is 300 Å or less.

Comparative Example 2 In Example 1, a thin film was formed under the same conditions except that diborane gas was not introduced into the ion generator. The Raman scattering spectrum of the thin film obtained under these conditions was similar to that of Example 1, and it was confirmed that a crystalline thin film was obtained, but since the group III element compound was not introduced, it was dark. The electrical conductivity was 2 × 10 ⁻⁷ S / cm and the carrier density was 6 × 10 ¹³ cm ^−3, which were extremely high resistance and low carrier density. In this comparative example, film formation and modification by ion irradiation may be repeated to obtain a crystalline thin film, but introduction of a Group III element compound is required to obtain characteristics of low resistance and high carrier density. It is shown that.

Comparative Example 3 In Example 1, after the Si thin film was formed to a thickness of 200Å, only ion irradiation was continued. Irradiation only time is 10
00 seconds. The Raman scattering spectrum of the thin film obtained under these conditions also did not show the spectrum peculiar to the silicon crystal at 520 cm ^-1 . Therefore, the electrical characteristics were high resistance and low carrier density. This comparative example is a film-
It shows that the film thickness per one time has an upper limit when the modification step is repeated.

Comparative Example 4 In Example 1, film formation was carried out without ion irradiation in the film formation step. That is, open the shutter of the electron beam evaporation system for 20 seconds, and after depositing a 20Å silicon thin film on the substrate.
(Film forming step) While the shutter of the electron beam vapor deposition apparatus was closed, the ion beam shutter was opened, and the ion beam irradiation was performed for 10 seconds (reforming step). Next, the shutter for the ion beam is closed and the shutter for the electron beam vapor deposition apparatus is opened again to form a film. By repeating this film formation and reforming 10 times, a thin film of about 200 Å was obtained. As a result of measuring the thin film formed under these conditions by Raman scattering spectrum, the Raman scattering spectrum peculiar to silicon crystal at 520 cm ^-1 was not recognized. It was also found that the electrical characteristics are high resistance and low carrier density. In this comparative example, even if the condition of the film thickness for one time is selected within the range specified in the present invention and the film formation-reforming process is repeated, if there is no ion irradiation in the film forming process, It is revealed that the effect does not appear.

[0036]

As is clear from the above examples and comparative examples, the semiconductor thin film produced by this method is
Å It is a thin film with crystallinity even at film thickness below
In addition, it was confirmed that it has low resistance, high carrier density, and high hole mobility. This enables the application of a microcrystalline semiconductor thin film to the p-layer of an amorphous solar cell, which has been difficult in the past, and improves the photoelectric conversion efficiency and the reliability of the amorphous solar cell. Will lead to. Therefore, the present invention can provide a promising technology that enables high conversion efficiency and high reliability required for a solar cell for electric power, and it must be said that the present invention is an extremely useful invention for the energy industry. .. It is believed that the technical matters disclosed by the present invention have a great impact on those skilled in the technical field to which the present invention belongs.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing an example of a semiconductor thin film manufacturing apparatus for carrying out the present invention.

2 is a Raman scattering spectrum chart of the semiconductor thin film formed by the method shown in Example 1. FIG.

3 is a Raman scattering spectrum chart of a semiconductor thin film formed under the conditions shown in Comparative Example 1. FIG.

[Explanation of symbols]

 1 Electron Beam Vapor Deposition Device 2 Ion Beam Generator 3 Shutter 4 Substrate 5 Substrate Heater 6 Turbo Molecular Pump, 7 Oil Rotary Pump, 8 Gas Flowmeter,

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] January 10, 1992

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Claim 2

[Correction method] Change

[Correction content]

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Nobuhiro Fukuda 1190 Kasama-cho, Sakae-ku, Yokohama-shi, Kanagawa Mitsui Toatsu Chemical Co., Ltd.

Claims (3)

[Claims] 1. An atmosphere containing charged particles obtained by discharging a mixed gas of a Group III element compound and a non-depositing gas,
It is obtained by supplying a silicon-based thin film forming material to form a silicon-based thin film, stopping the supply of the silicon-based thin film forming material, and discharging a mixed gas of a Group III element compound and a non-depositing gas. P-type crystal with a total film thickness of 300Å or less, in which the step of exposing the thin film forming surface to an atmosphere containing charged particles is repeated, and the thickness of the silicon-based thin film formed in one cycle is 1 to 100Å Thin semiconductor film. 2. A mixed gas of a Group III element compound and a non-depositing gas is introduced into the ion generator to form a thin film of 1 to 100 Å while irradiating the thin film forming surface with low energy ions. Stopping the process and the supply of the deposition gas,
The thin film according to claim 1, wherein the step of continuing the ion irradiation is repeated. 3. The thin film according to claim 3, wherein the low-energy ions irradiated to the thin film growth surface are 1 KeV or less.