JPH0583714U - 2-axis tilt stand - Google Patents
2-axis tilt standInfo
- Publication number
- JPH0583714U JPH0583714U JP2106992U JP2106992U JPH0583714U JP H0583714 U JPH0583714 U JP H0583714U JP 2106992 U JP2106992 U JP 2106992U JP 2106992 U JP2106992 U JP 2106992U JP H0583714 U JPH0583714 U JP H0583714U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- screw
- main body
- base
- folded back
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】
【目的】 微小光学部品を高精度に2軸あおり調整でき
るあおり台の構造を提供する。
【構成】 隣青銅等の弾性体でできた板状の材料を折り
曲げ加工して作成した本体部10は、コ字状に折り返し
成形し、上辺中心部に円形ないし正方形の穴11をあけ
板バネとして機能する部分10Aと、断面がチャンネル
形状になるように側縁部9を折り曲げ剛体化した部分1
0Bとに分けられ、それぞれ回転軸となる本体部固定用
ネジ4と、あおり方向8の調整用ネジ5とによりベース
12に固定される。回転方向7は、本体10に開けた穴
13にピン14を通し、ベース12上の穴15に突き刺
し、ピン14の上部を傾けることで微調整できる。
(57) [Abstract] [Purpose] To provide a structure of a tilting table that allows two-axis tilting adjustment of minute optical components with high accuracy. [Structure] The main body 10 made by bending a plate-shaped material made of an elastic material such as adjacent bronze is folded back into a U shape, and a circular or square hole 11 is formed in the center of the upper side to form a leaf spring. Portion 10A that functions as a portion and a portion 1 in which the side edge portion 9 is bent and rigidified so that the cross-section has a channel shape.
0B, and is fixed to the base 12 by a main body fixing screw 4 that serves as a rotation shaft and an adjusting screw 5 in the tilt direction 8. The rotation direction 7 can be finely adjusted by inserting the pin 14 into the hole 13 formed in the main body 10, piercing the hole 15 on the base 12, and tilting the upper portion of the pin 14.
Description
【0001】[0001]
本考案は、ビームスプリッタやプリズムなどの光学部品を、高精度に2軸あお り方向に微動調整する機構に関する。 The present invention relates to a mechanism for finely adjusting optical components such as a beam splitter and a prism in two axial directions with high precision.
【0002】[0002]
光学ベンチ上で設置可能な5cm角程度の大型微動装置は市販されているが、 超小型で微調整可能な光学部品の2軸あおり機構は見あたらない。 小型の2軸あおり機構としては、例えば図1に示すように弾性の板状本体を板バ ネとして用いた方式が容易に考えられる。ネジ4を中心として方向7へ回転可能 とし、弾性体1の変形を利用し、ネジ5を調整することにより方向8へ可動とし て2軸あおり調整を行なう方式である。 Although a large 5 cm square fine movement device that can be installed on an optical bench is commercially available, no two-axis tilting mechanism, which is an ultra-small and finely adjustable optical component, is found. As a small biaxial tilt mechanism, for example, as shown in FIG. 1, a system using an elastic plate-shaped main body as a plate panel can be easily considered. This is a system in which the screw 4 is rotatable in the direction 7, the deformation of the elastic body 1 is used, and the screw 5 is adjusted to move in the direction 8 to perform biaxial tilt adjustment.
【0003】[0003]
図2のように従来技術では折り曲げ部分2で曲がらず、プリズム等の光学部品 6の固着部3を含む全体が一様に変形し、接着剤等で固定した光学部品6が剥離 してしまうおそれがある。 As shown in FIG. 2, in the conventional technique, the bent portion 2 is not bent, and the entire portion including the fixing portion 3 of the optical component 6 such as a prism is uniformly deformed, and the optical component 6 fixed with an adhesive or the like may be peeled off. There is.
【0004】[0004]
1枚の弾性板からなる本体の一端側をコの字状に折り返し、この折り返し部上 辺に設けた孔を通した第1のネジ部材により、折り返し部下辺をベースに対して 固定し、前記弾性板の折り返し部外で取付物付近はその両側縁をチャンネル型に 折り曲げて剛体化し、折り返し部とは反対側の端部付近に、幅方向に延びる長孔 を設けて、この長孔を通した第2のネジ部材により、第1ネジ部材を回転中心と する水平方向の回転角調整自在に固定した。 One end side of the main body made of one elastic plate is folded back in a U-shape, and the lower side of the folded back portion is fixed to the base by the first screw member passing through the hole provided on the upper side of the folded back portion. Outside the folded-back portion of the elastic plate, both sides of the attachment are bent into a channel shape to make it rigid, and a long hole extending in the width direction is provided near the end opposite to the folded-back portion. By the second screw member, the first screw member was fixed so that the rotation angle in the horizontal direction about the rotation center could be adjusted.
【0005】[0005]
水平方向の微動は第1ネジ部材を中心として行なわれ、垂直方向のあおりは第 2のネジ部材を調整すると行える。チャンネル形状として補強した部分にはプリ ズム等の光学部品が接着剤等で固着される。 The fine movement in the horizontal direction is performed around the first screw member, and the vertical movement can be performed by adjusting the second screw member. Optical parts such as prisms are fixed to the portion reinforced as a channel shape with an adhesive or the like.
【0006】[0006]
図3及び図4は本発明の実施例を示す。1枚の隣青銅等の弾性体でできた板状 の材料を折り曲げ加工して作成した本体部10は、コ字状に折り返し成形し、上 辺中心部に円形ないし正方形の穴11(ネジ頭部が自由に通り得る大きさとする )をあけ板バネとして機能する部分10Aと、断面がチャンネル形状になるよう に側縁部9を折り曲げ剛体化した部分10Bとに分けられ、それぞれ回転軸とな る本体部固定用ネジ4と、あおり方向8の調整用ネジ5とによりベース12に固 定される。 3 and 4 show an embodiment of the present invention. The main body 10 made by bending a plate-shaped material made of an elastic material such as one adjacent bronze is folded back into a U shape, and a circular or square hole 11 (screw head) is formed at the center of the upper side. (The size is such that the part can pass freely) is divided into a part 10A that functions as a leaf spring and a part 10B in which the side edge part 9 is bent so that the cross section has a channel shape, and the part 10B is made rigid. It is fixed to the base 12 by the main body fixing screw 4 and the adjusting screw 5 in the tilt direction 8.
【0007】 折り返し部10Aの下辺には孔41が設けてあり、この孔41に通した第1の ネジ4でベース12に対し固定される。 本体10の他端側には、幅方向に延びかつネジ孔41を中心とする円弧の一部を 成す長孔16が設けてあり、この長孔16を通した第2のネジ5でベース12に 対し固定される。すなわち、ネジ5の締め込み度を調整すれば光学部品6の上下 方向のあおり角を調整できるとともに、長孔16内でのネジ5の移動可能範囲で 、第1ネジ4を中心とした水平面内での回転角度調整ができる。 図示例では、回転方向7は、本体10に開けた穴13にピン14を通し、ベース 12上の穴15に突き刺し、ピン14の上部を傾けることで微調整できる。A hole 41 is provided on the lower side of the folded portion 10 A, and is fixed to the base 12 by the first screw 4 passing through the hole 41. On the other end side of the main body 10, there is provided an elongated hole 16 extending in the width direction and forming a part of an arc centered on the screw hole 41. The second screw 5 passing through the elongated hole 16 allows the base 12 to pass through. Fixed to. That is, if the tightening degree of the screw 5 is adjusted, the vertical tilt angle of the optical component 6 can be adjusted, and within the movable range of the screw 5 within the long hole 16, within the horizontal plane centered on the first screw 4. You can adjust the rotation angle at. In the illustrated example, the rotation direction 7 can be finely adjusted by inserting the pin 14 into the hole 13 formed in the main body 10, piercing the hole 15 on the base 12, and tilting the upper portion of the pin 14.
【0008】[0008]
本考案は、一枚の弾性体金属板を切断、折り曲げ加工することにより低コスト な材料が使用でき、剛性をもたせる部分をチャンネル形状とし、変形させる折り 返し辺部分をネジの貫通用穴として兼用し、かつ穴の大きさを調整することによ りバネの硬さを調整することができる。また、剛性を持たせた部分はあおり調整 時に変形しないので、剛性の高い厚みのある金属板を間に用いなくても、接着剤 で直接光学部品を固着できる。構造は極めて簡単なため組み立て調整時間が大幅 に短縮できる。 The present invention can use a low-cost material by cutting and bending one elastic metal plate, the part that gives rigidity is made into a channel shape, and the folding side part to be deformed is also used as a hole for screw penetration. In addition, the hardness of the spring can be adjusted by adjusting the size of the hole. In addition, since the rigid part does not deform during tilt adjustment, the optical components can be fixed directly with an adhesive without using a highly rigid metal plate in between. Since the structure is extremely simple, assembly and adjustment time can be greatly shortened.
【図1】従来のあおり台の例を示す斜視図FIG. 1 is a perspective view showing an example of a conventional tilting stand.
【図2】従来のあおり台の問題点を説明する側面図FIG. 2 is a side view for explaining the problems of the conventional tilting stand.
【図3】本考案の一実施例を示す斜視図FIG. 3 is a perspective view showing an embodiment of the present invention.
【図4】図3のあおり台の側面図FIG. 4 is a side view of the tilt base of FIG.
4:固定ネジ(第1ネジ部材) 5:あおり量調整ネジ(第2ネジ部材) 6:光学部品(取付物) 7:水平あおり方向 8:垂直あおり方向 9:側縁部 10:本体 11:固定ネジ挿通用穴 12:ベース 13:本体部水平あおり微調整用穴 14:水平あおり微調整用ピン 15:ベース部水平あおり微調整用穴 4: Fixing screw (first screw member) 5: Tilt amount adjusting screw (second screw member) 6: Optical component (attachment) 7: Horizontal tilt direction 8: Vertical tilt direction 9: Side edge part 10: Main body 11: Fixing screw insertion hole 12: Base 13: Main body horizontal tilt fine adjustment hole 14: Horizontal tilt fine adjustment pin 15: Base horizontal horizontal fine adjustment hole
───────────────────────────────────────────────────── フロントページの続き (72)考案者 田中 俊明 大阪府大阪市中央区道修町3丁目5番11号 日本板硝子株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Creator Toshiaki Tanaka 3-5-11 Doshomachi, Chuo-ku, Osaka-shi, Osaka Inside Nippon Sheet Glass Co., Ltd.
Claims (1)
の字状に折り返し、この折り返し部上辺にはネジ頭部の
通過を許す孔を設け、該孔を通した第1のネジ部材によ
り上記折り返し下辺をベースに対して固定し、前記弾性
板の折り返し部外で取付物付近はその両側縁を折り曲げ
て剛体化し、該端部付近に幅方向に延びる長孔を設けて
該長孔を通した第2のネジ部材により、前記第1ネジ部
材を回転中心とする水平方向の回転角調整自在に固定し
た2軸あおり台。1. A main body made of one elastic plate is folded back in a U-shape, and a hole allowing passage of a screw head is provided on an upper side of the folded back portion, and a first screw passed through the hole. The lower side of the folded back is fixed to the base by a member, and outside the folded portion of the elastic plate, both side edges of the attachment are bent to be rigid, and a long hole extending in the width direction is provided near the end. A biaxial tilting base fixed by a second screw member passing through a hole so that the rotation angle in the horizontal direction about the first screw member can be adjusted.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2106992U JPH0583714U (en) | 1992-04-07 | 1992-04-07 | 2-axis tilt stand |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2106992U JPH0583714U (en) | 1992-04-07 | 1992-04-07 | 2-axis tilt stand |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0583714U true JPH0583714U (en) | 1993-11-12 |
Family
ID=12044602
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2106992U Pending JPH0583714U (en) | 1992-04-07 | 1992-04-07 | 2-axis tilt stand |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0583714U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012027296A (en) * | 2010-07-26 | 2012-02-09 | Akutesu Kk | Positioning device |
JP2014515881A (en) * | 2011-04-14 | 2014-07-03 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Facet mirror device |
KR20180097731A (en) * | 2015-12-30 | 2018-08-31 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 | A prism rotation adjusting mechanism, a stepper exposure system, and a stepper |
-
1992
- 1992-04-07 JP JP2106992U patent/JPH0583714U/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012027296A (en) * | 2010-07-26 | 2012-02-09 | Akutesu Kk | Positioning device |
JP2014515881A (en) * | 2011-04-14 | 2014-07-03 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Facet mirror device |
US9645388B2 (en) | 2011-04-14 | 2017-05-09 | Carl Zeiss Smt Gmbh | Facet mirror device |
KR20180097731A (en) * | 2015-12-30 | 2018-08-31 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 | A prism rotation adjusting mechanism, a stepper exposure system, and a stepper |
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