JPH0581649U - Optical fiber sensor - Google Patents

Optical fiber sensor

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Publication number
JPH0581649U
JPH0581649U JP2270592U JP2270592U JPH0581649U JP H0581649 U JPH0581649 U JP H0581649U JP 2270592 U JP2270592 U JP 2270592U JP 2270592 U JP2270592 U JP 2270592U JP H0581649 U JPH0581649 U JP H0581649U
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JP
Japan
Prior art keywords
light
optical fiber
signal
light source
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2270592U
Other languages
Japanese (ja)
Inventor
敏保 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ono Sokki Co Ltd
Original Assignee
Ono Sokki Co Ltd
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Filing date
Publication date
Application filed by Ono Sokki Co Ltd filed Critical Ono Sokki Co Ltd
Priority to JP2270592U priority Critical patent/JPH0581649U/en
Publication of JPH0581649U publication Critical patent/JPH0581649U/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Optical Transform (AREA)

Abstract

(57)【要約】 【目的】 本考案は、光ファイバを利用して被測定体の
物理量を測定する光ファイバセンサに関し、光源から射
出される光の光量が温度変化や時間経過に伴う光量変化
を打ち消すように補正する際の補正誤差の発生を防止す
る。 【構成】 1つの光源から発せられた光を分岐して一方
は測定用として用い他方はモニタ用として用いる。
(57) [Summary] [Object] The present invention relates to an optical fiber sensor for measuring a physical quantity of an object to be measured by using an optical fiber, and a light quantity of light emitted from a light source changes with temperature and time. It is possible to prevent the occurrence of a correction error when the correction is performed so as to cancel. [Structure] The light emitted from one light source is branched and one is used for measurement and the other is used for monitor.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial applications]

本考案は、光ファイバを利用して被測定体の物理量を測定する光ファイバセン サに関する。 The present invention relates to an optical fiber sensor that measures a physical quantity of an object to be measured using an optical fiber.

【0002】[0002]

【従来の技術】[Prior Art]

光を用いて被測定体の種々の物理量を測定する場合において、防爆上、あるい は狭い場所にセンサを配置する必要上等から光ファイバで光を導いて測定する光 ファイバセンサが従来より用いられている。 光ファイバを利用した従来の光ファイバセンサについて、いわゆるエンコーダ を例として図2を参照して説明する。 When measuring various physical quantities of an object to be measured using light, an optical fiber sensor that guides light with an optical fiber to measure light has been conventionally used because of explosion proof or because it is necessary to place the sensor in a narrow place. Has been. A conventional optical fiber sensor using an optical fiber will be described with reference to FIG. 2 by taking a so-called encoder as an example.

【0003】 図2に示すエンコーダ10は、測定部11と光量補正部12とに大別される。 測定部11においては、光源13から射出された光は、一端がフェルール14に 保持された光ファイバ16内を伝送されてセンサ部18に導かれる。このセンサ 部18には固定スリット18a及び移動スリット18bが備えられており、この 移動スリット18bが被測定体(図示せず)の動きに応じて移動し、これにより スリット18a、18bを通過した光は被測定体の動きの情報を担う光となる。 スリット18a、18bを通過した光は、光ファイバ20内を伝送され、フェル ール22で保持された端部から射出されて信号用光検出器24で受光され、信号 回路26を経て、図示しない例えばカウンタ等に入力され被測定体の動きが検出 される。The encoder 10 shown in FIG. 2 is roughly divided into a measurement unit 11 and a light amount correction unit 12. In the measuring unit 11, the light emitted from the light source 13 is transmitted through the optical fiber 16 having one end held by the ferrule 14 and guided to the sensor unit 18. The sensor unit 18 is provided with a fixed slit 18a and a moving slit 18b, and the moving slit 18b moves in accordance with the movement of the object to be measured (not shown), whereby the light passing through the slits 18a, 18b is moved. Is light that carries information about the movement of the object to be measured. The light passing through the slits 18a and 18b is transmitted through the optical fiber 20, emitted from the end portion held by the ferrule 22, received by the signal photodetector 24, passed through the signal circuit 26, and not shown. For example, it is input to a counter or the like and the movement of the measured object is detected.

【0004】 ここで、測定部11の光源13から射出される光の光量は周囲の温度変化や時 間経過に伴って変化し、このためセンサ部18に導かれる光量も変化し、その結 果、被測定体の動きの情報を担う信号、即ち信号用光検出器24で検出された信 号が安定しないこととなる。このため、この光信号が安定になるように上記光量 等を補正して測定誤差を最小にするために光量補正部12が備えられている。こ の光量補正部12には、上記光源13と同様の特性を備えた光源30が備えられ ており、この光源30から射出された光は、光ファイバ34に、フェルール32 に保持された端部側から入射し、光ファイバ34内を伝送されて、フェルール3 6に保持された端部から射出されモニタ用光検出器38に導かれる。このモニタ 用光検出器38で得られたモニタ信号は制御回路40に入力される。この制御回 路40は、入力されたモニタ信号に基づいて光源13、30から常に一定の光量 の光が発せられるように光源13、30を制御する回路であり、これにより光源 13及び光源30から発せられる光の光量が周囲の温度変化や時間経過に拘わら ず安定になるように補正される。このため、センサ部18に導かれる光の光量は 安定し、信号用光検出器24で得られる信号も安定することとなる。Here, the amount of light emitted from the light source 13 of the measuring unit 11 changes with changes in the ambient temperature and the passage of time, so that the amount of light guided to the sensor unit 18 also changes, and as a result thereof. That is, the signal carrying the information on the movement of the object to be measured, that is, the signal detected by the signal photodetector 24 is not stable. For this reason, a light amount correction unit 12 is provided to correct the above-mentioned light amount and the like so that this optical signal becomes stable and to minimize the measurement error. The light quantity correction unit 12 is provided with a light source 30 having the same characteristics as the light source 13, and the light emitted from the light source 30 is held in the optical fiber 34 by the end portion held by the ferrule 32. The light enters from the side, is transmitted through the optical fiber 34, is emitted from the end portion held by the ferrule 36, and is guided to the monitor photodetector 38. The monitor signal obtained by the monitor photodetector 38 is input to the control circuit 40. The control circuit 40 is a circuit that controls the light sources 13 and 30 so that the light sources 13 and 30 always emit a constant amount of light based on the input monitor signal. The amount of light emitted is corrected so that it is stable regardless of changes in ambient temperature and the passage of time. Therefore, the amount of light guided to the sensor unit 18 is stable, and the signal obtained by the signal photodetector 24 is also stable.

【0005】 尚、ここでは制御回路40は光源13から発せられる光の光量を制御するもの として説明したが、図2に破線で示すように、制御回路40により信号回路26 を制御し、信号用光検出器24で得られた信号が所定の大きさとなるようにその 信号の増幅率を変化させてもよい。また光源13から発せられる光の光量と信号 用光検出器24で得られた信号の増幅率との双方を調整してもよい。Although the control circuit 40 has been described here as controlling the amount of light emitted from the light source 13, the control circuit 40 controls the signal circuit 26 as shown by the broken line in FIG. The amplification factor of the signal obtained by the photodetector 24 may be changed so that the signal has a predetermined magnitude. Further, both the amount of light emitted from the light source 13 and the amplification factor of the signal obtained by the signal photodetector 24 may be adjusted.

【0006】[0006]

【考案が解決しようとする課題】[Problems to be solved by the device]

上記従来のエンコーダ10では、測定用の光源13と補正用の光源30との2 つの光源が使用されてセンサ部18に導かれる光の光量が安定するように制御さ れているが、この2つの光源の経時的な光量変化率、温湿度に対する光量変化率 等の特性にはバラツキがあるため、光源13と光源30とから射出される光の光 量の変化量が異なり、光源30から射出される光の光量に基づいて行われる上記 光源13の補正には誤差が生じる場合がある。この誤差が生じたときは、信号用 光検出器24で得られた信号が安定せずしたがって測定誤差を生じることとなる 。 In the conventional encoder 10 described above, two light sources, a measurement light source 13 and a correction light source 30, are used and controlled so that the amount of light guided to the sensor unit 18 is stable. Since there are variations in characteristics such as the rate of change in the amount of light of two light sources over time and the rate of change in the amount of light with respect to temperature and humidity, the amount of change in the amount of light emitted from the light source 13 and the amount of change in the amount of light emitted from the light source 30 are different, An error may occur in the correction of the light source 13 performed based on the amount of the emitted light. When this error occurs, the signal obtained by the signal photodetector 24 is not stable, and therefore a measurement error occurs.

【0007】 本考案は、上記事情に鑑み、光源から射出される光の光量が温度変化や時間経 過に伴う光量変化を打ち消すように補正する際の補正誤差の発生を防止して安定 した光信号を得る光ファイバセンサを提供することを目的とする。In view of the above circumstances, the present invention prevents the occurrence of a correction error when correcting the light amount of the light emitted from the light source so as to cancel the change in the light amount due to the temperature change or the passage of time, and stabilizes the light output. An object is to provide an optical fiber sensor for obtaining a signal.

【0008】[0008]

【課題を解決するための手段】[Means for Solving the Problems]

上記目的を達成するための本考案の光ファイバセンサは、 光ファイバにより、光を用いて被測定体の物理量を測定するセンサ部に光を伝 送し、該センサ部から、光ファイバにより、該物理量を担持する光を導いて受光 する光ファイバセンサにおいて、 (1)光源 (2)モニタ用光検出器を備えたモニタ用受光部 (3)信号用光検出器を備えた信号用受光部 (4)光源から射出された光が双方に同時に入射されるようにこの光源側の各 端部を纏めて保持するフェルールを備えた、この光源とセンサ部との間に延び、 この光源から射出された光をセンサ部に伝送する1本もしくは複数本の第1光フ ァイバ、及びこの光源とモニタ用受光部との間に延び、この光源から射出された 光をモニタ用光検出器に導く第2光ファイバ (5)センサ部と信号用受光部との間に延び、物理量を担持する光を信号用光 検出器に導く1本もしくは複数本の第3光ファイバ (6)モニタ用光検出器で得られたモニタ信号に基づいて、光源から射出され る光の光量及び/又は信号用光検出器で得られた信号の増幅率を制御する制御回 路 を備えたことを特徴とするものである。 An optical fiber sensor of the present invention for achieving the above object transmits an optical fiber to a sensor unit for measuring a physical quantity of an object to be measured using the optical fiber, and from the sensor unit to the optical fiber, In an optical fiber sensor that guides and receives light carrying a physical quantity, (1) a light source (2) a monitor light-receiving section equipped with a monitor photodetector (3) a signal light-receiving section equipped with a signal photodetector ( 4) Extends between the light source and the sensor unit, which is equipped with a ferrule that holds the end portions of the light source side together so that the light emitted from the light source is simultaneously incident on both, and is emitted from the light source. A first optical fiber or a plurality of first optical fibers that transmit the emitted light to the sensor unit, and a first optical fiber that extends between the light source and the light receiving unit for monitoring and guides the light emitted from the light source to the photodetector for monitoring. 2 optical fibers (5) Sensor part One or a plurality of third optical fibers that extend between the signal light receiving section and guide the light carrying the physical quantity to the signal light detector (6) Based on the monitor signal obtained by the monitor light detector It is characterized by comprising a control circuit for controlling the amount of light emitted from the light source and / or the amplification factor of the signal obtained by the signal photodetector.

【0009】 上述の光ファイバセンサにおいて、光源から射出される光の光量と、信号用光 検出器で得られた信号の増幅率とのいずれを制御対象としてもよく、もしくはこ れらの双方を制御対象としてもよい。。これらの双方を制御対象としたときは、 いずれか一方を粗調整用、他方を微調整用としてもよい。In the above-described optical fiber sensor, either the light amount of the light emitted from the light source or the amplification factor of the signal obtained by the signal photodetector may be controlled, or both of them may be controlled. It may be controlled. . When both of these are control targets, either one may be for coarse adjustment and the other may be for fine adjustment.

【0010】[0010]

【作用】[Action]

光源から射出された光は、上記第1光ファイバと第2光ファイバとに同時に入 射され、第1光ファイバに入射された光はセンサ部に伝送され、第2光ファイバ に入射された光はモニタ用光検出器で受光される。このためモニタ用光検出器で 得られたモニタ信号は、そのままセンサ部に伝送される光の光量の情報を担うこ ととなる。制御回路ではこのモニタ信号に基づいて光源から射出される光の光量 が制御され、したがって光源から射出される光の光量が周囲の温度変化や時間経 過に伴って変化しても、この変化が高精度に打ち消され、この結果、安定した信 号を得ることができ被測定体の物理量が、従来と比べて安定的に高精度に測定さ れる。 The light emitted from the light source is simultaneously incident on the first optical fiber and the second optical fiber, and the light incident on the first optical fiber is transmitted to the sensor unit and is incident on the second optical fiber. Is received by the monitor photodetector. Therefore, the monitor signal obtained by the monitor photodetector directly carries the information on the amount of light transmitted to the sensor unit. The control circuit controls the light quantity of the light emitted from the light source based on this monitor signal. Therefore, even if the light quantity of the light emitted from the light source changes due to the ambient temperature change or the passage of time, this change does not occur. It is canceled with high accuracy, and as a result, a stable signal can be obtained and the physical quantity of the measured object can be measured stably and with high accuracy compared to the conventional method.

【0011】[0011]

【実施例】【Example】

以下、図面を参照して本考案の実施例について説明する。 図1は、本考案の一実施例に係るエンコーダの概略構成図である。 このエンコーダ50には、LED52が備えられている。またこのエンコーダ 50には、センサ部60に光を伝送する光ファイバ54と、モニタ用光センサ6 6に光を導く光ファイバ56とが備えられており、これらの光ファイバ54、5 6のLED52側の端部は、LED52で発せられた光が双方に同時に入射され るようにフェルール58により纏めて保持されている。LED52で発せられ光 ファイバ54に入射した光はセンサ部60に伝送され、この伝送された光はこの センサ部60に備えられた固定スリット60a、移動スリット60bにより被測 定体(図示せず)の動きにより強度変調を受け、光ファイバ68を経由してフェ ルール69により保持された端部から射出されて信号用光センサ70に導かれ、 この信号用光センサ70により電気信号に変換される。この信号は、信号回路7 6に入力され、この信号回路76において適切に増幅されその信号に基づいて被 測定体の動きが検出される。 Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic configuration diagram of an encoder according to an embodiment of the present invention. The encoder 50 is provided with an LED 52. The encoder 50 is also provided with an optical fiber 54 that transmits light to the sensor unit 60 and an optical fiber 56 that guides light to the monitoring optical sensor 66. The LEDs 52 of these optical fibers 54 and 56 are provided. The end portions on the side are collectively held by a ferrule 58 so that the light emitted from the LED 52 is incident on both ends at the same time. The light emitted from the LED 52 and incident on the optical fiber 54 is transmitted to the sensor unit 60, and the transmitted light is measured by a fixed slit 60a and a moving slit 60b provided in the sensor unit 60 (not shown). Is subjected to intensity modulation by the movement of the optical fiber, is emitted from the end held by the ferrule 69 via the optical fiber 68, is guided to the signal optical sensor 70, and is converted into an electric signal by the signal optical sensor 70. .. This signal is input to the signal circuit 76, is appropriately amplified in the signal circuit 76, and the movement of the measured object is detected based on the signal.

【0012】 一方、光ファイバ56に入射した光はこの光ファイバ56内を通ってフェルー ル57に保持された端部から射出され、モニタ用光センサ66により受光されて モニタ信号に変換され、このモニタ信号は制御回路78に入力され、この制御回 路78は入力されたモニタ信号に基づいてLED52の発光光量が常に一定とな るようにLED52を制御する。ここで、このモニタ信号は、LED52そのも ので発せられた光を受光することにより得られた信号であるため、この信号に基 づいてLED52の発光光量の経時変化、温湿度による変化をそのまま補正する ことができ、したがって信号用光センサ70で得られる信号も安定し、高精度の 測定が可能なエンコーダが実現する。尚、制御回路78は、モニタ用光センサ6 6で得られたモニタ信号に基づいて、上記のようにLED52の発光光量を制御 してもよく、信号回路76における、信号用光センサ70で得られた信号の増幅 率を制御してもよく、これら発光光量と増幅率との双方を制御してもよい。尚、 センサ部60に光を伝送する光ファイバ54、センサ部60から光を戻すための 光ファイバ68は、上記実施例では各1本ずつ備えられているが、これらの光フ ァイバ54、68は各1本ずつである必要はなく、測定原理、センサ部60の構 造等に応じてそれぞれ複数本備えてもよいことはいうまでもない。On the other hand, the light incident on the optical fiber 56 passes through the inside of the optical fiber 56, is emitted from the end portion held by the ferrule 57, is received by the monitoring optical sensor 66, and is converted into a monitor signal. The monitor signal is input to the control circuit 78, and the control circuit 78 controls the LED 52 based on the input monitor signal so that the emitted light amount of the LED 52 is always constant. Since this monitor signal is a signal obtained by receiving the light emitted by the LED 52 itself, the change over time in the amount of light emitted from the LED 52 and the change due to temperature and humidity are directly corrected based on this signal. Therefore, the signal obtained by the signal light sensor 70 is stable, and an encoder capable of highly accurate measurement is realized. The control circuit 78 may control the amount of light emitted from the LED 52 based on the monitor signal obtained by the monitor optical sensor 66 as described above. The amplification factor of the generated signal may be controlled, or both the amount of emitted light and the amplification factor may be controlled. The optical fiber 54 for transmitting light to the sensor section 60 and the optical fiber 68 for returning the light from the sensor section 60 are provided one by one in the above embodiment, but these optical fibers 54, 68 are provided. Needless to say, it is not necessary to provide one each, and it is needless to say that a plurality of each may be provided depending on the measurement principle, the structure of the sensor unit 60, and the like.

【0013】 また上記実施例はエンコーダの例であるが、本考案の光ファイバセンサはエン コーダに限らず、光ファイバを用いて光を伝送してして被測定体の物理量を測定 する各種装置に適用することができるものである。Although the above embodiment is an example of an encoder, the optical fiber sensor of the present invention is not limited to an encoder, but various devices for transmitting light using an optical fiber to measure a physical quantity of a measured object. Can be applied to.

【0014】[0014]

【考案の効果】[Effect of the device]

以上説明したように、本考案の光ファイバセンサは、1つの光源から発せられ た光を分岐して一方は測定用として用い他方はモニタ用として用いるようにした ため、光量及び/又は信号の増幅率を高精度に制御することができ、高精度のセ ンサとなる。また従来と比べ光源の数が少なくて済み、低コスト化を図ることも できる。 As explained above, in the optical fiber sensor of the present invention, the light emitted from one light source is branched and one is used for measurement and the other is used for monitoring. The rate can be controlled with high precision, resulting in a high precision sensor. In addition, the number of light sources is smaller than in the past and the cost can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本考案の一実施例に係るエンコーダの概略構成
図である。
FIG. 1 is a schematic configuration diagram of an encoder according to an embodiment of the present invention.

【図2】従来のエンコーダの概略構成図である。FIG. 2 is a schematic configuration diagram of a conventional encoder.

【符号の説明】[Explanation of symbols]

50 エンコーダ 52 LED 54,56,68 光ファイバ 57,58,69 フェルール 66 モニタ用光センサ 70 信号用光センサ 76 信号回路 78 制御回路 50 encoder 52 LED 54, 56, 68 optical fiber 57, 58, 69 ferrule 66 monitor optical sensor 70 signal optical sensor 76 signal circuit 78 control circuit

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 光ファイバにより、光を用いて被測定体
の物理量を測定するセンサ部に光を伝送し、該センサ部
から、光ファイバにより、該物理量を担持する光を導い
て受光する光ファイバセンサにおいて、 光源と、 モニタ用光検出器を備えたモニタ用受光部と、 信号用光検出器を備えた信号用受光部と、 前記光源から射出された光が双方に同時に入射されるよ
うに前記光源側の各端部を纏めて保持するフェルールを
備えた、前記光源と前記センサ部との間に延び、前記光
源から射出された光を前記センサ部に伝送する1本もし
くは複数本の第1光ファイバ、及び前記光源と前記モニ
タ用受光部との間に延び、前記光源から射出された光を
前記モニタ用光検出器に導く第2光ファイバと、 前記センサ部と前記信号用受光部との間に延び、前記物
理量を担持する光を前記信号用光検出器に導く1本もし
くは複数本の第3光ファイバと、 前記モニタ用光検出器で得られたモニタ信号に基づい
て、前記光源から射出される光の光量及び/又は前記信
号用光検出器で得られた信号の増幅率を制御する制御回
路とを備えたことを特徴とする光ファイバセンサ。
1. An optical fiber transmits light to a sensor unit for measuring a physical quantity of an object to be measured by using light, and the optical fiber guides the light carrying the physical quantity from the sensor unit to receive the light. In a fiber sensor, a light source, a monitor light-receiving unit having a monitor photodetector, a signal light-receiving unit having a signal photodetector, and light emitted from the light source are incident on both at the same time. A ferrule that holds the end portions on the light source side together, extends between the light source and the sensor portion, and transmits one or more light emitted from the light source to the sensor portion. A first optical fiber, and a second optical fiber extending between the light source and the monitor light-receiving unit and guiding the light emitted from the light source to the monitor photodetector; the sensor unit and the signal light-receiving unit Extends between the front and One or a plurality of third optical fibers for guiding the light carrying the physical quantity to the signal photodetector, and the light emitted from the light source based on the monitor signal obtained by the monitor photodetector. An optical fiber sensor, comprising: a control circuit for controlling an amount of light and / or an amplification factor of a signal obtained by the signal photodetector.
JP2270592U 1992-04-10 1992-04-10 Optical fiber sensor Pending JPH0581649U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2270592U JPH0581649U (en) 1992-04-10 1992-04-10 Optical fiber sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2270592U JPH0581649U (en) 1992-04-10 1992-04-10 Optical fiber sensor

Publications (1)

Publication Number Publication Date
JPH0581649U true JPH0581649U (en) 1993-11-05

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2270592U Pending JPH0581649U (en) 1992-04-10 1992-04-10 Optical fiber sensor

Country Status (1)

Country Link
JP (1) JPH0581649U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022191201A1 (en) * 2021-03-10 2022-09-15 長野計器株式会社 Physical quantity measurement device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61275632A (en) * 1985-05-31 1986-12-05 Toshiba Corp Pressure measuring instrument
JPH02206430A (en) * 1989-02-03 1990-08-16 Canon Inc Blood flowmeter

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61275632A (en) * 1985-05-31 1986-12-05 Toshiba Corp Pressure measuring instrument
JPH02206430A (en) * 1989-02-03 1990-08-16 Canon Inc Blood flowmeter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022191201A1 (en) * 2021-03-10 2022-09-15 長野計器株式会社 Physical quantity measurement device

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