JPH0579908A - Pyroelectric element - Google Patents

Pyroelectric element

Info

Publication number
JPH0579908A
JPH0579908A JP31555591A JP31555591A JPH0579908A JP H0579908 A JPH0579908 A JP H0579908A JP 31555591 A JP31555591 A JP 31555591A JP 31555591 A JP31555591 A JP 31555591A JP H0579908 A JPH0579908 A JP H0579908A
Authority
JP
Japan
Prior art keywords
pyroelectric
electrodes
electrode
electrode portion
pyroelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31555591A
Other languages
Japanese (ja)
Other versions
JP2753905B2 (en
Inventor
Masao Inoue
雅央 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Ltd filed Critical Nohmi Bosai Ltd
Priority to JP3315555A priority Critical patent/JP2753905B2/en
Priority to PCT/JP1992/001211 priority patent/WO1993006444A1/en
Priority to EP92920398A priority patent/EP0558766B1/en
Priority to DE69219453T priority patent/DE69219453T2/en
Priority to US08/066,146 priority patent/US5420426A/en
Publication of JPH0579908A publication Critical patent/JPH0579908A/en
Application granted granted Critical
Publication of JP2753905B2 publication Critical patent/JP2753905B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To provide a pyroelectric element having corrosion resistance and excellent durability when it is used for a flame detector. CONSTITUTION:Electrodes 10, 11 formed by deposition and the like on the upper and lower faces of a pyroelectric body 1 are divided into absorbing electrode sections 10c, 11c and extracting electrodes 10d, lid. The electrodes 10, 11 rarely having a short circuit at boundary portions of conducting adhesives 12, 13 are obtained while the thickness or material of them is changed and an infrared absorbing function is provided.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、赤外線を検出する炎感
知器などに使用される焦電素子に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pyroelectric element used in a flame detector for detecting infrared rays.

【0002】[0002]

【従来の技術】近年、赤外線センサや感熱素子として、
焦電素子が広く用いられている。この焦電素子に使用さ
れる焦電体は、一般に自発分極を有する高分子材料やセ
ラミック材料等からなり、焦電体の膜の両面に電極を形
成すると、温度変化により電極間に電位差を発生する作
用がある。一般に赤外線センサは、このような焦電素子
により入射する赤外線による熱量に応じた電圧を発生さ
せ、これを適宜増幅して炎や人体を検出する。
2. Description of the Related Art In recent years, as infrared sensors and heat-sensitive elements,
Pyroelectric elements are widely used. The pyroelectric body used in this pyroelectric element is generally made of a polymer material or a ceramic material having spontaneous polarization. When electrodes are formed on both sides of the pyroelectric film, a potential difference occurs between the electrodes due to temperature change. There is an action. In general, an infrared sensor generates a voltage according to the amount of heat of incident infrared rays by such a pyroelectric element and appropriately amplifies this voltage to detect a flame or a human body.

【0003】このような焦電素子の一例として、図6に
断面図を示すような素子がある。焦電体1は、PZT、
タンタル酸リチウム、チタン酸鉛、PVDFおよびその
コポリマ等の焦電材料をフィルム状にしたものであり、
枠状のその基台となる素子基板2を介してプリント基板
3に載置されており、同様にプリント基板3には、焦電
体1の電位差を取り出すためのFET等による電気回路
部4が構成されている。この基台2およびプリント基板
3の材質にはアルミナが使用されている。
As an example of such a pyroelectric element, there is an element whose cross-sectional view is shown in FIG. The pyroelectric body 1 is PZT,
A film made of pyroelectric material such as lithium tantalate, lead titanate, PVDF and its copolymer,
The printed circuit board 3 is mounted on the printed circuit board 3 via the frame-shaped element substrate 2 serving as a base. Similarly, the printed circuit board 3 is provided with an electric circuit section 4 such as an FET for extracting the potential difference of the pyroelectric body 1. It is configured. Alumina is used as the material of the base 2 and the printed circuit board 3.

【0004】プリント基板3は、ステム5を貫通(必要
に応じて絶縁体6を介する)する3本の端子7の先端に
接続され、その周囲をフィルタ8による窓を有するキャ
ン9により気密に覆われている。フィルタ8は、シリコ
ン等の赤外線透過能を有する材質が用いられ、フィルタ
8と鉄鋼等の金属製のステム5およびキャン9によりシ
ールド作用がなされている。
The printed circuit board 3 is connected to the ends of three terminals 7 that penetrate the stem 5 (via an insulator 6 if necessary), and the periphery thereof is airtightly covered by a can 9 having a window formed by a filter 8. It is being appreciated. The filter 8 is made of a material having infrared transmissivity such as silicon, and is shielded by the filter 8, the metal stem 5 such as steel, and the can 9.

【0005】焦電体1近傍について図5の概略的拡大図
により詳しく説明すると、焦電体1の上下面には、鍵穴
形の電極10、11が蒸着などにより形成され、その円
形部10a、11aは、重なる位置にされている。そし
て、その突出部10b、11bが円形部10a、11a
から焦電体1の左右の端まで形成されている。電極1
0、11の材質には、ニッケル・クロム合金、金黒等の
赤外線吸収材料が使用されている。
The vicinity of the pyroelectric body 1 will be described in detail with reference to the schematic enlarged view of FIG. 5. Keyhole-shaped electrodes 10 and 11 are formed on the upper and lower surfaces of the pyroelectric body 1 by vapor deposition or the like, and circular portions 10a, 11a is located at an overlapping position. The protruding portions 10b and 11b are circular portions 10a and 11a.
To the left and right ends of the pyroelectric body 1. Electrode 1
An infrared absorbing material such as nickel-chromium alloy or gold black is used as the material of 0 and 11.

【0006】焦電体1、基台2、プリント基板3は、そ
れぞれ適切な材質により接着固定されており、焦電体1
上下面の電極10、11と、プリント基板3の図示しな
い回路パターンとの間は、導電性接着剤12、13の塗
布により、導通がとられている。導電性接着剤12、1
3には、銀フィラーが混入されているものなどが使用さ
れる。
The pyroelectric body 1, the base 2 and the printed circuit board 3 are adhered and fixed to each other by an appropriate material.
The electrodes 10 and 11 on the upper and lower surfaces and a circuit pattern (not shown) of the printed circuit board 3 are electrically connected by applying conductive adhesives 12 and 13. Conductive adhesive 12, 1
As 3, there is used a material containing a silver filler.

【0007】[0007]

【発明が解決しようとする課題】このような焦電素子に
おいて、焦電体1の表面に構成される電極10、11に
は、焦電体1への電気的な接続の作用とともに、更に焦
電体1に入射した赤外線を閉じ込める作用がある。即
ち、理想的には、受光面の電極10は、赤外線を反射せ
ずに吸収し、その背面の電極11は、赤外線を透過させ
ずに反射させることにより、焦電体1への赤外線吸収効
率を向上させる。従って、電極10、11は、個々に最
適な所定の厚みにされている。
In such a pyroelectric element, the electrodes 10 and 11 formed on the surface of the pyroelectric body 1 are further connected to the pyroelectric body 1 by the action of electrical connection. It has a function of confining infrared rays incident on the electric body 1. That is, ideally, the electrode 10 on the light-receiving surface absorbs infrared light without reflecting it, and the electrode 11 on the back surface reflects infrared light without transmitting it, whereby the infrared absorption efficiency to the pyroelectric body 1 is increased. Improve. Therefore, each of the electrodes 10 and 11 has a predetermined optimum thickness.

【0008】電極10、11には、導電性接着剤12、
13が塗布され、その硬化時に電極10、11に対して
張力がかかる。電極10、11は、赤外線吸収作用のた
め、厚くすることは不可能で、腐食や振動等により、薄
くて細くなっている電極10、11と接着剤12、13
との境界面において簡単に切断されてしまうことがあ
る。特に赤外線を検出することによる炎感知器にこのよ
うな焦電素子を使用する場合、耐久性に関する規定が厳
しいのみならず、実際の設置環境が極めて悪条件の場合
もあり、故障の原因となる。
A conductive adhesive 12,
13 is applied, and tension is applied to the electrodes 10 and 11 when it is cured. Since the electrodes 10 and 11 cannot absorb the infrared rays, the electrodes 10 and 11 and the adhesives 12 and 13 are thin and thin due to corrosion or vibration.
It may be easily cut at the boundary surface with. In particular, when using such a pyroelectric element for a flame sensor that detects infrared rays, not only the stipulations regarding durability are strict, but the actual installation environment may be extremely bad conditions, which may cause failure. ..

【0009】[0009]

【課題を解決するための手段】本発明は、上記の点に鑑
みなされたものであり、第1発明として、焦電体1の上
下面に電極10、11を形成する際に、吸収電極部10
c、11cを薄層に構成し、引出電極部10d、11d
を吸収電極部10d、11dより厚く構成するものであ
る。
The present invention has been made in view of the above points, and as a first invention, when the electrodes 10 and 11 are formed on the upper and lower surfaces of the pyroelectric body 1, the absorbing electrode portion is formed. 10
c and 11c are formed in a thin layer, and the extraction electrode portions 10d and 11d are formed.
Is thicker than the absorption electrode portions 10d and 11d.

【0010】また、第2発明として、吸収電極部10
e、11eの材質にニッケル・クロム合金などの赤外線
吸収材料を、引出電極部10f、11fの材質に他の材
質として白金などの良導体あるいは耐食性の導電材料を
使用するものである。
Further, as a second invention, the absorbing electrode portion 10
An infrared absorbing material such as nickel-chromium alloy is used as the material of e and 11e, and a good conductor such as platinum or a conductive material having corrosion resistance is used as the material of the extraction electrode portions 10f and 11f.

【0011】[0011]

【作用】第1発明においては、電極10、11の形成を
二段階に行ってその厚みを変えること、第2発明におい
ては、電極10、11の形成の際に材質を2種類用いる
ことにより、焦電体1の赤外線吸収効率を減少させるこ
となく、導電性接着剤12、13の塗布による電極1
0、11とプリント基板3との電気的接続を確実なもの
とする。
In the first aspect of the invention, the electrodes 10 and 11 are formed in two steps to change the thickness thereof. In the second aspect of the invention, when the electrodes 10 and 11 are formed, two kinds of materials are used. The electrode 1 formed by applying the conductive adhesives 12 and 13 without reducing the infrared absorption efficiency of the pyroelectric body 1.
The electrical connection between 0 and 11 and the printed circuit board 3 is ensured.

【0012】また、電極10、11の材質には、焦電体
1への赤外線吸収材料として、ニッケル・クロム合金、
金黒、ニッケル、金、インジウム・アンチモン等を、ま
た導電性接着剤12、13への良導体あるいは耐食性の
導電材料として、白金、アルミニウム、金、銀、銅等を
用いることができる。
The electrodes 10 and 11 are made of nickel-chromium alloy as an infrared absorbing material for the pyroelectric body 1,
Gold black, nickel, gold, indium antimony, or the like can be used, and platinum, aluminum, gold, silver, copper, or the like can be used as a good conductor or a corrosion-resistant conductive material for the conductive adhesives 12 and 13.

【0013】[0013]

【実施例】以下、本発明による実施例について説明す
る。図1は、本発明による焦電素子の内部の平面図、図
2は、第1実施例を示す図1の概略的断面図、図3およ
び図4は、第2実施例を示す図2同様の断面図である。
図5および図6と同一部分または相当部分には、同一符
号を付し、説明を省略する。
EXAMPLES Examples according to the present invention will be described below. 1 is a plan view of the inside of a pyroelectric element according to the present invention, FIG. 2 is a schematic sectional view of FIG. 1 showing a first embodiment, and FIGS. 3 and 4 are the same as FIG. 2 showing a second embodiment. FIG.
The same or corresponding parts as those in FIGS. 5 and 6 are designated by the same reference numerals, and the description thereof will be omitted.

【0014】第1実施例において、電極10、11は、
焦電体1の上下面に形成されていて、図1の如く、表面
上には焦電体1を介して円形の吸収電極部10c、11
cが重なって見え、その左右に引出電極部10d、11
dが突出している。導電性接着剤12、13は、引出電
極部10d、11dの部分に着けられるとともに、その
下方に位置するプリント基板3の図示しない回路パター
ンに電気的に接続されている。
In the first embodiment, the electrodes 10 and 11 are
The absorption electrodes 10c, 11 are formed on the upper and lower surfaces of the pyroelectric body 1 and have circular absorption electrode portions 10c, 11 on the surface through the pyroelectric body 1 as shown in FIG.
c appear to overlap, and the extraction electrode parts 10d and 11
d is protruding. The conductive adhesives 12 and 13 are attached to the lead electrode portions 10d and 11d, and are electrically connected to a circuit pattern (not shown) of the printed circuit board 3 located below the lead electrode portions 10d and 11d.

【0015】電極10を作成する場合、まず焦電体1の
片面に所定の厚みの薄層を鍵穴形に蒸着等により形成す
る。その後、その円形から突出する部分上のみに同様に
して更に積層する。すると、円形部分には、所定の厚さ
の吸収電極部10cが、突出部分には、円形部分よりも
厚みを有する引出電極部10dが構成される。電極11
も電極10と同様に作成する。その結果、幅が細く形成
される引出電極部10d、11dの伝導性や耐久性が改
善される。
When the electrode 10 is formed, first, a thin layer having a predetermined thickness is formed on one surface of the pyroelectric body 1 in a keyhole shape by vapor deposition or the like. After that, further lamination is similarly performed only on the portion protruding from the circle. Then, the absorption electrode portion 10c having a predetermined thickness is formed in the circular portion, and the extraction electrode portion 10d having a thickness larger than that of the circular portion is formed in the protruding portion. Electrode 11
Also, the electrode 10 is formed similarly to the electrode 10. As a result, the conductivity and durability of the lead-out electrode portions 10d and 11d formed to have a small width are improved.

【0016】電極10、11の作成方法は、上記に限ら
ず、先に突出部分(引出電極部10d、11d)にある
程度の層を作成して、その上に所定の厚みになるように
吸収電極部10c、11cを作成してもよい。更に両者
を個々に作成してもよい。
The method of forming the electrodes 10 and 11 is not limited to the above, and a layer to some extent is first formed on the projecting portions (lead-out electrode portions 10d and 11d), and the absorbing electrode is formed thereon to have a predetermined thickness. The parts 10c and 11c may be created. Further, both may be created individually.

【0017】第2実施例において、電極10、11等の
構成および作成方法は、第1実施例とほぼ同じであり、
異なる点は、蒸着等による鍵穴形の1回目の薄層(吸収
電極部10e、11e)作成時には、その材質をニッケ
ル・クロム合金などの赤外線吸収材料を円形に用い、突
出部分(引出電極部10f、11f)に対する積層時に
は、その材質を白金などの良導体または耐食性の他の材
料を用い円形部分の端部に重ねることである。従って、
表面上、鍵穴形の円形部分(吸収電極部10e、11
e)にはニッケル・クロム合金が、突出部分(引出電極
部10f、11f)には白金が見えることになり、導電
性接着剤12、13は、白金の部分に塗布される。その
結果、第1実施例同様に引出電極部10f、11fの伝
導性や耐久性が改善される。また、鍵穴形にニッケル・
クロム合金を形成し、その上に白金を形成してもよい。
In the second embodiment, the structure of the electrodes 10 and 11 and the method of making them are almost the same as in the first embodiment.
The difference is that when a keyhole-shaped first thin layer (absorption electrode portions 10e, 11e) is formed by vapor deposition or the like, an infrared absorbing material such as nickel-chromium alloy is used in a circular shape, and the protruding portion (extraction electrode portion 10f , 11f) is laminated on the end of the circular portion using a good conductor such as platinum or another material having corrosion resistance. Therefore,
On the surface, a keyhole-shaped circular portion (absorption electrode portions 10e, 11
The nickel-chromium alloy is visible in e) and platinum is visible in the protruding portions (lead-out electrode portions 10f and 11f), and the conductive adhesives 12 and 13 are applied to the platinum portions. As a result, the conductivity and durability of the extraction electrode portions 10f and 11f are improved as in the first embodiment. In addition, the keyhole shape is nickel
A chromium alloy may be formed and platinum may be formed thereon.

【0018】電極10、11の作成方法については、第
1実施例の如く種々の方法があり、最終的に焦電体1の
受光面にニッケル・クロム合金、導電性接着剤12、1
3の接合面に白金が配置されていればよい。
There are various methods for forming the electrodes 10 and 11 as in the first embodiment. Finally, a nickel-chromium alloy and a conductive adhesive 12, 1 are formed on the light receiving surface of the pyroelectric body 1.
It suffices that platinum is arranged on the joint surface of No. 3.

【0019】以上、各実施例において、電極10、11
の形状は上記に限らず、吸収電極部10c、10e、1
1c、11eは、焦電体1の受光面に広く形成されてよ
く、引出電極部10d、10f、11d、11fは、導
電性接着剤12、13が接合する部分のみでよく、電極
10、11を同じに構成する必要がないことは、勿論で
ある。
As described above, in each embodiment, the electrodes 10, 11
The shape of is not limited to the above, but the absorption electrode portions 10c, 10e, 1
1c and 11e may be widely formed on the light receiving surface of the pyroelectric body 1, and the extraction electrode portions 10d, 10f, 11d and 11f may be only the portions where the conductive adhesives 12 and 13 are joined, and the electrodes 10 and 11 may be formed. Needless to say, it is not necessary to configure the same.

【0020】[0020]

【発明の効果】本発明は、焦電素子における焦電材料の
薄膜の上下面に構成する電極に関し、電極の厚みを、ま
たは、電極の材質を部分毎に変えることにより、腐食に
強く耐久性に優れた焦電素子が得られる効果がある。
INDUSTRIAL APPLICABILITY The present invention relates to an electrode formed on the upper and lower surfaces of a thin film of a pyroelectric material in a pyroelectric element. By changing the thickness of the electrode or the material of the electrode for each part, it is resistant to corrosion and durable. There is an effect that an excellent pyroelectric element is obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例による焦電素子の内部の平
面図。
FIG. 1 is a plan view of the inside of a pyroelectric element according to a first embodiment of the present invention.

【図2】図1の概略的な断面図。2 is a schematic cross-sectional view of FIG.

【図3】本発明の第2実施例による図2同様の断面図。FIG. 3 is a sectional view similar to FIG. 2 according to a second embodiment of the present invention.

【図4】第2実施例の他の構成を示す図2同様の断面
図。
FIG. 4 is a sectional view similar to FIG. 2, showing another configuration of the second embodiment.

【図5】従来例を示す図2同様の断面図。5 is a sectional view similar to FIG. 2 showing a conventional example.

【図6】焦電素子の全体の構造を示す縦断面図。FIG. 6 is a vertical sectional view showing the overall structure of a pyroelectric element.

【符号の説明】[Explanation of symbols]

1 焦電体 3 プリント基板 10、11 電極 12、13 導電性接着剤 1 Pyroelectric body 3 Printed circuit board 10, 11 Electrode 12, 13 Conductive adhesive

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 焦電材料による薄膜の上下面に、円形等
の薄層に形成される吸収電極部と、それに連通して該吸
収電極部よりも厚い層に形成される引出電極部と、から
なる電極が構成されていることを特徴とする焦電素子。
1. An absorption electrode portion formed in a thin layer such as a circle on the upper and lower surfaces of a thin film made of a pyroelectric material, and an extraction electrode portion which is formed in a layer thicker than the absorption electrode portion in communication therewith. A pyroelectric element comprising an electrode made of
【請求項2】 焦電材料による薄膜の上下面に、円形等
の薄層に形成される赤外線吸収材料を材質とする吸収電
極部と、それに連通して形成される他の導電材料を材質
とする引出電極部と、からなる電極が構成されているこ
とを特徴とする焦電素子。
2. An absorption electrode portion made of infrared absorbing material formed in a thin layer such as a circle on the upper and lower surfaces of a thin film made of a pyroelectric material, and another conductive material formed in communication with the absorbing electrode portion. And a lead electrode section for forming an electrode.
【請求項3】 吸収電極部の材質がニッケル・クロム合
金または金黒である請求項1または2の焦電素子。
3. The pyroelectric element according to claim 1, wherein the material of the absorbing electrode portion is nickel-chromium alloy or gold black.
【請求項4】 引出電極部の材質が貴金属またはアルミ
ニウムである請求項1または2の焦電素子。
4. The pyroelectric element according to claim 1, wherein the material of the extraction electrode portion is noble metal or aluminum.
JP3315555A 1991-09-24 1991-09-24 Pyroelectric element Expired - Fee Related JP2753905B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP3315555A JP2753905B2 (en) 1991-09-24 1991-09-24 Pyroelectric element
PCT/JP1992/001211 WO1993006444A1 (en) 1991-09-24 1992-09-24 Pyroelectric element
EP92920398A EP0558766B1 (en) 1991-09-24 1992-09-24 Pyroelectric element
DE69219453T DE69219453T2 (en) 1991-09-24 1992-09-24 PYROELECTRIC ELEMENT
US08/066,146 US5420426A (en) 1991-09-24 1992-09-24 Pyroelectric device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3315555A JP2753905B2 (en) 1991-09-24 1991-09-24 Pyroelectric element

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11237279A (en) * 1998-02-19 1999-08-31 Matsushita Electric Works Ltd Pyroelectric infrared detection element
WO2006009174A1 (en) * 2004-07-20 2006-01-26 Murata Manufacturing Co., Ltd. Infrared sensor and method for manufacturing same
JP2015064219A (en) * 2013-09-24 2015-04-09 株式会社センサーズ・アンド・ワークス Pyroelectric infrared sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180434U (en) * 1982-05-28 1983-12-02 松下電器産業株式会社 Pyroelectric infrared sensor
JPS6069524A (en) * 1984-07-27 1985-04-20 Matsushita Electric Ind Co Ltd Infrared ray detecting element
JPS61170626A (en) * 1985-01-24 1986-08-01 Matsushita Electric Ind Co Ltd Infrared linear array element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180434U (en) * 1982-05-28 1983-12-02 松下電器産業株式会社 Pyroelectric infrared sensor
JPS6069524A (en) * 1984-07-27 1985-04-20 Matsushita Electric Ind Co Ltd Infrared ray detecting element
JPS61170626A (en) * 1985-01-24 1986-08-01 Matsushita Electric Ind Co Ltd Infrared linear array element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11237279A (en) * 1998-02-19 1999-08-31 Matsushita Electric Works Ltd Pyroelectric infrared detection element
WO2006009174A1 (en) * 2004-07-20 2006-01-26 Murata Manufacturing Co., Ltd. Infrared sensor and method for manufacturing same
US7629581B2 (en) 2004-07-20 2009-12-08 Murata Manufacturing Co., Ltd. Infrared sensor and method of producing the same
JP2015064219A (en) * 2013-09-24 2015-04-09 株式会社センサーズ・アンド・ワークス Pyroelectric infrared sensor

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