JPH057984U - Fluid machinery - Google Patents

Abstract

(57) [Abstract] [Purpose] In a scroll type vacuum pump, the eccentric shafts of the driving scroll and the driven scroll must rotate synchronously with each other, and the conventional technique requires an arm, an Oldham coupling, etc. I was trying. However, since the Oldham coupling and the arm are in sliding contact, oil that is a lubricant is indispensable. In order to operate this in a dry (without using lubricating oil) system, synchronous rotation must be performed without sliding contact. [Composition] Outer periphery of driven scroll (18) and driven scroll
The rotors (40b, c) are fixed to the outer circumference of (21) respectively, and a stator (40a) having an eccentric center is installed by opening a gap. Further, a can (thin plate) is installed inside the stator to protect it.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a drive scroll and a driven scroll that are rotationally driven by a motor, and a device that rotationally drives an eccentric shaft.

[0002]

[Prior Art]

 FIG. 4 is a cross-sectional view of the scroll pump disclosed in, for example, Japanese Patent Laid-Open No. 2-81983. In the figure, (11) is a motor, the rotating shaft (11a) of which is projected downward, (12) is an upper casing which constitutes the exhaust chamber B, and an exhaust port (13) is attached to the vacuum container (14). ), Install the intake port (15). (16) is a lower casing, (17) is a lower cover, (18) is a drive scroll, and the shaft portion (18a) protrudes from the upper casing (12) and the lower casing (16) and the upper casing. It is rotatably supported on (12) via bearings (20) and (23). Reference numeral (21) is a driven scroll that cooperates with the drive scroll (18) to form the compression chamber (A), and the shaft portion (21a) is mounted on the lower cover (17) via the bearing (22) to allow the drive scroll ( It is rotatably supported at a position eccentric to the axis of 18). (24) is an arm (24a) connected to the drive scroll (18) by an Oldham coupling that rotatably connects the drive scroll (18) and the driven scroll (21) to each other, and the driven scroll (21). It is composed of a joint (24b) connected to. (25) is a coupling, (26) and (27) are O-rings, (30) is a lubricating oil, (31) and (32) are oil seals, and (33) is a vane pump.

The conventional scroll pump is configured as described above. For example, the rotation of the motor (11) causes the drive scroll (18) to rotate and the driven scroll (21) to eccentrically rotate via the Oldham coupling (24). Therefore, the gas compressed by each scroll (18) (21) is discharged into the upper casing (12) through the exhaust passage (29). Therefore, the gas in the vacuum container (14) is sucked into the scrolls (18) and (21) through the intake port (15) → the intake passage (12a) → the lower casing (16). Then, it is discharged into the outer casing (12). Further, the gas in the upper casing (12) is exhausted to the outside of the machine body through the exhaust port (13).

[0004]

[Problems to be solved by the device]

 The conventional scroll pump as described above rotates synchronously with the coupling (25) and the drive scroll (18) as the motor (11) rotates, but the eccentric driven scroll (21) is driven by the Oldham coupling. (24) The Oldham joint (24), which is driven via the arm (24a), must slide the movement amount for eccentric rotation at the connecting portion with the arm (24a). In addition, lubricating oil had to be used to slide it.

The present invention has been made in order to solve such a problem, and a driven scroll having an axis eccentric to a drive scroll is synchronously rotated without using a joint or an arm, and a scroll is also used. The purpose is to prevent contact between parts and to obtain a pumping action. Furthermore, the purpose is to use a can (thin plate) for the stator part of the motor used in the device and take out the stator that causes heat generation outside the container. There is.

[0006]

[Means for Solving the Problems]

 In the scroll pump according to the present invention, the motor is arranged around the driving scroll and the driven scroll, and the Oldham joint and the arm are eliminated.

Further, the rotor part of the motor part is a permanent magnet on a cylinder, and the S pole and the N pole are evenly arranged, and they are attached in a range where they do not come into contact with the outer circumferences of the drive scroll and the driven scroll.

In addition, since the motor portion stator member corresponds to the eccentric shaft, an eccentric stator corresponding to the drive scroll and the driven scroll is used.

Further, a non-magnetic can (thin plate) is attached to the inner diameter of the motor stator to keep the stator, which has a heat generation factor, outside the vacuum container to prevent the temperature inside the container from rising and at the same time from the stator itself. The generated gases can be deleted.

Further, as shown in FIG. 3, the same magnetic poles are installed in the same phase portion on the outer diameters of the driving scroll and the driven scroll, but this is when the loads of both scrolls are the same, and the scroll on one side is When many components are installed and the load becomes large, the rotor can be displaced by that amount and arranged so that the magnetic flux corresponding to the load is output, and the same phase can be maintained.

[0011]

[Action]

 When the scroll pump configured as described above is rotated by the motor attached to the outer periphery of the drive scroll and the driven scroll, the magnetic flux generated from the stator of the motor portion is attached to the outer periphery of the drive scroll and the driven scroll. It acts on the permanent magnet and starts to rotate synchronously. In this case, neither the Oldham joint nor the arm is needed, and the sliding part will be eliminated. Pumping is performed by the driven and driven scrolls that rotate synchronously.

Further, by forming a can (thin plate) in the stator inner diameter of the motor part, the stator part is taken out from the inside of the vacuum vessel, and the heat generating part is placed in the atmosphere. Release can also be prevented.

[0013]

【Example】

 Example 1. 1 and 2 are cross-sectional views showing an embodiment of the present invention, in which (18) is a drive scroll supported by bearings (43a) and (43b), and similarly a driven scroll (21) which is free to orbit. Are supported by bearings (42a) and (42b). Oil seals (45), (46) are used to seal the bearing lubricating oil. The rotor portion is fixed to the outer circumferences of the drive scroll (18) and the driven scroll (21), and the stator (40a) is attached to the casing (44) with a certain gap. Further, a can (thin plate) is attached between the stator (40a) and the rotors (40b) and (40c).

The scroll vacuum pump configured as described above has permanent magnets attached to the outer periphery of the drive scroll (18) and the driven scroll (21) when a current flows through the stator (40a) having an eccentric shaft. The rotor rotates synchronously. In this way, the compression stroke can be smoothly performed by applying the force of synchronous rotation to both scrolls. Furthermore, by sealing the inside of the stator with a can (47), it is possible to bring the stator, which is the heat source, from the vacuum chamber to the outside.

Example 2. In the first embodiment, the rotor is fixed to the outer circumference of the scroll pump with the stator of the permanent magnet. However, due to space limitations, if the corresponding shaft is to be used while being eccentric, a general die casting A rotor may be used.

In the first embodiment described above, the can is provided in the gap between the stator and the rotor. However, when there is a margin in the temperature of the stator, the can itself may be left inside without installing the can.

By the way, although the invention has been limited to the scroll vacuum pump in the above description, there is also a method in which the rotor is fixed to the outer periphery of the scroll and the stator of the permanent magnet is fixed to the scroll compressor. Even in this case, the Oldham joint and the arm are not required, and the number of mechanical parts is reduced, so that the size and weight are reduced.

[0018]

[Effect of the device]

 Since the present invention is configured as described above, it has the following effects.

By installing the rotor of the motor in the scroll part and installing the stator with a gap, synchronous rotation is possible, parts such as Oldham's joints and arms are not required, and smooth rotation is possible.

In addition, the Oldham coupling and the arm were in sliding contact with each other, and lubricating oil was required. However, with the above-mentioned configuration, this component is not required, so that a dry method without oil is used. It becomes possible to drive.

Further, by using a can on the inner circumference of the motor section stator, the stator, which is also a heat source, can be placed outside the vacuum chamber, and no heat countermeasure is required.

Further, by exposing the stator to the outside of the vacuum chamber, it is possible to discharge the influence of the gas released from the stator itself.

Further, even if a corrosive gas enters the vacuum chamber, the stator part is isolated and can be protected.

[Brief description of drawings]

FIG. 1 is a sectional view showing a first embodiment of the present invention.

FIG. 2 is a drive scroll and rotor portion showing Example 1 of this consideration.

FIG. 3 is a sectional view showing a scroll pump of the present invention.

FIG. 4 is a cross-sectional view showing a conventional scroll pump.

[Explanation of symbols]

 (12) Upper casing (16) Lower casing (15) Intake port (13) Exhaust port (40a) Motor stator (40b) Motor rotor (1) (40c) Motor rotor (2) (41) Flange (42a) ) Bearing (42b) Bearing (43a), (43b) Bearing (44) Casing (45), (46) Oil seal (47) Can

Claims (1)

Claims for utility model registration: Claims: 1. A drive scroll which is supported by a bearing and rotates, and a driven scroll which is combined with the drive scroll and supported by the bearing around an eccentric shaft.
A fluid machine characterized by having magnets fixed to the outer circumferences of both scrolls and having N poles and S poles alternately arranged, and a stator mounted with a gap between the magnets on the outer circumferences as rotors.