JPH0577713U - Finely adjustable movement mechanism - Google Patents

Abstract

(57) [Summary] [Object] The present invention relates to a moving mechanism capable of coarse and fine movements, and an object of the present invention is to realize a small-sized moving mechanism capable of fine adjustment with good operability. [Structure] A shaft 1 having a first male screw portion 11 and a second male screw portion 12 having different pitches and a knob 7 for manual rotation at one end, and a first male screw portion 11 of the shaft 1 are screwed together. A distal end moving member 2 that has a first female screw portion 13 that is movable in the axial direction with respect to the main body 6 but is regulated so as not to rotate.
And a second female threaded portion 14 to be screwed with the second male threaded portion 12 of the shaft 1 is provided on the inner side and has a third male threaded portion 15 on the outer side and is movable in the axial direction with respect to the main body 6. However, it has an intermediate cylindrical member 3 which is regulated so as not to rotate and a third female screw portion 16 which is screwed into the third male screw portion 15 and is rotatable about the shaft 1 with respect to the main body 6. The rotary member 4 is held so as not to move in the axial direction, and the driving means 5 for driving the rotary member 4 is provided.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a moving mechanism capable of coarse and fine movements for adjusting a set position of a device for measuring a surface shape, and particularly to a small-sized and finely adjustable moving mechanism that can be safely operated.

[0002]

[Prior Art]

 FIG. 3 is a diagram showing a surface profile measuring machine such as a surface roughness profile measuring machine and a contour profile measuring machine. In the figure, reference numeral 36 denotes an object to be measured, and the detector 34 detects the vertical displacement when the stylus 35 is brought into contact with the surface of the object to be measured 36 and moved along the surface. Reference numeral 33 is a measurement moving unit that moves the detecting unit 34 along the surface. Reference numeral 31 is a stand, and 32 is a column for moving the measurement moving unit 33 in the vertical direction.

In the surface profile measuring machine shown in FIG. 3, the measurable displacement range of the stylus 35 is fixed, and it is impossible to measure beyond the range, and an unreasonable force is applied. In some cases, the stylus 35 may be damaged. Therefore, at the start of measurement, the measurement moving unit 33 is moved along the column 32 to adjust the position so that the change range of the surface to be measured falls within the measurement range, and then the measurement is performed.

In the surface profile measuring instrument shown in FIG. 3, the resolution of measurement can be changed according to the state of the surface to be measured, but generally, the higher the resolution, the smaller the measurement range. .. That is, when the change in the surface to be measured is large, it is not possible to perform measurement with a very high resolution, and when measuring with high resolution, the range of change in the surface must be small. Therefore, in order to perform the measurement with high resolution, the vertical position adjustment of the detection unit 34 and the measurement moving unit 33, which is performed first, also requires precise adjustment, so that the surface to be measured falls within the narrow measurement range. There is a need to.

Therefore, in the surface profilometer shown in FIG. 3, it is necessary that the mechanism for moving the measurement moving unit 33 up and down with respect to the column 32 is capable of precise adjustment. The fact that precise adjustment is possible means that the amount of movement is smaller than the amount of rotation when turning the rotary knob, for example, and differential screws are widely used to realize such functions.

The differential screw is a mechanism in which screws with different pitches are combined so as to move by the amount of two pitch differences for one rotation, and the smaller the pitch difference is, the more precise adjustment is possible. It will be possible. However, the movable amount is smaller than the screw length. There are some moving mechanisms that can be adjusted precisely, such as differential screws that use cams, but it is difficult to achieve a long moving distance.

The moving mechanism capable of precise adjustment as described above has a problem that it is difficult to increase the moving distance, but at the same time, since the moving amount is smaller than the rotation amount, a manual operation or an electric operation is performed. However, there is a problem that the moving speed becomes slow. In the surface profile measuring instrument as shown in FIG. 3, it is necessary to move the stylus 35 by a considerable amount at the time of measuring objects having different heights or exchanging the objects to be measured. There is a problem. Therefore, a coarse movement mechanism and a fine movement mechanism are usually used in combination, a large amount of movement is performed by the coarse movement mechanism, and fine movement adjustment is performed by the fine movement mechanism.

FIG. 4 is a view showing a conventional example of such a finely adjustable movement mechanism. Reference numeral 42 denotes a screw provided on the base 41, to which the coarse movement portion 48 is attached. The coarse movement part 48 is provided with a female screw to be screwed into the screw 42, and the female screw or the screw 42 is rotated to move the female screw in the vertical direction. This rotation may be manual or driven by a motor. Reference numeral 49 denotes a fine moving portion, and the position of the coarse moving portion 48 can be precisely adjusted by a differential screw provided on the coarse moving portion 48 or the fine adjusting portion 49. The detection unit or measurement moving unit 43 is attached to this fine moving unit, moves the coarse moving unit 48 to roughly adjust, and then moves the fine moving unit 49 to perform fine adjustment.

[0009]

A conventional moving mechanism as shown in FIG. 4 is a type in which a coarse moving part and a fine moving part are completely divided into two parts and are combined. Therefore, there is a problem that the whole becomes large. Further, since the fine moving part is attached to one of the coarse moving parts, a cantilever load is applied to the shaft on which the coarse moving part moves. It is quite difficult to make it possible to move smoothly even under such a load, and a large mechanism is required accordingly.

The present invention has been made in view of the above problems, and an object of the present invention is to realize a mechanism capable of further reducing the size of a moving mechanism capable of coarse and fine movements.

[0011]

[Means for Solving the Problems]

 In order to solve the above problems, the moving mechanism of the present invention has a coarse movement mechanism and a fine movement mechanism on the same axis. FIG. 1 is a view showing the basic structure of a finely adjustable moving mechanism of the present invention. As shown in the figure, the finely adjustable moving mechanism of the present invention includes a shaft 1, a tip moving member 2, an intermediate cylindrical member 3, a rotating member 4, and a driving means 5, and is attached to a main body 6 to The tip movement member 2 can be moved by coarse movement and fine movement.

The shaft 1 has a first male screw portion 11 and a second male screw portion 12 having different pitches, and has a knob 7 for manual rotation at one end. The tip moving member 2 has a first female threaded portion 13 screwed into the first male threaded portion 11 of the shaft 1 and is movable with respect to the main body 6 in the axial direction of the shaft 1 but does not rotate. It is regulated. The intermediate cylindrical member 3 is provided with a second female threaded portion 14 to be screwed into the second male threaded portion 12 of the shaft 1 on the inner side, and has a third male threaded portion 15 on the outer side. It is movable in the axial direction of the shaft 1, but is regulated so as not to rotate. The rotating member 4 has a third female threaded portion 16 screwed into the third male threaded portion 15, and is rotatable about the shaft 1 with respect to the main body 6 and does not move in the axial direction of the shaft 1. Is held. The driving means 5 rotates the rotating member 4. The fine movement is performed by rotating the knob 7 for manual rotation, and the coarse movement is performed by the rotating member 4.

[0013]

[Action]

 At the time of coarse movement, the rotating member 4 is rotated by the drive means 5, but since the rotating member 4 does not move in the axial direction, it only rotates at that position. When the rotating member 4 rotates, the rotational force of the screw acts on the intermediate cylindrical member 3 having the third male screw portion 15 screwed into the third female screw portion 16. Since the intermediate cylindrical member 3 is restricted from rotating with respect to the main body 6, it moves in the axial direction. The movement at this time is the pitch of the third male screw portion 15 per one rotation of the rotating member 4. Since the intermediate cylindrical member 3 moves in the axial direction without rotating, the shaft 1 screwed to this also moves, and the tip moving member 2 screwed to the shaft 1 also moves. To do. That is, the driving means 5 moves the tip moving member 2 in the axial direction.

Next, at the time of slight movement, the knob 7 for manual rotation is rotated to rotate the shaft 1. A front end moving member 2 and an intermediate cylindrical member 3 are screwed onto the shaft 1, and these two members are regulated so as not to rotate. Since the intermediate cylindrical member 3 is screwed onto the rotating member 4 and does not rotate, it does not displace with respect to the main body 6. Therefore, when the shaft 1 rotates, the shaft 1 moves in the axial direction. The amount of movement at this time is the pitch of the second male screw 12 per one rotation of the shaft 1. When the shaft 1 rotates, the rotation of the tip moving member 2 is restricted, and therefore the first male screw 11 moves by one rotation with respect to the shaft 1. This movement is with respect to the shaft 1, and since the shaft 1 is moved by the pitch of the second male screw 12 per one rotation as described above, the tip moving member 2 is eventually moved to the first male screw and the second male screw. It will be moved by the pitch of the male screw. That is, the function of the differential screw is realized.

As is clear from the figure, the coarse movement mechanism and the fine movement mechanism are realized on the same axis, so that the size can be reduced. Particularly, since the coarse movement is performed by the driving means 5, high speed movement is easy, and since the knob 7 for manual rotation does not rotate at that time, it is preferable for safety. When only the fine movement mechanism is moved by manual operation and electric operation without providing the coarse movement mechanism, the moving speed can be improved to some extent by increasing the electric operation speed, but the problem that the moving distance is short remains and the electric operation is not performed. Since the same axis is rotated by manual operation, the manual knob rotates at high speed during electric operation, which is not preferable because it causes a safety problem. With the present invention, such a problem does not occur.

[0016]

【Example】

 FIG. 2 shows an embodiment of the present invention. In this embodiment, the present invention is applied to a moving device that moves a moving table 282 up and down, and the position of the moving table 282, which is biased upward by a spring 283, is moved by a tip moving member 22 via a hard ball 281. This is a restriction, and the moving base 282 moves up and down by vertically moving the front end moving member 22.

In FIG. 2, reference numeral 21 denotes a shaft, and two male screws 211 and 212 having different pitches are formed. 220 is a guide member for the intermediate cylindrical member 23. Reference numeral 22 denotes a front end moving member, which is held so as to be movable in the axial direction along a receiving member 262 forming a part of the main body, and is regulated by the pin member 218 so as not to rotate. A female screw to be screwed with the male screw 211 is formed inside the tip moving member 22. Reference numeral 23 denotes an intermediate cylindrical member, which has an internal thread formed therein which is screwed into the internal thread 212, and a portion which also slides with the guide member 220. The intermediate cylindrical member 23 is provided with a pin member 218, and the tip of the pin member 218 extends through the hole on the side surface of the tip moving member 22 to the elongated hole of the receiving member 262, thereby preventing rotation. ing.

An external thread is provided on the outer side of the intermediate cylindrical member 23, and the external thread is screwed with the internal thread of the rotating member 24. The rotating member 24 is held by the receiving member 262 and the regulating member 263 via the hard balls 241, and is rotatable about the shaft 21, but does not move in the vertical direction. The rotating member 24 has a pulley 254, and is rotationally driven by a motor 251 via a belt 253 and a pulley 252.

An adjustment shaft 210 is connected to the upper end of the shaft 21. The adjusting shaft 210 is attached to a friction plate 275 that is biased by a plate spring 272. The friction plate 275 is in contact with the knob 271, and when the knob 271 is rotated, the friction plate 275 is rotated by a frictional force, and the adjustment shaft 210 is rotated. In this case, even if the knob 271 is rotated, the shaft does not rotate because it slides with the friction plate 275. The rotating limit load is determined by the pressure of the leaf spring 272 and the coefficient of friction between the knob 271 and the friction plate 275.

When using the moving mechanism of this embodiment, first, the switch of the motor 251 is operated to move to a rough position. After that, the knob 271 is used for fine adjustment. During the coarse movement, the rotation of the motor 251 causes the rotation member 24 to rotate and the intermediate cylindrical member 23 to move in the axial direction. Along with that, the shaft 21, the tip moving member 22, and the knob 27 1 also move by the same amount. This amount of movement is determined by the pitch of the screw between the rotary member 24 and the intermediate cylindrical member 23. Therefore, it is possible to move a considerable amount in one rotation, and the moving speed is high. The movable range is determined by the length of the screw.

The knob 271 is rotated during fine movement, but the male threads 211 and 212 of the shaft 21, the female thread of the distal end moving member 22, and the female thread of the intermediate cylindrical member 23 form a differential screw, so that the knob rotates once. The amount of movement per hit is the difference between the pitches of the two screws 211 and 212, and if this difference is made small, very fine adjustment can be easily performed.

[0022]

[Effect of the device]

 According to the present invention, it is possible to reduce the size of a moving mechanism that is capable of coarse and fine movements and has good operability.

[Brief description of drawings]

FIG. 1 is a diagram showing a basic configuration of a finely adjustable movement mechanism of the present invention.

FIG. 2 is a diagram showing an embodiment of the present invention.

FIG. 3 is a diagram showing necessity of position setting in a surface profile measuring machine.

FIG. 4 is a diagram showing a conventional fine adjustment movable mechanism.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Shaft 2 ... Tip moving member 3 ... Intermediate cylindrical member 4 ... Rotating member 5 ... Driving means 6 ... Main body 7 ... Knob for manual rotation

Claims (2)

[Scope of utility model registration request] 1. A shaft (1) having a first male screw part (11) and a second male screw part (12) of different pitches, and a knob (7) for manual rotation at one end, and the shaft (1). It has a first female threaded portion (13) screwed with the first male threaded portion (11) of (1), and is movable in the axial direction of the shaft (1) with respect to the main body (6). A tip moving member (2) which is restricted from rotating, and a second female screw portion (14) screwed with the second male screw portion (12) of the shaft (1) are provided inside, An intermediate cylindrical member (3) having a third male screw part (15) on the outside and movable in the axial direction of the shaft (1) with respect to the main body (6) but restricted so as not to rotate. ) And a third female threaded portion (16) screwed into the third male threaded portion (15), and rotatable about the shaft (1) with respect to the main body (6). A rotary member (4) held so as not to move in the axial direction of the shaft (1), and a drive means (5) for rotating the rotary member (4),
A finely adjustable moving mechanism capable of moving the tip moving member (2) by fine movement by rotating the manual rotation knob (7) and coarse movement by the rotating member (4). 2. The finely adjustable movement mechanism according to claim 1, wherein the knob for manual rotation (7) is provided with a torque rotation mechanism that causes a slip when a predetermined load or more is applied during rotation.