JPH0577258A - Resin layer duplicating method and its device - Google Patents

Abstract

PURPOSE:To provide a resin layer duplicating method and its device which can supply the constant quantity of a resin material all the time and is stabilized optically. CONSTITUTION:1) Drops of a resin material 14 are brought into contact with the face of a stamper 13 before dropping from a nozzle 19 in a device in which the resin material 14 is dropped from the nozzle 19 of a storing section 18 storing the liquid resin 14 onto the upper face of a disk-shaped stamper 13 forming the given shape and rotating and duplicates the disk by the resin material 14. 2) The device is provided with a stamper 13, a driving means 17 for rotating the stamper 13, a storing section 18 provided movably above the stamper 13 and storing the liquid resin material 14 and injecting the resin material 14 from the nozzle 19 at the lower end onto the stamper 13 and a moving means 20 for moving the storing section 18 to the given position where drops are brought into contact with the stamper 13 before the resin material 14 is dropped, and the drops are injected while being brought into contact with the stamper 13.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for duplicating a resin layer such as a hologram disk used in an electrophotographic printing apparatus or a reading apparatus, and more particularly, the tip of the droplet immediately before dropping the resin material is brought into contact with a stamper. The present invention relates to a resin layer replicating method and device for injecting the resin.

2. Description of the Related Art Recently, an exposure scanning apparatus using a laser diode as a light source has been widely used in an electrophotographic printing apparatus incorporated in a laser printer, a copying machine, a facsimile machine or the like.

In such an apparatus, a hologram is used in an optical system for forming a light beam from a laser light source into a scanning beam. This hologram is produced by processing an original plate by a two-beam interference exposure method. If there is fluctuation in the interference light, it is difficult to obtain a highly efficient hologram. Therefore, in order to accurately and inexpensively produce a large amount of holograms, it is essential to duplicate the master hologram.

[0004]

2. Description of the Related Art FIG. 7 illustrates an internal side view of an electrophotographic printer. In the figure, 1 is a cassette mounting portion, 2 is a cassette, 3 is a delivery roller, 4 is a conveying path, 5 is a printer section, and 6 is a stacker.

The printer section 5 includes an optical unit 50, a photosensitive drum 51, a cleaner 52, a charging section 53, a developing section 54, a transfer section 55,
It is composed of a charge removing unit 56 and a fixing unit 57. A cassette 2 is set in the cassette mounting portion 1, and printing papers (hereinafter referred to as papers) 2a of a desired size are accumulated and stored in the cassette 2.

With such a configuration, when the power of the apparatus is turned on, the fixing section 57 is heated to a predetermined temperature to be in a printable state, and the sheet 2a is fed out from the cassette 2 in the direction of arrow A based on the print instruction signal and conveyed. The photosensitive drum 51 is conveyed along the path 4.
Send below.

By this time, the charge on the photosensitive drum 51 has been removed by the charge removing section 56, the residual toner has been cleaned by the cleaner 52, and the charging section 53 has been charged again. Optical data generated by the laser beam emitted from the optical unit 50 is scanned and exposed on the photosensitive drum 51, and the electrostatic image formed on the photosensitive drum 51 is developed into a toner image by the developing unit 54, and the paper is transferred by the transfer unit 55. After being transferred onto the sheet 2a, the sheet 2a is sent to the stacker 6 after being heated and pressed by the fixing section 57 to be fixed.

Next, referring to the perspective view of FIG.
The configuration and the outline of the exposure process will be described. As shown in the figure, the optical unit 50 includes a light source 7a composed of, for example, a semiconductor laser (laser diode), a hologram lens 8 for diffracting and condensing a laser beam emitted from the light source 7a in a predetermined direction, and a motor M. It is composed of a hologram disk 9 which rotates at high speed and diffracts the beam from the hologram lens 8 to form a scanning beam.

Therefore, the beam emitted from the light source 7 passes through the hologram lens 8 and is formed into a scanning beam by the rotating hologram disk 9 to expose the photosensitive drum 51. The hologram disk 9 is made by adhering a resin film having fine irregularities to a glass or resin substrate, for example, and has a function of diffracting incident light in a predetermined direction and transmitting (or reflecting) it.

The present invention relates to a method of copying the original plate of the hologram disk 9, and the steps of the conventional producing method will be described in detail below with reference to FIG. Since the hologram disk 9 has a central hole, the cross section is divided into left and right, but for simplicity, only one cross section will be described.

As shown in FIGS. 9A to 9F, (a) a resist pattern 11 is formed on a substrate 10 by a holographic exposure method.

(B) Ni is sputtered on the resist pattern 11. (c) Perform electroforming of Ni. (d) When the substrate 10 is peeled off and backed by the backing plate 12, the stamper 13a is completed.

(E) An ultraviolet ray (hereinafter referred to as UV) curable resin, for example, a transparent liquid photopolymer 14a having a viscosity is dropped onto the stamper 13a, and a replica substrate 15 made of, for example, transparent glass is placed thereon. , The photopolymer 14a is diffused on the stamper 13a.

At this time, the photopolymer 14a spreads outward due to the weight of the duplicate substrate 15 or the capillary phenomenon. Then, the photopolymer 14 is irradiated with UV from above the replication substrate 15a.
Cure a.

(F) Duplicate substrate with photopolymer 14a attached
15a (for example, a glass plate) is peeled from the stamper 13a. Thus, the hologram disc 16 having the resin layer as shown in FIG. 10 is duplicated.

Thus, the layer of the photopolymer 14a is adhered to the surface of the duplicate substrate 15a for duplication, but the hologram disc 16 eventually becomes the hologram disc 9 shown in FIG. 8, and the disc surface is even. There are multiple facets that are split and require a uniform photopolymer 14a thickness to maintain stable optical properties in each facet.

Therefore, conventionally, on the stamper 13a which rotates at a constant speed, the discharge amount is adjusted by the nozzle diameter and the discharge pressure at the tip of a photopolymer injector (not shown), and a constant amount of the photopolymer 14a is placed on the stamper 13a. It is formed by diffusing into.

[0018]

According to the above conventional method, the photopolymer is dropped onto the stamper and supplied,
Although it is preferable to make a thin ring shape as shown in Fig. 11 (a), since the droplets of the photopolymer are dropped by moving the position, the droplets come in contact with each other in a beaded shape although there is a difference depending on the size of the droplets. Then, both sides and the upper surface are arranged in an uneven shape.

Therefore, when the duplicate substrate is placed and the photopolymer is diffused on the stamper, bubbles are apt to be generated between the duplicate substrate and the photopolymer due to the unevenness of the upper surface, and when the bubbles are generated, the photopolymer layer becomes uniform. Will be damaged and replication will be defective.

Since the amount of photopolymer is not necessarily the proper amount because it is determined on a drop-by-drop basis, as shown in FIG. 11 (b) during diffusion, if the photopolymer is the proper amount, the dimensional range of the pattern formed on the stamper is reduced. Although it spreads in the area a, as shown in FIG. 11 (c), if the amount of photopolymer is excessive, "burrs" occur on the inner / outer periphery of the duplicate substrate, resulting in poor duplication.

Further, as shown in FIG. 11 (d), when the amount of photopolymer is too small, it does not spread in the pattern and is in a narrow range b.
Will result in poor replication. Therefore, in order to adjust an appropriate amount when injecting a small amount of photopolymer, it is necessary to use a small nozzle diameter to reduce the size of the droplet and then drop the droplet, but with a thin nozzle, a high discharge pressure is required. There is a problem that

It is an object of the present invention to provide a method and apparatus for duplicating a resin layer, which makes it possible to always supply a constant amount of resin material to a stamper and perform optically stable duplication.

[0023]

FIG. 1 is a principle view of the present invention, (a) is a side view corresponding to claim 1, and (b) is claim 2.
It is a block diagram corresponding to. 1) Means corresponding to claim 1 In the drawings, 13 is a rotating disk stamper having a predetermined shape, 14 is a curable liquid resin material, and 18 is a curable liquid resin material.
Is a housing portion that houses the resin material 14, 19 is a nozzle provided at the lower end of the housing portion 18, and thus the housing portion 18 from the nozzle 19 to the resin material
This is a method of injecting the resin material 14 by bringing the lower end of the droplet into contact with the surface of the stamper 13 before the droplet is dropped. 2) The means 13 corresponding to claim 2 is a disk-shaped stamper having a predetermined shape formed on the upper surface and provided so as to be horizontally rotatable, 17 is a driving means for rotating the stamper 13 at a predetermined speed, and 18 is a stamper 13. An accommodating portion that is provided so as to be movable upward, accommodates the liquid resin material 14, drops the resin material 14 from the nozzle 19 and injects the resin material 14 onto the stamper 13,
Reference numeral 19 denotes a nozzle provided at the lower end of the containing portion 18 for dropping the resin material 14 from the tip, and 20 denotes the lower end of the drop contacting the upper surface of the stamper 13 before the resin material 14 drops the containing portion 18 from the tip of the nozzle 19. It is a moving means for moving to a predetermined position.

Therefore, the housing portion 18 is moved to a predetermined position,
The resin material 14 is injected while the lower end of the resin material 14 dropped from the nozzle 19 is brought into contact with the upper surface of the rotating stamper 13.

[0025]

[Action]

1) Action corresponding to claim 1 Before the droplet of the resin material 14 is dropped from the nozzle 19 of the housing portion 18, the lower end of the droplet is brought into contact with the surface of the rotating stamper 13 to inject the resin material 14, While forming a liquid reservoir of the resin material 14 between the stamper 13 and the nozzle 19, the resin material 14 is continuously supplied to the rotating stamper 13 in a tail-like manner, so that bubbles are generated in the resin layer. It is possible to prevent this from happening, facilitate the adjustment of the supply amount, and eliminate the need for a thin nozzle or a high pressure discharge pressure due to the use of a thin nozzle, so that a constant amount of resin material 14 can be supplied. 2) Action corresponding to claim 2 Move the accommodating portion 18 to a predetermined position by the moving means 20,
The lower end of the droplet of the resin material 14 dropped from the nozzle 19 is driven by the driving means.
By injecting the resin material 14 while making contact with the upper surface of the rotating stamper 13 by means of the stamper 13 and the nozzle 19
Since the resin material 14 is continuously supplied in a trailing manner on the rotating stamper 13 while forming a liquid reservoir of the resin material 14 between them, it is possible to prevent bubbles from being generated in the resin layer. At the same time, the supply amount can be easily adjusted, and a constant amount of the resin material 14 can be always supplied without requiring a thin nozzle or a high pressure discharge pressure due to the thin nozzle.

[0026]

【Example】

1) Embodiment corresponding to claim 1 An embodiment corresponding to claim 1 of the present invention will be described with reference to FIGS. The photopolymer 14a in FIG. 2 corresponds to the resin material 14 in FIG. 1 (a).

In the side view of FIG. 2, the stamper 13a is
It rotates horizontally by a drive mechanism (not shown). The resin containing portion 18a contains the liquid photopolymer 14a, and the photopolymer 14a is dropped from the nozzle 19a at the lower end. At this time, since the photopolymer 14a has a viscosity, when a predetermined discharge pressure is applied to the photopolymer 14a to discharge the photopolymer 14a, as shown in FIG.
As shown in (a) to (d), the size of the droplet gradually increases from the tip of the nozzle 19a until the photopolymer 14a drops.
When it reaches a certain size, it will fall freely. In the present invention, before the drop of the photopolymer 14a falls freely (that is, in FIG. 3 (c)).
In the state shown in (1), the lower end of the droplet is brought into contact with the surface of the stamper 13a.

Therefore, as shown in FIG. 2, the resin accommodating portion 18a
Before the photopolymer 14a is dropped from the nozzle 19a by bringing the tip of the nozzle 19a of the nozzle 19a closer to the surface of the stamper 13a by a predetermined distance g, the lower end of the drop is stamped in the state of FIG. 3 (c).
When brought into contact with the surface of 13a, a photopolymer 14a is supplied between the stamper 13a and the nozzle 19a while the reservoir of the photopolymer 14a is formed between the stamper 13a and the nozzle 19a.

Thus, as shown in the perspective view of FIG. 4, the photopolymer 14a is uniformly applied on the stamper 13a in an arc shape. In this way, since the photopolymer 14a is continuously supplied onto the stamper 13a so as to draw a tail, it is possible to prevent bubbles from being generated in the photopolymer layer, and
The supply amount can be adjusted more easily than in the conventional method in which the supply amount is adjusted on a drop-by-drop basis, and a thinner nozzle or a high-pressure discharge pressure due to the use of a thinner nozzle is unnecessary.

Therefore, a constant amount of the photopolymer 14a can be supplied at all times, and a stable duplicate hologram disk with little variation in optical characteristics can be obtained. 2) Embodiments corresponding to claims 2 to 5 Embodiments corresponding to claims 2 to 5 of the present invention will be described with reference to FIGS. 5 and 6. The photopolymer 14a, the rotation drive unit 17a, and the lifting drive unit 20a of FIG. 5 are the resin material 1 of FIG.
4, corresponding to the driving means 17 and the moving means 20, respectively.

As shown in FIG. 5, the apparatus comprises a stamper 13b, a rotation drive unit 17a, a resin storage unit 18a, a lifting drive unit 20a, and a UV irradiation unit.
21 and a pressurizing section 22 (corresponding to the pressure applying means of claim 4). S1 to S3 are position sensors (position sensor S1
Indicates the second detecting means of claim 5, and the position sensor S3 corresponds to the first detecting means of claim 3.

The stamper 13a is rotated horizontally by the rotation driving unit 17a, and when it makes one rotation, the position sensor S1 detects it and stops the rotation. The resin containing portion 18a is a liquid photopolymer.
The photopolymer 14a is provided with a pressurizing section 22 for accommodating 14a and applying a discharge pressure to the photopolymer 14a. The pressurizing unit 22 releases the application of the discharge pressure according to the detection signal of the position sensor S1. Further, the resin containing portion 18a
Moves up and down by the up-and-down drive unit 20a, stops at the upper position by the detection of the position sensor S2, and stops at the lower position by the detection of the position sensor S3.

The lower position is the tip of the nozzle 19a and the stamper 13.
It is set so that the distance between the surfaces a is a predetermined distance g.
The predetermined distance g is from the tip of the nozzle 19a to the photopolymer 14a.
Is the distance that the surface of the stamper 13a contacts before dropping.

The rotary drive unit 17a includes a motor M1, gears G1 and G2.
, A rotary shaft 170, and a base 171 attached to the rotary shaft 170. The lifting drive unit 20a includes a motor M2 and a rack.
It is composed of G3 and gear G4.

The center hole 15 is made of a UV transparent material.
A disk-shaped replica substrate 15a having 0 is prepared. Figure 6
In the control block diagram of FIG. 3, the control unit 23 includes a CPU and a control program (not shown), and controls each unit according to the control program to perform the duplication operation.

Reference numeral 24 is a keyboard, and 25 is a motor driver. Since it has such a configuration, the operation will be described below. First, when the start button of the keyboard 32 is pressed, the elevation drive unit 20a is driven by the rotation of the motor M1 under the control of the control unit 23 and stopped at the position detected by the sensor S3.

Then, the rotation driving unit 17a is driven by the rotation of the motor M2.
Is driven, the stamper 13a starts rotating, and at the same time, the pressurizing unit
22 is driven to eject the photopolymer 14a from the nozzle 19a of the resin containing portion 18a.

The tip of the discharged droplet of the photopolymer 14a comes into contact with the surface of the rotating stamper 13a, and the stamper 13a
While the liquid reservoir of the photopolymer 14a is formed between the nozzle 19a and the nozzle 19a, the photopolymer 14a is supplied on the stamper 13a in a circular arc so as to draw a tail.

When the stamper 13a makes one revolution, the position sensor S1 detects it and the rotation of the motor M2 is stopped.
Stops rotating, and at the same time, driving of the pressurizing unit 22 stops. At this time, the photopolymer 14a is uniformly supplied in a ring shape on the stamper 13a.

When the motor M1 rotates in the reverse direction, the lifting / lowering drive unit 20a raises the resin container 18a, and the position sensor
Stops when S2 is detected. Therefore, the center hole 150 of the duplicate substrate 15a described in the conventional example.
Is fitted on the upper end of the rotary shaft 170 and placed on the photopolymer 14a, and the duplicated substrate 15a is applied with its own weight or pressing force.
After diffusing the photopolymer 14a on the stamper 13a, U
UV is irradiated from the V irradiation section 21 to cure the photopolymer 14a.

Upon completion of curing, the cured photopolymer 14
The duplicate substrate 15a to which a is attached is released from the stamper 13a. In this way, since the photopolymer 14a is continuously supplied onto the stamper 13a, the supply amount can be easily adjusted even if the diameter of the nozzle 19a is relatively large, and bubbles are not generated in the resin layer. In addition, the photopolymer 14a can be easily supplied with a relatively low discharge pressure, and a thin nozzle or a high-pressure discharge pressure due to the thin nozzle is unnecessary.

Therefore, a constant amount of the photopolymer 14a can be supplied at all times, and a stable duplicate hologram disc with little variation in optical characteristics can be obtained.

[0043]

As described above, according to the present invention, in Claim 1, the lower end of the droplet is brought into contact with the surface of the stamper before the resin material is dropped from the nozzle, so that a thin nozzle or a thin nozzle can be formed. It is possible to always supply a constant amount of the resin material onto the stamper without requiring a corresponding high discharge pressure.

According to a second aspect of the present invention, the containing portion containing the liquid resin material is moved to a predetermined position by the moving means, and the resin material is dropped while the lower end of the droplet of the resin material dropped from the nozzle is brought into contact with the upper surface of the rotating stamper. By injecting, the resin material is continuously supplied on the stamper so as to draw a tail, so that it is possible to prevent bubbles from being generated in the resin layer, and it becomes easy to adjust the supply amount, and a thin nozzle or It is possible to always supply a constant amount of resin material onto the stamper without requiring a high discharge pressure corresponding to a thin nozzle.

According to a third aspect of the present invention, there is provided the first detecting means for detecting that the distance between the tip of the nozzle of the accommodating part moved by the moving means and the upper surface of the stamper has reached a predetermined dimension, and thus the accommodating means by the moving means. The movement of the parts can be automatically stopped, the distance between the tip of the nozzle and the upper surface of the stamper can be accurately set, and a stable amount of resin material can be supplied.

According to a fourth aspect of the present invention, pressure applying means for applying a discharge pressure to the resin material housed in the housing portion is provided, and the resin material is dropped from the nozzle by the application of the discharge pressure, so that a constant amount of the resin material is continuously supplied. Can be supplied on stamper.

According to a fifth aspect of the present invention, there is provided second detecting means for detecting one rotation of the stamper by the driving means, and based on the detection output of the second detecting means, the driving of the driving means is stopped and the pressure applying means is applied. By canceling the application of the discharge pressure by, the stamper can be automatically stopped after one rotation and the supply of the resin material can be stopped at the same time, and a constant amount of the resin material can be stably supplied. .. There is an effect.

[Brief description of drawings]

FIG. 1 is a principle diagram of the present invention.

FIG. 2 is a side view showing an embodiment corresponding to claim 1 of the present invention.

FIG. 3 is an illustration of photopolymer droplet formation.

FIG. 4 is an explanatory diagram of FIG.

FIG. 5 is a configuration diagram showing an embodiment corresponding to claims 2 to 5 of the present invention.

FIG. 6 is a control block diagram of FIG.

FIG. 7 is a side view of the inside of the electrophotographic printing apparatus.

FIG. 8 is a perspective view showing an optical unit,

FIG. 9 is a process chart of hologram disc duplication in a conventional example.

FIG. 10 is a perspective view showing a hologram disc of a conventional example.

FIG. 11 is an explanatory diagram of a conventional example.

[Explanation of symbols]

13, 13a is a stamper, 14 is a resin material, 14
a is a photopolymer, 17 is a driving means, 17a is a rotation driving part, 18 is a housing part, 18a is a resin housing part,
19, 19a is a nozzle, 20 is a moving means, 20a is a lifting drive unit, 22 is a pressurizing unit, S1 to S3 are position sensors,

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shigetake Iwata 1015 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture Fujitsu Limited (72) Inventor Shigeo Kayajima 1015, Kamedotachu, Nakahara-ku, Kawasaki City, Kanagawa Prefecture Fujitsu Limited Within

Claims (5)

[Claims] 1. A nozzle (19) of an accommodating portion (18) accommodating a curable liquid resin material (14) on a rotating disk-shaped stamper (13) having a predetermined shape formed on its upper surface. In a device for replicating a resin layer by dropping the resin material (14), the lower end of the droplet is brought into contact with the surface of the stamper (13) before the resin material (14) is dropped from the nozzle (19). A method for replicating a resin layer, comprising: 2. A disk-shaped stamper (13) having a predetermined shape formed on the upper surface and rotatably provided horizontally, and a driving means (17) for rotating the stamper (13) at a predetermined speed.
And a liquid resin material (14) having a curability, which is movably provided above the stamper (13), is accommodated, and the resin material (14) is dripped from a nozzle (19) provided at a lower end. And a lower end of the drop before the resin material (14) drips the resin material (14) from the nozzle (19) into the stamper (13). A moving means (20) for moving the container (18) to a predetermined position in contact with the upper surface of the resin material (14), and the lower end of the droplet of the resin material (14) dropped from the nozzle (19). A resin layer duplication device, wherein the resin material (14) is injected while contacting the upper surface of the rotating stamper (13). 3. The stamper (13) and the tip of the nozzle (19) of the accommodating portion (18) moved by the moving means (20).
To detect when the distance from the upper surface of the
The resin layer duplication device according to claim 2, further comprising: 4. The accommodating portion (18) includes the accommodating resin material.
The resin material (14) is dripped from the nozzle (19) by providing a pressure applying means for applying a discharge pressure to the (14), and applying the discharge pressure of the pressure applying means. 3 resin layer duplicator. 5. The stamper (1) by the driving means (17)
3) is provided with a second detection means for detecting one rotation, and based on the detection output of the second detection means, the drive means (17)
5. The resin layer duplicating apparatus according to claim 4, wherein the driving of the resin is stopped and the application of the discharge pressure by the pressure applying means is released.