JPH05756U - Integrated carbon holder - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention relates to an integrated carbon holder.
An object of the present invention is to integrate two carbon holders into one body, set carbon rods on them in advance, and attach the carbon rods to a vacuum vapor deposition device for carbon vapor deposition so that the carbon rods can be mounted easily, quickly and surely. [Structure] The carbon rod 1 is fixed, and a carbon holder 2 having a hole 4 that can be inserted into a column arranged in a vacuum vapor deposition apparatus, and the carbon rod 1 is fixed so that the carbon rod 1 can be pushed out by a spring in the axial direction. A carbon holder 3 having a hole 4 that can be inserted into a column arranged in a vapor deposition device, and a fixing plate 6 for fixing the carbon holder 2 and the carbon holder 3
The carbon holder 1 and the carbon holder 3 are fixed to the fixing plate 6 by being electrically insulated, and the carbon rod 1 can be preset.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an integrated carbon holder for attaching a carbon rod and performing vacuum deposition.

[0002]

[Prior Art]

 When you try to observe a sample using a scanning electron microscope, etc., this sample is charged by electrons, and the resolution decreases and the fine structure becomes invisible. It is thinly vapor-deposited and has conductivity. A vacuum deposition device is used as a device for depositing carbon on a sample. As shown in FIG. 2, two columns 22 are erected in a vacuum container (eg, a bell-shaped transparent bell-shaped part of a glass, which is made transparent so that the degree of evaporation in a vacuum can be seen) 21 of the vacuum evaporation apparatus. The holes of the carbon holders 23 and 24 are inserted and fixed. Then, the carbon rods 25 are arranged so as to be opposed to each other in the horizontal direction, and one of them can be moved in the horizontal direction, and the ends of the two carbon rods 25 (one is a flat face and one is a thin tip like a pencil tip are pointed by a spring). (States) are set to be pressed against each other, and an electric current is applied to the contact portion of the carbon rod 25 through these stanchions 22. The electric current is concentrated and heated at the contact portion to sublime carbon. Then, carbon was vapor-deposited on the surface of the sample 26 arranged in the vicinity. At this time, in order to allow the two carbon rods 25 to come into good contact with each other to deposit carbon, the carbon rods 25 were set by the following procedure.

(1) A carbon rod 25 having a flat tip or an obliquely cut end is fixed in a horizontal hole in one carbon holder 23 attached to the column 22. (2) Insert a carbon rod 25 with a sharp tip like a pencil tip into a horizontal hole in another car boulder 24 attached to the other column 22, and fix the tip with (1). The carbon holder 24 is vertically moved and horizontally rotated so that the carbon holder 25 is positioned substantially at the center of the flat portion of the carbon rod 25. In this fixed state, the carbon rod 25 is further adjusted by a spring 27 provided in the carbon holder 24 so as to press the carbon rod 25 toward the mating flat carbon rod 25 with appropriate strength.

The operator has to perform these complicated and troublesome operations for each carbon vapor deposition with respect to the carbon holders 23 and 24 attached to the support column 22 arranged above the vacuum vapor deposition apparatus.

[0005]

[Problems to be solved by the device]

 As described above, conventionally, every time when carbon is vapor-deposited on a sample using the vacuum vapor deposition apparatus, the vacuum vessel (glass bell jar) 21 of the vacuum vapor deposition apparatus is removed, and the carbon is attached to the two columns 22 separately. It is necessary to operate the holders 23 and 24 individually so that the tips of the carbon rods 25 of both holders are in good contact with each other at a substantially central position and at an appropriate pressure, which is extremely troublesome and stable. Then there was the problem that it was difficult to set. Further, after removing the vacuum vessel 21 of the vacuum vapor deposition apparatus, it is necessary to replace and set the carbon rod 25 each time, and it is difficult to vapor deposit carbon quickly. Furthermore, since the carbon rods 25 were exchanged and the setting operation was performed by operating the two carbon holders 23 and 24 mounted on the two columns 22 of the vacuum vapor deposition apparatus, these two columns 22 are Conventionally, the vacuum container (glass bell jar) 21 must be designed to be removed upward so that it can be easily operated by the operator. There was also the problem that it was difficult to do.

According to the present invention, two carbon holders are integrally formed, and carbon rods are pre-set on them, which are then attached to a vacuum vapor deposition device for carbon vapor deposition, so that the carbon rods can be easily, quickly, and surely mounted. The purpose is to

[0007]

Means for Solving the Problem Means for solving the problem will be described with reference to FIG. In FIG. 1, a carbon holder 2 has a hole 4 into which a carbon rod 1 is fixed and which can be inserted into a column arranged in a vacuum evaporation apparatus. The carbon holder 3 has a hole 4 which can be inserted into a column arranged in a vacuum vapor deposition device, while the carbon holder 1 can be fixed to be extruded by a spring in the axial direction.

The fixing plate 6 fixes the carbon holder 2 and the carbon holder 3.

[0009]

[Action]

 The present invention, as shown in FIG. 1, fixes a carbon holder 2 and a carbon holder 3 by electrically insulating them to a fixing plate 6 so that the carbon rod 1 can be set outside the vacuum deposition apparatus. There is. Then, the integrated carbon holder in which the carbon rod 1 is set in advance is inserted into two columns provided in the vacuum vapor deposition apparatus, and an electric current is applied to the carbon rod 1 from these columns to heat the carbon rod 1 for carbon vapor deposition.

Therefore, the two carbon holders 2 and 3 are integrally formed, and the carbon rod 1 is previously set on them, so that the carbon rod 1 can be easily, quickly and surely attached to the vacuum deposition apparatus. Becomes As a result, the working time for mounting and adjusting the carbon rod 1 can be greatly shortened, individual differences between operators can be eliminated, and carbon deposition can be performed stably and easily.

[0011]

【Example】

 Next, the configuration and operation of the embodiment of the present invention will be sequentially described in detail with reference to FIG. In FIG. 1, a carbon rod 1 is a rod for electrically heating to deposit carbon on a sample. As shown, the carbon rod 1 has a flat tip (or diagonally cut) or a fine tip. Then, as shown in the figure, the flat tip and the thin tip are pressed against each other, and an electric current is passed between them to heat by energization to sublime the carbon and vapor-deposit carbon on the sample arranged in the vicinity.

The carbon holder 2 has a flat carbon rod 1 with a fixed tip as shown in the figure, or a hole 4 for supplying an electric current by inserting the carbon rod 1 into a column arranged in a vacuum vapor deposition apparatus and mounting it. It is a thing. The carbon holder 3 is to bring the carbon rod 1 whose tip is finely cut into contact with the flat carbon rod 1 by giving a force to the left by a spring.

The hole 4 is a hole for being inserted into a column (for example, column 22 in FIG. 2) of the vacuum vapor deposition apparatus and attached thereto, and for receiving an electric current supply. The fixing plate 6 is for fixing the carbon holder 2 and the carbon holder 3 in an electrically insulated state. Here, an insulating plate is inserted between the fixing plate 6 and the carbon holder 2, and an insulating plate is further inserted between the fixing plate 6 and the carbon holder 3 to firmly fix them to the carbon holder 2. The carbon rod with a flat tip attached and fixed, and the axis of the carbon rod 1 which is axially movable to the carbon holder 3 and whose tip is finely ground so as to be pushed out by a spring are in contact with each other almost at the center. I have to. With the configuration of this embodiment, it is possible to set the carbon rod 1 on the carbon holder 2 and the carbon holder 3 as shown in the figure, without attaching the same to the vacuum vapor deposition apparatus.

The insulating plate 7 is a heat-resistant material that electrically insulates between the carbon holder 2 and the fixing plate 6 and between the carbon holder 3 and the fixing plate 6, and is, for example, a Teflon plate or a porcelain plate. Is. The fixing screw 8 is a screw for attaching and fixing the carbon holder 2 and the carbon holder 3 to the fixing plate 6.

The operation of setting the carbon rod 1 with the configuration of FIG. 1 will be described below. (1) First, as a preparation, the carbon holder 2, the fixing plate 6, the insulating plate 7, and the carbon holder 3 are assembled without the illustrated carbon rod 1. This assembly is performed, for example, by insulating the insulating plate 7 with the holes 4 of the carbon holders 2 and 3 inserted in the columns 22 of the conventional vacuum deposition apparatus of FIG. Set. At this time, the carbon rods 1 are aligned so that the centers of the tips thereof are exactly in contact with each other. Then, the fixed integrated carbon holder according to this embodiment is pulled out from the column of the vacuum vapor deposition apparatus and placed on the workbench.

(2) For the carbon holder 2 of the integrated carbon holder without the carbon rod 1 shown in FIG. 1 placed on the workbench, the carbon rod 1 having a flat tip has a cylindrical shape and a collar portion at the right end. Insert it into the sleeve with and fix it with the fixing screw 5. As a result, when the carbon rod 1 is pushed from right to left, the brim portion of the sleeve comes into contact with the hole of the carbon holder 2 and is fixed.

(3) Similarly, to the carbon holder 3, the carbon rod 1 whose tip is finely cut is inserted into a cylindrical sleeve having a flange portion at the left end, and fixed by a fixing screw 5. As a result, the carbon rod 1 is pushed out to the left by the force of the spring, so that the thin end portion and the flat portion of the other carbon rod 1 come into contact with each other at an appropriate contact pressure. .

The setting of the carbon rod 1 is completed by performing the above-described simple operations (2) and (3) on a workbench or the like where the work is easy. (4) Next, the two holes of the carbon holders 2 and 3 constituting the integrated carbon holder as shown in FIG. 1 in which the setting of the carbon rod 1 is completed are made into, for example, two columns 22 of the vacuum vapor deposition apparatus of FIG. To insert. Then, it is evacuated and a current is passed between these two columns 22 to deposit carbon.

Therefore, in (1), the carbon holders 2 and 3 are fixed to the fixing plate 6 in advance to form an integrated carbon holder, and in (2) and (3), the carbon is preliminarily placed on the worktable. By setting the rod 1, the setting is completed by simply inserting the two holes of this integrated carbon holder into the two columns in the vacuum vapor deposition device. Then, after evacuation, a current can be passed between the carbon rods 1 through the support columns to carry out carbon vapor deposition.

[0020]

[Effect of the device]

 As described above, according to the present invention, since the two carbon holders 2 and 3 are integrally formed with the fixing plate 6 and the carbon rod 1 is preset thereto, the integrated carbon The holder can be mounted by the extremely simple operation of inserting it into the column of the vacuum vapor deposition equipment, and can be evacuated to deposit carbon. As a result, the work of attaching the carbon rod 1 to the vacuum vapor deposition apparatus can be performed in an extremely short time, and there is no individual difference due to the skill of the operator, and carbon vapor deposition can be performed stably and easily. Furthermore, since the carbon rod 1 can be mounted by simply inserting the two two holes of the integrated carbon holder in which the carbon rod 1 is pre-set, into the two columns of the vacuum deposition apparatus, the vacuum container can be installed in the upper direction of the vacuum deposition apparatus as in the conventional case. There is no need to lift and facilitate the replacement work of the carbon rod 1, and there are no structural restrictions on the vacuum container. For example, a cylindrical vacuum container is placed horizontally, and its lid is opened to the front. The integrated carbon holder can be mounted by a simple operation such as inserting it from the front into two columns arranged horizontally, and the structure of the vacuum vapor deposition apparatus can be simplified.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of the present invention.

FIG. 2 is an explanatory diagram of a conventional technique.

[Explanation of symbols]

 1: Carbon rod 2, 3: Carbon holder 4: Hole (for electrode) 5: Carbon fixing screw 6: Fixing plate 7: Insulating plate 8: Fixing screw

Claims (1)

[Claims for utility model registration] [Claim 1] In a carbon holder for attaching a carbon rod and performing vacuum deposition, the carbon rod (1) is fixed, and a hole (4) that can be inserted into a column arranged in a vacuum deposition apparatus is provided. And a carbon holder (2) having a hole (4) that can be inserted into a column arranged in a vacuum deposition apparatus while the carbon rod (1) is fixed and can be pushed out by a spring in the axial direction. ) And a fixing plate (6) for fixing the carbon holder (2) and the carbon holder (3), and the carbon holder (2) is electrically insulated from the fixing plate (6). An integrated carbon holder characterized in that the carbon holder (3) is fixed and the carbon rod (1) can be preset.