JPH0574923A - Retainer apparatus for wafer holder - Google Patents

Abstract

PURPOSE:To provide a retainer apparatus which is simple in structure without troublesome adjustments, which is capable of coping with a deformed wafer holder, and which facilitates the insertion and removal of the wafer holder. CONSTITUTION:In a wafer holder housing which is disposed on the machine body of a semiconductor manufacturing machine, a retainer member 2 which is composed of two leaf springs 3 presses the side walls of a wafer holder from two opposite directions.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer holder holding structure in a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art Conventionally, as a method of holding a wafer holder in a semiconductor manufacturing apparatus, a fixed four-direction guide 8 is used.
The wafer holder is held at a position determined by (see FIG. 2) or fixed in the other direction, and the wafer holder is held by a drive device 9 such as a cylinder (shown in FIG. 3).

[0003]

However, in the former configuration in which the wafer holder is held at the position determined by the fixed guide, it is very inconvenient to adjust the positioning, and the wafer holder is deformed. However, there was a problem that gaps and the like could not be dealt with.

Further, in the latter structure in which the wafer holder is pressed by the cylinder, the structure becomes complicated and a power source for driving the cylinder is required. Further, there is a problem that a lot of space is taken when arranging several wafer holders.

It is an object of the present invention to provide an apparatus that eliminates the deficiencies of the prior art and facilitates loading and unloading of wafer holders.

[0006]

A wafer holder holding device according to the present invention is a holding device for a semiconductor manufacturing apparatus using a wafer holder. It is characterized in that the side surface is pressed from two directions by the elastic holding member constituted by the leaf spring.

[0007]

Embodiments of the present invention will be described using an example of a semiconductor manufacturing apparatus.

FIG. 1A is a plan view of a holding device for a wafer holder, and FIG. 1B is a sectional view of FIG. 1A.

In the drawings, 1 is a wafer holder, 2 is a moving guide for fixing the wafer holder, and 3 is a leaf spring having elasticity. Reference numeral 4 is a block for fixing the leaf spring 3, 5 is a screw for fixing the leaf spring 3, 6 is a stopper for determining the movement amount of the movement guide 2, and 7 is a fixing guide for positioning the wafer holder.

In FIG. 1A, the wafer holder 1 is inserted into the holder housing, and the side surface of the wafer holder 1 is in contact with the moving guide 2 and the fixed guide 7.

The leaf spring 3 has elasticity to move the movement guide 2 and hold the wafer holder 1 while elastically pressing the side surface thereof.

Further, when the wafer holder 1 is taken in and out, the movement guide 2 is moved in parallel by the two leaf springs 3, so that a force is applied to the entire flat end portion of the movement guide 2 and a partial force is prevented. There is. For this reason, it is possible to take in and out without applying excessive force.

Further, even if the wafer holder 1 is deformed,
Due to the spring force of the leaf spring 3 attached to the moving guide 2, the spring is pressed in a position suitable for the shape, so that the cage is deformed.

In FIG. 1 (b), when performing positioning adjustment, it is only necessary to determine the position of the fixed guide 7 in two directions, and the adjustment work can be performed easily. In addition, since the movement guide 2 eliminates the misalignment even if a slight misalignment occurs, it is not necessary to readjust it only by making an adjustment at the time of first assembling.

Further, regarding the adjustment of the elastic force of the moving guide 2, since the block 4 is attached to the stopper 6, it is possible to change the elastic pressure to be held by adjusting the stopper 6 itself. From this, the elastic pressure at the time of taking in and out can be changed to the pressure suitable for the working state.

However, with respect to vibration and shock in the main body of the semiconductor manufacturing apparatus, it may not be sufficient to hold the wafer holder 1 in only one direction, so the wafer holder 1 is held in two directions.

Since the holding method of the present invention has a simple structure and can be adjusted very easily, it is highly effective as a holding device for a wafer holder in a semiconductor manufacturing apparatus.

[0018]

As described above, according to the present invention, when the wafer holder is held on the mechanical body, the wafer holder is elastically pressed from the side by the holding member having elasticity to hold the wafer holder on the mechanical body. This has the advantages of simplifying the loading and unloading of the container, adjusting the positioning only at the time of assembly, and being able to follow the deformation of the wafer holder.

[Brief description of drawings]

FIG. 1A is a front view of a holding device for a wafer holder according to an embodiment of the present invention. 1B is a sectional view of FIG.

FIG. 2 is a front view of a holding device for a wafer holder according to another embodiment of the present invention.

FIG. 3 is a side view of a holding device using a drive system according to another embodiment of the present invention.

[Explanation of symbols]

 1-Wafer holder 2--Movement guide 3--Leaf spring 4--Fixing block 5--Set screw 6-Stopper 7・ ・ ・ ・ ・ Fixed guide 8 ・ ・ ・ ・ ・ Fixed guide (conventional type) 9 ・ ・ ・ ・ ・ Cylinder (drive device)

Claims (1)

[Claims] 1. A holding device for a wafer holder in a semiconductor manufacturing apparatus, wherein a wafer holder housing portion provided in a mechanical body of the apparatus has a two-way elastic holding member formed by two leaf springs. A holding device for a wafer holder, characterized in that the side surface of the wafer holder is pressed.