JPH0572067A - Method for setting pressure value - Google Patents
Method for setting pressure valueInfo
- Publication number
- JPH0572067A JPH0572067A JP23063491A JP23063491A JPH0572067A JP H0572067 A JPH0572067 A JP H0572067A JP 23063491 A JP23063491 A JP 23063491A JP 23063491 A JP23063491 A JP 23063491A JP H0572067 A JPH0572067 A JP H0572067A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- flow rate
- pressure value
- suction
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Manipulator (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、圧力値設定方法に関
し、一層詳細には、例えば、吸着パッドを用いてワーク
の搬送等を行うとするとき、真空圧機器が経時変化等に
よってその性能を変化させた際、それに対応して吸着の
有無を決定するための設定圧力を容易に変更することが
可能な圧力値設定方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure value setting method. More specifically, for example, when a suction pad is used to transfer a work, the performance of a vacuum pressure device can be improved by aging. The present invention relates to a pressure value setting method capable of easily changing the set pressure for determining the presence or absence of adsorption when the pressure is changed.
【０００２】[0002]
【従来の技術】従来から、各種自動化の要請により、物
品の搬送、移動、取り出し等の作業を行う手段として真
空吸着方法が利用されている。この場合、エゼクタある
いは真空ポンプで吸着用パッドの内部を負圧にして所望
の作業を達成する。すなわち、吸着用パッドが物品を吸
着すると負圧状態が増すので、これを圧力センサで検出
して、吸着の有無を判断して次なる搬送等の動作を行
う。しかしながら、上記の方法では、真空供給源、流体
経路の特性の変化でワークを吸着しているにも係わらず
非吸着の信号を圧力センサが出力することがある。2. Description of the Related Art Conventionally, a vacuum suction method has been used as a means for carrying out operations such as carrying, moving, and taking out articles in response to various automation requests. In this case, a desired work is achieved by setting the negative pressure inside the suction pad with an ejector or a vacuum pump. That is, when the suction pad sucks the article, the negative pressure state increases, so that this is detected by the pressure sensor, the presence or absence of the suction is determined, and the next operation such as transportation is performed. However, in the above method, the pressure sensor may output a non-adsorption signal even though the work is adsorbed due to changes in the characteristics of the vacuum supply source and the fluid path.
【０００３】上記のような欠点を除去すべく様々な工夫
が行われているが、ここでは代表的なものを図３および
図４を参照して説明する。Various measures have been taken to eliminate the above-mentioned drawbacks, but a typical one will be described here with reference to FIGS. 3 and 4.
【０００４】エゼクタあるいは真空ポンプである真空供
給源２から吸着用パッド４に連通する通路６上に圧力ス
イッチ８および流量計９を設け、前記吸着用パッド４の
吸着確認を行い、この確認信号をシーケンサ等の制御機
器に伝達する。吸着確認は、図４に示すように、圧力ス
イッチ８および流量計９の吸入流量−真空圧力特性図に
おいて、以下のように行われる。ここで、ＵおよびＷ
は、吸着時および非吸着時の吸入流量−真空圧力特性曲
線であり、吸着時と非吸着時の間に吸着確認用の設定値
を設ければ確実にワークを吸着したか否かの検出を行う
ことが可能である。A pressure switch 8 and a flowmeter 9 are provided on a passage 6 communicating with a suction pad 4 from a vacuum supply source 2 which is an ejector or a vacuum pump, and suction confirmation of the suction pad 4 is performed. Transmit to a control device such as a sequencer. As shown in FIG. 4, the suction confirmation is performed as follows in the suction flow rate-vacuum pressure characteristic diagram of the pressure switch 8 and the flow meter 9. Where U and W
Is the suction flow rate-vacuum pressure characteristic curve during adsorption and non-adsorption.If a set value for adsorption confirmation is set between adsorption and non-adsorption, it can be detected whether or not the workpiece is adsorbed securely. Is possible.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、実際
上、エゼクタまたは真空ポンプ、あるいはこれらに関連
して用いられているフィルタには、作業環境、経年変
化、フィルタの目詰まり等に起因する圧力変動が生じ
る。従って、圧力値ＰX と圧力値ＰY との間の吸着確認
用の設定値によっては前記の原因で圧力変動が生じる結
果、吸着用パッド４が確実にワークを吸着したか否かを
判別することが困難となる。However, in practice, the ejector or vacuum pump, or the filter used in connection therewith, is subject to pressure fluctuations due to work environment, aging, filter clogging, and the like. Occurs. Therefore, depending on the set value for the suction confirmation between the pressure value P X and the pressure value P Y , the pressure fluctuation occurs due to the above-mentioned cause, and as a result, it is determined whether or not the suction pad 4 surely sucks the work. Becomes difficult.
【０００６】しかも、エゼクタあるいは真空ポンプに複
数の吸着用パッド４が連通接続されているとき、一方の
吸着用パッドの吸着能力によって他方の吸着用パッドの
吸着能力に変動を生ずる。従って、一律に個々の吸着用
パッドに関連して吸着確認のための圧力の設定が困難と
なる。Moreover, when the plurality of suction pads 4 are connected to the ejector or the vacuum pump, the suction capacity of one suction pad varies with the suction capacity of the other suction pad. Therefore, it is difficult to uniformly set the pressure for confirming the suction in association with each suction pad.
【０００７】また、供給側圧力の変動、電気的制御下で
は電源の電動によっても同様の不都合が露呈する。[0007] Further, the same inconvenience is exposed even when the supply side pressure fluctuates, and under electrical control, the power source is electrically driven.
【０００８】本発明は、この種の問題を解決するために
なされたものであって、圧力変動が生じたとき、予め設
定された圧力設定値に対して流体の流量が変化した場合
であっても、この圧力設定値に対して比例的に新たな圧
力設定を行い、これによって、流体の流量の変動があっ
た場合でも確実に吸着の有無を判断することが可能な圧
力値設定方法を提供することを目的とする。The present invention has been made in order to solve this kind of problem, and is a case where the flow rate of the fluid changes with respect to a preset pressure set value when a pressure fluctuation occurs. Also provides a new pressure setting in proportion to this pressure setting value, thereby providing a pressure value setting method that can reliably determine the presence or absence of adsorption even when the flow rate of the fluid changes. The purpose is to do.
【０００９】[0009]
【課題を解決するための手段】前記の目的を達成するた
めに、本発明は、流体の第１の流量Ｑ1 と、該第１流量
Ｑ1 によって得られる第１の真空圧力Ｐ1 とから吸着状
態の有無を判断する第１の圧力値Ｖ1 を決定し、前記第
１圧力値Ｖ1 によって前記第１真空圧力Ｐ1 を按分して
ｃとｄの値を得、次いで、前記第１流量Ｑ1 が第２の流
量Ｑ2 に変化した際、この第２流量Ｑ2 によって得られ
る第２の真空圧力Ｐ2 を定め、さらに前記按分されたｃ
とｄの比に基づいて第２の圧力値Ｖ2 を決定することを
特徴とするIn order to achieve the above object, the present invention comprises a first flow rate Q 1 of a fluid and a first vacuum pressure P 1 obtained by the first flow rate Q 1 . The first pressure value V 1 for determining the presence or absence of the adsorption state is determined, and the first vacuum pressure P 1 is proportionally divided by the first pressure value V 1 to obtain the values of c and d. when the flow rate Q 1 is changed to a second flow rate Q 2, defines a second vacuum pressure P 2 obtained by the second flow rate Q 2, is further the prorated c
Characterized in that the second pressure value V 2 is determined based on the ratio of d and d
【００１０】[0010]
【作用】本発明に係る圧力値設定方法では、フィルタ等
の目詰まり、あるいは多数の吸着用パッドが連設されて
いる場合であっても、圧力変動に応じて個々の吸着用パ
ッドに対する吸着の有無を判別する圧力値の設定が容易
に行われる。In the pressure value setting method according to the present invention, even when a filter or the like is clogged, or a large number of suction pads are arranged in series, the suction of each suction pad is changed according to the pressure fluctuation. The pressure value for determining the presence or absence can be easily set.
【００１１】[0011]
【実施例】本発明に係る圧力値設定方法について、それ
に用いられる装置との関係で好適な実施例を挙げ、添付
の図面を参照しながら以下詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The pressure value setting method according to the present invention will be described in detail below with reference to the accompanying drawings, with reference to preferred embodiments in relation to the apparatus used therein.
【００１２】図１において、参照符号１０はエゼクタを
示し、このエゼクタ１０には圧力流体としての圧縮空気
が導入される。エゼクタ１０には空気の圧縮性に影響さ
れず真空でも測定可能な質量流量計並びに疏水性エレメ
ントを用いたフィルタ１２が接続され、このフィルタ１
２は可変絞り１４を介して吸着用パッド１６に連通して
いる。可変絞り１４を挟んで上流側にはフィルタ１８と
このフィルタ１８を介して導入される真空圧力を検出す
るためのセンサ２０が設けられ、このセンサ２０の出力
はコントローラ２２に導入される。In FIG. 1, reference numeral 10 indicates an ejector into which compressed air as a pressure fluid is introduced. The ejector 10 is connected with a filter 12 using a mass flowmeter and a hydrophobic element that are not affected by the compressibility of air and can measure even in vacuum.
2 communicates with a suction pad 16 via a variable aperture 14. A filter 18 and a sensor 20 for detecting a vacuum pressure introduced through the filter 18 are provided on the upstream side of the variable throttle 14, and an output of the sensor 20 is introduced into a controller 22.
【００１３】一方、可変絞り１４の下流側には前記フィ
ルタ１８と同様に、分岐した管路に別異のフィルタ２４
が接続され、このフィルタ２４はさらにセンサ２６に接
続されている。センサ２６は真空圧を検出するものであ
り、その出力は前記コントローラ２２に導入される。コ
ントローラ２２の出力は、例えば、表示器（図示せず）
等に出力される。この場合、フィルタ２４、センサ２６
は念の為に設けられた回路であり、コントローラ２２は
センサ２０、２６のいずれの信号を取り込んで吸着の有
無の判別に用いてもよい。On the other hand, on the downstream side of the variable throttle 14, as in the case of the filter 18, a different filter 24 is provided in a branched pipe line.
Are connected, and the filter 24 is further connected to the sensor 26. The sensor 26 detects a vacuum pressure, and its output is introduced into the controller 22. The output of the controller 22 is, for example, a display (not shown)
Etc. are output. In this case, the filter 24 and the sensor 26
Is a circuit provided just in case, and the controller 22 may take in any signal of the sensors 20 and 26 and use it for determining the presence or absence of adsorption.
【００１４】そこで、以上のような構成において、先
ず、真空圧力を所望の値Ｐ1 と定める。エゼクタ１０の
特性からこの真空圧力Ｐ1 を得るための吸入流量Ｑ1 が
決定される。そこで、吸着特性曲線Ｓ1 と非吸着特性曲
線Ｓ2 の間で第１の圧力値Ｖ1 が定められる。この第１
圧力値Ｖ1 によって第１真空圧力値Ｐ1 を按分するｃ並
びにｄの値が得られる。Therefore, in the above structure, first, the vacuum pressure is set to a desired value P 1 . Intake flow rate to Q 1 for the characteristics of the ejector 10 to obtain the vacuum pressure P 1 is determined. Therefore, the first pressure value V 1 is determined between the adsorption characteristic curve S 1 and the non-adsorption characteristic curve S 2 . This first
The value of c and d is obtained for apportioning the first vacuum pressure value P 1 by the pressure value V 1.
【００１５】次に、例えば、フィルタ１２が目詰まりを
生じたとする。第１圧力値Ｖ1 が変動しないとすると、
このとき、この目詰まりによって、空気流量が減ったに
も係わらず、この第１圧力値Ｖ1 で吸着用パッド１６が
ワークに対する吸着動作を行っているか否かが判断され
ることになる。従って、目詰まりの存在によっては、吸
着しているにも係わらず吸着していないが如き信号をコ
ントローラ２２に送ることになる。例えば、図２に示す
一点鎖線に特性が移った場合であっても第１圧力値Ｖ1
によって吸着の有無を判別しようとすると、実質的にマ
ークを吸着していても吸着していないという信号をセン
サ２０は出力する。これを避けるために、第２の圧力値
Ｖ2 が選択される。これも吸着特性曲線Ｓ1 と非吸着特
性曲線Ｓ 2 との間に存在するものであるが、その決定は
以下のように行われる。Next, for example, the filter 12 is clogged.
Suppose that it has occurred. First pressure value V1If does not change,
At this time, the air flow rate decreased due to this clogging.
Nevertheless, this first pressure value V1And the suction pad 16
It is judged whether or not the suction operation is performed on the workpiece.
Will be. Therefore, depending on the presence of clogging,
Even though you are wearing it, it is not adsorbed
It will be sent to the controller 22. For example, shown in FIG.
Even if the characteristic moves to the alternate long and short dash line, the first pressure value V1
When trying to determine the presence or absence of adsorption by using
A signal indicating that it has not
The server 20 outputs. To avoid this, the second pressure value
V2Is selected. This is also the adsorption characteristic curve S1And non-adsorption
Sex curve S 2It exists between
This is done as follows.
【００１６】先ず、目詰まり等の事態に至ったときに、
第２の真空圧力Ｐ2が決定される。次に、この第２真空
圧力Ｐ2 を得るための第２の吸入流量Ｑ2 が定められ
る。そして、この第２真空圧力Ｐ2 と第２吸入流量Ｑ2
との特性上で、前記按分されたｃ並びにｄの比の値に対
応してａ並びにｂの値が定められる。換言すれば、 ｃ／ｄ＝ａ／ｂ を演算する。これはコントローラ２２内の図示しないＣ
ＰＵによって行われる。それによって、吸着特性曲線Ｓ
1 と非吸着特性曲線Ｓ2 の領域内で第２の圧力値Ｖ2 が
決定される。すなわち、フィルタの目詰まり等により流
量の変動があってもこのエゼクタ１０の特性に応じた特
性曲線で平行移動しただけで第２の圧力値を設定するこ
とができる。従って、ａ／ｄとｃ／ｄの比の値が同じで
あること、すなわち、同じ比の値に設定すれば、フィル
タ１２に目詰まりが惹起したとしても容易に圧力値を設
定変更することが可能となる。First, when a situation such as clogging occurs,
The second vacuum pressure P 2 is determined. Next, the second intake flow rate Q 2 for obtaining a second vacuum pressure P 2 is determined. Then, the second vacuum pressure P 2 and the second suction flow rate Q 2
In view of the characteristics of and, the values of a and b are determined corresponding to the values of the proportionally distributed ratios of c and d. In other words, c / d = a / b is calculated. This is a C not shown in the controller 22.
It is done by the PU. As a result, the adsorption characteristic curve S
The second pressure value V 2 is determined within the region of 1 and the non-adsorption characteristic curve S 2 . That is, even if the flow rate changes due to clogging of the filter or the like, the second pressure value can be set only by the parallel movement with the characteristic curve according to the characteristic of the ejector 10. Therefore, if the value of the ratio of a / d and c / d is the same, that is, if the value of the same ratio is set, the setting of the pressure value can be easily changed even if the filter 12 is clogged. It will be possible.
【００１７】なお、本実施例では、流体の流量がＱ1 か
らＱ2 に変化した際の圧力設定値の変更を行う場合につ
いて説明したが、真空圧力Ｐが変動した際に応用可能で
あることは勿論である。In this embodiment, the case where the pressure set value is changed when the flow rate of the fluid changes from Q 1 to Q 2 has been described, but it can be applied when the vacuum pressure P changes. Of course.
【００１８】[0018]
【発明の効果】本発明に係る圧力値設定方法によれば、
以上のように極めて簡単に圧力変動、例えば、フィルタ
の目詰まり等に対応することが可能である。従って、常
時、完全な吸着状態にあるか否かを自動的に検出するこ
とができるため、吸着不良に基づくワークの落下等の事
故から未然に回避することが可能となる。勿論、圧力変
動によるために、複数の吸着用パッドを一つのエゼクタ
あるいは真空ポンプ等に連結した場合であっても、同様
な効果が得られる。本発明は４方弁を用いたシリンダ搬
送システム等に好適に用いられる。According to the pressure value setting method of the present invention,
As described above, it is possible to cope with the pressure fluctuation, for example, the clogging of the filter extremely easily. Therefore, since it is always possible to automatically detect whether or not a perfect suction state is present, it is possible to avoid an accident such as a drop of a work due to a suction failure. Of course, the same effect can be obtained even when a plurality of suction pads are connected to one ejector, a vacuum pump or the like because of pressure fluctuation. INDUSTRIAL APPLICABILITY The present invention is suitably used for a cylinder transfer system using a 4-way valve.
【図１】本発明に係る圧力値設定方法を実施するための
エゼクタとコントローラとの概略説明図である。FIG. 1 is a schematic explanatory diagram of an ejector and a controller for implementing a pressure value setting method according to the present invention.
【図２】第１の圧力設定値から第２の圧力設定値へと圧
力値の設定変更を行う際の概略特性説明図である。FIG. 2 is a schematic characteristic explanatory view when changing the setting of the pressure value from the first pressure setting value to the second pressure setting value.
【図３】従来技術に係る吸着有無判別装置のブロック説
明図である。FIG. 3 is a block diagram of a suction presence determination device according to a conventional technique.
【図４】図３に示す装置における吸着判別のための圧力
値を決定する際の特性図である。FIG. 4 is a characteristic diagram when determining a pressure value for adsorption determination in the apparatus shown in FIG.
１０…エゼクタ １２、１８、２４…フィルタ １４…可変絞り １６…吸着用パッド ２０、２６…センサ ２２…コントローラ 10 ... Ejector 12, 18, 24 ... Filter 14 ... Variable diaphragm 16 ... Adsorption pad 20, 26 ... Sensor 22 ... Controller
Claims (2)
によって得られる第１の真空圧力Ｐ 1 とから吸着状態の
有無を判断する第１の圧力値Ｖ1 を決定し、 前記第１圧力値Ｖ1 によって前記第１真空圧力Ｐ1 を按
分してｃとｄの値を得、 次いで、前記第１流量Ｑ1 が第２の流量Ｑ2 に変化した
際、この第２流量Ｑ2 によって得られる第２の真空圧力
Ｐ2 を定め、 さらに前記按分されたｃとｄの比に基づいて第２の圧力
値Ｖ2 を決定することを特徴とする圧力値設定方法。1. A first flow rate Q of a fluid1And the first flow rate Q1
The first vacuum pressure P obtained by 1From the adsorption state
First pressure value V for determining presence / absence1And the first pressure value V1By the first vacuum pressure P1Apportion
To obtain the values of c and d, and then the first flow rate Q1Is the second flow rate Q2Changed to
At this time, this second flow rate Q2Second vacuum pressure obtained by
P2The second pressure based on the proportionally divided ratio of c and d.
Value V2A method for setting a pressure value, characterized in that
Ｖ1 と第２圧力値Ｖ2 とは吸着特性曲線Ｓ1 と非吸着特
性曲線Ｓ2の間で定められることを特徴とする圧力値設
定方法。2. The method according to claim 1, wherein the first pressure value V 1 and the second pressure value V 2 are determined between the adsorption characteristic curve S 1 and the non-adsorption characteristic curve S 2. How to set pressure value.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23063491A JP3225063B2 (en) | 1991-09-10 | 1991-09-10 | Pressure value setting method |
| PCT/JP1992/001148 WO1993004963A1 (en) | 1991-09-09 | 1992-09-09 | Vacuum-chuck ascertaining apparatus and vacuum-chuck ascertaining pressure level setting method |
| EP92919504A EP0603396B1 (en) | 1991-09-09 | 1992-09-09 | Vacuum-chuck ascertaining apparatus and vacuum-chuck ascertaining pressure level setting method |
| DE69225486T DE69225486T2 (en) | 1991-09-09 | 1992-09-09 | DEVICE FOR MONITORING THE FUNCTION OF A SUCTION GRIPPER AND METHOD FOR SETTING THE PRESSURE LEVEL FOR THE FUNCTIONAL MONITORING OF A SUCTION CUP |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23063491A JP3225063B2 (en) | 1991-09-10 | 1991-09-10 | Pressure value setting method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0572067A true JPH0572067A (en) | 1993-03-23 |
| JP3225063B2 JP3225063B2 (en) | 2001-11-05 |
Family
ID=16910867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23063491A Expired - Fee Related JP3225063B2 (en) | 1991-09-09 | 1991-09-10 | Pressure value setting method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3225063B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003101678A1 (en) * | 2002-06-04 | 2003-12-11 | Yamatake Corporation | Negative pressure attraction device and attraction confirming sensor |
| WO2004094105A1 (en) * | 2003-04-24 | 2004-11-04 | Nikon Corporation | Vacuum suction holding apparatus and method, grinding apparatus using the holding apparatus, and device producing method using the grinding apparatus |
| JPWO2021144935A1 (en) * | 2020-01-16 | 2021-07-22 | ||
| US11092642B2 (en) | 2018-09-27 | 2021-08-17 | Ns Technologies, Inc. | Electronic component handler and electronic component tester |
-
1991
- 1991-09-10 JP JP23063491A patent/JP3225063B2/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003101678A1 (en) * | 2002-06-04 | 2003-12-11 | Yamatake Corporation | Negative pressure attraction device and attraction confirming sensor |
| US7261350B2 (en) | 2002-06-04 | 2007-08-28 | Yamatake Corporation | Negative pressure attraction device and attraction confirming sensor |
| WO2004094105A1 (en) * | 2003-04-24 | 2004-11-04 | Nikon Corporation | Vacuum suction holding apparatus and method, grinding apparatus using the holding apparatus, and device producing method using the grinding apparatus |
| US7175504B2 (en) | 2003-04-24 | 2007-02-13 | Nikon Corporation | Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatus |
| US11092642B2 (en) | 2018-09-27 | 2021-08-17 | Ns Technologies, Inc. | Electronic component handler and electronic component tester |
| JPWO2021144935A1 (en) * | 2020-01-16 | 2021-07-22 | ||
| WO2021144935A1 (en) * | 2020-01-16 | 2021-07-22 | オムロン株式会社 | Control device, control method, and control program |
| EP4091777A4 (en) * | 2020-01-16 | 2023-05-03 | OMRON Corporation | Control device, control method, and control program |
| US12109686B2 (en) | 2020-01-16 | 2024-10-08 | Omron Corporation | Control apparatus, control method, and computer-readable storage medium storing a control program |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3225063B2 (en) | 2001-11-05 |
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