JPH0566563B2 - - Google Patents
Info
- Publication number
- JPH0566563B2 JPH0566563B2 JP59180623A JP18062384A JPH0566563B2 JP H0566563 B2 JPH0566563 B2 JP H0566563B2 JP 59180623 A JP59180623 A JP 59180623A JP 18062384 A JP18062384 A JP 18062384A JP H0566563 B2 JPH0566563 B2 JP H0566563B2
- Authority
- JP
- Japan
- Prior art keywords
- light guide
- lens
- light
- substrate
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 23
- 230000003287 optical effect Effects 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 5
- 239000010936 titanium Substances 0.000 description 3
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は光伝送技術に関し、特にプレーナ型光
ガイドと光源との光結合構造及びその製造方法に
関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to optical transmission technology, and particularly to an optical coupling structure between a planar light guide and a light source, and a method for manufacturing the same.
光伝送手段として光フアイバが主に用いられて
いるが、近年は、例えばニオブ酸リチウム
（LiNbO3）や石英（SiO2）などの誘電体または
ガリウムひ素（GaAs）などの半導体からなる基
板の表面に形成されたプレーナ型光ガイドが実用
化されている。一方、かかる光ガイドを用いて伝
送する光の光源としては、発光ダイオード
（LED）や半導体レーザダイオード（LD）など
が一般に用いられている。 Optical fibers are mainly used as optical transmission means , but in recent years , optical fibers have been A planar light guide formed in On the other hand, light-emitting diodes (LEDs), semiconductor laser diodes (LDs), and the like are generally used as light sources for light transmitted using such light guides.
上記のようなプレーナ型光ガイドと光源との光
結合は、従来、両者の間の空間に球レンズなどを
配置し、これで光源からの出射光を集光して光ガ
イドの端面に導入するように構成されている。し
かしこの構造では、光源とレンズ間ならびにレン
ズと光ガイド間のそれぞれに高精度の光軸調整が
必要で、組立作業が煩雑であるという問題があ
る。また、レンズの介在によつてそれだけ媒質間
の境界面が多くなり、フレネル損失が大きいとい
う問題がある。
Conventionally, optical coupling between a planar light guide and a light source as described above is achieved by placing a ball lens or the like in the space between the two, which condenses the light emitted from the light source and introduces it to the end face of the light guide. It is configured as follows. However, this structure requires highly accurate optical axis adjustment between the light source and the lens and between the lens and the light guide, making assembly work complicated. Furthermore, the presence of the lens increases the number of interfaces between the media, resulting in a problem of large Fresnel loss.
本発明は上記問題点を解決するために、プレー
ナ型光ガイドと光源との光結合構造において、光
源からの出射光を光ガイドに導入するための集光
レンズを光ガイドに対して非対称に該光ガイドの
端面に一体形成したものである。
In order to solve the above problems, the present invention provides an optical coupling structure between a planar light guide and a light source, in which a condensing lens for introducing light emitted from the light source into the light guide is arranged asymmetrically with respect to the light guide. It is integrally formed on the end face of the light guide.
また、本発明はこのようなプレーナ型光ガイド
の端面に集光レンズを光軸非対称に一体形成する
方法を提供するものであり、この方法は透明で且
つ通常は比較的粘性の高い液状であるレンズ材料
中に前記基板の光ガイド端面側のエツジを浸し、
次に基板を垂直に引き上げ、このとき該基板エツ
ジの端面及びその近傍の基板側面に残つて滴状に
垂下したレンズ材料を硬化させることにより前記
集光レンズを形成するものである。 The present invention also provides a method for integrally forming a condensing lens asymmetrically on the optical axis on the end face of such a planar light guide, and this method uses transparent and usually relatively highly viscous liquid. immersing the edge of the light guide end of the substrate in a lens material;
Next, the substrate is vertically pulled up, and the condensing lens is formed by curing the lens material that remains on the end surface of the substrate edge and the side surface of the substrate in the vicinity and hangs down in the form of drops.
本発明による光結合構造では、光ガイド端面に
一体形成された集光レンズが、集光レンズと光ガ
イド間の光軸調整を不要となし、また媒質間境界
面の数を減らす如く作用する。
In the optical coupling structure according to the present invention, the condenser lens integrally formed on the end face of the light guide eliminates the need for adjusting the optical axis between the condenser lens and the light guide, and acts to reduce the number of interfaces between media.
また、本発明による集光レンズの一体形成方法
によれば、基板エツジから垂下するレンズ材料の
表面張力が理想的な形状の集光レンズを容易に形
成可能とする。 Furthermore, according to the method for integrally forming a condenser lens according to the present invention, the surface tension of the lens material hanging down from the edge of the substrate makes it possible to easily form a condenser lens having an ideal shape.
以下、図面を参照して本発明の実施例を詳細に
説明する。
Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明によるプレーナ型光ガイドと光
源との光結合構造の一実施例の略示側面図であ
る。図中、符号１が光源を示し、これは例えば半
導体レーザダイオードである。また、符号２はプ
レーナ型光ガイド（以下単に「光ガイド」と略
記）を示す。この光ガイド２はLiNbO3の基板３
に形成したものであり、厚さが約0.5mmの基板３
の表面に金属チタン（Ti）を幅数μm、厚さ数百
Åとして所望のパターンに形成し、これを約1000
℃で数時間加熱してTiをLiNbO3中に熱拡散せし
めることにより形成される。この熱拡散により形
成された光ガイド２は他の部分よりわずかに大き
な屈折率を有し、従つて光ガイド２にその端面か
ら光を導入すると、光は光ガイド２内に閉じ込め
られて伝送される。第２図イは光ガイド２及び基
板３の部分斜視図である。 FIG. 1 is a schematic side view of an embodiment of an optical coupling structure between a planar light guide and a light source according to the present invention. In the figure, reference numeral 1 indicates a light source, which is, for example, a semiconductor laser diode. Further, the reference numeral 2 indicates a planar light guide (hereinafter simply abbreviated as "light guide"). This light guide 2 is a LiNbO 3 substrate 3
The substrate 3 has a thickness of approximately 0.5 mm.
Metallic titanium (Ti) is formed into a desired pattern with a width of several μm and a thickness of several hundred Å on the surface of the
It is formed by thermally diffusing Ti into LiNbO 3 by heating at ℃ for several hours. The light guide 2 formed by this thermal diffusion has a slightly larger refractive index than other parts, so when light is introduced into the light guide 2 from its end face, the light is confined within the light guide 2 and transmitted. Ru. FIG. 2A is a partial perspective view of the light guide 2 and the substrate 3.
次に符号４は、光源１からの出射光５を光ガイ
ド２に導入するための集光レンズを示し、このレ
ンズ４は光ガイド２の端面に一体形成されてい
る。第２図ロはレンズ４を一体形成した状態の部
分斜視図である。 Next, reference numeral 4 denotes a condensing lens for introducing the emitted light 5 from the light source 1 into the light guide 2, and this lens 4 is integrally formed on the end surface of the light guide 2. FIG. 2B is a partial perspective view of a state in which the lens 4 is integrally formed.
このレンズ４は第３図に示すようなデイツプ法
によつて形成可能である。まず、符号１０はレン
ズ材料１１が入つた槽を示す。レンズ材料１１と
しては、透明で且つ通常は比較的粘性の高い液状
であり、そして例えば熱あるいは光などの手段に
よつて硬化する性質のもの、例えば米国の
Summers Laboratories社の「Optical Cement
UV−71」などを用いる。これは紫外線照射によ
つて硬化する。そして第３図イに示す如く、この
レンズ材料１１中に、第２図イに示したような基
板３の光ガイド２の端面側のエツジを浸す。そし
て数秒後に、第３図ロに示す如く基板３を垂直に
そつと引き上げる。このとき、基板３に付着した
レンズ材料は、重力と表面張力との作用により基
板エツジに符号４ａで示す如く滴状に垂下する。
これに紫外線を照射して硬化させれば、第２図ロ
に示す如く基板３のエツジ沿つてほぼ一様な断面
形状の集光レンズ４が一体形成される。 This lens 4 can be formed by the dip method as shown in FIG. First, reference numeral 10 indicates a tank containing lens material 11. The lens material 11 is transparent and usually has a relatively high viscosity liquid, and has a property of curing by means such as heat or light, such as those made in the United States.
“Optical Cement” by Summers Laboratories
UV-71" etc. are used. This is cured by UV irradiation. Then, as shown in FIG. 3A, the edge of the light guide 2 of the substrate 3 as shown in FIG. 2A is dipped into this lens material 11. After a few seconds, the substrate 3 is gently pulled up vertically as shown in FIG. 3B. At this time, the lens material attached to the substrate 3 hangs down to the edge of the substrate in the form of drops as shown by reference numeral 4a due to the effects of gravity and surface tension.
By irradiating this with ultraviolet rays and curing it, a condensing lens 4 having a substantially uniform cross-sectional shape is integrally formed along the edge of the substrate 3, as shown in FIG. 2B.
本発明の光結合構造によれば、集光レンズ４が
光ガイド２の端面に一体形成されているので、光
源１と光ガイド２（もしくは集光レンズ４）間の
光軸調整のみを行えば良く、組立が非常に容易で
ある。また、同じく集光レンズの一体形成によ
り、光ガイド２と集光レンズ４間に他の媒質が介
在しないのでそれだけ媒質間の境界面の数が少な
く、フレネル損失が小さい。
According to the optical coupling structure of the present invention, since the condenser lens 4 is integrally formed on the end face of the light guide 2, only the optical axis adjustment between the light source 1 and the light guide 2 (or the condenser lens 4) is required. Good and very easy to assemble. Furthermore, since the condensing lens is integrally formed, no other medium is interposed between the light guide 2 and the condensing lens 4, which reduces the number of interfaces between the media and reduces Fresnel loss.
更に、本発明の方法によれば光ガイド２への集
光レンズ４の一体形成が非常に簡単であり、しか
も理想的なレンズ形状を得ることができる。特
に、本発明の方法で形成されるレンズは、基板面
内方向にはレンズ作用を持たない。しかるに、光
源として主に用いられる半導体レーザダイオード
の場合、その出射光は活性層の接合面と平行な方
向（つまり基板面内方向）には拡がりが小さく、
接合面と直角な方向への拡がりが大きい軸非対称
であり、従つて図示のような集光レンズは光結合
の上で極めて有利である。しかし、発光ダイオー
ドのように出射光が軸対称のものにも実用上十分
有効であることは云うまでもない。また、本発明
に方法で形成される集光レンズ４は第１図に示す
ように基板３の中心線に関し対称形であるが、実
際にレンズとして用いられるのは光ガイド２の方
に偏つた領域である。これは、光ガイド２は片側
が基板３に接し、反対側は空気に接していて全反
射が相違する点を考慮すると、理想的なレンズ作
用が得られる。尚、特殊なレンズ形状を得たい場
合には、第３図ロで説明した紫外線照射による滴
状レンズ材料４ａの硬化の際、半硬化の状態でこ
れを所望の形状に整形することも可能である。 Furthermore, according to the method of the present invention, it is very easy to integrally form the condenser lens 4 to the light guide 2, and moreover, an ideal lens shape can be obtained. In particular, the lens formed by the method of the present invention does not have a lens effect in the in-plane direction of the substrate. However, in the case of a semiconductor laser diode, which is mainly used as a light source, the emitted light has a small spread in the direction parallel to the bonding surface of the active layer (that is, in the direction in the substrate plane).
It is axially asymmetrical with a large extent in the direction perpendicular to the cementing surface, and therefore the condensing lens as shown is extremely advantageous in terms of optical coupling. However, it goes without saying that the present invention is sufficiently effective in practice even for devices whose emitted light is axially symmetrical, such as a light emitting diode. Furthermore, although the condensing lens 4 formed by the method of the present invention is symmetrical with respect to the center line of the substrate 3 as shown in FIG. It is an area. This is because one side of the light guide 2 is in contact with the substrate 3 and the other side is in contact with the air, so that an ideal lens effect can be obtained, considering that total reflection is different. Incidentally, if it is desired to obtain a special lens shape, it is also possible to shape the droplet-shaped lens material 4a into the desired shape in a semi-cured state when the droplet-shaped lens material 4a is cured by ultraviolet irradiation as explained in FIG. be.
第１図は本発明によるプレーナ型光ガイドと光
源の光結合構造の一実施例の略示側面図、第２図
は光ガイド及び基板の部分斜視図であつてイが集
光レンズ形成前の状態、ロが集光レンズ形成後の
状態をそれぞれ示す図、第３図は本発明による集
光レンズ一体形成方法を示す図である。
１……光源、２……光ガイド、３……基板、４
……集光レンズ、４ａ……滴状レンズ材料、５…
…光、１０……レンズ材料槽、１１……レンズ材
料。
FIG. 1 is a schematic side view of an embodiment of the optical coupling structure between a planar light guide and a light source according to the present invention, and FIG. 2 is a partial perspective view of the light guide and the substrate, and FIG. FIG. 3 is a diagram showing a method for integrally forming a condenser lens according to the present invention. 1...Light source, 2...Light guide, 3...Substrate, 4
...Condensing lens, 4a...Droplet lens material, 5...
...Light, 10... Lens material tank, 11... Lens material.
Claims (1)
たプレーナ型光ガイドと光源とを結合する光結合
構造であつて、光源からの出射光を該ガイドに導
入するための集光レンズを光ガイドに対して非対
称に該光ガイドの端面に一体形成したことを特徴
とするプレーナ型光ガイド。 ２ 誘電体または半導体の基板の表面に形成され
たプレーナ型光ガイドに光源からの出射光を導入
するための集光レンズを光軸非対称に光ガイドの
端面に一体形成する方法であつて、透明で且つ通
常は比較的粘性の高い液状であるレンズ材料中に
前記基板の光ガイド端面側のエツジを浸し、次に
基板を垂直に引き上げ、このとき基板エツジの端
面及びその近傍の基板側面に残つて滴状に垂下し
たレンズ材料を硬化させることにより前記集光レ
ンズを形成することを特徴とする方法。[Scope of Claims] 1. An optical coupling structure for coupling a light source to a planar light guide formed on the surface of a dielectric or semiconductor substrate, the structure including a concentrator for introducing light emitted from the light source into the guide. 1. A planar light guide, characterized in that a light lens is integrally formed on an end face of the light guide asymmetrically with respect to the light guide. 2. A method of integrally forming a condensing lens asymmetrically on the optical axis on the end face of the light guide for introducing light emitted from a light source into a planar light guide formed on the surface of a dielectric or semiconductor substrate, the method comprising: The edge of the light guide end of the substrate is immersed in a lens material, which is usually a liquid with relatively high viscosity, and then the substrate is pulled up vertically. A method characterized in that the condenser lens is formed by curing lens material that hangs down in the form of drops.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18062384A JPS6159406A (en) | 1984-08-31 | 1984-08-31 | Optical coupling structure of planar type light guide and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18062384A JPS6159406A (en) | 1984-08-31 | 1984-08-31 | Optical coupling structure of planar type light guide and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6159406A JPS6159406A (en) | 1986-03-26 |
| JPH0566563B2 true JPH0566563B2 (en) | 1993-09-22 |
Family
ID=16086446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18062384A Granted JPS6159406A (en) | 1984-08-31 | 1984-08-31 | Optical coupling structure of planar type light guide and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6159406A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63194204A (en) * | 1987-02-09 | 1988-08-11 | Toshiba Corp | Optical device |
| JPH079492B2 (en) * | 1987-04-24 | 1995-02-01 | 松下電工株式会社 | Manufacturing method of optical circuit board |
| DE102010024545B4 (en) * | 2010-06-22 | 2022-01-13 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Semiconductor device and method of manufacturing a semiconductor device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5080792A (en) * | 1973-11-14 | 1975-07-01 | ||
| JPS554049A (en) * | 1978-06-23 | 1980-01-12 | Mitsubishi Electric Corp | Production of optical transmission path |
-
1984
- 1984-08-31 JP JP18062384A patent/JPS6159406A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5080792A (en) * | 1973-11-14 | 1975-07-01 | ||
| JPS554049A (en) * | 1978-06-23 | 1980-01-12 | Mitsubishi Electric Corp | Production of optical transmission path |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6159406A (en) | 1986-03-26 |
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