JPH056428B2 - - Google Patents

Info

Publication number
JPH056428B2
JPH056428B2 JP58052061A JP5206183A JPH056428B2 JP H056428 B2 JPH056428 B2 JP H056428B2 JP 58052061 A JP58052061 A JP 58052061A JP 5206183 A JP5206183 A JP 5206183A JP H056428 B2 JPH056428 B2 JP H056428B2
Authority
JP
Japan
Prior art keywords
elastic body
rotor
pressure contact
rotationally symmetrical
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58052061A
Other languages
Japanese (ja)
Other versions
JPS59178987A (en
Inventor
Tadao Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP58052061A priority Critical patent/JPS59178987A/en
Publication of JPS59178987A publication Critical patent/JPS59178987A/en
Publication of JPH056428B2 publication Critical patent/JPH056428B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【発明の詳細な説明】 (発明の技術分野) 本発明は超音波振動を利用した超音波モーター
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field of the Invention) The present invention relates to an ultrasonic motor that utilizes ultrasonic vibrations.

(発明の背景) 従来より最も一般的に用いられている、電磁力
を利用したモーターは、形状や材料に対する制約
が大きく、また、構造的にも巻き線や、小型で高
出力を得るためには希土類の永久磁石を用いる
等、コスト的にも限界を有していた。
(Background of the Invention) Motors that utilize electromagnetic force, which have been the most commonly used motors in the past, have significant restrictions on shape and materials, and are structurally difficult to use, such as wire windings and the need to achieve high output with a small size. However, there were limitations in terms of cost, such as the use of rare earth permanent magnets.

この様な状況に対し、従来より電磁式のモータ
ーに代わるべくアクチユエーターの開発が行なわ
れ、その1つとして、超音波振動を利用したモー
ターが考えられている。この超音波振動を利用し
たモーター(以後、超音波モーターと呼ぶ)の試
作例として、圧電体等を用いて弾性体表面に表面
波を発生させて、この表面に圧接されたローター
を駆動せしめる表面波型の超音波モーター(以
後、表面波モーターと呼ぶ)が考案されている。
そして、この表面波型の超音波モーターとして、
弾性体の表面を回転対称面(例えば円筒面や円錐
面)とし、該回転対称面に圧接されるローターの
圧接面をこの回転対称面に沿つて形成したものが
ある。
In response to this situation, actuators have been developed to replace conventional electromagnetic motors, and one type of actuator is a motor that uses ultrasonic vibration. As a prototype example of a motor that utilizes ultrasonic vibrations (hereinafter referred to as an ultrasonic motor), a surface wave is generated on the surface of an elastic material using a piezoelectric material, etc., and a surface that drives a rotor that is pressed against this surface. A wave-type ultrasonic motor (hereinafter referred to as a surface wave motor) has been devised.
And as this surface wave type ultrasonic motor,
There is one in which the surface of the elastic body is a rotationally symmetrical surface (for example, a cylindrical surface or a conical surface), and the pressure contact surface of the rotor that is pressed against the rotationally symmetrical surface is formed along this rotationally symmetrical surface.

ところが従来装置においては弾性体の回転対称
面にローターの圧接面をその回転対称面の全周に
わつて均等に押しつける事が困難であるという欠
点を有していた。
However, the conventional device has a drawback in that it is difficult to press the pressure contact surface of the rotor against the rotationally symmetrical surface of the elastic body evenly over the entire circumference of the rotationally symmetrical surface.

(発明の目的) そこで本発明はこれらの欠点を解決し、弾性体
の回転対称面(例えば円筒面や円錐面)にロータ
ーの圧接面を全周にわたつて均等に押しつけられ
る様な超音波モーターを提供する事を目的とす
る。
(Object of the Invention) The present invention solves these drawbacks and provides an ultrasonic motor that can press the pressure contact surface of the rotor evenly over the entire circumference against the rotationally symmetrical surface (for example, a cylindrical surface or a conical surface) of an elastic body. The purpose is to provide.

尚、本明細書において、「回転対称面」とは直
線あるいは曲線を1つの軸を中心にして回転させ
た時に、その直線あるいは曲線によつて形成され
る面をいう。その回転対称面を例示すれば円筒
面、円錐面、球面などがある。
In this specification, the term "rotationally symmetrical surface" refers to a surface formed by a straight line or curved line when the straight line or curved line is rotated about one axis. Examples of rotationally symmetrical surfaces include cylindrical surfaces, conical surfaces, and spherical surfaces.

(実施例) 第1図は本発明の一実施例を示し、駆動側は円
筒状の弾性体1と、複数の領域(実施例では15の
領域)に分割され各領域に高電圧を印加する等し
て分極処理された、弾性体1を励振させる為の圧
電体2と、圧電体に電圧を印加する為の電極3a
〜3cと、各電極に対応して設けられた導線4a
〜4cと、端子5a〜5cとで構成されている。
ステータは、弾性体1と圧電体2とから構成され
ている。電圧体2は弾性体1の内側に、各電極3
a〜3cは圧電体2の内側にそれぞれ設けられて
いる。また被駆動側のローター6は、第1図に示
される如く、円筒状の基部6aと該基部6aから
伸張した複数の枝状部(本実施例で3つ)6b〜
6dと、各枝状部6b〜6dの先端に形成され
た、弾性体1の外周に沿つた形状の圧接面6e′〜
6g′を有する圧接部(接触子)6e〜6gと、リ
ング状の加圧部材7とからなる。各枝状部6b〜
6dの先端(圧接部が設けられている側)は自身
の弾性力により外方に拡がるよう構されている。
また、圧接部6e〜6gは枝状部6b〜6dの弾
性力によつて圧接方向成分の自由を持ち独立して
動くように構成されている。そして各枝状部の根
元部分の外周には螺子6h〜6jが形成されてい
る。加圧部材7の内周には各螺子6h〜6jに螺
合する螺子7aが形成されている。したがつて螺
子6h〜6jと螺子7aとを螺合させ、加圧部材
7を回転させると、加圧部材7は各枝状部6b〜
6d上を回転するとともに、各枝状部の先端に向
つて進む。そして各圧接部6e〜6gはそれぞれ
内側に向かつて変位する。こして各圧接面6e′〜
6g′は弾性体1の外周面上に均等な力で押圧され
る。
(Embodiment) Fig. 1 shows an embodiment of the present invention, in which the driving side is divided into a cylindrical elastic body 1 and a plurality of regions (15 regions in the embodiment), and a high voltage is applied to each region. A piezoelectric body 2 for exciting the elastic body 1 and an electrode 3a for applying a voltage to the piezoelectric body, both of which have been equally polarized.
~3c, and a conductive wire 4a provided corresponding to each electrode.
4c and terminals 5a to 5c.
The stator is composed of an elastic body 1 and a piezoelectric body 2. The voltage body 2 has each electrode 3 inside the elastic body 1.
A to 3c are provided inside the piezoelectric body 2, respectively. Further, as shown in FIG. 1, the rotor 6 on the driven side includes a cylindrical base 6a and a plurality of branch-shaped parts (three in this embodiment) 6b to 6b extending from the base 6a.
6d, and pressure contact surfaces 6e' to 6e' shaped along the outer periphery of the elastic body 1 formed at the tips of the branch parts 6b to 6d.
It consists of pressure contact parts (contactors) 6e to 6g having a diameter of 6g' and a ring-shaped pressure member 7. Each branch 6b~
The tip of 6d (the side where the pressure contact portion is provided) is configured to expand outward due to its own elastic force.
Further, the pressure contact portions 6e to 6g are configured to have freedom in the pressure contact direction component and move independently due to the elastic force of the branch portions 6b to 6d. Screws 6h to 6j are formed on the outer periphery of the root portion of each branch. A screw 7a is formed on the inner periphery of the pressure member 7 and is screwed into each of the screws 6h to 6j. Therefore, when the screws 6h to 6j and the screw 7a are screwed together and the pressurizing member 7 is rotated, the pressurizing member 7 rotates the respective branch-like portions 6b to 7a.
6d and progresses toward the tip of each branch. Each pressure contact portion 6e to 6g is displaced inwardly. Strain each pressure contact surface 6e'~
6g' is pressed onto the outer peripheral surface of the elastic body 1 with an even force.

いま、端子5bをグランドして、端子5aに高
周波数の正弦波を、そして端子5cにその正弦波
と位相のずれた(例えば90゜)正弦波を各々印加
してやると、圧接部2により弾性体1が励振さ
れ、弾性体1の表面(円筒の外側)に表面波が発
生する。したがつて、弾性体1の外側に圧接され
ている圧接部6e〜6gが弾性体1上をその円周
方向に向かつて駆動される。こうして弾性体1上
をローター6が円周方向に回転する。
Now, when the terminal 5b is grounded and a high frequency sine wave is applied to the terminal 5a and a sine wave out of phase with the sine wave (for example, 90 degrees) is applied to the terminal 5c, the elastic body is 1 is excited, and a surface wave is generated on the surface of the elastic body 1 (outside the cylinder). Therefore, the pressure contact portions 6e to 6g pressed to the outside of the elastic body 1 are driven on the elastic body 1 in the circumferential direction thereof. In this way, the rotor 6 rotates on the elastic body 1 in the circumferential direction.

本実施例は以上のように圧接部6e〜6gがそ
れぞれ弾性体1上に別個独立に押圧されるので、
弾性体1における回転対称面の軸(弾性体1を構
成する円筒の軸)と、ローター6における回転軸
とが完全に一致するよう構成したり、弾性体1の
回転対称面が完全に回転対称になるよう構成した
りしなくても、換言すればそのような厳密な製造
精度を要求されることなく、各圧接部6e〜6g
が均等な力で弾性体に押圧できる。したがつてス
ムースな回転力の伝達ができるものである。
In this embodiment, the pressure contact parts 6e to 6g are pressed onto the elastic body 1 separately and independently as described above.
The axis of the rotationally symmetrical surface of the elastic body 1 (the axis of the cylinder constituting the elastic body 1) and the rotational axis of the rotor 6 may be configured to completely match, or the rotationally symmetrical surface of the elastic body 1 may be configured to be completely rotationally symmetrical. In other words, each pressure contact portion 6e to 6g does not require such strict manufacturing precision.
can be pressed against an elastic body with even force. Therefore, smooth rotational force can be transmitted.

また本実施例の如く構成すれば、圧接部の弾性
体1への押圧力を調節するのが容易である。
Furthermore, with the configuration as in this embodiment, it is easy to adjust the pressing force of the pressure contact portion against the elastic body 1.

さらに本実施例で述べた加圧部材の回転を制御
できるようにしてやれば、弾性体1と圧接部6e
〜6gの接触を制御することができ、加圧部材及
びローター6にクラツチ機能を持たせることもで
きる。
Furthermore, if the rotation of the pressure member described in this embodiment can be controlled, the elastic body 1 and the pressure contact portion 6e
It is possible to control contact of up to 6 g, and the pressure member and rotor 6 can also have a clutch function.

なお、本実施例では弾性体1の外に圧接部6e
〜6gを設けたが、弾性体の外に圧電体2及び電
極3a〜3cを設け、弾性体の内側にこれに押圧
される圧接部を設けてもよいことは言うまでもな
い。
In addition, in this embodiment, a pressure contact portion 6e is provided outside the elastic body 1.
Although the piezoelectric body 2 and the electrodes 3a to 3c are provided outside the elastic body, it goes without saying that the piezoelectric body 2 and the electrodes 3a to 3c may be provided inside the elastic body, and a press-contact portion pressed therewith may be provided inside the elastic body.

また本実施例で用いた表面波モーターの原理に
ついては1983年2月28日付「日経メカニカル」に
詳述されているで詳述しない。
Further, the principle of the surface wave motor used in this embodiment is described in detail in "Nikkei Mechanical" dated February 28, 1983, and will not be described in detail.

(発明の効果) 以上のように本発明によれば、高い製造精度を
要求されることなく、弾性体とローターとの間の
圧接力を全周にわたつて均等にかけられる様な超
音波モーターを得ることができる。
(Effects of the Invention) As described above, the present invention provides an ultrasonic motor that can apply pressure force between the elastic body and the rotor evenly over the entire circumference without requiring high manufacturing precision. Obtainable.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例を示す斜視図である。 〔主要部分の符号の説明〕、1……弾性体、2
……圧電体、3a〜3c……電極、6……ロータ
ー、6e′〜6g′……圧接面。
FIG. 1 is a perspective view showing an embodiment of the present invention. [Explanation of symbols of main parts], 1...Elastic body, 2
... Piezoelectric body, 3a to 3c... Electrode, 6... Rotor, 6e' to 6g'... Pressure contact surface.

Claims (1)

【特許請求の範囲】 1 ステータ10と、ロータ6と、加圧手段7と
を備えた超音波モーターであつて、 ステータ10は、回転対称面を形成する形状か
ら成る弾性体1と、それを励振する圧電体2とか
ら成り、 ロータ6は、円周方向に沿つて複数個に分割さ
れそれぞれ圧接面6e′〜6g′を備えた接触子6e
〜6gを有し、弾性体1に対する圧接方向成分の
自由度を持ち独立して動くものであり、 加圧手段7は、ロータ6の接触子をそれぞれ独
立して弾性体1の回転対称面に圧接保持するもの
である 超音波モーター。
[Claims] 1. An ultrasonic motor comprising a stator 10, a rotor 6, and a pressure means 7, wherein the stator 10 includes an elastic body 1 having a shape forming a rotationally symmetrical surface, and an elastic body 1 having a shape forming a rotationally symmetrical surface. The rotor 6 consists of a piezoelectric body 2 that vibrates, and the rotor 6 is divided into a plurality of parts along the circumferential direction, each having a contactor 6e having pressure contact surfaces 6e' to 6g'.
~6 g, and has a degree of freedom in the direction of pressure with respect to the elastic body 1 and moves independently. An ultrasonic motor that holds pressure.
JP58052061A 1983-03-28 1983-03-28 Surface wave motor utilizing supersonic vibration Granted JPS59178987A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58052061A JPS59178987A (en) 1983-03-28 1983-03-28 Surface wave motor utilizing supersonic vibration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58052061A JPS59178987A (en) 1983-03-28 1983-03-28 Surface wave motor utilizing supersonic vibration

Publications (2)

Publication Number Publication Date
JPS59178987A JPS59178987A (en) 1984-10-11
JPH056428B2 true JPH056428B2 (en) 1993-01-26

Family

ID=12904294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58052061A Granted JPS59178987A (en) 1983-03-28 1983-03-28 Surface wave motor utilizing supersonic vibration

Country Status (1)

Country Link
JP (1) JPS59178987A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6477484A (en) * 1987-09-18 1989-03-23 Nec Corp Ultrasonic motor and method for driving same
DE60014990T2 (en) * 1999-02-26 2005-11-03 Honda Electronic Co., Ltd., Toyohashi Ultrasonic motor drive
JP5407155B2 (en) * 2008-03-12 2014-02-05 株式会社ニコン Vibration actuator, lens unit, and imaging device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326911A (en) * 1976-08-25 1978-03-13 Yokogawa Hokushin Electric Corp Pulse motor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326911A (en) * 1976-08-25 1978-03-13 Yokogawa Hokushin Electric Corp Pulse motor

Also Published As

Publication number Publication date
JPS59178987A (en) 1984-10-11

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