JPH0562424B2 - - Google Patents
Info
- Publication number
- JPH0562424B2 JPH0562424B2 JP58246603A JP24660383A JPH0562424B2 JP H0562424 B2 JPH0562424 B2 JP H0562424B2 JP 58246603 A JP58246603 A JP 58246603A JP 24660383 A JP24660383 A JP 24660383A JP H0562424 B2 JPH0562424 B2 JP H0562424B2
- Authority
- JP
- Japan
- Prior art keywords
- mass
- resolution
- quadrupole
- peak
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 150000002500 ions Chemical class 0.000 description 12
- 230000035945 sensitivity Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000001819 mass spectrum Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
- H01J49/4215—Quadrupole mass filters
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Description
【発明の詳細な説明】
イ 産業上の利用分野
本発明は四重極質量分析計の分解能調整装置に
関する。DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a resolution adjustment device for a quadrupole mass spectrometer.
ロ 従来技術
四重極質量分析計では分解能を上げると感度が
低下し、高感度を得ようとすると分解能が低下す
る。従つて分析操作前に分析目的に応じて分解能
調整を行う。そして従来この調整は分析を行う者
の知識と経験に頼つて行われていたが、その調整
項目は感度、分解能、質量較正等で、感度と分解
能が関係しているのは勿論、分解能を変えると質
量ピークの中心位置がずれるので、質量較正が必
要なのであり、感度、分解能、質量ピークの中心
の三者が互に関連して動くので、調整操作は大変
複雑で骨の折れる仕事であつた。B. Prior Art In a quadrupole mass spectrometer, increasing the resolution lowers the sensitivity, and attempting to obtain higher sensitivity lowers the resolution. Therefore, the resolution should be adjusted according to the purpose of the analysis before the analysis operation. Traditionally, this adjustment has relied on the knowledge and experience of the person conducting the analysis, but the adjustment items include sensitivity, resolution, mass calibration, etc., and of course sensitivity and resolution are related, as well as changes in resolution. Since the center position of the mass peak shifts, mass calibration is required, and since sensitivity, resolution, and the center of the mass peak move in relation to each other, the adjustment operation was a very complicated and arduous task. .
ハ 目的
本発明は四重極質量分析計の調整に当つての分
析者の負担を軽減することを目的とする。C. Purpose The present invention aims to reduce the burden on analysts when adjusting a quadrupole mass spectrometer.
ニ 構成
本発明装置は四重極質量分析計で分解能を変え
たときの質量ピークの中心の移動を予め測定して
おき、この測定データに基き、分解能の設定に応
じて自動的に質量変化を補正するものである。D. Configuration The device of the present invention measures in advance the movement of the center of the mass peak when the resolution is changed using a quadrupole mass spectrometer, and based on this measurement data, automatically changes the mass according to the resolution setting. This is a correction.
四重極質量分析計で分解能を変えると質量ピー
クの中心が移動する理由を第1図によつて説明す
る。四重極質量分析装置は四つの電極で対向する
もの同士が同極性に隣り合うものが互に反対極性
になるように四つの電極に直流電圧Uと振幅がV
の高周波交流電圧とを重量させて印加する。第1
図は安定線図と呼ばれるもので横軸は交流振幅
V、縦軸は直流電圧Uを表わし、三角状のカーブ
はMなる質量のイオンに対して電圧U,Vがこの
三角状カーブの内側にあるとき、そのイオンの軌
道は安定で四重極空間を通り抜けてイオン検出器
に入射することができ、U,Vが三角状カーブの
外に設定されたときはイオン軌道は不安定で発散
してしまい、イオンは検出器に入射できない。質
量が異れば、この三角状カーブも異り、軽いイオ
ンに対する三角状カーブ程小さくなりかつ左方へ
寄つて行く。そこで、UとVの値が直線Pに沿つ
て変化するようなプログラムによつてU,Vを変
化させると、質量MのイオンはU,Vが第1図に
示すようにU1,V1からU1+ΔU、V1+ΔVまで
変化する間イオン検出器に検出される。そこで交
流電圧の振幅Vを質量を表わすパラメータとして
イオン検出出力を記録すると第2図Aのような質
量スペクトルのプロフアイルが得られる。この場
合のピーク幅の中心のVの値をVpとすると、U,
Vの変化プログラムを直線Pのように設定したと
きは、Vpが質量Mを示すように表示装置を調整
する。同様にしてU,Vの変化のプログラムを第
1図で直線Qのように設定すると、質量Mのイオ
ンは交流振幅VがV1′からV1′+ΔV′まで変化す
る間検出されており、この場合の質量スペクトル
のプロフアイルは第2図Bのようになり、ピーク
幅が広くなると共に、安定線図が非対称な計であ
るためピーク中心はVpからVqに移動する。他方
ピーク幅が広くなつただけ感度は向上し、分解能
は低下している。 The reason why the center of the mass peak moves when the resolution is changed in a quadrupole mass spectrometer will be explained with reference to FIG. A quadrupole mass spectrometer has four electrodes that are facing each other and have the same polarity, while adjacent electrodes have opposite polarity.
A high frequency alternating current voltage is applied. 1st
The figure is called a stability diagram, where the horizontal axis represents AC amplitude V and the vertical axis represents DC voltage U. The triangular curve shows that voltages U and V for an ion with mass M are inside this triangular curve. At some point, the ion's trajectory is stable and it can pass through the quadrupole space and enter the ion detector, but when U and V are set outside the triangular curve, the ion's trajectory is unstable and diverges. As a result, ions cannot enter the detector. If the mass is different, this triangular curve will be different, and the triangular curve for lighter ions will be smaller and move further to the left. Therefore, if U and V are changed by a program that changes the values of U and V along the straight line P, an ion with mass M will change U1 and V from U1 and V1 to U1 + ΔU as shown in Figure 1. , V1+ΔV is detected by the ion detector. Therefore, if the ion detection output is recorded using the amplitude V of the AC voltage as a parameter representing the mass, a mass spectrum profile as shown in FIG. 2A can be obtained. If the value of V at the center of the peak width in this case is Vp, then U,
When the change program of V is set as a straight line P, the display device is adjusted so that Vp indicates the mass M. Similarly, if the program of changes in U and V is set as the straight line Q in Figure 1, an ion of mass M is detected while the AC amplitude V changes from V1' to V1' + ΔV', and in this case The profile of the mass spectrum becomes as shown in Figure 2B, and the peak width becomes wider, and since the stability diagram is asymmetric, the peak center moves from Vp to Vq. On the other hand, as the peak width becomes wider, the sensitivity improves and the resolution decreases.
質量Mのイオンの安定線図の形は四重極の寸
法、配置間隔等によつて変化し、従つて分解能を
変えたときの質量スペクトルの中心位置の移動量
と分解能の関係は装置個有の関数となる。本発明
は予めこの関数形に調べておいて、実際の装置調
整の場合に任意に設定した分解能に対する質量ピ
ークの中心の移動量を先に求めてある関数形から
割り出して、質量目盛を自動的に較正するもので
ある。 The shape of the stability diagram for an ion with mass M changes depending on the dimensions of the quadrupole, the arrangement spacing, etc. Therefore, when the resolution is changed, the relationship between the amount of movement of the center position of the mass spectrum and the resolution is unique to each device. becomes a function of In the present invention, this function form is investigated in advance, and in the case of actual equipment adjustment, the amount of movement of the center of the mass peak with respect to the arbitrarily set resolution is determined from the function form, and the mass scale is automatically adjusted. It is calibrated to
ホ 実施例
第3図は本発明の一実施例を示す。Qが四重極
質量分析器、Eは四重極電源で先に説明した直流
電圧U及び高周波交流Vを発生している。Cは
CPUであり四重極電源Eに制御信号を送つてU,
Vを変化させると共に、高周波交流電圧の振幅V
のデータに係数Kを掛け、質量MをM=KVによ
つてVの値から算出して表示装置DにMの値を表
示させる。こゝで前述したようにKの値が分解能
の設定に応じて変化するので、CPUには予め分
解能RとKとの関係K=(R)のデータを実測
によつて記憶させておき、Rの設定に応じて直ち
にM=(R)・Vとして質量を表示させればよい
のであるが、更にこの分解能Rは第1図から分る
ように、U/Vによつて決まるので、設定分解能
のデータとしてU/Vの値を採用し、M=g
(U/V)・Vとして質量を表示装置Dに表示させ
る。E. Embodiment FIG. 3 shows an embodiment of the present invention. Q is a quadrupole mass spectrometer, and E is a quadrupole power source that generates the DC voltage U and high frequency AC V as described above. C is
It is a CPU and sends a control signal to the quadrupole power supply E.
While changing V, the amplitude V of the high frequency AC voltage
The data is multiplied by a coefficient K, the mass M is calculated from the value of V by M=KV, and the value of M is displayed on the display device D. Here, as mentioned above, the value of K changes depending on the resolution setting, so the data of the relationship K = (R) between the resolution R and K is stored in advance in the CPU by actual measurement, and the value of K is changed according to the resolution setting. It is sufficient to immediately display the mass as M=(R)・V according to the setting of The value of U/V is adopted as the data of M=g
The mass is displayed on the display device D as (U/V)·V.
g(U/V)の実際の形は既知質量Mのイオン
を用いてU/Vの値を3種類設定し、夫々の場合
に質量スペクトルピークの中心のVの値V1,
V2,V3を実測し、この3点の実測値から、
g(U/V)=A(U/V)2+B(U/V)+C
……(1)
の形でg(U/V)が与えられるとして係数A,
B,Cを計算し、CPUのメモリに記憶させてお
く。上の係数の計算はU,VをU1,V1に設定し
たとき、
g(U1/V1)=M/V1=A(U1/V1)2
+B(U1/V1)+C ……(2)
(2)と同様の式がV2,V3の場合に対しても出来
るので、これら三式からA,B,Cが求まる。 The actual form of g(U/V) is obtained by setting three types of U/V values using ions of known mass M, and in each case, the value of V at the center of the mass spectrum peak, V1,
Measure V2 and V3, and from the measured values of these three points, g (U/V) = A (U/V) 2 + B (U/V) + C
……(1) Assuming that g(U/V) is given in the form, the coefficient A,
Calculate B and C and store them in the CPU memory. To calculate the above coefficient, when U and V are set to U1 and V1, g(U1/V1)=M/V1=A(U1/V1) 2 +B(U1/V1)+C...(2) (2 ) can be used for V2 and V3, so A, B, and C can be found from these three equations.
第4図は分析動作のフローチヤートを示す。分
析者が分解能を任意に設定(U/Vの設定)イ
し、較正キーを押すロと、CPUはメモリからA,
B,Cのデータを読出し、上記(1)式により、設定
された(U/V)の値を代入してg(U/V)を
算出ハして、結果をメモリに記憶させニ、測定が
開始されると、以後はニのステツプでメモリされ
たg(U/V)の値を用い、その時々のVの値に
g(U/V)を掛算ホして表示装置に質量数の表
示を行うヘ。 FIG. 4 shows a flowchart of the analysis operation. When the analyst sets the resolution arbitrarily (U/V settings) and presses the calibration key, the CPU reads A,
Read the data of B and C, calculate g (U/V) by substituting the set value of (U/V) according to the above formula (1), and store the result in memory. Once started, the value of g(U/V) memorized in step 2 is used from now on, and the mass number is displayed on the display by multiplying the current value of V by g(U/V). To perform the display.
上例ではg(U/V)は2次式として表現した
が、折線で表示してもよい。 In the above example, g(U/V) was expressed as a quadratic equation, but it may also be expressed as a broken line.
ヘ 効果
本発明によれば、質量M=KVでKの値と分解
能を関係づける計算資料、上例のA,B,C等は
メーカー側で実測によつて求めて制御用CPUの
メモリに格納しておけばよく、ユーザーの側では
分析に当つて分析目的に応じて分解能と感度との
兼ね合いを適当に選択すれば、四重極電源(U又
はV)に対する質量の較正は自動的に完了し、分
析者の装置調整の負担が大幅に軽減され、調整に
消費される時間が短縮されて分析能率が向上し、
調整に間違いが入り込まないから分析結果の信頼
性が向上する。F. Effect According to the present invention, the calculation data that relates the value of K and the resolution, such as A, B, and C in the above example, where mass M = KV, are obtained by actual measurements on the manufacturer's side and stored in the memory of the control CPU. If the user selects an appropriate balance between resolution and sensitivity according to the analysis purpose, the mass calibration for the quadrupole power source (U or V) will be completed automatically. This greatly reduces the burden on analysts in adjusting the equipment, reduces the time spent on adjustments, and improves analytical efficiency.
The reliability of analysis results is improved because no errors are introduced into the adjustments.
第1図は四重極質量分析器の安定線図、第2図
は分解能によつてピーク中心がずれる様子を示す
グラフ、第3図は本発明装置のブロツク図、第4
図は動作のフローチヤートである。
Q……四重極質量分析器、E……四重極電源、
C……CPU、D……表示装置。
Figure 1 is a stability diagram of a quadrupole mass spectrometer, Figure 2 is a graph showing how the peak center shifts depending on resolution, Figure 3 is a block diagram of the device of the present invention, and Figure 4 is a graph showing how the peak center shifts depending on the resolution.
The figure is a flowchart of the operation. Q...Quadrupole mass spectrometer, E...Quadrupole power supply,
C...CPU, D...Display device.
Claims (1)
能との関係を規定するデータを予めメモリに蓄え
ておき、調整操作において分解能を設定すると、
上記メモリに蓄えられたデータを用い、設定され
た分解能に応じた係数を算出するプログラムと、
この算出された係数を用いて、四重極電圧に対応
する質量を算出して表示するプログラムを有する
制御回路を設けたことを特徴とする四重極質量分
析計。1. If data specifying the relationship between the coefficients that relate mass and quadrupole voltage and resolution are stored in memory in advance, and the resolution is set during the adjustment operation,
A program that uses the data stored in the memory to calculate coefficients according to the set resolution;
A quadrupole mass spectrometer comprising a control circuit having a program for calculating and displaying a mass corresponding to a quadrupole voltage using the calculated coefficient.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58246603A JPS60142245A (en) | 1983-12-29 | 1983-12-29 | Quadrupole mass spectrometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58246603A JPS60142245A (en) | 1983-12-29 | 1983-12-29 | Quadrupole mass spectrometer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60142245A JPS60142245A (en) | 1985-07-27 |
JPH0562424B2 true JPH0562424B2 (en) | 1993-09-08 |
Family
ID=17150862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58246603A Granted JPS60142245A (en) | 1983-12-29 | 1983-12-29 | Quadrupole mass spectrometer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60142245A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3800565B2 (en) | 1997-02-26 | 2006-07-26 | 株式会社日本コンラックス | Card dispensing device |
JP2007323838A (en) * | 2006-05-30 | 2007-12-13 | Shimadzu Corp | Quadrupole mass spectrometer |
JP5507421B2 (en) * | 2010-11-12 | 2014-05-28 | 株式会社日立ハイテクノロジーズ | Mass spectrometer |
-
1983
- 1983-12-29 JP JP58246603A patent/JPS60142245A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60142245A (en) | 1985-07-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |