JPH0560727A - Electrochemical gas sensor - Google Patents
Electrochemical gas sensorInfo
- Publication number
- JPH0560727A JPH0560727A JP3220299A JP22029991A JPH0560727A JP H0560727 A JPH0560727 A JP H0560727A JP 3220299 A JP3220299 A JP 3220299A JP 22029991 A JP22029991 A JP 22029991A JP H0560727 A JPH0560727 A JP H0560727A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- detection unit
- solid electrolyte
- electrode
- electrolyte membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、電気化学式ガスセンサ
に関し、詳しくは絶縁基板に作用極を含む複数の電極が
設けられ、さらにこれらの電極を一連に被覆する固体電
解質膜とからなる電気化学式ガスセンサに関し、電極上
で起こるガスの電気化学反応を利用して、例えば大気中
の特定のガスを検知する電気化学式ガスセンサに関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrochemical gas sensor, and more particularly to an electrochemical gas sensor comprising an insulating substrate provided with a plurality of electrodes including working electrodes, and a solid electrolyte membrane covering the electrodes in series. Relates to an electrochemical gas sensor that detects a specific gas in the atmosphere, for example, by utilizing an electrochemical reaction of a gas that occurs on an electrode.
【0002】[0002]
【従来の技術】電気化学反応を利用したガスセンサの基
本は、複数の電極を電解質でつなぎ、電極において電気
化学的な反応を起こさせるものである。ここで電解質と
しては、液体やゲル状電解質を用いていたが、機器から
の液漏れや溶媒の蒸発などが生じるために、センサの耐
久性や信頼性に劣る問題がある。このために無機物ある
いは有機の固体電解質が採用されるに到った。無機物と
しては、β−アルミナ、ナシコン、リシコン、安定化ジ
ルコニア等が用いられ、これらの無機物を用いた場合
は、常温におけるインピーダンスが高いため、常温では
イオンが伝導しがたい状態にある。したがって、一般に
は前記のような無機物の固体電解質は、加熱してインビ
ーダンスが低い状態に保持する必要があり、その結果、
消費電力が大きくなる。2. Description of the Related Art The basis of a gas sensor utilizing an electrochemical reaction is to connect a plurality of electrodes with an electrolyte to cause an electrochemical reaction at the electrodes. Here, although a liquid or gel electrolyte was used as the electrolyte, there is a problem that the sensor is inferior in durability and reliability because liquid leakage from the device and evaporation of the solvent occur. For this reason, inorganic or organic solid electrolytes have been adopted. As the inorganic substance, β-alumina, naconone, ricicone, stabilized zirconia, etc. are used. When these inorganic substances are used, the impedance at room temperature is high, so that ions are difficult to conduct at room temperature. Therefore, in general, the inorganic solid electrolyte as described above needs to be heated to keep the impedance low, and as a result,
Power consumption increases.
【0003】一方有機物としては、ポリスチレンスルホ
ネート、ポリビニルスルホネート、パーフルオロスルホ
ネートポリマー、パーフルオロカルボキシレートポリマ
ー等のカチオン交換樹脂に属するポリマが用いられる。
これらの樹脂は、無機物に比べて、常温でのカチオン解
離度が大きいために、インピーダンスが小さく、したが
って消費電力が小さい点で有利である。中でもパーフル
オロスルホネートポリマーは、カチオン解離度が他に比
べて大きく、かつ熱的に、ならびに電気化学的にも安定
である上に溶媒に可溶であるため絶縁基板とこの絶縁基
板に形成された複数の電極の上にキャステングすること
により成膜することができるので、製造上の利点も見逃
せない。On the other hand, as the organic substance, polymers belonging to a cation exchange resin such as polystyrene sulfonate, polyvinyl sulfonate, perfluorosulfonate polymer, perfluorocarboxylate polymer and the like are used.
Since these resins have a large degree of cation dissociation at room temperature as compared with inorganic substances, they are advantageous in that they have a low impedance and therefore a low power consumption. Above all, the perfluorosulfonate polymer has a larger degree of cation dissociation than others, is thermally and electrochemically stable, and is soluble in a solvent. Therefore, it is formed on the insulating substrate and the insulating substrate. Since the film can be formed by casting on a plurality of electrodes, the manufacturing advantages cannot be overlooked.
【0004】ところで、この様に利点を有する有機物を
用いた固体電解質膜を備えた電気化学式ガスセンサは、
この固体電解質膜の電気的特性あるいはガスの透過性が
経時的に変化するために、センサの感度の経時的変化を
誘発し、信頼性に欠ける問題がある。By the way, an electrochemical gas sensor provided with a solid electrolyte membrane using an organic substance having such advantages is
Since the electrical characteristics or gas permeability of the solid electrolyte membrane changes over time, it causes a change in the sensitivity of the sensor over time, and there is a problem of lack of reliability.
【0005】[0005]
【発明が解決しようとする課題】したがって、この発明
が解決する課題は、固体電解質膜の電気的特性あるいは
ガスの透過性など複雑な原因によって引き起こされる、
対象ガスを検知する感度が正常に保持されていることを
検知することにより、信頼性を高めた電気化学式ガスセ
ンサを提供するものである。Therefore, the problem to be solved by the present invention is caused by complicated causes such as electric characteristics of solid electrolyte membranes or gas permeability.
An electrochemical gas sensor with improved reliability is provided by detecting that the sensitivity for detecting a target gas is normally maintained.
【0006】[0006]
【課題を解決するための手段】この発明に係る電気化学
式ガスセンサは、絶縁基板10、この絶縁基板10に設
けられた作用極20、対極30、参照極40及びこれら
の電極20、30、40を一連に被覆する固体電解質膜
80とからなる対象ガスを検知する対象ガス検知部A、
この対象ガス検知部Aと同一の構成を有する、使用環境
に一定の濃度で存在する基準ガスを検知する基準ガス検
知部B、及びこの基準ガス検知部Bには検知出力が一定
値以下になると信号を発する寿命告知手段を備えたこと
を特徴とするものである。An electrochemical gas sensor according to the present invention includes an insulating substrate 10, a working electrode 20, a counter electrode 30, a reference electrode 40 and electrodes 20, 30, 40 for these electrodes provided on the insulating substrate 10. A target gas detection unit A for detecting a target gas consisting of a solid electrolyte membrane 80 covering a series of
A reference gas detection unit B having the same configuration as the target gas detection unit A, which detects a reference gas existing at a constant concentration in the use environment, and a detection output of the reference gas detection unit B that is equal to or less than a certain value. It is characterized in that it is provided with a life notification means for emitting a signal.
【0007】[0007]
【作用】この発明にかかる電気化学式ガスセンサによる
と、絶縁基板10に設けられた作用極20、対極30、
参照極40及びこれらの電極10,20,30を一連に
被覆する固体電解質膜80とからなる対象ガスを検知す
る対象ガス検知部A、及びこの対象ガス検知部Aと同一
の構成を有する、使用環境に一定の濃度で存在する基準
ガスを検知する基準ガス検知部B、及びこの基準ガス検
知部Bには検知出力が一定値以下になると信号を発する
寿命告知手段を備えることにより、使用環境に一定の濃
度で存在する基準ガスを検知する基準ガス検知部Bの感
度特性は、基準ガス検知部Bが対象ガスを検知する対象
ガス検知部Aと同一の構成を備えているので、対象ガス
検知部Aの感度特性と同一乃至同等の経時変化をたどる
ので、基準ガス検知部Bの検知出力が一定値以下になる
と信号を発する寿命告知手段の信号により検知すること
ができるのである。According to the electrochemical gas sensor of the present invention, the working electrode 20, the counter electrode 30 provided on the insulating substrate 10,
A target gas detection unit A for detecting a target gas consisting of a reference electrode 40 and a solid electrolyte membrane 80 covering the electrodes 10, 20, 30 in series, and the same configuration as the target gas detection unit A. The reference gas detection unit B that detects the reference gas existing at a constant concentration in the environment, and the reference gas detection unit B are provided with a life notification means that emits a signal when the detection output becomes a certain value or less. The sensitivity characteristic of the reference gas detection unit B for detecting the reference gas existing at a constant concentration is the same as that of the target gas detection unit A for detecting the target gas. Since the change over time is the same as or equal to the sensitivity characteristic of the part A, it can be detected by the signal of the life notification means that emits a signal when the detection output of the reference gas detection part B becomes a certain value or less.
【0008】[0008]
【実施例】以下、本発明を実施例として示した図面に基
づいて説明する。図1は本発明の一実施例に係る電気化
学式ガスセンサを模式的に示した平面図であり、図2は
その断面図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings showing the embodiments. FIG. 1 is a plan view schematically showing an electrochemical gas sensor according to an embodiment of the present invention, and FIG. 2 is a sectional view thereof.
【0009】図1及び図2において、絶縁基板10に
は、対象ガスを検知する対象ガス検知部Aとこの対象ガ
ス検知部Aに対を成す基準ガス検知部Bを間隔をおいて
備える。対象ガス検知部Aは、絶縁基板10の上に相互
に間隔をおいて形成された作用極20、この作用極20
の対極30及び参照極40を備え、さらにこれらの電極
20、30、40を被覆して一連につなぐ固体電解質膜
80から構成される。作用極20、この作用極20の対
極30及び参照極40は、一例を挙げると、白金や金な
どの電極材料を絶縁基板10にスパッタリングや蒸着等
の手段により,図示の如く、一端を固体電解質膜80の
外部に露出させて、外部回路との接続に用いる端子部2
2、23、24を有するよう形成され、固体電解質膜8
0は、たとえば前記のポリスチレンスルホネート、ポリ
ビニルスルホネート、パーフルオロスルホネートポリマ
ー、パーフルオロカルボキシレートポリマー等のポリマ
が用いられ、中でも一例をあげると前述の如くパーフル
オロスルホネートポリマー(デュポン社製の商標ナフィ
オン)が実用的である。固体電解質膜80を成膜するに
は、たとえば簡単なキャステング、その他適当な手段が
用いられる。In FIG. 1 and FIG. 2, the insulating substrate 10 is provided with a target gas detecting section A for detecting a target gas and a reference gas detecting section B forming a pair with the target gas detecting section A at intervals. The target gas detection unit A is a working electrode 20 formed on the insulating substrate 10 at a distance from each other, and the working electrode 20.
The counter electrode 30 and the reference electrode 40 are provided, and the electrodes 20, 30, 40 are further covered to form a solid electrolyte membrane 80 connected in series. The working electrode 20, the counter electrode 30 and the reference electrode 40 of the working electrode 20 are, for example, an electrode material such as platinum or gold on the insulating substrate 10 by means such as sputtering or vapor deposition, and one end thereof is a solid electrolyte. The terminal portion 2 exposed to the outside of the film 80 and used for connection with an external circuit
Solid electrolyte membrane 8 formed to have 2, 23, 24
0 is, for example, a polymer such as polystyrene sulfonate, polyvinyl sulfonate, perfluorosulfonate polymer, or perfluorocarboxylate polymer described above. It is practical. To form the solid electrolyte membrane 80, for example, simple casting or other suitable means is used.
【0010】この固体電解質膜80の経時的劣化、たと
えば電気的特性の経時的変化あるいは対象ガスの透過性
の変化等を阻止する目的で、この固体電解質膜80の上
に、さらに保護膜90が形成される。この保護膜90
は、一例を示すと弗素系樹脂を用い、蒸着法あるいはプ
ラズマ法等により形成することができる。A protective film 90 is further provided on the solid electrolyte membrane 80 for the purpose of preventing deterioration of the solid electrolyte membrane 80 with time, for example, change with time of electrical characteristics or change of permeability of a target gas. It is formed. This protective film 90
As an example, a fluorine-based resin can be used and can be formed by a vapor deposition method, a plasma method, or the like.
【0011】基準ガス検知部Bは、上述の対象ガス検知
部Aと同一の構成を有する。すなわち、絶縁基板10の
上に相互に間隔をおいて形成された作用極50、この作
用極50の対極60及び参照極70を備え、さらにこれ
らの電極50、60、70を被覆して一連につなぐ固体
電解質膜82から構成され、基準ガス検知部Aの作用極
20、作用極20の対極30及び参照極40と同様に、
一端を固体電解質膜80の外部に露出させて、端子部2
2、23、24を有するよう形成され、さらに対象ガス
検知部Aの固体電解質膜80の経時的劣化と同一乃至同
等に追従する固体電解質膜82の上に、この固体電解質
膜82を作用極52とで挟む、ほぼ作用極52と同一の
形状を有する保護膜92が形成されている。ここで、保
護膜92を作用極52上のみに限定して形成すると、電
気的特性の経時的変化あるいは対象ガスの透過性の変化
等の経時特性が同等の対象ガス検知部Aと基準ガス検知
部Bを構成することができる。その理由はつぎのとおり
である。基準ガス検知部Bでは、使用環境中に存在して
いるため、作用極52上においては、電気化学反応が絶
えず起きているために、たとえば基準ガスを酸素とする
と、The reference gas detector B has the same structure as the target gas detector A described above. That is, a working electrode 50, which is formed on the insulating substrate 10 at a distance from each other, a counter electrode 60 and a reference electrode 70 of the working electrode 50, and these electrodes 50, 60, 70 are further covered to form a series. Like the working electrode 20, the counter electrode 30 and the reference electrode 40 of the working electrode 20, which are composed of the solid electrolyte membrane 82 to be connected,
One end is exposed to the outside of the solid electrolyte membrane 80, and the terminal portion 2
2, 23, 24, and further, the solid electrolyte membrane 82 is formed on the solid electrolyte membrane 82 that is the same as or equivalent to the deterioration over time of the solid electrolyte membrane 80 of the target gas detection unit A, and the solid electrolyte membrane 82 is attached to the working electrode 52. A protective film 92 having a shape substantially the same as that of the working electrode 52, which is sandwiched between and, is formed. Here, if the protective film 92 is formed only on the working electrode 52, the target gas detection unit A and the reference gas detection that have the same temporal characteristics such as temporal changes in electrical characteristics or changes in permeability of the target gas. Part B can be constructed. The reason is as follows. Since the reference gas detection unit B exists in the usage environment, and the electrochemical reaction is constantly occurring on the working electrode 52, for example, when the reference gas is oxygen,
【0012】[0012]
【化1】 [Chemical 1]
【0013】なる反応により水が発生し続ける。このよ
うな生成物が固体電解質膜82内に留まると、対象ガス
検知部Aの経時特性とは異なる特性を示す。固体電解質
膜82が保護膜92で被覆されていない場合は、このよ
うな生成物は使用環境中に大部分が放出されるので、そ
れほどの影響を与えないが、固体電解質膜82が保護膜
92で被覆されている場合は、放出されにくい。そこ
で、固体電解質膜82の作用極50上の部分を除いた全
面を露出させると、生成物の放出が促進されるからであ
る。Water continues to be generated by the reaction. When such a product stays in the solid electrolyte membrane 82, it exhibits a characteristic different from the aging characteristic of the target gas detection unit A. If the solid electrolyte membrane 82 is not covered with the protective film 92, most of such products are released into the environment of use, so that the solid electrolyte membrane 82 is not so affected, but the solid electrolyte membrane 82 does not affect the protective film 92. When it is coated with, it is difficult to be released. Therefore, if the entire surface of the solid electrolyte membrane 82 excluding the portion on the working electrode 50 is exposed, the release of the product is promoted.
【0014】上述のとおり、経時的劣化が相互に同一乃
至同等に進行する関係にある対象ガス検知部Aの電極2
0、30、40と基準ガス検知部Bの電極50、60、
70は、それぞれの端子部22、32、42と52、6
2、72においてリード線102と104を介して対象
ガスの検知を、対象ガス検知部Aの作用極20と対極3
0間に流れる電流値によって行う信号処理回路100と
基準ガス検知部Bの作用極50と対極60間に流れる電
流値によって基準ガス検知部Bの経時劣化の検知を行う
寿命告知回路110に接続され、この寿命告知回路11
0は、作用極50と対極60間に流れる電流値で判別す
る検知出力が一定値以下になると信号を発して寿命を告
知する寿命告知手段を構成する。ここで寿命を告知する
信号は、たとえば警告音の発生、警告ランプの点灯など
任意である。また寿命を告知する時点は、作用極50と
対極60間に流れる初期の電流値の半分になる時点、ま
たはあらかじめ設定したしきい値以下に低下した時点と
することもでき、ガスセンサの用途や目的に応じて設定
する必要がある。As described above, the electrode 2 of the target gas detection portion A having the same or equivalent progressing deterioration over time.
0, 30, 40 and the electrodes 50, 60 of the reference gas detector B,
70 designates the respective terminal portions 22, 32, 42 and 52, 6
2 and 72, the target gas is detected via the lead wires 102 and 104, and the working electrode 20 and the counter electrode 3 of the target gas detection unit A are detected.
It is connected to a signal processing circuit 100 that performs a current value flowing between zero and a life notification circuit 110 that detects aged deterioration of the reference gas detecting unit B by a current value flowing between the working electrode 50 and the counter electrode 60 of the reference gas detecting unit B. , This life notification circuit 11
0 constitutes a life notification means for issuing a signal and notifying the life when the detection output determined by the current value flowing between the working electrode 50 and the counter electrode 60 is below a certain value. Here, the signal notifying the end of life is arbitrary such as generation of a warning sound and lighting of a warning lamp. The life may be notified at a time when the initial current value flowing between the working electrode 50 and the counter electrode 60 becomes half, or when it falls below a preset threshold value. Need to be set accordingly.
【0015】なお、対象ガス検知部Aの検知する対象ガ
スは、一酸化炭素、アルコール、硫化水素他、各種のガ
スがなりうる。すなわち、これらのガス種に応じて、作
用極20と参照極30の間にかける電圧を設定する。同
様に基準ガス検知部Bの基準ガスは、通常の使用環境で
は、大気中に存在する酸素が適切であるが、使用環境に
応じてガス種を選択し、選択したガスに応じて作用極5
0と参照極60の間にかける電圧を設定する。The target gas detected by the target gas detection unit A may be various gases such as carbon monoxide, alcohol, hydrogen sulfide and the like. That is, the voltage applied between the working electrode 20 and the reference electrode 30 is set according to these gas species. Similarly, as the reference gas of the reference gas detection unit B, oxygen present in the atmosphere is suitable in a normal use environment, but a gas species is selected according to the use environment and the working electrode 5 is selected according to the selected gas.
The voltage applied between 0 and the reference electrode 60 is set.
【0016】[0016]
【発明の効果】この発明に係る電気化学式ガスセンサに
よると、絶縁基板10に設けられた作用極20、対極3
0、参照極40及びこれらの電極10、20、30を一
連に被覆する固体電解質膜80とからなる対象ガスを検
知する対象ガス検知部A、及びこの対象ガス検知部と同
一の構成を有する、使用環境に一定の濃度で存在する基
準ガスを検知する基準ガス検知部B、及びこの基準ガス
検知部Bには検知出力が一定値以下になると信号を発す
る寿命告知手段を備えることにより、使用環境に一定の
濃度で存在する基準ガスを検知する基準ガス検知部Aの
感度特性は、基準ガス検知部Bが対象ガスを検知する対
象ガス検知部Aと同一の構成を備えているので、対象ガ
ス検知部Aの感度特性と同一乃至同等の経時変化をたど
るので、基準ガス検知部Bの検知出力が一定値以下にな
ると信号を発する寿命告知手段の信号により検知するこ
とができ、その結果、対象ガス検知部Aの固体電解質膜
80の電気的特性あるいはガスの透過性など複雑な原因
によって引き起こされる、対象ガスを検知する感度が正
常に保持されていることを検知することにより、信頼性
を高めた電気化学式ガスセンサを提供するものである。According to the electrochemical gas sensor of the present invention, the working electrode 20 and the counter electrode 3 provided on the insulating substrate 10 are provided.
0, a reference electrode 40, and a target gas detection unit A for detecting a target gas consisting of a solid electrolyte membrane 80 covering the electrodes 10, 20, 30 in series, and the same configuration as the target gas detection unit. By using a reference gas detection unit B that detects a reference gas existing at a constant concentration in the use environment, and a life notification unit that issues a signal when the detection output falls below a certain value, the reference gas detection unit B is used. The sensitivity characteristic of the reference gas detection unit A for detecting the reference gas existing at a constant concentration in the target gas is the same as that of the target gas detection unit A for detecting the target gas in the reference gas detection unit B. Since the sensitivity characteristics of the detection unit A are the same as or equal to those of the sensitivity characteristics of the detection unit A, the detection output of the reference gas detection unit B can be detected by the signal of the life notifying unit that emits a signal when the detection output becomes a certain value or less. , By detecting that the sensitivity for detecting the target gas is normally maintained, which is caused by a complicated cause such as the electrical characteristics of the solid electrolyte membrane 80 of the target gas detection unit A or gas permeability. It is intended to provide an electrochemical gas sensor having improved temperature.
【図1】本発明の一実施例に係る電気化学式ガスセンサ
の平面図である。FIG. 1 is a plan view of an electrochemical gas sensor according to an embodiment of the present invention.
【図2】本発明の一実施例に係る図1の断面図である。FIG. 2 is a sectional view of FIG. 1 according to an embodiment of the present invention.
10 絶縁基板 20 作用極 30 対極 40 参照極 80 固体電解質膜 82 固体電解質膜 90 保護膜 92 保護膜 A 対象ガス検知部 B 基準ガス検知部 10 Insulating Substrate 20 Working Electrode 30 Counter Electrode 40 Reference Electrode 80 Solid Electrolyte Membrane 82 Solid Electrolyte Membrane 90 Protective Film 92 Protective Film A Target Gas Detector B Reference Gas Detector
Claims (2)
られた作用極20、対極30、参照極40及びこれらの
電極を一連に被覆する固体電解質膜80とからなる対象
ガスを検知する対象ガス検知部A、この対象ガス検知部
Aと同一の構成を有する、使用環境に一定の濃度で存在
する基準ガスを検知する基準ガス検知部B、及びこの基
準ガス検知部Bの検知出力が一定値以下になると信号を
発する寿命告知手段を備えたことを特徴とする電気化学
式ガスセンサ。1. A target gas for detecting a target gas comprising an insulating substrate 10, a working electrode 20, a counter electrode 30, a reference electrode 40 provided on the insulating substrate 10 and a solid electrolyte membrane 80 which covers these electrodes in series. The detection unit A, the reference gas detection unit B having the same configuration as the target gas detection unit A, which detects the reference gas existing at a constant concentration in the use environment, and the detection output of the reference gas detection unit B is a constant value. An electrochemical gas sensor, characterized in that it is provided with a life notification means that emits a signal when:
面を被覆する保護膜90、及び基準ガス検知部Bの固体
電解質膜82の上に、この固体電解質膜82を作用極5
0とで挟む作用極50とほぼ同一の保護膜92を備えた
請求項1記載の電気化学式ガスセンサ。2. The solid electrolyte membrane 82 is provided on the protective film 90 which covers the entire surface of the solid electrolyte membrane 50 of the target gas detecting section A and the solid electrolyte membrane 82 of the reference gas detecting section B.
The electrochemical gas sensor according to claim 1, further comprising a protective film 92 that is substantially the same as the working electrode 50 that is sandwiched between 0 and 0.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3220299A JP2988040B2 (en) | 1991-08-30 | 1991-08-30 | Electrochemical gas sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3220299A JP2988040B2 (en) | 1991-08-30 | 1991-08-30 | Electrochemical gas sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0560727A true JPH0560727A (en) | 1993-03-12 |
JP2988040B2 JP2988040B2 (en) | 1999-12-06 |
Family
ID=16748984
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3220299A Expired - Fee Related JP2988040B2 (en) | 1991-08-30 | 1991-08-30 | Electrochemical gas sensor |
Country Status (1)
Country | Link |
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JP (1) | JP2988040B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5496451A (en) * | 1993-09-14 | 1996-03-05 | Sanyo Electric Co., Ltd. | Method for detecting chemical substances |
US5770038A (en) * | 1994-06-29 | 1998-06-23 | Sanyo Electric Co., Ltd. | Method for detecting chemical substances |
-
1991
- 1991-08-30 JP JP3220299A patent/JP2988040B2/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5545299A (en) * | 1993-09-13 | 1996-08-13 | Sanyo Electric Co., Inc. | Vapor phase sensor |
US5496451A (en) * | 1993-09-14 | 1996-03-05 | Sanyo Electric Co., Ltd. | Method for detecting chemical substances |
US5770038A (en) * | 1994-06-29 | 1998-06-23 | Sanyo Electric Co., Ltd. | Method for detecting chemical substances |
Also Published As
Publication number | Publication date |
---|---|
JP2988040B2 (en) | 1999-12-06 |
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