JPH0560589A - Device for supplying fixed quantity of liquid - Google Patents

Abstract

PURPOSE:To provide a device for supplying a fixed quantity of liquids which is capable of accurately supplying a predetermined quantity of liquids and of easily and freely changing the quantity of liquids supplied. CONSTITUTION:A device for supplying a fixed quantity of liquids comprises a quantity measuring tank 1 for weighing the quantity of liquids to be supplied to a processing tank 4, and a liquid tank 2 and a feed pump 21 for feeding liquids 20 to the quantity measuring tank 1, and the quantity measuring tank 1 is provided with an overflow pipe 12 inserted from the bottom portion thereof in such a manner as being capable of rising and falling. The overflow pipe 12 has a lift 3. The overflow pipe 12 is put in vertical motion to change the position of its upper end face to thereby freely change the quantity of the liquids supplied.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid quantitative replenishing device used in a chemical plant or the like.

[0002]

2. Description of the Related Art For example, in a plating apparatus, a chemical reaction apparatus, etc., a certain amount of liquid may be supplied to a processing tank for plating or reaction. Examples of the liquid include a plating liquid and a reaction raw material liquid. Conventionally, as a method of supplying a fixed amount of liquid, there is one shown in FIG. 5, for example. The figure illustrates the case of a plating apparatus.

In this method, a metering pump 29 is used to replenish the processing tank 4 which is a plating tank with a fixed amount of the liquid 20 which is a plating liquid. That is, the concentration of the plating liquid in the processing tank 4 decreases as the plating operation proceeds. Therefore, during the steady operation, the liquid 20 must be supplied in a constant amount into the processing tank 4 at regular intervals. Therefore, the constant rate pump 2
9 is operating.

A large number of processing tanks 4 are provided, and a liquid is replenished to each processing tank 4 by opening and closing a valve 291 provided in each processing tank 4. The work 5 to be plated is immersed in the processing tank 4. The liquid 20 in the processing tank 4 overflows into the receiving tank 44 and is circulated by the pump 45 and the circulation pipe 46. The circulating liquid is delivered into the processing tank 4 from the jet nozzle pipe 47, and agitates the liquid 4 in the processing tank 4. In addition, reference numeral 451 in FIG.
Reference numeral 61 is a valve for taking out a part of the liquid.

[0005]

However, in the conventional quantitative replenishment device described above, when the replenishment pipe 290 and the outlet nozzle are clogged, the liquid sent by the constant volume pump 29 is replenished to the processing tank 4 by a necessary amount. It was unclear whether or not it was. In addition, due to a malfunction of the metering pump 29, a predetermined amount of liquid may not be accurately replenished. As described above, it has been difficult to manage accurate quantitative supply in the past.

Further, since the metering pump delivers a fixed amount of liquid, it is impossible to supply different amounts of liquid to the plurality of processing tanks. In view of the above conventional problems, the present invention is to provide a liquid quantitative replenishing device capable of accurately replenishing a predetermined amount of liquid and arbitrarily changing the amount of replenishing liquid.

[0007]

According to the present invention, a fixed quantity tank for measuring the amount of liquid to be replenished to a processing tank, a liquid tank for supplying the liquid to the fixed quantity tank, and a fixed quantity tank for the liquid in the liquid tank. A liquid quantitative replenishing device comprising a pump for feeding into and out of the tank, and a replenishing pipe connected via a valve between the constant amount tank and the processing tank, wherein the constant amount tank can be moved up and down from the bottom thereof. An overflow pipe inserted into the pipe, and an elevating tool for elevating the overflow pipe. The lower end of the overflow pipe is opened to the liquid tank, and the elevating pipe is moved up and down to change the position of its upper end surface. The liquid constant quantity replenishing device is characterized in that the liquid amount to be weighed is adjusted by means of. What is most noticeable in the present invention is that a fixed quantity tank is provided between the processing tank and the liquid tank, and an overflow pipe is inserted in the bottom surface of the fixed quantity tank so as to be able to move up and down, and a lifting tool for moving the overflow pipe up and down is provided. There is something.

The fixed quantity tank is provided for each processing tank, for example. The fixed quantity tank is a tank for measuring the amount of liquid to be replenished in the corresponding processing tank. Then, this weighing is performed by moving up and down the overflow pipe inserted in the fixed quantity tank. That is, the amount of liquid retained in the metering tank is determined by moving the upper end of the overflow pipe in the metering tank up and down.

Further, the lower end of the overflow pipe is opened in the liquid tank so that the liquid overflowing from the fixed amount tank returns to the liquid tank. A pump for supplying liquid to the fixed quantity tank is provided between the liquid tank and the fixed quantity tank. A supply pipe is provided between the metering tank and the processing tank to supply the liquid pre-measured in the metering tank to the processing tank when necessary. A valve for opening at the time of the above replenishment is provided in the replenishment pipe.

[0010]

In the present invention, the liquid in the liquid tank is pumped into the metering tank. This liquid is stored in the fixed amount tank, but when the liquid surface reaches the upper end surface of the overflow pipe, the liquid that is sent thereafter overflows from the upper end surface of the overflow pipe and returns to the liquid tank. Then, when the overflow occurs, the feeding of the liquid into the fixed quantity tank is stopped. As a result, the amount of liquid to be supplied to the processing tank is weighed. That is, a fixed amount of liquid defined by the upper end surface of the overflow pipe is stored in the metering tank.

After that, when necessary, the replenishment valve between the metering tank and the processing tank is opened to replenish the liquid in the metering tank to the processing tank. Therefore, it is possible to accurately replenish the predetermined amount of liquid. After replenishment, the replenishment valve is closed and the liquid is again fed into the metering tank from the liquid tank as described above.

What is important here is that the quantitative tank can change the amount of liquid to be weighed. That is, the liquid amount can be adjusted by moving the overflow pipe up and down and changing the upper end position. That is, in the fixed quantity tank, the height from the bottom surface to the upper end surface of the overflow pipe and the horizontal sectional area of the fixed quantity tank set the amount of liquid to be weighed.

Therefore, the metering tank can arbitrarily change the amount of liquid to be weighed according to the amount of replenishing liquid. In particular, when a plurality of processing tanks are provided and a fixed quantity tank is provided for each of them, it is possible to easily cope with a change in the amount of replenishing liquid in each processing tank. Therefore, according to the present invention, it is possible to provide a liquid quantitative replenishing device capable of accurately replenishing a predetermined amount of liquid and changing the amount of replenishing liquid arbitrarily and easily.

[0014]

【Example】

Embodiment 1 FIG. 1 shows a liquid constant quantity replenishing device according to an embodiment of the present invention.
~ It demonstrates using FIG. The quantitative supply device of this example is shown in FIG.
As shown in FIG. 2, a fixed quantity tank 1 for weighing the amount of liquid to be supplied to the processing tank 4, and a liquid 20 to the fixed quantity tank 1
And a liquid tank 2 for supplying. Further, a supply pump 21, a supply valve 22 and a supply pipe 23 for supplying a liquid are provided between the liquid tank 2 and the fixed amount tank 1. Further, a replenishment pipe 41 and a replenishment valve 42 are provided between the fixed quantity tank 1 and the processing tank 4. These valves are solenoid valves.

As shown in FIGS. 1 to 3, the fixed quantity tank 1 has an overflow pipe 12 which is inserted from a bottom portion 111 thereof so as to be able to move up and down, and an elevating tool 3 which elevates and lowers the overflow pipe 12. Also, the overflow pipe 12
Has its lower end opened to the liquid tank 2. As shown in FIGS. 2 and 3, the elevator 3 supports the support plates 35 and 351 fixed to the overflow pipe 12, the elevating guide rod 31, the support plate 35 on the guide rod 31, and the overflow pipe 12. And nuts 33 and 34 for moving up and down. The guide rod 31 has a threaded portion 310 for screwing the nuts 33 and 34 together.

Between the lower portion of the bottom portion 111 of the metering tank 1 and the overflow pipe 12, the O-ring 1
6, the seal frame 15 is disposed via the seal material 17. Further, at the lower part of the seal frame 15, the tightening member 1 for pressing the O-ring 16 and the seal material 17 is provided.
8 and nuts 181 are provided. The bottom of the metering tank 1 has a nozzle 11 for connecting a supply pipe 41.
3 is provided. A liquid level sensor 121 is provided above the side surface 11 of the metering tank 1 (FIG. 1). The liquid level sensor 121, the supply valve 22, and the supply valve 42 are electrically connected to the controller 49. On the other hand, the processing tank 4 is the same as that of the conventional example.

Next, the function and effect will be described. First, the liquid 20 in the liquid tank 2 is sent to the metering tank 1 by the supply pump 21. The liquid 20 is stored in the fixed quantity tank 1. When the liquid surface reaches the upper end surface of the overflow pipe 12, the liquid 20 supplied thereafter overflows from the upper end of the overflow pipe 12, and the liquid tank 2 Return to inside. At the time of this overflow, the liquid level sensor 121 causes the upper end surface 12 of the overflow pipe 12 to
It catches that the liquid level is above 0 and sends a signal to the controller 49.

Therefore, the controller 49 closes the supply valve 22 for feeding the liquid 20 into the fixed quantity tank 1. Therefore, the liquid supply to the fixed quantity tank 1 is stopped. Then, the liquid 20 above the upper end surface 120 of the overflow pipe 12 finishes overflowing from the overflow pipe 12. As a result, the weighing of the liquid amount in the fixed quantity tank 1 is completed. After that, when necessary, the replenishment valve 42 between the fixed quantity tank 1 and the processing tank 4 is opened, and the liquid 20 in the fixed quantity tank 1 is supplied to the processing tank 4. Therefore,
A predetermined amount of liquid can be accurately replenished. After the replenishment, the replenishment valve 42 is closed, and the liquid 20 is again fed into the fixed amount tank 1 from the liquid tank 2 in the same manner as above.

Next, a method of changing the amount of liquid to be weighed in the fixed quantity tank 1 will be described. When changing the amount of liquid, as shown in FIG. 2, the overflow pipe 1
2 is moved up and down, and the position of the upper end surface 120 is changed within the range of height d. In moving up and down in the lifting operation, the nut 34 of the lifting tool 3 is moved upward. Then, the nut 33 is turned to move it upward (FIG. 4).

As a result, the support plate 35 rises along the guide rod 31, so that the overflow pipe 12 fixed to the support plate 35 also rises. Therefore, fixed quantity tank 1
The amount of liquid in it increases. On the other hand, in the case of reducing the amount of liquid, the support plate 35 of the elevating tool 3 is lowered, contrary to the above. As described above, the replenishment liquid amount of the fixed quantity tank 1 can be arbitrarily adjusted by moving the overflow pipe 12 up and down.

Embodiment 2 In this embodiment, as shown in FIG. 4, two processing tanks 4, 40 are used.
In contrast, an example in which the quantitative tanks 1 and 100 are provided is shown. That is, in this example, as in the first embodiment, the processing tank 4 is provided with the fixed amount tank 1 for supplying the liquid 20, while the other processing tank 40 is provided with the fixed amount tank 100 for supplying the liquid 20. ing. The fixed quantity tank 100, like the fixed quantity tank 1, has an overflow pipe 12 that can be raised and lowered. In addition, fixed quantity tank 1
00 and the processing tank 40, a supply pipe 410 and a supply valve 420 are provided.

The supply pipe 23 for supplying the liquid 20 from the liquid tank 2 extends to above the metering tank 100. Then, the liquid is supplied to the metering tank 1 via the first valve 231 and to the metering tank 100 via the second valve 232. Further, the first valve 231 is electrically connected to the liquid level sensor 121 of the metering tank 1, and the second valve 122 is electrically connected to the liquid level sensor 122 of the metering tank 100. Both liquid level sensor 1
Reference numerals 21 and 122 each have an upper liquid level HL sensor and a lower liquid level LL sensor. Others are the same as in the first embodiment.

Next, the function and effect will be described. First, when the liquid 20 is not contained in the fixed quantity tank 1, this is detected by the lower liquid level sensor LL in the liquid level sensor 121, and the first valve 231 is opened. Then, as in the first embodiment, the liquid 20 is supplied by the supply pump 21,
The amount of liquid in the fixed quantity tank 1 is weighed. At this time, when the liquid level of the fixed quantity tank 1 reaches the height at which it overflows from the overflow pipe 12, this is detected by the upper liquid level sensor HL, and the first valve 23 by the liquid level sensor 121.
Close 1 After that, as in the first embodiment, the replenishment valve 42 is opened by the controller 49 to replenish the processing tank 4 with the liquid. After replenishment, the liquid level sensor 121 is again used.
To open the first valve 231.

On the other hand, also in the fixed quantity tank 100, when the liquid is not contained, the liquid level sensor 122 opens the second valve 232 to supply the liquid 20. Then, after the supply, the second valve 232 is closed and the liquid amount is weighed in the same manner as the metering tank 1. After that, when necessary, the controller 49 opens the replenishment valve 420, and the processing tank 4
Add liquid to 0. Then, the liquid is again supplied to the fixed quantity tank 100 and weighed. Others are the same as in the first embodiment.

In this example, fixed quantity tanks 1 and 100 are provided for the respective processing tanks 4 and 40, and the fixed quantity tanks 1 and 100 each have an overflow pipe 12 that can be moved up and down. Therefore, both quantitative tanks 1, 1
00, the amount of liquid to be replenished in the processing tanks 4 and 40 can be arbitrarily changed. Further, according to this example, it is possible to obtain the same effect as that of the first embodiment.

[Brief description of drawings]

FIG. 1 is an overall explanatory diagram of a liquid quantitative replenishing device according to a first embodiment.

FIG. 2 is a sectional view of a metering tank according to the first embodiment.

FIG. 3 is an enlarged view of the main part of the left half of the metering tank according to the first embodiment.

FIG. 4 is an overall explanatory diagram of a liquid quantitative replenishing device according to a second embodiment.

FIG. 5 is an overall explanatory view of a liquid quantitative replenishing device in a conventional example.

[Explanation of symbols]

 1,100. ． ． Quantitative tank, 12. ． ． Overflow pipe, 2. ． ． Liquid tank, 20. ． ． Liquid, 3. ． ． Lifts, 4,40. ． ． Processing tank,

Claims (1)

[Claims] 1. A metering tank for weighing the amount of liquid to be replenished to a processing tank, a liquid tank for supplying liquid to the metering tank, and for feeding the liquid in the liquid tank to the metering tank. Is a liquid replenishing device comprising a pump and a replenishing pipe connected between a quantifying tank and a processing tank via a valve, wherein the quantifying tank is an overflow which is vertically movable from the bottom thereof. The overflow pipe has a pipe and an elevating tool for moving the overflow pipe up and down, and the lower end of the overflow pipe is opened to the liquid tank. The overflow pipe is moved up and down to change the position of the upper end surface of the liquid pipe. A liquid constant quantity replenishing device, characterized in that the liquid amount can be adjusted.