JPH0552689U - Ozone purification equipment - Google Patents

Ozone purification equipment

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Publication number
JPH0552689U
JPH0552689U JP10046991U JP10046991U JPH0552689U JP H0552689 U JPH0552689 U JP H0552689U JP 10046991 U JP10046991 U JP 10046991U JP 10046991 U JP10046991 U JP 10046991U JP H0552689 U JPH0552689 U JP H0552689U
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JP
Japan
Prior art keywords
ozone
container
condenser
gas
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP10046991U
Other languages
Japanese (ja)
Inventor
光彦 荻原
Original Assignee
沖電気工業株式会社
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Publication date
Application filed by 沖電気工業株式会社 filed Critical 沖電気工業株式会社
Priority to JP10046991U priority Critical patent/JPH0552689U/en
Publication of JPH0552689U publication Critical patent/JPH0552689U/en
Withdrawn legal-status Critical Current

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  • Separation By Low-Temperature Treatments (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

(57)【要約】 【目的】 オゾナイザから発生する約5%オゾン含有酸
素ガス中のオゾンを効率よく液化捕集する。 【構成】 凝縮器内を通過する配管を螺旋状管部と直管
部とで構成し、最下部に液化オゾン貯溜部を設け、この
貯溜部はヒーターによって加熱できる構造とする。
(57) [Summary] [Purpose] To efficiently liquefy and collect ozone in oxygen gas containing about 5% ozone generated from an ozonizer. [Structure] A pipe passing through the inside of the condenser is composed of a spiral pipe portion and a straight pipe portion, and a liquefied ozone storage portion is provided at the bottom, and the storage portion can be heated by a heater.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial application]

この考案は、オゾン精製装置、特にその凝縮器の構造に関する。 The present invention relates to an ozone purifier, and more particularly to the structure of its condenser.

【0002】[0002]

【従来の技術】[Prior Art]

従来より、酸化物超電導体の製造などに用いるオゾンを生成するための方法と して、例えば文献:Review of scientific Instru ments(レビュー オブ サイエンティフィック インスツルメンツ)Vo l.60 No.12 1989年 p.3769〜3770に提案されている 方法がある。 Conventionally, as a method for producing ozone used for production of oxide superconductors, for example, literature: Review of scientific Instruments (Review of Scientific Instruments) Vol. 60 No. 12 1989 p. There is a method proposed in 3769-3770.

【0003】 図2を用いてこの方法を説明する。原料となる酸素ガスを酸素ガス源20から オゾン発生器(オゾナイザとも称する)22に送りこみ、ここでコロナ放電によ り、原料酸素ガスの約5%がオゾンに変わる。このガスをコントロールバルブ1 6を通して凝縮器12へ供給し、余剰分は分解器30において有害なオゾンを分 解して酸素に変換した後、大気に放出する。This method will be described with reference to FIG. Oxygen gas as a raw material is sent from an oxygen gas source 20 to an ozone generator (also referred to as an ozonizer) 22, where about 5% of the raw oxygen gas is converted to ozone by corona discharge. This gas is supplied to the condenser 12 through the control valve 16, and the surplus is decomposed into harmful oxygen in the decomposer 30 to be converted into oxygen and then released into the atmosphere.

【0004】 凝縮器12は内筒26,および外筒24によって覆われ、内筒の中には、不活 性ガス32、例えばヘリウム(He)ガスが充填されており、外筒の中には冷媒 28、例えば液体窒素が入っている。従って凝縮器12に入った5%オゾン含有 酸素ガスは液体窒素(温度:−196℃)で冷却されたヘリウムガスによって冷 却される。このため、液化温度−112℃のオゾンおよび同−183℃の酸素は 共に液化して凝縮器12の底の貯溜部34に溜まる。The condenser 12 is covered with an inner cylinder 26 and an outer cylinder 24. The inner cylinder is filled with an inert gas 32, for example, helium (He) gas, and the outer cylinder is filled. It contains a refrigerant 28, for example liquid nitrogen. Therefore, the 5% ozone-containing oxygen gas entering the condenser 12 is cooled by the helium gas cooled by liquid nitrogen (temperature: -196 ° C). For this reason, ozone at a liquefaction temperature of −112 ° C. and oxygen at a liquefaction temperature of −183 ° C. are both liquefied and stored in the reservoir 34 at the bottom of the condenser 12.

【0005】 次いで内筒26内のヘリウムガス32を抜いて、真空状態にした後(図示せず )、凝縮器12内をソープションポンプ18によって減圧にする。液体窒素の温 度−196℃におけるオゾンの蒸気圧は、3mmTorrであり、また、そのと きの酸素の蒸気圧は150Torrであるため、酸素の蒸気圧が極めて高い。こ のため酸素は再び気化して液体オゾン34だけが凝縮器12の底の貯溜部34に 残る。Next, the helium gas 32 in the inner cylinder 26 is removed to make a vacuum (not shown), and then the inside of the condenser 12 is decompressed by the sorption pump 18. The vapor pressure of ozone at a temperature of liquid nitrogen of −196 ° C. is 3 mmTorr, and the vapor pressure of oxygen at that time is 150 Torr, so the vapor pressure of oxygen is extremely high. Therefore, oxygen is vaporized again and only liquid ozone 34 remains in the reservoir 34 at the bottom of the condenser 12.

【0006】[0006]

【考案が解決しようとする課題】[Problems to be solved by the device]

しかしながら、上述の従来装置における凝縮器12は円筒形をしており、この ため冷却のための伝熱面積が十分でなく、従って、液化効率がよくないという問 題点があった。 However, the condenser 12 in the above-mentioned conventional apparatus has a cylindrical shape, and therefore, there is a problem that the heat transfer area for cooling is not sufficient and therefore the liquefaction efficiency is not good.

【0007】 この考案の目的は、オゾナイザから導入して来るオゾンガス含有酸素ガスを凝 縮器において効率よく液化させるために、凝縮器の伝熱面積を増大させた構造の オゾン精製装置を提供することにある。An object of the present invention is to provide an ozone purifier having a structure in which a heat transfer area of a condenser is increased in order to efficiently liquefy an oxygen gas containing ozone gas introduced from an ozonizer in a condenser. It is in.

【0008】[0008]

【課題を解決するための手段】[Means for Solving the Problems]

この目的の達成を図るため、この考案は、オゾンと酸素との混合ガスから、冷 媒を用いて、オゾンガスを液化分離する凝縮器を備えるオゾン精製装置において 、凝縮器は容器と該容器の上部側面から混合ガスを該凝縮器中へ導入する配管を 備え、該前記容器内での前記配管は、該容器の内側の深さ方向に延在する螺旋状 管部と、前記容器の内側の底部から垂直に立ち上がる下端部を閉止した直管部と を備え、該直管部の下端部に液化オゾン貯溜部を残して該直管部と前記螺旋状管 部とを連結してあり、前記直管部は前記凝縮器の頂部を突き抜けて設けてある ことを特徴とする。 In order to achieve this object, the present invention relates to an ozone purifying apparatus including a condenser for liquefying and separating ozone gas from a mixed gas of ozone and oxygen using a cooling medium, wherein the condenser is a container and an upper part of the container. A pipe for introducing a mixed gas into the condenser from a side surface is provided, and the pipe in the container is a spiral pipe portion extending in a depth direction inside the container, and a bottom portion inside the container. A straight pipe part having a closed bottom end rising vertically from the straight pipe part, and the straight pipe part and the spiral pipe part are connected to each other, leaving a liquefied ozone storage part at the lower end part of the straight pipe part. The pipe portion is provided so as to penetrate through the top of the condenser.

【0009】 この考案の実施にあたり、好ましくは、直管下端部の液化オゾン貯溜部の外周 囲にヒーターを設けて、この部分を加熱できる構造とするのがよい。In implementing the present invention, it is preferable that a heater is provided around the outer periphery of the liquefied ozone storage portion at the lower end of the straight pipe so that this portion can be heated.

【0010】[0010]

【作用】[Action]

上述したこの考案の構成によれば、凝縮器へ原料ガス、すなわちオゾンと酸素 との混合ガスを導入する配管を構成しているパイプを螺旋状管部と直管部とで主 として構成しているため、冷媒に対する伝熱面積が大きくなり、従って、冷却効 率が向上する。 According to the configuration of the present invention described above, the pipe constituting the pipe for introducing the raw material gas, that is, the mixed gas of ozone and oxygen into the condenser is mainly composed of the spiral pipe portion and the straight pipe portion. As a result, the heat transfer area for the refrigerant is increased, and therefore the cooling efficiency is improved.

【0011】[0011]

【実施例】【Example】

以下、図面を参照して、この考案の実施例を説明する。図1は、この考案のオ ゾン精製装置の要部を構成している凝縮器の説明に供する概略図である。 An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram for explaining a condenser forming a main part of an ozone purifying apparatus of the present invention.

【0012】 なお、図はこの発明が理解できる程度に、各構成成分の形状、大きさ、および 配置関係は概略的に示してあるにすぎない。It should be noted that the drawings only schematically show the shapes, sizes, and positional relationships of the respective constituent components to the extent that the present invention can be understood.

【0013】 この実施例のオゾン精製装置は、凝縮器を除いて上述した従来装置と全く同じ 構成とし得るので、ここでは、図1および図2を用いて、この考案による凝縮器 を中心に説明し、他の構成部分についての説明は省略する。Since the ozone purifying apparatus of this embodiment can have the same structure as the above-mentioned conventional apparatus except for the condenser, here, the condenser according to the present invention will be mainly described with reference to FIGS. 1 and 2. However, description of other components will be omitted.

【0014】 オゾナイザ22で発生した混合ガス、例えば約5%オゾン含有の酸素ガス(生 成ガスと称することがある)は、コントロールバルブ16を通り、旧来の凝縮器 に代わって設置されたこの考案に基づく凝縮器50(図1)に入る。The mixed gas generated in the ozonizer 22, for example, oxygen gas containing about 5% ozone (sometimes referred to as “produced gas”) passes through the control valve 16 and is installed in place of the conventional condenser. Based condenser 50 (FIG. 1).

【0015】 この凝縮器50は、不活性ガスを収容した容器52と、この容器52内へ混合 ガスを導入し、かつ、凝縮を行わせるための配管からなる凝縮管54とを備えて いる。The condenser 50 includes a container 52 containing an inert gas, and a condensing pipe 54 that is a pipe for introducing the mixed gas into the container 52 and for causing the gas to condense.

【0016】 この凝縮管54は螺旋状管部56と直管部58とを備えている。この螺旋状管 部56は、そのガス入口部60側の端部を、容器52の上部の側面で容器52の 外側へ貫通させて設けてある。そして螺旋状管部56の本体部分は、この容器5 2内を底部に向けて下方へと延在させてある。この管部56の管径、螺旋ループ の径、ループの段数およびこの管部56の延在方向の長さは設計に応じて任意に 定めることができる。The condensing pipe 54 includes a spiral pipe portion 56 and a straight pipe portion 58. The spiral tube portion 56 is provided by penetrating the end portion on the gas inlet portion 60 side to the outside of the container 52 at the side surface of the upper portion of the container 52. The main body portion of the spiral tube portion 56 extends downward in the container 52 toward the bottom. The pipe diameter of the pipe portion 56, the diameter of the spiral loop, the number of stages of the loop, and the length of the pipe portion 56 in the extending direction can be arbitrarily determined according to the design.

【0017】 また、直管部58は、容器52の底部から垂直に立ち上がって容器52の頂部 を貫通して容器外へと突き出ている。この突き出た部分がガス出口部62となる 。The straight pipe portion 58 rises vertically from the bottom of the container 52, penetrates the top of the container 52, and projects outside the container. The protruding portion becomes the gas outlet 62.

【0018】 一方、この直管部58の容器52の底部側を閉止し、封止構造の貯溜部64を 形成しておく。この貯溜部64に液化オゾンが貯溜できるようにするため、螺旋 状管部56を直管部58に、この貯溜部64を残して、互いに連結するように構 成する。なお、66はこの貯溜部64の外周囲に設けたヒーターである。また、 容器52の内部には冷媒として不活性ガス、例えばヘリウムガス68が排気自在 の状態で充填されている。On the other hand, the bottom portion side of the container 52 of the straight pipe portion 58 is closed to form a storage portion 64 having a sealing structure. In order to store the liquefied ozone in the storage portion 64, the spiral pipe portion 56 is configured to be connected to the straight pipe portion 58, leaving the storage portion 64. Reference numeral 66 is a heater provided on the outer periphery of the reservoir 64. In addition, an inert gas such as helium gas 68 as a refrigerant is filled in the container 52 in a freely exhaustable state.

【0019】 このような構造によれば生成ガスはガス入口部60より入り液体窒素によって 冷却されたヘリウムガス68によって液体窒素の温度、すなわち−196℃にま で冷却された螺旋状パイプを下降して行くうちに液化して、直管部58の下端の 貯溜部64に溜まる。According to such a structure, the produced gas enters from the gas inlet portion 60 and descends the spiral pipe cooled to the temperature of the liquid nitrogen, that is, -196 ° C. by the helium gas 68 cooled by the liquid nitrogen. As it goes, it liquefies and collects in the storage part 64 at the lower end of the straight pipe part 58.

【0020】 次いで生成ガスの導入を止め、容器52内のヘリウム68を抜き、後述する断 熱加熱のため容器52内を真空とする(真空装置図示せず)。Then, the introduction of the generated gas is stopped, the helium 68 in the container 52 is removed, and the inside of the container 52 is evacuated for the purpose of heating by heat insulation (a vacuum device not shown).

【0021】 次に、凝縮管54内をソープションポンプ18によって減圧にして、先に述べ たように、オゾンと酸素の蒸気圧の差を利用して酸素をオゾン送気系外に放出す る。その後、ヒータ66によって貯溜部64を断熱加熱して、液化オゾンを気化 させ、よってガス出口部62を経由してオゾン送気系へ取り出し、使用目的に応 じた他の所要個所へオゾンを送気する。Next, the pressure inside the condensing pipe 54 is reduced by the sorption pump 18, and as described above, oxygen is released to the outside of the ozone gas supply system by utilizing the difference in vapor pressure between ozone and oxygen. .. After that, the storage section 64 is adiabatically heated by the heater 66 to vaporize the liquefied ozone, so that the liquefied ozone is taken out to the ozone gas supply system via the gas outlet section 62, and the ozone is sent to other required places according to the purpose of use. I care.

【0022】 上述した実施例は、この考案の単なる好適例につき説明したに過ぎない。この 考案は種々の変形または変更を行い得る。例えば、直管部58は螺旋状管部56 の中を通る構造とせずに螺旋状管部56の脇を通る構造としてもよい。The above-described embodiments are merely described as preferred embodiments of the present invention. This invention can be modified or changed in various ways. For example, the straight pipe portion 58 may not have a structure that passes through the spiral pipe portion 56, but may have a structure that passes by the side of the spiral pipe portion 56.

【0023】[0023]

【考案の効果】 上述した説明から明らかなように、この考案のオゾン精製装置によれば、凝縮 器内の生成ガス導入配管を螺旋状管部と直管部をもって構成したので、冷媒に対 する伝熱面積が従来の直管のみの場合に比べて増大し、このためオゾナイザから 凝縮器へ導入される生成ガス中のオゾンの液化捕集効果が向上する。As is apparent from the above description, according to the ozone purifying apparatus of the present invention, since the product gas introduction pipe in the condenser is composed of the spiral pipe portion and the straight pipe portion, it is suitable for the refrigerant. The heat transfer area is increased compared to the conventional case where only a straight pipe is used, so that the liquefaction and collection effect of ozone in the product gas introduced from the ozonizer to the condenser is improved.

【0024】 また、導入配管の貯溜部にヒータを設け、加熱、蒸発を可能としたため、液化 オゾンの気化速度が早まり、よって生産性が向上する。Further, since a heater is provided in the reservoir portion of the introduction pipe to enable heating and evaporation, the vaporization rate of liquefied ozone is increased, thereby improving productivity.

【図面の簡単な説明】[Brief description of drawings]

【図1】この考案による凝縮器の説明図である。FIG. 1 is an explanatory view of a condenser according to the present invention.

【図2】従来のオゾン製造装置の説明図である。FIG. 2 is an explanatory diagram of a conventional ozone manufacturing apparatus.

【符号の説明】[Explanation of symbols]

10:原料ガス供給部 12:凝縮器 14:冷却部 16:コントロールバルブ 18:ソープションポンプ 20:酸素ガス源 22:オゾナイザ 24:容器(外筒) 26:容器(内筒) 28:冷媒 30:分解器 32:不活性ガス 34:液体オゾン 50:凝縮器 52:容器(内筒) 54:凝縮管 56:螺旋状管部 58:直管部 60:ガス入口部 62:ガス出口部 64:液化物貯溜部 66:ヒーター 68:不活性ガス層 10: Raw material gas supply part 12: Condenser 14: Cooling part 16: Control valve 18: Sorption pump 20: Oxygen gas source 22: Ozonizer 24: Container (outer cylinder) 26: Container (inner cylinder) 28: Refrigerant 30: Decomposing device 32: Inert gas 34: Liquid ozone 50: Condenser 52: Container (inner cylinder) 54: Condensing pipe 56: Spiral pipe part 58: Straight pipe part 60: Gas inlet part 62: Gas outlet part 64: Liquefaction Material storage unit 66: Heater 68: Inert gas layer

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 オゾンと酸素との混合ガスから、冷媒を
用いて、オゾンガスを液化分離する凝縮器を備えるオゾ
ン精製装置において、 凝縮器は容器と該容器の上部側面から混合ガスを該凝縮
器中へ導入する配管を備え、該前記容器内での前記配管
は、該容器の内側の深さ方向に延在する螺旋状管部と、
前記容器の内側の底部から垂直に立ち上がる下端部を閉
止した直管部とを備え、該直管部の下端部に液化オゾン
貯溜部を残して該直管部と前記螺旋状管部とを連結して
あり、前記直管部は前記凝縮器の頂部を突き抜けて設け
てあることを特徴とするオゾン精製装置。
1. An ozone purifying apparatus comprising a condenser for liquefying and separating ozone gas from a mixed gas of ozone and oxygen using a refrigerant, wherein the condenser is a container and a mixed gas from the upper side surface of the container. A pipe to be introduced into the container, the pipe in the container, a spiral pipe portion extending in a depth direction inside the container,
A straight pipe part having a closed bottom end rising vertically from the inner bottom part of the container, and connecting the straight pipe part and the spiral pipe part leaving a liquefied ozone storage part at the lower end part of the straight pipe part. The ozone purifier is characterized in that the straight pipe portion is provided so as to penetrate through the top portion of the condenser.
【請求項2】 請求項1に記載の液化オゾン貯溜部は、
その外周囲に加熱ヒーターを備えていることを特徴とす
るオゾン精製装置。
2. The liquefied ozone storage part according to claim 1,
An ozone purifier characterized in that a heater is provided around its outer periphery.
JP10046991U 1991-12-05 1991-12-05 Ozone purification equipment Withdrawn JPH0552689U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10046991U JPH0552689U (en) 1991-12-05 1991-12-05 Ozone purification equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10046991U JPH0552689U (en) 1991-12-05 1991-12-05 Ozone purification equipment

Publications (1)

Publication Number Publication Date
JPH0552689U true JPH0552689U (en) 1993-07-13

Family

ID=14274773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10046991U Withdrawn JPH0552689U (en) 1991-12-05 1991-12-05 Ozone purification equipment

Country Status (1)

Country Link
JP (1) JPH0552689U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008004278A1 (en) * 2006-07-04 2008-01-10 Toshiba Mitsubishi-Electric Industrial Systems Corporation Apparatus for concentrating/diluting specific gas and method of concentrating/diluting specific gas
CN109200737A (en) * 2017-07-04 2019-01-15 保定赛印科学仪器研发有限公司 Ozone purifying plant and ozone purification system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008004278A1 (en) * 2006-07-04 2008-01-10 Toshiba Mitsubishi-Electric Industrial Systems Corporation Apparatus for concentrating/diluting specific gas and method of concentrating/diluting specific gas
WO2008004321A1 (en) * 2006-07-04 2008-01-10 Toshiba Mitsubishi-Electric Industrial Systems Corporation Apparatus and method for the concentration and dilution of specific gas
CN109200737A (en) * 2017-07-04 2019-01-15 保定赛印科学仪器研发有限公司 Ozone purifying plant and ozone purification system
CN109200737B (en) * 2017-07-04 2024-04-26 保定赛印科学仪器研发有限公司 Ozone purification device and ozone purification system

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