JPH0549238B2 - - Google Patents

Info

Publication number
JPH0549238B2
JPH0549238B2 JP2653787A JP2653787A JPH0549238B2 JP H0549238 B2 JPH0549238 B2 JP H0549238B2 JP 2653787 A JP2653787 A JP 2653787A JP 2653787 A JP2653787 A JP 2653787A JP H0549238 B2 JPH0549238 B2 JP H0549238B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2653787A
Other versions
JPS63194285A (en
Inventor
Masanori Watanabe
Masayuki Katagiri
Masaya Hijikigawa
Original Assignee
Sharp Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kk filed Critical Sharp Kk
Priority to JP2653787A priority Critical patent/JPH0549238B2/ja
Publication of JPS63194285A publication Critical patent/JPS63194285A/en
Publication of JPH0549238B2 publication Critical patent/JPH0549238B2/ja
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

JP2653787A 1987-02-06 1987-02-06 Expired - Lifetime JPH0549238B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2653787A JPH0549238B2 (en) 1987-02-06 1987-02-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2653787A JPH0549238B2 (en) 1987-02-06 1987-02-06

Publications (2)

Publication Number Publication Date
JPS63194285A JPS63194285A (en) 1988-08-11
JPH0549238B2 true JPH0549238B2 (en) 1993-07-23

Family

ID=12196241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2653787A Expired - Lifetime JPH0549238B2 (en) 1987-02-06 1987-02-06

Country Status (1)

Country Link
JP (1) JPH0549238B2 (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006500231A (en) * 2002-09-20 2006-01-05 イリディグム ディスプレイ コーポレイション Control of the electromechanical behavior of structures in microelectromechanical systems devices
JP2006106756A (en) * 1994-05-05 2006-04-20 Iridigm Display Corp Visible spectrum modulator array
JP2006136997A (en) * 2004-08-27 2006-06-01 Idc Llc System and method of sensing actuation and release voltages of interferometric modulator
US8693084B2 (en) 2008-03-07 2014-04-08 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US8964280B2 (en) 2006-06-30 2015-02-24 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US8971675B2 (en) 2006-01-13 2015-03-03 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US9001412B2 (en) 2004-09-27 2015-04-07 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US9081188B2 (en) 2011-11-04 2015-07-14 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
US9086564B2 (en) 2004-09-27 2015-07-21 Qualcomm Mems Technologies, Inc. Conductive bus structure for interferometric modulator array
US9097885B2 (en) 2004-09-27 2015-08-04 Qualcomm Mems Technologies, Inc. Device having a conductive light absorbing mask and method for fabricating same
US9110289B2 (en) 1998-04-08 2015-08-18 Qualcomm Mems Technologies, Inc. Device for modulating light with multiple electrodes
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6963440B2 (en) * 2004-02-13 2005-11-08 Hewlett-Packard Development Company, L.P. System and method for driving a light delivery device
WO2010085286A1 (en) 2009-01-23 2010-07-29 Qualcomm Mems Technologies, Inc. Integrated light emitting and light detecting device

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006106756A (en) * 1994-05-05 2006-04-20 Iridigm Display Corp Visible spectrum modulator array
US9110289B2 (en) 1998-04-08 2015-08-18 Qualcomm Mems Technologies, Inc. Device for modulating light with multiple electrodes
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
JP4800619B2 (en) * 2002-09-20 2011-10-26 クゥアルコム・メムス・テクノロジーズ・インコーポレイテッドQUALCOMM MEMS Technologies, Inc. Control of the electromechanical behavior of structures in microelectromechanical systems devices
JP2006500231A (en) * 2002-09-20 2006-01-05 イリディグム ディスプレイ コーポレイション Control of the electromechanical behavior of structures in microelectromechanical systems devices
JP2006136997A (en) * 2004-08-27 2006-06-01 Idc Llc System and method of sensing actuation and release voltages of interferometric modulator
US9086564B2 (en) 2004-09-27 2015-07-21 Qualcomm Mems Technologies, Inc. Conductive bus structure for interferometric modulator array
US9001412B2 (en) 2004-09-27 2015-04-07 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US9097885B2 (en) 2004-09-27 2015-08-04 Qualcomm Mems Technologies, Inc. Device having a conductive light absorbing mask and method for fabricating same
US8971675B2 (en) 2006-01-13 2015-03-03 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8964280B2 (en) 2006-06-30 2015-02-24 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US8693084B2 (en) 2008-03-07 2014-04-08 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US9121979B2 (en) 2009-05-29 2015-09-01 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9081188B2 (en) 2011-11-04 2015-07-14 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device

Also Published As

Publication number Publication date
JPS63194285A (en) 1988-08-11

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