JPH0546060U - Magnetoresistive element - Google Patents

Abstract

(57) [Abstract] [Purpose] In a magnetoresistive element in which a plurality of magnetic sensitive sections are provided on a substrate and the magnetic sensitive sections are connected to each other, the surface of the magnetoresistive element is formed by only terminals and magnetic sensitive sections. In other words, a magnetoresistive element with no electrodes on the surface is used, and the magnetic sensitive section is connected in series at the terminals to eliminate the structure that reduces the resistance change. Can be emptied. A magnetoresistive element in which a plurality of magnetic sensitive sections 2 are provided on a substrate 1 and the magnetic sensitive sections 2 are connected to each other is provided.
One end is connected to terminals 3 and 5, and the other end of the magnetic sensing part 2 is connected to the terminal 4 in series.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a magnetoresistive element that changes its resistance value depending on the direction of a magnetic field and a current path.

The current path pattern of the conventional magnetoresistive element is the same as that of the conventional example of Japanese Patent Publication No. 2-3796, which is shown in FIG. It consists of a folding part 16 that is at a right angle, and is folded several times. When the longitudinal direction of the stripe portion 15 and the magnetic field direction are parallel, the folded portion 16 is perpendicular to the magnetic field direction, and the resistance value changes in the opposite direction, reducing the change in resistance value as a whole. ing.

As another example of the magnetoresistive element, as shown in FIG. 4B, a terminal 17 is formed at the end of the chip substrate 1 ′, and an electrode 18 is drawn from the magnetically sensitive portion 2 to form it. I was connected to the terminal. Moreover, in order to reduce the electric resistance of this electrode, the width of the electrode 18 is widened so that the electrode 18 is formed as large as possible.

[0004]

[Problems to be solved by the device]

 According to the improvement proposal of the above-mentioned prior art publication, since the folded-back portion of the magnetic sensitive material remains, there is a drawback that the change in resistance value is reduced. According to the above conventional technique, there are the following problems. ′ Electrode parts tend to be defective. ′ Chips get bigger. The'electrode also has drawbacks such as being affected by the magnetic field.

The present invention has been made in order to solve such a problem, and the surface of the magnetoresistive element is formed only by the terminal and the magnetic sensitive portion. In other words, a magnetoresistive element having no electrode on the surface is used, and the magnetic sensitive section is connected in series at the terminal to eliminate the structure that reduces the change in resistance value at the electrode made of the magnetic sensitive material. Another object of the present invention is to provide a magnetoresistive element having a space between terminals by forming a magnetically sensitive portion with a strap structure.

[0006]

[Means for Solving the Problems]

 The magnetoresistive element of the present invention is characterized in that a plurality of magnetic sensitive sections are provided on a substrate and the magnetic sensitive sections are connected to each other, and the magnetic sensitive sections are connected by terminals.

[0007]

[Action]

 For example, a ferromagnetic thin film is deposited on a substrate 1 made of glass or the like to form a plurality of magnetic sensitive portions 2. Terminals 3, 4, and 5 are formed on the end of the magnetic sensing portion 2 by aluminum vapor deposition or the like to form a magnetoresistive element chip. By not arranging the electrodes made of the magnetic sensitive material in this way, the error in the resistance change due to the magnetoresistive effect due to the electrodes is reduced and the performance of the magnetoresistive element is improved.

[0008]

【Example】

 Hereinafter, embodiments of a magnetoresistive element according to the present invention will be described with reference to the drawings. FIG. 1 shows a first embodiment, in which a nickel alloy magnetic film such as a Ni—Co alloy film, which is a kind of ferromagnetic thin film, is deposited on a substrate 1 made of glass or the like to form a plurality of stripe-shaped magnetic sensitive portions 2. Has been formed. Terminals 3 and 5 are formed on one end of the magnetic sensing section 2 by aluminum vapor deposition or the like. The other end of the magnetic sensing part 2 is connected in series with a terminal 4 to form a chip. Then, to the outside, terminals 3, 4, 5 and the like are connected to the outer lead wires by wire bonding or the like.

Since the magnetoresistive element formed as described above does not have the electrode, which is a conventional defect occurrence point, the defects are reduced. Since the entire area of the conventional electrode part can be reduced, the chip can be miniaturized. Further, if the magnetic sensing portion is downsized, the magnetoresistive element chip can be downsized as it is. Since it does not have an electrode, only the magnetically sensitive portion is affected by the magnetic field, and there is no error in the change in the resistance value of the magnetically sensitive portion, thus improving the performance of the magnetoresistive element. Since the entire chip is almost magnetically sensitive, it can be arranged easily when facing the magnet of the member to be detected which constitutes the encoder or the like, since the central portion of the chip must face. Since it can be miniaturized, the cost can be reduced.

FIG. 2 shows a second embodiment, in which a nickel alloy magnetic film such as a Ni—Co alloy film, which is a kind of ferromagnetic thin film, is deposited on a substrate 1 made of glass or the like to form a stripe-shaped magnetic sensitive portion 2. Are formed in plural. Terminals 6, 7, 8, 9 and 10 are formed on the end of the magnetic sensing part 2 by aluminum vapor deposition or the like to form a chip. Recesses 1a, 1b, 1c, 1d, 1e are formed at the respective terminal positions of the substrate 1, and the terminals 6, 7, 8, 9, 10 are connected to the back surface of the substrate 1. Then, a signal is guided from the rear surface to the outside by the lead wires 11 and 11. In addition, you may guide from the side surface of a terminal. Further, the terminals 3, 4, and 5 in FIG. 1 may be formed by filling a through hole with a conductive material. In this case, the magnetic sensitive portion 2 is formed on the through-hole after the filling, that is, the magnetic sensitive portion 2 is extended to above the terminals 3, 4, 5. If the width between the adjacent magnetic sensitive parts 2 is narrow, the terminals to be directly formed on the magnetic sensitive part 2 should be narrowed down to three positions such as terminals 12, 13, and 14 shown in FIG. Since the terminals 12 and 14 are separated from each other, a short circuit between the terminals does not occur.

[0011]

[Effect of the device]

 According to the present invention, since the electrode, which has been a conventional defect occurrence point, is not provided, the defect is reduced. Since the entire area of the conventional electrode part can be reduced, the chip can be miniaturized. Further, if the magnetic sensing section is downsized, the magnetoresistive element chip can be downsized as it is. Since there is no electrode, there is no structure in which only the magnetically sensitive portion is affected by the magnetic field to cause an error in the change in resistance value, and the performance of the magnetoresistive element is improved. Since the entire chip is almost composed of the magnetically sensitive portion, it is easy to position the magnetoresistive element in the encoder. Since the size can be reduced, the cost can be reduced.

[Brief description of drawings]

FIG. 1 is a plan view showing a first embodiment of a magnetoresistive element according to the present invention.

FIG. 2 is a perspective view showing a second embodiment of the magnetoresistive element according to the present invention.

FIG. 3 is a plan view showing a third embodiment of the magnetoresistive element according to the present invention.

FIG. 4 is a plan view showing an example of a conventional magnetoresistive element.

[Explanation of symbols]

 1 substrate 2 magnetic sensitive section 3, 4, 5, 6, 7, 8, 9, 10 terminals

Claims (1)

[Scope of utility model registration request] 1. A magnetoresistive element in which a plurality of magnetic sensitive sections are provided on a substrate and the magnetic sensitive sections are connected to each other, wherein the magnetic sensitive sections are connected by terminals.