JPH0545968Y2 - - Google Patents
Info
- Publication number
- JPH0545968Y2 JPH0545968Y2 JP1985170592U JP17059285U JPH0545968Y2 JP H0545968 Y2 JPH0545968 Y2 JP H0545968Y2 JP 1985170592 U JP1985170592 U JP 1985170592U JP 17059285 U JP17059285 U JP 17059285U JP H0545968 Y2 JPH0545968 Y2 JP H0545968Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- magnetic field
- static magnetic
- transmitter
- rotation axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005481 NMR spectroscopy Methods 0.000 claims description 16
- 230000003068 static effect Effects 0.000 claims description 14
- 239000000523 sample Substances 0.000 description 46
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012615 high-resolution technique Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Description
【考案の詳細な説明】
［産業上の利用分野］
本考案は核磁気共鳴装置（NMR装置）に関
し、特に半導体ウエハ等の板状試料を破壊するこ
となく測定することのできるNMR装置に関す
る。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a nuclear magnetic resonance apparatus (NMR apparatus), and particularly to an NMR apparatus that can measure a plate-shaped sample such as a semiconductor wafer without destroying it.
［従来技術］
最近は、固体試料についても分解能の高い
NMR測定が可能になつて来ている。[Prior art] Recently, high resolution techniques have been developed for solid samples as well.
NMR measurements are becoming possible.
第２図は固体試料を測定するために用いられる
NMRプローブの一例を示す概略図である。図に
おいて１は静磁場H0中に配置されるこまの形を
したスピンナで、内部に粉末の試料が封入され
る。２はこのスピンナ１の先端の円錐部分を受け
る受け台で、内部に設けられた送気通路３を介し
て加圧空気がスピンナ１の円錐部分に吹きつけら
れる。このため、スピンナ１は浮上すると共に軸
Ｏの回りに高速回転される。この軸Ｏが静磁場
H0と成す角度を54.7°（マジツクアングル）に設定
することにより、送受信コイル４を介して分解能
の高いNMR測定を行うことができる。 Figure 2 is used to measure solid samples.
FIG. 1 is a schematic diagram showing an example of an NMR probe. In the figure, 1 is a top-shaped spinner placed in a static magnetic field H 0 , and a powder sample is sealed inside. Reference numeral 2 denotes a pedestal for receiving the conical portion at the tip of the spinner 1, and pressurized air is blown onto the conical portion of the spinner 1 via an air supply passage 3 provided inside. Therefore, the spinner 1 floats and rotates around the axis O at high speed. This axis O is the static magnetic field
By setting the angle formed with H 0 to 54.7° (magic angle), high resolution NMR measurement can be performed via the transmitter/receiver coil 4.
［考案が解決しようとする問題点］
ところが、このような従来の構造では、スピン
ナ内に収容できる試料は粉末あるいは粒子の状態
に限られる。そのため、例えば、半導体ウエハを
測定する場合には、ウエハを砕いてスピンナに封
入して測定を行わなければならず、ウエハの破壊
は避けられなかつた。[Problems to be solved by the invention] However, in such a conventional structure, the sample that can be accommodated in the spinner is limited to a powder or particle state. Therefore, for example, when measuring a semiconductor wafer, it is necessary to crush the wafer and enclose it in a spinner for measurement, and destruction of the wafer is unavoidable.
本考案はこの点に鑑みてなされたものであり、
板状の試料であつても試料を破壊することなく
NMR測定を行うことのできるNMR装置を提供
することを目的としている。 This invention was made in view of this point,
Even if the sample is plate-shaped, it can be used without destroying the sample.
The purpose is to provide an NMR device that can perform NMR measurements.
［問題点を解決するための手段］
この目的を達成するため本考案にかかるNMR
装置は、静磁場を発生するための磁石と、該静磁
場中に配置される試料保持台であつて、回転軸と
該回転軸に直交する試料保持面を有し、板状試料
を該保持面に保持した時に試料面が静磁場に対し
て略35.3°傾斜して保持されるように設定された
試料保持台と、該試料保持台を回転軸を中心とし
て回転させるための手段と、前記試料保持台上に
保持される板状試料の回転中心部に試料表面から
微小距離をおいて配置される送受信コイルと、該
送受信コイルへ観測用パルスを供給するための送
信回路と、該送受信コイルに誘起された共鳴信号
が供給される受信回路を備えたことを特徴として
いる。[Means for solving the problem] In order to achieve this purpose, the NMR according to the present invention
The device includes a magnet for generating a static magnetic field, a sample holding table placed in the static magnetic field, a rotation axis and a sample holding surface perpendicular to the rotation axis, and a plate-shaped sample is held on the sample holding surface. a sample holder set such that the sample surface is held at an angle of approximately 35.3 degrees with respect to a static magnetic field when held on a surface; a means for rotating the sample holder about a rotation axis; A transmitting/receiving coil disposed at a rotational center of a plate-shaped sample held on a sample holding table at a small distance from the sample surface, a transmitting circuit for supplying observation pulses to the transmitting/receiving coil, and the transmitting/receiving coil. The present invention is characterized in that it includes a receiving circuit to which a resonance signal induced by the resonance signal is supplied.
［作用］
静磁場に対して略35.3°傾斜された試料保持面
を持つ試料保持台を、この傾斜角を保つたまま回
転させると、その回転軸は静磁場に対して略
54.7°傾斜することになり、マジツクアングルに
設定される。本考案では、この試料保持面に取付
けられた板状試料の表面に近接して送受信コイル
を配置するため、この送受信コイルが面した限ら
れた領域の試料についてNMR測定を感度良く行
うことが可能である。以下、図面を用いて本考案
の一実施例を詳説する。[Function] When a sample holder with a sample holding surface tilted at approximately 35.3 degrees with respect to the static magnetic field is rotated while maintaining this tilt angle, its axis of rotation will be approximately 35.3° with respect to the static magnetic field.
It will be tilted at 54.7 degrees and will be set to a magic angle. In the present invention, the transmitting and receiving coils are placed close to the surface of the plate-shaped sample attached to the sample holding surface, making it possible to perform NMR measurements with high sensitivity on the limited area of the sample that the transmitting and receiving coil faces. It is. Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.
［実施例］
第１図は本考案の一実施例の構成を示す。図に
おいて、磁石１１が発生する静磁場Hp中には、
静磁場に対して略35.3°傾斜された試料保持面を
持つ試料保持台１２が配置され、この試料保持台
上には同じく円板状の試料１３が載置される。１
４は試料保持台に取付けられた回転軸で、コンプ
レツサ１５から加圧空気が送られる空気軸受１６
によつて支持される。この空気軸受の端部には軸
１４の周面に設けた複数の溝１７にコンプレツサ
１８からの加圧空気を吹付けることにより軸に回
転力を与えるノズル１９が設けられている。その
ため、試料保持台は静磁場に対する35.3°の傾斜
角度を保つたまま高速回転される。[Embodiment] FIG. 1 shows the configuration of an embodiment of the present invention. In the figure, in the static magnetic field H p generated by the magnet 11,
A sample holder 12 having a sample holder surface inclined at approximately 35.3 degrees with respect to the static magnetic field is arranged, and a disk-shaped sample 13 is placed on this sample holder. 1
Reference numeral 4 denotes a rotating shaft attached to the sample holder, and an air bearing 16 to which pressurized air is sent from the compressor 15.
Supported by. A nozzle 19 is provided at the end of the air bearing to apply a rotational force to the shaft by blowing pressurized air from a compressor 18 into a plurality of grooves 17 provided on the circumferential surface of the shaft 14. Therefore, the sample holder is rotated at high speed while maintaining an inclination angle of 35.3° with respect to the static magnetic field.
このようにして保持台と共に高速回転される試
料１３の回転中心部分には、アーム２０の先端に
取付けられた送受信コイル２１が極めて小さな距
離をおいて近接配置される。２２はアーム２０が
回動可能に取付けられる基台、２３は送受信コイ
ル２１へ観測パルスを供給するための送信回路、
２４は送受信コイル２１に誘起される共鳴信号を
取出すための受信回路、２５は取出された共鳴信
号を処理するコンピユータである。 A transmitting/receiving coil 21 attached to the tip of an arm 20 is placed close to the center of rotation of the sample 13, which is thus rotated at high speed together with the holding table, at a very small distance. 22 is a base on which the arm 20 is rotatably mounted; 23 is a transmitting circuit for supplying observation pulses to the transmitting/receiving coil 21;
24 is a receiving circuit for extracting the resonance signal induced in the transmitting/receiving coil 21, and 25 is a computer for processing the extracted resonance signal.
上述の如き構成において、試料１３は試料に対
して略35.3°傾斜した面上で回転されるため、そ
の回転の軸は静磁場に対して略54.7°傾斜し、マ
ジツクアングルに設定されることになる。そし
て、試料表面の回転中心部分に近接配置される送
受信コイル２１へ送信回路２３から観測パルス
（パルス列）を送つて試料に照射し、照射後送受
信コイル２１に誘起される共鳴信号を受信回路２
４を介して取出せば、この試料表面の回転中心部
分についてNMR測定を行うことができる。 In the above configuration, the sample 13 is rotated on a plane inclined at approximately 35.3 degrees with respect to the sample, so the axis of rotation is inclined at approximately 54.7 degrees with respect to the static magnetic field, and is set at a magic angle. become. Then, an observation pulse (pulse train) is sent from the transmitting circuit 23 to the transmitting/receiving coil 21 disposed close to the rotational center of the sample surface, and the sample is irradiated with the observation pulse.
4, NMR measurements can be performed on the center of rotation of the sample surface.
尚、回転する試料表面に沿つて送受信コイル２
１を移動させれば、回転中心から適宜な半径の円
周に沿つた環状の領域についてNMR測定を行う
ことができる。 In addition, the transmitter/receiver coil 2 is placed along the rotating sample surface.
1, NMR measurements can be performed on an annular region along the circumference of an appropriate radius from the center of rotation.
このように、試料が高速回転するため、送受信
コイル２１が回転中心以外の位置に配置される
と、測定領域が環状になることは避けられない。
そのため、試料保持台１２に試料を固定する際
に、試料上の測定所望部位が回転中心に来るよう
にセツトすれば、その所望部位についてNMR測
定を行うことができる。その場合、試料の回転バ
ランスがくずれるので、適宜なバランサを試料保
持台に設置し、試料のどの部分が回転中心に来て
もバランス良く回転するように配慮する必要があ
る。 As described above, since the sample rotates at high speed, if the transmitter/receiver coil 21 is placed at a position other than the center of rotation, it is inevitable that the measurement area will become annular.
Therefore, when fixing a sample on the sample holding table 12, if the desired measurement part on the sample is set to be at the center of rotation, NMR measurement can be performed on the desired part. In this case, the rotational balance of the sample will be lost, so it is necessary to install an appropriate balancer on the sample holder to ensure that the sample rotates in a well-balanced manner no matter which part of the sample is at the center of rotation.
［効果］
以上詳述した如く、本発明によれば、半導体ウ
エハ等の板状試料を破壊することなく測定するこ
とのできるNMR装置が実現される。[Effects] As detailed above, according to the present invention, an NMR apparatus is realized that can measure a plate-shaped sample such as a semiconductor wafer without destroying it.
第１図は本考案一実施例の構成を示す図、第２
図は固体試料を測定するために用いられるNMR
プローブの一例を示す概略図である。
１１……磁石、１２……試料保持台、１３……
試料、１４……回転軸、１５，１８……コンプレ
ツサ、１６……空気軸受、１７……溝、１９……
ノズル、２０……アーム、２１……送受信コイ
ル、２２……基台、２３……送信回路、２４……
受信回路。
Figure 1 is a diagram showing the configuration of one embodiment of the present invention, Figure 2 is a diagram showing the configuration of an embodiment of the present invention.
The figure shows NMR used to measure solid samples.
It is a schematic diagram showing an example of a probe. 11... Magnet, 12... Sample holding stand, 13...
Sample, 14... Rotating shaft, 15, 18... Compressor, 16... Air bearing, 17... Groove, 19...
Nozzle, 20... Arm, 21... Transmitting/receiving coil, 22... Base, 23... Transmitting circuit, 24...
receiving circuit.
Claims (1)
配置される試料保持台であつて、回転軸と該回転
軸に直交する試料保持面を有し、板状試料を該保
持面に保持した時に試料面が静磁場に対して略
35.3°傾斜して保持されるように設定された試料
保持台と、該試料保持台を回転軸を中心として回
転させるための手段と、前記試料保持台上に保持
される板状試料の回転中心部に試料表面から微小
距離をおいて配置される送受信コイルと、該送受
信コイルへ観測用パルスを供給するための送信回
路と、該送受信コイルに誘起された共鳴信号が供
給される受信回路を備えたことを特徴とする核磁
気共鳴装置。 A magnet for generating a static magnetic field, and a sample holding stand placed in the static magnetic field, which has a rotation axis and a sample holding surface perpendicular to the rotation axis, and holds a plate-shaped sample on the holding surface. When the sample surface is approximately equal to the static magnetic field,
A sample holder set to be held at an angle of 35.3°, means for rotating the sample holder around a rotation axis, and a rotation center of a plate-shaped sample held on the sample holder. A transmitter/receiver coil disposed at a small distance from the sample surface, a transmitter circuit for supplying observation pulses to the transmitter/receiver coil, and a receiver circuit to which a resonance signal induced in the transmitter/receiver coil is supplied. A nuclear magnetic resonance apparatus characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985170592U JPH0545968Y2 (en) | 1985-11-06 | 1985-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985170592U JPH0545968Y2 (en) | 1985-11-06 | 1985-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6279151U JPS6279151U (en) | 1987-05-20 |
| JPH0545968Y2 true JPH0545968Y2 (en) | 1993-11-30 |
Family
ID=31105457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985170592U Expired - Lifetime JPH0545968Y2 (en) | 1985-11-06 | 1985-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0545968Y2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7541807B2 (en) * | 2007-07-19 | 2009-06-02 | Varian, Inc. | Rotor drive apparatus and methods utilizing center-fed radial-outflow gas |
| JP5416052B2 (en) * | 2010-07-23 | 2014-02-12 | 国立大学法人京都大学 | Solid-state NMR apparatus, sample holder for solid-state NMR apparatus, and solid-state NMR measurement method |
| US9063060B2 (en) | 2011-10-10 | 2015-06-23 | Jeol Resonance Inc. | Solid-state NMR spectrometer, sample holder therefor, and method of solid-state NMR spectroscopy |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5523494A (en) * | 1978-08-04 | 1980-02-19 | Ibm | Revolving device for nmr spectral analysis |
-
1985
- 1985-11-06 JP JP1985170592U patent/JPH0545968Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5523494A (en) * | 1978-08-04 | 1980-02-19 | Ibm | Revolving device for nmr spectral analysis |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6279151U (en) | 1987-05-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| SE7806294L (en) | DEVICE FOR INDICATION OF ANGLE DOCTOR IN VERTICAL JOINT | |
| JPH07225128A (en) | Device to determine horizontal plane by level | |
| KR101921041B1 (en) | Array of permanent magnets for the rotor of a magnetic bearing and method of assembly of the array | |
| JP2002502484A (en) | Bearing device | |
| JPS6244232U (en) | ||
| JPH0545968Y2 (en) | ||
| JPS62297740A (en) | Dynamic unbalance measuring device for bearing ball | |
| US5057725A (en) | Rotary electric machine | |
| JP3322047B2 (en) | Method and apparatus for measuring dynamic imbalance of a sphere | |
| US20050075805A1 (en) | Vibration measurement apparatus and method | |
| JPH10221022A (en) | Size and shape measuring error correction method | |
| US3127761A (en) | Bearing radial load torque test instrument | |
| JPH0257096U (en) | ||
| JPH01215700A (en) | Device for offsetting aerodynamic force applied to rotating body and application to dynamic balance | |
| JPH09264739A (en) | Measuring apparatus for circularity | |
| JPS5938702B2 (en) | Ion implantation device | |
| GB593231A (en) | Improvements in apparatus for testing the balance of rotating bodies | |
| JP2001302393A (en) | Device for pulling silicon single crystal | |
| GB492670A (en) | Improvements relating to gyroscopic apparatus | |
| US3324386A (en) | Fluid operated spinner magnetometer for determining the orientation of the principal magnetic axis of a sample material | |
| JPS63122985A (en) | Density distribution measuring apparatus for charged particle beam | |
| JPS64409A (en) | Instrument for measuring frame shape | |
| JPS6130210Y2 (en) | ||
| Barnes | Measurement of the errors in two radial diffraction gratings by their mutual intercomparison | |
| JPH07243905A (en) | Pair microphone support device for measuring acoustic intensity |