JPH0545148A - Section contour measuring device of sheet-shaped object - Google Patents

Abstract

PURPOSE:To enable a thickness signal of an object to be measured and an illumination position signal of a scanning line to be input to a display portion and a section contour of the object to be displayed to be formed in an accurate pattern by adding a signal delay portion for delaying a position signal by a time which is required for calculating a thickness before the position signal enters the display portion. CONSTITUTION:A title item is provided with a signal delay portion 31 which performs output as a delay position signal 30a and a display portion 32 which displays a section contour of the object to be measured by using a thickness signal 11a and the delay signal 30a by delaying an input position signal 23a by a delay time which is equal to the time required for thickness calculation operation. A thickness data of the object to be measured which each of the thickness signal 11a and the signal delay signal 30a which are input simultaneously to the display portion 32 according to operation of a signal delay portion 31 and an irradiation position data of a scanning line indicate the thickness and irradiation position which are detected at nearly a same time by a scanning line detection portion 2 and a position detection portion 19, thus enabling a sectional contour of the object to be measured to be accurately displayed by the display portion 32.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention utilizes a scan line attenuation phenomenon that occurs when a scan line as radiation or infrared rays passes through an object or is reflected from the object, and is used as a sheet-like object. The present invention relates to an apparatus for measuring a cross-sectional contour of a sheet-like object, which measures the thickness of a measurement object, and displays the cross-sectional contour of the measurement object, and more particularly, to an apparatus capable of accurately displaying the cross-sectional contour.

[0002]

2. Description of the Related Art FIG. 3 is a block diagram of a conventional cross-sectional contour measuring apparatus 1 for a sheet-like object. Then, in FIG.
Is a sheet-shaped object, which is a thin metal plate, and is disposed on one surface 3a side of the DUT 3 and emits a radiation 4 in a beam shape toward the one surface 3a substantially vertically. A radiation detector 6 that detects the transmitted radiation 4 and outputs a radiation detection signal 6a as an analog signal corresponding to the detection result, and a U-shaped mount 2a that fixedly connects the emitter 5 and the detector 6. The radiation detector 5 is composed of a radiation source 5a for radiating the radiation 4 and a radiation source container 5b accommodating the radiation source 5a. In this case, since the radiation 4 passes through the DUT 3 as described above, the intensity I of the radiation 4 detected by the detector 6 is I0 when the DUT 3 is not present, and the intensity I of the DUT 3 is When the thickness is x and the attenuation coefficient of the DUT 3 with respect to the radiation 4 is μ, the equation (1) is established. x = (1 / μ) · ln (I0 / I) ───────────────── (1) Then, in FIG. 3, the radiation detection signal 6a is input. A for converting the signal 6a into a digital signal 8a
The D converter 8 and the signal 8a are integrated for a predetermined time T1 and then the average value of the values of the signal 8a during the time T1 is obtained to reduce the statistical fluctuation of the radiation 4 detected by the radiation detector 6. Using the first calculator 9 that outputs the digital signal 9a representing the height I and the radiation intensity I0 obtained in advance and the signal I represented by the signal 9a, the right side of the equation (1) is calculated to calculate the thickness x. The calculator 7 includes a second calculator 10 that outputs the digital signal 10a and a DA converter 11 that DA-converts the signal 10a and outputs a signal 11a as an analog signal. Because it is configured
It can be said that the calculation unit 7 performs a thickness calculation calculation for calculating the thickness x of the signal 6a and outputs the thickness signal 11a representing the thickness x.

Reference numeral 12 denotes an object-to-be-measured drive such as a conveying roller for linearly moving the object-to-be-measured 3 in a direction substantially perpendicular to the radiation 4 having a central axis on the paper surface of the drawing and substantially perpendicular to the paper surface of the drawing. A mechanism, 13 is a radiation as a measuring device side drive mechanism that moves the radiation detection unit 2 substantially reciprocally and periodically in both the direction of the central axis of the radiation 4 and the direction perpendicular to the plane of the drawing. The detector drive mechanism 14 is a radiation scanning mechanism including a drive mechanism 12 and a drive mechanism 13. In this case, the drive mechanism 13 is a wheel 15 mounted on the pedestal 2a.
A rail 17 that is fixed to a mount 16 that constitutes the measuring apparatus 1 and that allows wheels 15 to travel;
And a wheel drive device 18 for driving the vehicle. Fifty
Is fixed to the mount 16 by means not shown and detects a spatial position P as a position where the radiation 4 irradiates the DUT 3 via a pulse encoder or a potentiometer provided in the wheel drive device 18. The position detection unit 25 that outputs a position signal 50a representing the detection result is a signal 11
AD converter 26 for AD converting a and AD for signal 50a
Using the AD converter 27 for converting and the output P of both converters 26, 27, the measured object 3 as a relationship between the position P represented by the signal 50a and the thickness x of the object 3 represented by the signal 11a. This is a display unit including a CRT that displays the cross-sectional contour, a display unit main body 28 as a recording device, and the like, and the cross-sectional contour measuring apparatus 1 for a sheet-like object is configured by the above-described units except the measured object 3.

[0004]

Since the measuring apparatus 1 is constructed as described above, the delay of the thickness signal 11a as the time required for the above thickness calculation in the thickness calculation section 7 with respect to the radiation detection signal 6a. It is clear that the signal 11a input to the display unit 25 is delayed with respect to the position signal 50a by a delay time τ2 of about several hundreds milliseconds, which is almost equal to the time τ1, and as a result, the radiation 4 is changed to A shown in FIG. Object 3 having a uniform thickness x in this direction from the side B to the side B.
When forward scanning is performed, the display main body 28 displays the cross-sectional contour 29 of the DUT 3 shown in FIG. 4, and the position of the contour 29 is the length L1 with respect to the DUT 3. Only in the direction shown in the figure. Then, when the radiation 4 scans the DUT 3 from the side B toward the side A, the position of the contour 29 is displaced by the length L2 in the direction shown in FIG. Become. Then, it is clear that these positional deviations L1 and L2 depend on the scanning speed V of the radiation 4 and the above-mentioned delay time τ2, and FIG. 6 changes the speed V when τ1 = 140 ms in FIG. The results of the contour measurement experiment are shown. Therefore, when the contour 29 is obtained by the measuring device 1, the positional deviation of the contour 29 occurs as described above, and thus the device 1 has a problem that the cross-sectional contour of the DUT 3 cannot be accurately measured. .. The object of the present invention is to accurately match the position P represented by the position signal 50a input to the display unit 25 with the position of the measured portion 3 having the thickness x represented by the thickness signal 11a input at that time. In this way, the display unit 25 can accurately display the cross-sectional contour of the DUT 3.

[0005]

In order to achieve the above object, according to the present invention, 1) is arranged on one surface side of an object to be measured as a sheet-like object and faces the one surface of the object to be measured. A scanning line emitter that emits a scanning line as radiation or infrared rays in a beam shape substantially perpendicularly to the one surface, and detects the scanning line that passes through the object to be measured or is reflected from the object to be measured. A scanning line detector provided with a scanning line detector that outputs a scanning line detection signal according to a result, and a thickness calculation calculation for calculating the thickness of the object to be measured for the scanning line detection signal are performed. A thickness calculation unit that outputs a thickness signal indicating a thickness, and a scanning line scanning mechanism that relatively moves the scanning line detection unit and the measured object so that the scanning line scans the measured object. And the scanning line illuminates the DUT. A position detection unit that detects a spatial position as a position and outputs a position signal representing the detection result, and a delayed position signal by delaying the input position signal by a delay time equal to the time required for the thickness calculation operation. And a signal delay unit that outputs as
A section contour measuring device for a sheet-like object is configured to have a display section for displaying a section contour of the object to be measured using the thickness signal and the delay position signal, and 2) above 1). In the measuring apparatus described in 1, the scanning line scanning mechanism, the DUT driving mechanism that moves the DUT in a substantially linear and linear manner to the scanning line, a scanning line detection unit, a thickness calculation unit, and a signal delay unit. A measuring device side which moves at least the scanning line detection unit of the display unit by reciprocating substantially perpendicularly to the moving direction of the measured object by the measured object drive mechanism and the direction of the scanning line. A cross-sectional contour measuring device for a sheet-like object is configured so as to include a driving mechanism, and 3) in the measuring device described in the above item 2), the position detecting unit is a driving device-side driving mechanism of the scanning line detecting unit. A movable contact that is interlocked with movement, and And the rod-shaped electric resistor which fixed and the movable contact with respect to the mounting stand configured and the measuring device side drive mechanism the constant device is mounted slides,
A cross-sectional contour measuring device for a sheet-like object is configured to include a position signal output unit that converts the position of the movable contact with respect to one end of the rod-shaped electric resistor into a voltage and outputs a signal representing this voltage as a position signal. To do.

[0006]

With the above arrangement, in any of the sheet-shaped object cross-section contour measuring and measuring apparatuses, the thickness signal and the delay position signal, which are simultaneously input to the display section, are respectively caused by the operation of the signal delay section. It is clear that the thickness data of the measured object and the irradiation position data of the scanning line represent the thickness and the irradiation position detected by the scanning line detection unit and the position detection unit at substantially the same time. Therefore, it is possible to obtain a cross-sectional contour measuring device for a sheet-like object that accurately displays the cross-sectional contour of the measured object on the display unit.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram of an embodiment of the present invention, in which 19 is a movable contactor 20 which is fixedly coupled to a radiation source container 5b and is interlocked with the movement of the container 5b. In this way, a rod-shaped electric resistor 21 is fixed to the mount 16 to which the radiation detection unit drive mechanism 13 is attached by a means (not shown), and the contact 20 is slidable, and the resistor 21. An analog voltage signal 23a representing the voltage V is detected by detecting a voltage V between the DC power source 22 which is energized as shown in the figure, the illustrated end 21a of the resistor 21 and the contact 20.
In this case, since the detection unit 19 is configured as described above, the signal 23a is a signal indicating the position of the contact 20 with respect to the end 21a. Is clear, and also signal 2
It can be said that 3a is also a position signal representing a spatial position P as a position where the radiation 4 irradiates the DUT 3. Therefore, in FIG. 1, the power source 22 and the detector 23
And a position signal output unit 24 that outputs a position signal 23a as a voltage signal.
Is a position signal 2 that indicates the detection result of the position P and indicates the detection result.
It can be said that it outputs 3a. Then, at 30 each time the output signal 27a of the AD converter 27 is input, the previous signal input time t (n-1) and the signal 27a input at this time t (n-1) are input. The value p (n-1) of the irradiation position P of the radiation 4 and the time t (n-1)
Next, the signal input time tn, the irradiation position P value pn represented by the signal 27a input at this time tn, and the delay time τ1 are used to perform the calculation on the right side of the expression (2) (2). This is a third computing unit that outputs a signal 30a representing the value Pn on the left side of the equation. In this case, since the computing unit 30 operates as described above, the signal 30a becomes a signal delayed by the time τ1 from the signal 27a. It is clear that Pn = pn-[{pn-pn (n-1)} / {tn-t (n-1)}] τ1 ────────────────────── ──────────── (2) In FIG. 1, reference numeral 31 includes a converter 27 and an arithmetic unit 30. The arithmetic unit 30 performs the above-mentioned operation to input the position signal 23a. Is delayed by a delay time τ1 equal to the time required for the thickness calculation calculation performed by the thickness calculation unit 7, and is output as a delay position signal 30a.
A display unit corresponding to the display unit 25 shown in FIG. 3 and including a converter 26 and a display unit body 28, and 33 is a cross-sectional contour measuring position of a sheet-like object including the respective units shown in the drawing except the DUT 3. is there. Since the measuring device 33 is configured as described above, the thickness data of the DUT 3 and the irradiation position data of the radiation 4 which are respectively represented by the thickness signal 11a and the delay position signal 30a which are simultaneously input to the display unit 32. Clearly indicate the thickness x and the irradiation position P detected by the radiation detection unit 2 and the position detection unit 19 respectively at substantially the same time. Therefore, in the measuring apparatus 33, Therefore, the sectional outline of No. 3 is accurately displayed on the display unit main body 28. FIG. 2 shows an experimental result corresponding to FIG. 6 in an experiment in which the delay time τ1 used in the third computing unit 30 is 140 ms, and from this figure, the measuring device 33 enables accurate contour measurement. it is obvious.

In the above-described embodiment, the object 3 to be measured is a thin metal plate, the thickness is detected by using the radiation 3, and the transmission type thickness detecting mechanism such as the radiation detecting section 2 is adopted. In the present invention, the DUT 3 may be a metal plate other than a thin metal plate, a non-metal plate, or a synthetic resin film, the radiation 3 may be an infrared ray depending on the DUT, and a reflection type thickness detection mechanism. May be adopted. Then, although the radiation detection signal 6a is an analog signal in the above-described embodiment, the signal 6a may be a pulse train signal in the present invention. In that case, the thickness calculator 7 is The radiation intensity I is calculated by performing pulse counting on the signal 6a for a predetermined time and then the radiation dose rate is calculated, and the thickness signal 11a is finally output. Then, although the position detecting unit 19 is adopted in the above-described embodiment, the detecting unit 19 may be the above-described detecting unit 50 in the present invention. Further, in the above-described measuring device 33, the drive mechanism 13 drives only the radiation detection unit 2, but in the present invention, at least the detection unit 2, the calculation unit 7, the signal delay unit 31, and the display unit 32. The detector 2 may be driven by the mechanism 13.

[0009]

As described above, in the present invention, 1) a sheet-shaped object is arranged on one surface side of an object to be measured and directed toward the one surface of the object to be measured as a beam of radiation or infrared rays. A scanning line emitter that emits a scanning line substantially perpendicularly to the one surface and the scanning line that passes through or is reflected from the object to be measured and outputs a scanning line detection signal corresponding to the detection result. A scanning line detector provided with a scanning line detector, and a thickness for performing a thickness calculation operation for calculating the thickness of the object to be measured with respect to the scanning line detection signal and outputting a thickness signal representing the thickness. An arithmetic unit, a scanning line scanning mechanism that relatively moves the scanning line detection unit and the measured object so that the scanning line scans the measured object, and a spatial position as a position where the scanning line irradiates the measured object. The position is detected and a position signal indicating the detection result is output. A position detector that applies force, and a signal delay unit that delays the input position signal by a delay time equal to the time required for the thickness calculation operation and outputs the delayed position signal
A section contour measuring device for a sheet-like object is configured so as to have a display section for displaying a section contour of a measured object using a thickness signal and a delay position signal, and 2) the above item 1). In the measuring device, the scanning line scanning mechanism includes an object driving mechanism that moves the object to be measured substantially vertically and linearly to the scanning line, a scanning line detection unit, a thickness calculation unit, a signal delay unit, and a display unit. At least the scanning line detecting section is composed of a measuring device side driving mechanism that moves the scanning line detection unit reciprocally and substantially perpendicularly to the moving direction of the measured object by the measured object driving mechanism and the direction of the scanning line. A movable contactor that constitutes a cross-sectional contour measuring device for a sheet-like object, and 3) in the measuring device described in the above item 2), in which the position detecting unit is interlocked with the movement of the scanning line detecting unit by the measuring device side drive mechanism. And the measuring device, which constitutes the measuring device. A rod-shaped electric resistor, which is fixed to a mounting base to which a drive mechanism is attached and on which a movable contact slides, and the position of the movable contact with respect to one end of the rod-shaped electric resistor are converted into a voltage to represent this voltage. The cross-sectional contour measuring apparatus for a sheet-like object is configured so as to include a position signal output unit that outputs a signal as a position signal.

Therefore, with the above configuration, in any of the sheet-shaped object cross-section contour measuring apparatuses, the action of the signal delay unit causes the thickness signal and the delay position signal to be simultaneously input to the display unit. It is clear that the thickness data of the object to be measured and the irradiation position data of the scanning line respectively represent the thickness and irradiation position detected by the scanning line detection unit and the position detection unit at substantially the same time. Therefore, it is possible to obtain a cross-sectional contour measuring device for a sheet-like object that accurately displays the cross-sectional contour of the DUT.
As a result, the present invention has the effect of improving the reliability of the measurement result of the cross-sectional contour of the object to be measured and the efficiency of the survey on the contour.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of the present invention.

FIG. 2 is an explanatory view of an experimental result performed on the embodiment of the present invention shown in FIG.

FIG. 3 is a configuration diagram of a conventional cross-sectional contour measuring device for a sheet-like object.

FIG. 4 is a functional explanatory diagram of the measuring apparatus shown in FIG.

5 is a functional explanatory view of the measuring device shown in FIG. 3, which is different from FIG. 4;

FIG. 6 is an explanatory diagram of an experiment result performed on the measuring device shown in FIG.

[Explanation of symbols]

 2 Radiation detection part 3 Measured part 4 Radiation 5 Radiation emitter 6 Radiation detector 6a Radiation detection signal 7 Thickness calculation part 11a Thickness signal 12 Conveying roller (measurement device drive mechanism) 13 Radiation detection part drive mechanism (measurement device) Side drive mechanism) 14 Radiation scanning mechanism 16 Mounting base 19 Position detection unit 20 Movable contactor 21 Rod-shaped electric resistor 23a Position signal 24 Position signal output unit 29 Cross sectional contour 30a Delayed position signal 31 Signal delay unit 32 Display unit 33 Sheet-like object Cross-section contour measuring device

Claims (3)

[Claims] 1. A scan which is arranged on one surface side of an object to be measured as a sheet-like object and emits a scanning line as radiation or infrared rays in a beam shape toward the one surface of the object to be measured substantially perpendicularly to the one surface. A line emitter and a scanning line detector that detects the scanning line that passes through the object to be measured or is reflected from the object to be measured and outputs a scanning line detection signal according to the detection result are provided. A scanning line detection unit, a thickness calculation unit that performs a thickness calculation calculation for calculating the thickness of the object to be measured with respect to the scanning line detection signal, and outputs a thickness signal representing the thickness, and the scanning line A scanning line scanning mechanism that relatively moves the scanning line detection unit and the object to be measured so as to scan the object to be measured, and a spatial position as a position where the scanning line irradiates the object to be measured. The position signal that indicates the detection result is detected. A position detector that applies force, a signal delay unit that delays the input position signal by a delay time equal to the time required for the thickness calculation calculation, and outputs the delayed position signal as a delay position signal, and the thickness signal and the delay signal. And a display unit for displaying the cross-sectional contour of the object to be measured. 2. The measuring device according to claim 1, wherein the scanning line scanning mechanism moves the object to be measured linearly in a direction substantially perpendicular to the scanning line, a scanning line detecting portion, and a thickness. At least the scanning line detection unit of the calculation unit, the signal delay unit, and the display unit is arranged substantially perpendicular to the moving direction of the object to be measured by the object driving mechanism and the direction of the scanning line, and periodically. A cross-sectional contour measuring device for a sheet-like object, comprising: a measuring device-side drive mechanism that moves back and forth. 3. The measuring device according to claim 2, wherein the position detecting unit constitutes the measuring device and a movable contactor which is interlocked with the movement of the scanning line detecting part by the measuring device side drive mechanism. A rod-shaped electric resistor, which is fixed to a mounting base to which a side drive mechanism is attached and on which the movable contact slides, and the position of the movable contact with respect to one end of the rod-shaped electric resistor is converted into a voltage. A cross-sectional contour measuring device for a sheet-like object, comprising: a position signal output unit that outputs a signal representing a voltage as a position signal.