JPH0544589B2 - - Google Patents
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- Publication number
- JPH0544589B2 JPH0544589B2 JP59191509A JP19150984A JPH0544589B2 JP H0544589 B2 JPH0544589 B2 JP H0544589B2 JP 59191509 A JP59191509 A JP 59191509A JP 19150984 A JP19150984 A JP 19150984A JP H0544589 B2 JPH0544589 B2 JP H0544589B2
- Authority
- JP
- Japan
- Prior art keywords
- duct
- tank
- gas
- cooling device
- cryogenic cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 43
- 239000007788 liquid Substances 0.000 claims description 34
- 239000001307 helium Substances 0.000 claims description 29
- 229910052734 helium Inorganic materials 0.000 claims description 29
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 29
- 238000001816 cooling Methods 0.000 claims description 17
- 230000005855 radiation Effects 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 11
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-BJUDXGSMSA-N helium-3 atom Chemical compound [3He] SWQJXJOGLNCZEY-BJUDXGSMSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は極低温冷却装置に係り、特に狭くて密
閉に近い室内に設置して使用するのに好適な極低
温冷却装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a cryogenic cooling device, and particularly to a cryogenic cooling device suitable for installation and use in a narrow, nearly airtight room.
従来、極低温液体、例えば、液体ヘリウムを多
量に消費する極低温冷却装置においては液体ヘリ
ウムを貯蔵するクライオスタツトからのヘリウム
の蒸発量を極力小さくするために、被冷却物及び
液体ヘリウムを収納する容器を真空断熱し、さら
に容器の周囲を液体ヘリウムよりも蒸発温度の高
い液化ガス（例えば液体窒素等）で冷却されたふ
く射シールド板で囲うなどしているのが一般であ
る。また場合によつては液体ヘリウムの蒸発量を
０にするためにヘリウム冷凍機でクライオスタツ
ト内の液体ヘリウム容器を冷却したり、蒸発ヘリ
ウムガスを再凝縮したりする方式がとられてい
る。（米国特許第4223540号明細書、米国特許第
4277949号明細書、米国特許第4279127号明細書）
しかしながら、これら従来の極低温冷却装置に
おいては、いずれも通常の液体ヘリウム蒸発量を
低減するための対策のみで、異常時（例えば地
震、その他の原因でクライオスタツトが真空破壊
を起した場合には液体ヘリウム槽への熱侵入が正
常時の30〜40倍になるため瞬時に大量の液体ヘリ
ウムが蒸発する）の対策については特別に考慮さ
れていなかつた。
Conventionally, in cryogenic cooling equipment that consumes a large amount of cryogenic liquid, such as liquid helium, the object to be cooled and liquid helium are stored in order to minimize the amount of helium evaporated from a cryostat that stores liquid helium. Generally, the container is vacuum insulated and further surrounded by a radiation shield plate cooled with a liquefied gas (such as liquid nitrogen) that has a higher evaporation temperature than liquid helium. In some cases, in order to reduce the amount of evaporation of liquid helium to zero, a method is used in which a helium refrigerator is used to cool the liquid helium container in the cryostat, or the evaporated helium gas is recondensed. (U.S. Patent No. 4,223,540, U.S. Patent No.
4277949, U.S. Patent No. 4279127) However, in these conventional cryogenic cooling devices, only measures are taken to reduce the amount of liquid helium evaporated, and they cannot be used in abnormal situations (e.g. earthquakes, etc.). If the cryostat were to break its vacuum due to this cause, the amount of heat entering the liquid helium tank would be 30 to 40 times greater than normal, causing a large amount of liquid helium to evaporate instantly. Nakatsuta.
一方、最近は超電導応用機器の発展にともない
その機器を冷却するための極低温冷却装置を比較
的狭く、密閉に近い室に設置するケースが増して
きた。その場合に上記のように大量の液体ヘリウ
ムが異状蒸発を起すと、室内が蒸発ヘリウムガス
で充満し、作業者の安全がおびやかされる可能性
があつた。 On the other hand, with the recent development of superconducting application equipment, there has been an increase in the number of cases in which cryogenic cooling equipment for cooling the equipment is installed in relatively small, nearly airtight rooms. In that case, if a large amount of liquid helium were to evaporate abnormally as described above, the room would be filled with evaporated helium gas, potentially endangering the safety of workers.
本発明の目的は狭くて密閉に近い室に設置され
た極低温冷却装置のクライオスタツトで真空破壊
等による異状蒸発が起きたときに、大量の蒸発ガ
スを室内に充満させることなくすみやかに室外へ
誘導、排出できる極低温冷却装置を提供すること
にある。
The purpose of the present invention is to quickly move a large amount of evaporated gas outside without filling the room when abnormal evaporation occurs due to vacuum breakage in a cryostat of a cryogenic cooling device installed in a narrow, almost airtight room. The purpose of the present invention is to provide a cryogenic cooling device that can be guided and discharged.
本発明は被冷却体およびそれを冷却する極低温
液体を収納した真空断熱のクライオスタツト、該
クライオスタツト内を冷却する寒冷を供給するヘ
リウム冷凍機、蒸発ガスを誘導、排出する排出ダ
クト、クライオスタツトのガス放出管と排出ダク
トを連絡する連絡ダクト等によつて構成され、真
空破壊によつて大量に発生する液体槽からの蒸発
ガスを連絡ダクト及び排出ダクトを介して屋外に
排出するようにしたものである。
The present invention relates to a vacuum-insulated cryostat that houses an object to be cooled and a cryogenic liquid that cools it, a helium refrigerator that supplies cold to cool the inside of the cryostat, an exhaust duct that guides and discharges evaporated gas, and a cryostat. The system consists of a connecting duct, etc. that connects the gas discharge pipe and the exhaust duct, and the evaporative gas generated from the liquid tank in large quantities due to vacuum breakage is discharged outdoors through the connecting duct and the exhaust duct. It is something.
以下、本発明の一実施例を第１図によつて構成
から説明する。１は被冷却体、例えば、超電導マ
グネツト２、極低温液体、例えば、液体ヘリウム
３を収納した液体槽、４は液体槽１への熱侵入を
低減するため、冷媒、例えば、液体窒素５を収納
してふく射シールドの作用を行うふく射シールド
槽、６はふく射シールド槽４の周囲に貼付けた断
熱材（例えばスーパーインシユレーシヨン、以下
SIと略す）、７は外槽、８及び８′は真空空間、９
は真空バルブ、１０はガス放出管、１１は他のガ
ス放出管、１２はガス放出管１０に装着された安
全弁、１３は他のガス放出管１１に装着された安
全弁、１４はヘリウム冷凍機、１５はヘリウム冷
凍機で発生した寒冷をクライオスタツト１６の液
体槽１およびふく射シールド槽４に移送するため
のトランスフアチユーブ、１７はふく射シールド
槽４で蒸発した窒素ガスを再凝縮させる凝縮熱交
換器、１８は液体槽１で蒸発したヘリウムガスを
再凝縮させる凝縮熱交換器、１９は蒸発ガスを誘
導して室４０外に排出するための排出ダクト、２
０は排出ダクト１９とガス放出管１０及び他のガ
ス放出管１１とを連絡する連絡ダクトである。
Hereinafter, one embodiment of the present invention will be explained from the configuration with reference to FIG. Reference numeral 1 indicates a liquid tank containing a cooled object, such as a superconducting magnet 2, and a cryogenic liquid, such as liquid helium 3. Reference numeral 4 contains a refrigerant, such as liquid nitrogen 5, to reduce heat intrusion into the liquid tank 1. A radiation shield tank 6 acts as a radiation shield, and 6 is a heat insulating material pasted around the radiation shield tank 4 (for example, super insulation).
(abbreviated as SI), 7 is an outer tank, 8 and 8' are vacuum spaces, 9
10 is a vacuum valve, 10 is a gas release pipe, 11 is another gas release pipe, 12 is a safety valve attached to the gas release pipe 10, 13 is a safety valve attached to another gas release pipe 11, 14 is a helium refrigerator, 15 is a transfer tube for transferring the cold generated by the helium refrigerator to the liquid tank 1 and the radiation shield tank 4 of the cryostat 16, and 17 is a condensing heat exchanger for recondensing the nitrogen gas evaporated in the radiation shield tank 4. , 18 is a condensing heat exchanger for recondensing the helium gas evaporated in the liquid tank 1, 19 is an exhaust duct for guiding evaporated gas and discharging it outside the chamber 40, 2
0 is a communication duct that communicates the exhaust duct 19 with the gas discharge pipe 10 and other gas discharge pipes 11.
次に本実施例での作用について説明すると、ク
ライオスタツト１６の真空空間８，８′を十分な
真空になるまで真空ポンプ（図示せず）で引いた
後真空バルブ９を閉じて、ふく射シールド槽４及
び液体槽１にそれぞれ液体窒素５、液体ヘリウム
３を充てんする。それと同時にヘリウム冷凍機１
４を運転し、トランスフアチユーブ１５を経由し
て凝縮熱交換器１７，１８に寒冷を送る。 Next, the operation of this embodiment will be explained. After the vacuum spaces 8 and 8' of the cryostat 16 are drawn with a vacuum pump (not shown) until a sufficient vacuum is reached, the vacuum valve 9 is closed and the radiation shield tank is closed. 4 and liquid tank 1 are filled with liquid nitrogen 5 and liquid helium 3, respectively. At the same time, helium refrigerator 1
4 is operated to send cold air to the condensing heat exchangers 17 and 18 via the transfer tube 15.
凝縮熱交換器１７，１８が正常に作用しはじめ
るとふく射シールド槽４及び液体槽１内の蒸発ガ
スは再凝縮されるので各々の槽内圧力はほぼ一定
に維持され、安全弁１２及び１３は閉じた状態を
保たれる。 When the condensing heat exchangers 17 and 18 start functioning normally, the evaporated gas in the radiation shield tank 4 and liquid tank 1 is recondensed, so the pressure inside each tank is maintained almost constant, and the safety valves 12 and 13 are closed. The condition is maintained.
このような状況の下で超電導マグネツト２を使
つて実験中に、地震及び操作ミス等が原因でクラ
イオスタツト１６が大きな真空破壊を起した場
合、真空空間８及び８′の圧力は瞬時に（厳密に
は破壊の状況によつて異なるが数秒から数十秒
で）10-7Torrから大気圧760Torrにまで上昇す
る。そして、それにともなつて液体槽１への熱侵
入は正常時の30〜40倍に増加するので凝縮熱交換
器１７，１８での再凝縮能力をはるかにこえ、
各々の槽内圧力が上昇しはじめる。槽内圧力が一
定限度をこえると安全弁１２，１３からヘリウム
ガス及び窒素ガスが噴出する。真空破壊時のガス
噴出量は例えば、表面積５〜６m2、液体槽１の内
容積100程度のクライオスタツト１６で30秒間
に100の液体ヘリウムが噴出する程であり、こ
れが常温のヘリウムガスになると約70m3になるの
で排出しないと室４０内はヘリウムガスが充満す
ることになるが、この場合、連絡ダクト２０、排
出ダクト１９を経由して室４０外に排出される。 If the cryostat 16 suffers a major vacuum break due to an earthquake or operational error during an experiment using the superconducting magnet 2 under these circumstances, the pressure in the vacuum spaces 8 and 8' will instantly (strictly The atmospheric pressure rises from 10 -7 Torr to 760 Torr (in a few seconds to several tens of seconds, depending on the circumstances of the rupture). As a result, heat intrusion into the liquid tank 1 increases by 30 to 40 times the normal amount, far exceeding the recondensation capacity of the condensing heat exchangers 17 and 18.
The pressure inside each tank begins to rise. When the pressure inside the tank exceeds a certain limit, helium gas and nitrogen gas are ejected from the safety valves 12 and 13. The amount of gas ejected when the vacuum is broken is, for example, from a cryostat 16 with a surface area of 5 to 6 m 2 and an internal volume of liquid tank 1 of about 100, 100 ml of liquid helium is ejected in 30 seconds, and if this becomes helium gas at room temperature, Since the volume is about 70 m 3 , the chamber 40 will be filled with helium gas if it is not discharged, but in this case, it is discharged to the outside of the chamber 40 via the communication duct 20 and the discharge duct 19 .
本実施例ではヘリウム冷凍機１４、凝縮熱交換
器１７，１８で蒸発ガスを再凝縮させるケースに
ついて述べたが、これらヘリウム冷凍機１４よ凝
縮熱交換器１７，１８がない場合でも蒸発ガス量
が増すのみで基本的には同じ作用である。 In this embodiment, a case has been described in which the evaporated gas is recondensed using the helium refrigerator 14 and the condensing heat exchangers 17 and 18, but even if the helium refrigerator 14 and the condensing heat exchangers 17 and 18 are not provided, the amount of evaporated gas is It basically has the same effect, only increasing.
このように、本実施例によれば超電導機器冷却
用のクライオスタツトで大きな真空破壊が起つて
も噴出したヘリウムガスや窒素ガスは連絡ダク
ト、排出ダクトを経由して室外に排出されるの
で、室内に充満することはなく、したがつて作業
者の安全が保たれるという効果がある。 In this way, according to this embodiment, even if a large vacuum breakdown occurs in the cryostat used to cool superconducting equipment, the spouted helium gas and nitrogen gas will be discharged outdoors via the communication duct and the exhaust duct, so that the This has the effect of ensuring the safety of workers.
第２図は本発明の第２の実施例を示すもので、
２１はガス放出管１０の安全弁１２の付近に取付
けられた圧力センサー、２２は同様に他のガス放
出管１１の安全弁１３の付近に取付けられた圧力
センサー、２３は圧力センサー２１，２２の信号
をコントローラ２４に伝達する信号ケーブル、２
５はコントローラ２４の指令によつて運転される
排出フアンである。 FIG. 2 shows a second embodiment of the present invention.
21 is a pressure sensor installed near the safety valve 12 of the gas discharge pipe 10, 22 is a pressure sensor similarly installed near the safety valve 13 of another gas release pipe 11, and 23 is a pressure sensor that receives the signals of the pressure sensors 21 and 22. A signal cable for transmitting to the controller 24, 2
Reference numeral 5 denotes a discharge fan operated according to commands from the controller 24.
第１図に示した本発明の一実施例との相違は圧
力センサー２１，２２によつて異常蒸発による各
槽内圧力の急上昇をはやく検知し、安全弁１２，
１３が噴出する直前に検知した信号を信号ケーブ
ル２３を介してコントローラ２４に伝達し、コン
トローラ２４の動作で排出フアン２５を始動す
る。 The difference from the embodiment of the present invention shown in FIG.
A signal detected just before the ejection of the exhaust fan 13 is transmitted to the controller 24 via the signal cable 23, and the discharge fan 25 is started by the operation of the controller 24.
本実施例によれば安全弁が開く前に排出フアン
が運転されるので、排気ダクトの内部は負圧にな
つており、排気ダクトが少しぐらい長くても、噴
出したガスが排出されにくいということなく、ス
ムーズに排出されるという更に他の効果がある。 According to this embodiment, the exhaust fan is operated before the safety valve opens, so the inside of the exhaust duct is under negative pressure, so even if the exhaust duct is a little long, the ejected gas will not be difficult to exhaust. , it has another effect of being smoothly discharged.
第３図は本発明の第３の実施例を示すもので、
排気ダクト１９の一部を２重構造にして内ダクト
２７の中に排出フアン２５を設置し、内ダクト２
７と外ダクト２６の間を排出ガスが通るようにし
た。この構造では本発明の第２の実施例を示す第
２図の圧力センサー２１，２２の信号でコントロ
ーラ２４が排出フアン２５を動作させると室４０
内の空気が点線で示すように通気孔２８を通つて
排出される。それによつてエジエクター部２９が
負圧になり、排出ダクト１９の中のガスを実線矢
印のように吸引する。 FIG. 3 shows a third embodiment of the present invention,
A part of the exhaust duct 19 is made into a double structure, and an exhaust fan 25 is installed inside the inner duct 27.
Exhaust gas is allowed to pass between 7 and the outer duct 26. In this structure, when the controller 24 operates the exhaust fan 25 based on the signals from the pressure sensors 21 and 22 in FIG. 2 showing the second embodiment of the present invention, the chamber 40
The air inside is exhausted through the vent hole 28 as shown by the dotted line. As a result, the ejector section 29 becomes a negative pressure, and the gas inside the exhaust duct 19 is sucked in as shown by the solid arrow.
本実施例によれば排出フアンが直後、極低温の
噴出ガスにさらされることはないので、排出フア
ンが極低温に冷却されたり固着などによつて停止
する心配がなくスムーズに噴出ガスの排出ができ
るという更に他の効果がある。 According to this embodiment, the exhaust fan is not immediately exposed to the extremely low temperature of the blown gas, so there is no need to worry about the exhaust fan being cooled to an extremely low temperature or stopping due to sticking, etc., and the blown gas can be smoothly discharged. There is another effect that can be done.
第４図は本発明の第４の実施例を示すもので内
ダクト２７及び通気孔２８に断熱材３０を貼付け
たものである。本実施例によれば内ダクトの内側
を流れる室内空気が内ダクトを介して冷却されて
間接的に排出フアンが冷却されるのを防止できる
という更に他の効果がある。 FIG. 4 shows a fourth embodiment of the present invention, in which a heat insulating material 30 is attached to the inner duct 27 and the ventilation hole 28. According to this embodiment, there is a further effect that indoor air flowing inside the inner duct can be cooled through the inner duct and the exhaust fan can be prevented from being indirectly cooled.
本発明によれば、狭くて密閉に近い室に設置さ
れた極低温冷却装置のクライオスタツトで真空破
壊等による異常蒸発が発生しても、ガス放出管の
完全弁から噴出したガスは連絡ダクト及び排出ダ
クトを介してすみやかに室外に排出されるので、
室内が噴出されたガスによつて充満されるという
危険性が防止できるという効果がある。
According to the present invention, even if abnormal evaporation occurs due to vacuum breakage or the like in a cryostat of a cryocooler installed in a narrow, almost airtight room, the gas ejected from the complete valve of the gas discharge pipe will be transferred to the connecting duct and Since it is quickly discharged outside through the discharge duct,
This has the effect of preventing the danger of the room being filled with the ejected gas.
第１図は、本発明による極低温冷却装置の一実
施例を示す系統図、第２図は、本発明による極低
温冷却装置の第２の実施例を示す系統図、第３図
は、本発明による極低温冷却装置の第３の実施例
を示す排出ダクトの部分拡大縦断面図、第４図
は、本発明による極低温冷却装置の第４の実施例
を示す排出ダクトの部分拡大縦断面図である。
１……液体槽、４……ふく射シールド槽、７…
…外槽、８，８′……真空空間、１０……ガス放
出管、１１……他のガス放出管、１６……クライ
オスタツト、１９……排出ダクト、２０……連絡
ダクト、４０……室。
FIG. 1 is a system diagram showing one embodiment of the cryogenic cooling device according to the present invention, FIG. 2 is a system diagram showing a second embodiment of the cryogenic cooling device according to the present invention, and FIG. FIG. 4 is a partially enlarged longitudinal cross-sectional view of a discharge duct showing a third embodiment of the cryogenic cooling device according to the invention; FIG. It is a diagram. 1...Liquid tank, 4...Radiation shield tank, 7...
... Outer tank, 8, 8' ... Vacuum space, 10 ... Gas discharge pipe, 11 ... Other gas discharge pipes, 16 ... Cryostat, 19 ... Discharge duct, 20 ... Connection duct, 40 ... Room.
Claims (1)
と、該液体槽を囲んだふく射シールド槽と、前記
液体槽及びふく射シールド槽を収納した外槽とよ
り構成され、各槽間の空間を真空断熱したクライ
オスタツトを有し、該クライオスタツトの液体槽
上部にそれぞれ設けられ、窒素ガス及びヘリウム
ガスを再凝縮させる凝縮熱交換器と、該それぞれ
の凝縮熱交換器に連通し他端をヘリウム冷凍機に
連通したトランスフアチユーブを有し、前記クラ
イオスタツトの液体槽に連通せるガス放出管及び
ふく射シールド槽に連通せる他のガス放出管を備
えた極低温冷却装置において、 前記該極低温冷却装置を設置した室内から室外
に通ずる排出ダクトを設け、該排出ダクトと前記
ガス放出管及び前記他のガス放出管とを連絡ダク
トで連結し、前記ガス放出管及び前記他のガス放
出管のうちの少なくとも一方に槽内圧力の急上昇
を検知する圧力センサーを取付けるとともに、前
記排出ダクト内に排出フアンを備え、該排出フア
ンの操作を圧力センサーからの検知信号に応じて
コントローラで指令するように構成したことを特
徴とする極低温冷却装置。 ２ 前記排出ダクトの一部を２重構造にし、内部
ダクトの中に排出フアンを備え、内ダクトと外ダ
クトの間を排出ガス通路にするとともに内ダクト
と前記室内を連通する通気孔を設けたことを特徴
とする特許請求の範囲１記載の極低温冷却装置。 ３ 前記内ダクト及び前記通気孔に断熱材を貼付
けたことを特徴とする特許請求の範囲２記載の極
低温冷却装置。[Claims] 1. Consisting of a liquid tank for storing and cooling an object to be cooled, a radiation shield tank surrounding the liquid tank, and an outer tank housing the liquid tank and the radiation shield tank, It has a cryostat in which the space between each tank is vacuum insulated, and a condensing heat exchanger that is installed above the liquid tank of the cryostat and recondenses nitrogen gas and helium gas, and a condensing heat exchanger that recondenses nitrogen gas and helium gas A cryogenic cooling device having a transfer tube that communicates with the helium refrigerator at the other end, and a gas discharge tube that communicates with the liquid tank of the cryostat and another gas discharge tube that communicates with the radiation shield tank. , providing an exhaust duct leading from the room in which the cryogenic cooling device is installed to the outside; connecting the exhaust duct and the gas discharge pipe and the other gas discharge pipe with a communication duct; A pressure sensor is attached to at least one of the gas discharge pipes for detecting a sudden increase in the pressure inside the tank, and a discharge fan is provided in the discharge duct, and a controller controls the operation of the discharge fan according to a detection signal from the pressure sensor. A cryogenic cooling device characterized in that it is configured to issue commands. 2 A part of the exhaust duct has a double structure, an exhaust fan is provided in the inner duct, an exhaust gas passage is provided between the inner duct and the outer duct, and a ventilation hole is provided to communicate the inner duct and the room. The cryogenic cooling device according to claim 1, characterized in that: 3. The cryogenic cooling device according to claim 2, wherein a heat insulating material is attached to the inner duct and the ventilation hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19150984A JPS6170346A (en) | 1984-09-14 | 1984-09-14 | Cryogenic cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19150984A JPS6170346A (en) | 1984-09-14 | 1984-09-14 | Cryogenic cooling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6170346A JPS6170346A (en) | 1986-04-11 |
| JPH0544589B2 true JPH0544589B2 (en) | 1993-07-06 |
Family
ID=16275834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19150984A Granted JPS6170346A (en) | 1984-09-14 | 1984-09-14 | Cryogenic cooling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6170346A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0625697U (en) * | 1992-09-04 | 1994-04-08 | 日本酸素株式会社 | Liquefied gas storage tank for immersion cooling |
-
1984
- 1984-09-14 JP JP19150984A patent/JPS6170346A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6170346A (en) | 1986-04-11 |
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