JPH0543406Y2 - - Google Patents
Info
- Publication number
- JPH0543406Y2 JPH0543406Y2 JP14869888U JP14869888U JPH0543406Y2 JP H0543406 Y2 JPH0543406 Y2 JP H0543406Y2 JP 14869888 U JP14869888 U JP 14869888U JP 14869888 U JP14869888 U JP 14869888U JP H0543406 Y2 JPH0543406 Y2 JP H0543406Y2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film membrane
- measured
- modulus
- young
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 90
- 239000012528 membrane Substances 0.000 claims description 86
- 238000004364 calculation method Methods 0.000 claims description 8
- 238000005259 measurement Methods 0.000 description 18
- 239000010408 film Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 230000006837 decompression Effects 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14869888U JPH0543406Y2 (ru) | 1988-11-15 | 1988-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14869888U JPH0543406Y2 (ru) | 1988-11-15 | 1988-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0269745U JPH0269745U (ru) | 1990-05-28 |
| JPH0543406Y2 true JPH0543406Y2 (ru) | 1993-11-01 |
Family
ID=31420252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14869888U Expired - Lifetime JPH0543406Y2 (ru) | 1988-11-15 | 1988-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543406Y2 (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015140863A1 (ja) * | 2014-03-17 | 2015-09-24 | 三菱航空機株式会社 | 航空機の強度試験装置および強度試験方法 |
-
1988
- 1988-11-15 JP JP14869888U patent/JPH0543406Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015140863A1 (ja) * | 2014-03-17 | 2015-09-24 | 三菱航空機株式会社 | 航空機の強度試験装置および強度試験方法 |
| JP2015175789A (ja) * | 2014-03-17 | 2015-10-05 | 三菱航空機株式会社 | 航空機の強度試験装置および強度試験方法 |
| US10067044B2 (en) | 2014-03-17 | 2018-09-04 | Mitsubishi Aircraft Corporation | Aircraft strength testing apparatus and aircraft strength testing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0269745U (ru) | 1990-05-28 |
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