JPH0542990A - Method for supplying special material gas - Google Patents

Abstract

PURPOSE:To supply a special material gas stably and easily by providing a constant temperature and temperature gradient in a method for supplying the special material gas and particularly the gas low in vapor pressure from outside. CONSTITUTION:A special material gas pipe 6 is laid through an insulating duct 4 having fire dampers 7 provided between an outdoor storage shed 3 and a semiconductor manufacturing equipment 5 and air is normally supplied from the side of a clean room 10. The temperature of the special material gas pipe 6 is made the same as that of the clean room to supply the special material gas on a stable basis.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for supplying a special material gas, and more particularly, to a method for supplying a special material gas in piping for connecting devices.

[0002]

2. Description of the Related Art A conventional method for supplying a special material gas is shown in FIG.
As shown in FIG. 3, the gas cylinder 1, the cylinder cabinet 2 and the semiconductor device manufacturing equipment 5 installed in the outdoor storage 3 are connected by the special material gas pipe 6 made of stainless steel such as 1/4 inch or 3/8 inch. ing. Particularly, in the case of the special material gas pipe 6 having a high danger potential, the special material gas pipe 6 is made of vinyl chloride or stainless steel in order to prevent gas leakage and atmospheric diffusion in the transition pipe portion between the outdoor storage 3 and the clean room 10. It was installed inside and exhausted to the cylinder cabinet 2 side at all times by exhausting the casing on the cylinder cabinet 2 side. Similarly, in some cases, only the joint or weld of the special material gas pipe 6 is duplicated.

As a special case, when a cryogenic fluid such as liquid nitrogen is fed, a vacuum double pipe is used to prevent condensation of water in the atmosphere on the surface of the air feeding pipe. In some cases, a vacuum was used to shut off the cryogenic fluid from the atmosphere.

[0004]

In this conventional method for supplying a special material gas, the special material gas pipe between the outdoor storage and the clean room is affected by the outside air temperature (especially low temperature), and the liquefied gas and vapor pressure are affected. When a special material gas with a low temperature is sent to the semiconductor device manufacturing equipment, there is a problem that the gas cannot be stably supplied due to liquefaction, decomposition or composition change in the part affected by the outside temperature. It was

Further, since the vacuum double pipe has a one-to-one correspondence with the special material gas pipe, it is difficult to construct the pipe, and the vacuum equipment and the like are enormous and the cost becomes high.

[0006]

The method of supplying a special material gas according to the present invention is a method in which several special material gas pipes between an outdoor storage and a clean room are penetrated into a heat-insulated stainless duct and the outdoors. The storage room and the clean room are each divided by a fireproof damper, and the air whose temperature is adjusted by the differential pressure from the clean room side (about 25 ± 4 ° C) is passed through the stainless duct to the outdoor storage room and the outdoor storage room is also air conditioner. The temperature is adjusted at, but this temperature adjustment is set lower than the room temperature of the clean room.

With respect to the temperature setting, the temperature of the outdoor storage is set to 0 to 5 ° C. lower than the temperature of the clean room, and the exhaust speed is balanced and the wind speed is set so that the temperature in the duct made of stainless steel is also in this range.

[0008]

The present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of an embodiment of the present invention.
In the supply of the special material gas, first, the supplied special material gas cylinder 1 is mounted in a cylinder cabinet 2 having gas supply performance (pressure reducing valve, automatic valve and various interlocks). This cylinder cabinet 2
Is installed in an outdoor store 3 whose temperature is controlled by an air conditioner, and the cylinder cabinet 2 is placed in the outdoor store 3 from below.
The air inside is taken in and treated through an exhaust duct in an exhaust gas treatment device such as a scrubber.

The special material gas is sent from the gas cylinder 1 to the semiconductor element manufacturing facility 5 through the special material gas pipe 6, which is connected by the heat insulation duct 4. A fireproof damper 7 is provided in each of the heat retaining ducts, and the storage 3 and the clean room 10 can be partitioned. Normally, air-conditioned air in the clean room 10 (25 ° C. ± 4
(° C.) is supplied to the storage 3 through the heat insulation duct 4. The storage 3 is air-conditioned at a temperature lower than that of the clean room 10 and has a slight temperature gradient.

In the unlikely event of a fire or gas leak, a sensor (not shown) detects an accident and the fire dampers 7 are operated to shut off each room.

As another example of the transition duct 4, a fire protection damper 7 may be provided in the main pipe portion of the duct 4 as shown in FIG.

[0013]

As described above, according to the present invention, the conditioned air is blown from the receiving side of the special material gas to the supplying side, so that the special material gas is always kept at a constant temperature and has a slight temperature gradient. Since it has the special material gas, it has the result that the special material gas can always be stably supplied.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention.

FIG. 2 is a sectional view showing a modified example of the present invention.

FIG. 3 is a sectional view showing a conventional example.

[Explanation of symbols]

 1 Gas Cylinder 2 Cylinder Cabinet 3 Storage Cabinet 4 Heat Insulation Duct 5 Semiconductor Device Manufacturing Equipment 6 Special Material Gas Pipe 7 Fire Prevention Damper 10 Clean Room

Claims (2)

[Claims] 1. A method for supplying / supplying a material gas used for semiconductor device manufacturing or the like from a storage or the like to a semiconductor device manufacturing facility, wherein a gas pipe installed between the store and the semiconductor device manufacturing facility. And a fire protection damper installed in the gas pipe for isolating the storage and the semiconductor device manufacturing equipment, and a duct for making the atmosphere in the gas pipe constant, Method. 2. The method for supplying a special material gas according to claim 1, wherein the gas pipe is surrounded by the duct, and the material gas is sent to the semiconductor device manufacturing facility side through the duct.