JPH0540949U - Image processing device - Google Patents

Abstract

(57) [Abstract] [Purpose] To improve the calibration accuracy between videos when performing image processing by performing divided shooting with multiple CCD cameras. [Configuration] CCD for inputting an image and outputting as an image signal
A camera 5, a signal conversion circuit 4 for inputting, encoding and outputting a video signal, and a storage circuit 3 for storing encoded values.
And an arithmetic circuit 2 for arithmetically operating the numerical values stored in the memory circuit 3.
And XY for moving the object to be photographed by the CCD camera 5
The stage 6, a pulse generator 7 that generates a number of pulses proportional to the amount of movement of the XY stage 6, a motor control circuit 8 that controls the XY stage 6, and the number of pulses that the pulse generator 7 outputs are counted. It comprises a counting circuit 9, a signal conversion circuit 4, an arithmetic circuit 2, an electric motor control circuit 8, and a central processing unit 1 for controlling the counting circuit 9.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an image processing device, and more particularly, to an image processing device by divided photographing.

[0002]

[Prior Art]

 2. Description of the Related Art Conventionally, as shown in FIG. 2, this type of image processing apparatus has a CCD camera 5 for inputting an image and outputting it as an image signal, a signal conversion circuit 4 for inputting an image signal, encoding and outputting the same, and an encoding unit. The storage circuit 3 that stores the stored numerical values, the arithmetic circuit 2 that calculates the numerical values stored in the storage circuit 3, the uniaxial stage 10 that moves the object to the imaging range of the CCD camera 5, and the uniaxial stage 10 are controlled. A sequence controller 12, a central processing unit 1 for controlling the central processing unit 1 and the sequence controller 12, and a central processing unit 1 for controlling the signal conversion circuit 4, the arithmetic circuit 2, and the PI / O circuit 11 are provided. is doing.

[0003]

[Problems to be solved by the device]

 As in the case of the conventional configuration, in the divided photographing with the three separate uniaxial stages 10, it is not only difficult to accurately calibrate the positional relationship between the images photographed by one CCD camera 5, but also the three photographing units are used. It is more difficult to calibrate the positional relationship between images captured by the CCD camera 5 and the measurement accuracy is deteriorated.

An object of the present invention is to provide an image processing device that facilitates calibration between images captured by one CCD camera and three CCD cameras.

[0005]

[Means for Solving the Problems]

 In order to achieve the above object, in an image processing apparatus according to the present invention, a CCD camera for inputting an image and outputting it as an image signal, a signal conversion circuit for inputting an image signal, encoding and outputting the image signal, and an encoder A memory circuit that stores numerical values, an arithmetic circuit that calculates the numerical values stored in the memory circuit, an XY stage that moves an object to be photographed by a CCD camera, and a number of pulses that is proportional to the amount of movement of the XY stage Pulse generator, a motor control circuit for controlling the XY stage, a counting circuit for counting the number of pulses output by the pulse generator, a signal conversion circuit, an arithmetic circuit, a motor control circuit, a central processing for controlling the counting circuit And a device. It is a thing.

[0006]

[Action]

 Calibration between images is facilitated by using one XY stage and installing three CCD cameras on the XY stage.

[0007]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing an embodiment of the present invention.

Referring to FIG. 1, the image processing apparatus of the present invention includes a CCD camera 5 for inputting an image and outputting it as an image signal, a signal conversion circuit 4 for inputting an image signal, encoding and outputting the image signal, and an encoded signal. A memory circuit 3 for storing numerical values, an arithmetic circuit 2 for arithmetically operating the numerical values stored in the memory circuit 3, an XY stage 6 for moving an object to be photographed by the CCD camera 5, and a proportional movement amount of the XY stage 6. A pulse generator 7 for generating the same number of pulses, a motor control circuit 8 for controlling the XY stage 6, a counting circuit 9 for counting the number of pulses output by the pulse generator 7, a signal conversion circuit 4, and an arithmetic operation. A circuit 2, a motor control circuit 8, and a central processing unit 1 for controlling the counting circuit 9 are provided.

The object 100 to be inspected on the XY stage 6 is moved by the electric motor control circuit 8 into the photographing range of the three CCD cameras 5 by the movement of the XY stage 6.

Next, an image input command is issued from the central processing unit 1 to the signal conversion circuit 4, an image is input from the CCD camera 5, and is stored in the storage circuit 3 through the signal conversion circuit 4.

At the same time, the number of pulses output from the pulse generator 7 is counted by the counting circuit 9, and the value is read by the central processing unit 1.

With respect to the movement of the XY stage 6 described above, after the reading from the counting circuit 9 is repeated a specified number of times, the numerical value in the storage circuit 3 is calculated by the arithmetic circuit 2 and the result is output to the central processing unit 1. Finally, the count value read from the counting circuit 9 is used to convert the numerical value obtained by the divided photographing into the same format as that obtained when one photographing is performed.

[0013]

[Effect of the device]

 As described above, according to the present invention, one XY stage is provided, and three CCD cameras are installed on the XY stage. Therefore, it is easy to calibrate the images captured by the three CCD cameras. By counting the amount of movement of the stage, it is possible to easily calibrate the images captured by one CCD camera.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention.

FIG. 2 is a configuration diagram showing a conventional example.

[Explanation of symbols]

 1 central processing unit 2 arithmetic circuit 3 memory circuit 4 signal conversion circuit 5 CCD camera 6 XY stage 7 pulse generator 8 electric motor control circuit 9 counting circuit 10 uniaxial stage 11 PI / O circuit 12 sequence controller 100 test object

Claims (1)

[Scope of utility model registration request] 1. A CCD camera for inputting an image and outputting it as an image signal, a signal conversion circuit for inputting an image signal, encoding and outputting the same, a storage circuit for storing the encoded numerical value, and a storage circuit Controls the calculation circuit that calculates the numerical values, the XY stage that moves the test object within the imaging range of the CCD camera, the pulse generator that generates the number of pulses proportional to the movement amount of the XY stage, and the XY stage An image processing apparatus having a motor control circuit, a counting circuit for counting the number of pulses output from a pulse generator, and a central processing unit for controlling the signal conversion circuit, the arithmetic circuit, the motor control circuit, and the counting circuit. ..