JPH0540383Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a vacuum valve used, for example, in high vacuum or ultra-high vacuum areas.

[Prior Art] Conventionally, in this type of vacuum valve, a disk is set to a fully closed position, an intermediate position, or a fully open position by operating a stem by operating a handle, and the stem is operated to mechanically transmit the operating force of the handle. Some have a configuration in which a bellows is used as the shaft seal.

[Problems to be solved by the invention] However, in the case of the vacuum valve of the conventional structure described above, the so-called bellows valve, it is necessary to design the life of the bellows based on the stroke of the disk. , the length of the bellows has to be increased, which not only necessarily increases the size of the valve itself, but also increases the variation in the lifespan of the bellows.

In addition, since the disk is operated mechanically by the stem, it requires a dynamic seal and is unreliable for use in high vacuum or ultra-high vacuum areas. Because a bellows is used in the valve, the flow of fluid within the valve cannot be made in a straight line with the piping, which poses a problem in that the flow resistance of the fluid used increases.

[Purpose of the invention] The present invention was made under the above circumstances, and its purpose is to create a vacuum that reduces the flow resistance of the fluid used and is lightweight and compact. The purpose is to provide a valve.

[Means for Solving the Problems] That is, the vacuum valve according to the present invention includes a cylindrical body body having an inlet at one end in the axial direction and an outlet at the center of the other end in the axial direction, and a shaft on the inner periphery of the body body. A disk disposed so as to be movable in a direction and comes into contact with and separates from a valve seat on the outer periphery of the outflow port, a communication hole opened in the disk and communicating between the inflow port side and the outer periphery of the valve seat, and a communication hole in the body main body. a slider provided on an outer periphery so as to be freely movable in the axial direction; a plurality of first magnets protruding from the outer periphery of the disk at appropriate axial intervals and having axially adjacent magnetic poles different from each other; and an inner periphery of the slider. a second magnet fixed to the surface and facing each of the first magnets with different magnetic poles through the body main body;
and a magnet for controlling the axial movement of the slider toward the valve seat when the disc is in the valve closing position to maintain the opposing state of each of the first magnets and each of the second magnets to each other. It is equipped with a stopper.

[Function] In this vacuum valve, the second magnet provided on the slider on the outer periphery of the body and the first magnet provided on the disk on the inner periphery of the body are attracted between magnetic poles facing each other in the radial direction. A force acts, and a repulsive force acts between the radially opposing magnetic pole and the adjacent magnetic pole opposite the lotus, so by moving the slider in the axial direction, the disk follows in the axial direction. , moves toward and away from the valve seat. At this time,
Since a fluid reservoir is formed between the gaps between the first magnets on the outer circumferential surface of the disk and the inner circumferential surface of the main body, the disk can be smoothly moved in the axial direction.

In addition, if the disk comes into contact with the valve seat and the communication between the inlet and outlet sides of the body main body, which were communicating through the communication hole of the disk and the space on the outer circumferential side of the valve seat, is cut off, at that point Since the slider is also restricted from moving in the axial direction toward the valve seat by the stopper, the first
The opposing relationship between the magnet group and the second magnet group is maintained.

[Embodiment] Hereinafter, the present invention will be described in detail with reference to an illustrated embodiment.

As shown in FIG. 1, numeral 1 in the figure is a main body constituting a vacuum valve according to the present invention. A flow path 2 for the fluid W to be used is formed along the axial direction in the main body 1, and a disk 3 is provided in the flow path 2.
is provided slidably along the axial direction. This disk 3 transfers the working fluid W flowing in from the inlet 2A side of the flow path 2 to the communication port 2B side.
It has a communication hole 4 that communicates with 1 and guides the flow out.
In addition, the communication port 21 can be sealed via a soft sheet 5 provided on the end surface on the outlet 2B side.

On the outer peripheral surface of the disk 3, a plurality of first magnets 6 having magnetic poles (N) and (S) arranged alternately are provided along the axial direction. A slider 7 is provided on the outer periphery of the body 1 so as to be slidable along the axial direction, and a first slider 7 provided on the outer periphery of the disk 3 is provided on the inner periphery of the slider 7. A plurality of second magnets 8... having magnetic poles (N) and (S) alternately arranged so as to attract and repel each other are provided in correspondence with the magnets 6... along the axial direction. 9 in the figure is the inlet port 2 of the body main body 1.
This is a flange member that can be connected to a fluid piping system (not shown) that is joined to the A side via a gasket 10.

A stopper 1A is formed on the outer periphery of the body main body 1 and protrudes in correspondence with the valve seat 2C on the outer periphery of the opening of the outlet 2B. Slider 7 when
This restricts the axial movement of the valve seat 2C toward the valve seat 2C, that is, the rightward movement in the figure.

The first magnet 6 and the second magnet 8 attract each other with different magnetic poles facing each other in the radial direction, and repel each other with the same magnetic poles opposite to each other in the radial direction. When the disk 3 is moved, the magnetic attraction and repulsion forces described above cause the disk 3 to
moves to follow the slider 7 so as to maintain the correspondence between each first magnet 6 and each second magnet 8. At this time, a fluid reservoir δ is formed between the gaps between the first magnets 6 on the outer circumferential surface of the disk 3 and the inner circumferential surface of the main body 1, so that the disk 3 movement is carried out smoothly. In the illustrated state in which the disk 3 of the slider 7 in the right direction in the figure is in contact with the valve seat 2C, the slider 7 is also restricted from moving in the right direction in the figure by the stopper 1A at the same time. The correspondence relationship between the first magnet 6 and the second magnet 8 is maintained.

In the above embodiment, the sliding operation means for the slider 7 that causes the disk 3 to follow and slide by magnetic force may be manual operation, handle operation using a gear mechanism, drive operation using a motor, or various methods using a cylinder. There are various operating mechanisms that can be selected arbitrarily, and these mechanisms are designed to be installed outside the main body 1 and operated.

It goes without saying that the present invention may be modified in various ways without departing from the gist of the invention.

[Effects of the Invention] According to the present invention, there is no bellows for sealing the stem penetrating the body main body and the periphery of its shaft, and therefore, it is possible to prevent an increase in size and flow resistance due to the presence of the bellows. In addition, the disk follows the slider moving outside the body using magnetic force, and the magnet provided on the outer circumference of the disk forms a fluid bearing against the inner circumferential surface of the body, so the body can move smoothly. And it is done with good responsiveness.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional side view of the essential parts of an embodiment of the vacuum valve according to the present invention. 1...Body main body, 1A...Stopper, 2...
...Flow path, 2A...Inflow port, 2B...Outflow port, 2
1...Communication port, 3...Disk, 4...Communication hole,
5... Soft sheet, 6... First magnet, 7...
Slider, 8...Second magnet, W...Fluid used.

Claims (1)

[Scope of utility model registration request] A cylindrical body body having an inlet at one end in the axial direction and an outlet at the center of the other end in the axial direction, and a valve seat disposed on the inner periphery of the body body so as to be movable in the axial direction toward and away from a valve seat on the outer periphery of the outlet. a communication hole opened in the disk and communicating between the inlet side and the outer circumferential side of the valve seat; a slider provided on the outer circumference of the body main body so as to be movable in the axial direction; and an outer circumferential surface of the disk. a plurality of first magnets protruding from each other at appropriate intervals in the axial direction and having different magnetic poles adjacent to each other in the axial direction; a second magnet whose magnetic poles face each other, and each of the first magnet and each second magnet by restricting the axial movement of the slider toward the valve seat when the disk is in the valve closing position. A vacuum valve characterized by comprising a stopper and a stopper that maintain a mutually opposing state.